CN106531668A - Unpackaging device and method for unpackaging plastic packaging device by employing acid dropping method - Google Patents
Unpackaging device and method for unpackaging plastic packaging device by employing acid dropping method Download PDFInfo
- Publication number
- CN106531668A CN106531668A CN201611165354.7A CN201611165354A CN106531668A CN 106531668 A CN106531668 A CN 106531668A CN 201611165354 A CN201611165354 A CN 201611165354A CN 106531668 A CN106531668 A CN 106531668A
- Authority
- CN
- China
- Prior art keywords
- sour
- drip
- acid system
- mobile platform
- kaifeng
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002253 acid Substances 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 title abstract description 15
- 238000004806 packaging method and process Methods 0.000 title abstract description 5
- 238000010438 heat treatment Methods 0.000 claims abstract description 32
- 238000007789 sealing Methods 0.000 claims abstract description 24
- 238000009423 ventilation Methods 0.000 claims abstract description 17
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 11
- 229910052782 aluminium Inorganic materials 0.000 claims description 10
- 239000004411 aluminium Substances 0.000 claims description 9
- 239000005030 aluminium foil Substances 0.000 claims description 8
- 239000003292 glue Substances 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 230000002378 acidificating effect Effects 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 2
- 230000003628 erosive effect Effects 0.000 claims 1
- 239000004576 sand Substances 0.000 claims 1
- -1 wherein Substances 0.000 claims 1
- 230000007797 corrosion Effects 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000002679 ablation Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Package Closures (AREA)
Abstract
The invention discloses an unpackaging device and method for unpackaging a plastic packaging device by employing an acid dropping method. The unpackaging device comprises an acid dropping device, a heating device, a mobile platform, a sealing device and a ventilation device, wherein the ventilation device communicates with the sealing device; the acid dropping device, the heating device and the mobile platform are arranged in the sealing device; the acid dropping device is arranged at the upper part in the sealing device; and the heating device is put on the mobile platform. According to the unpackaging device, the advantages of the acid dropping method are combined, unpackaging of the plastic packaging device can be well completed, a determined unpackaging area can be obtained, and meanwhile, the integrity of the plastic packaging device structure is ensured.
Description
Technical field
The present invention relates to a kind of drop acid system seal opening device and method for plastic device Kaifeng, belongs to plastic device Kaifeng
Technical field.
Background technology
In the reliability field of plastic device, many pilot projects need to break a seal the encapsulated layer of plastic device, with
The information such as inside chip, bonding wire and lead frame are exposed, in order to carry out follow-up test and analysis.But, it is right at present
In the opening method of plastic device, ensure that inside chip is intact using the method for traditional pickling, but can not protect
The integrally-built integrity of card plastic device；Common Kaifeng demand and inside chip energy disclosure satisfy that using automatic seal opening device
Enough ensure complete exposure, but seal opening device needs suitable mask pad automatically, and during the acid mist corrosion device of ejection, by
Speed, corrosion position and controllability in corrosion is relatively low, and the region in Kaifeng can not control well, cause plastic device to break a seal
In journey, success rate is relatively low.
The laser opening method of plastic device can control region of breaking a seal well, it is also possible to which the depth to breaking a seal is controlled
System, but the method for use superlaser ablation adopted by laser opening method carries out, and is broken a seal to core using laser opening method
During piece surface, chip surface aluminum metal equally can be connected up ablation by superlaser, destroy chip surface.
Therefore, study a kind of complete external frame, lossless internal structure, and Kaifeng region for determining of being obtained to have
Important realistic meaning.
The content of the invention
The technical problem to be solved in the present invention is：A kind of drop acid system seal opening device for plastic device Kaifeng and side are provided
Method, is broken a seal to plastic device using the device, can be reached intact outer frame structure in plastic device Kaifeng, be opened
Envelope region determines, and the Kaifeng effect that chip internal is intact, can overcome the deficiencies in the prior art.
Technical scheme：A kind of drop acid system seal opening device for plastic device Kaifeng, including sour drip apparatus, also
Including heater, mobile platform, sealing device and ventilation unit, the ventilation unit is connected with sealing device, the acid drop
Device, heater and mobile platform are placed in sealing device, and wherein, the sour drip apparatus are placed in sealing device internal upper part, institute
State heater to place on a mobile platform.
The sealing device is the outer housing being made up of clear glass.
The sour drip apparatus are made up of drop bottle, glue head air bag, frosted switch and frosted piston, and wherein, glue head air bag passes through
Frosted switch is connected with drop bottle, is provided with frosted piston in drop bottle upper opening, is provided with frosted switch in drop bottle lower exit port.
The heater includes microcomputer controlling module and heating module, and microcomputer controlling module is connected with heating module
Connect.
The heating module includes heater strip, aluminium block and temperature sensor, and wherein heater strip and temperature sensor is placed in
In aluminium block, and it is connected with microcomputer controlling module.
The aluminium foil of resistance to strong acid corrosion is posted on the aluminium block surface.
The mobile platform is XY axle mobile platforms.
The ventilation unit includes fan, vent hose and fan control switch, and wherein fan is connected with vent hose, wind
Fan is in sealing device.
The operational approach of the drop acid system seal opening device is comprised the following steps：
The first step：Suitable temperature is set, starting heater carries out heated at constant temperature；
Second step：Appropriate acidic materials are added in sour drip apparatus, are placed in sealing device top；
3rd step：Device to be broken a seal is placed in heating vessel, then heating vessel is placed on heating platform and is heated；
4th step：Mobile platform is adjusted, device to be broken a seal is moved to into the underface of sour drip apparatus；
5th step：The sour drip apparatus of control are directed at device break a seal and carry out drop acid, so repeat, it would be desirable to Kaifeng by adjusting shifting
Moving platform simultaneously controls sour drip apparatus and carries out dripping sour Kaifeng.
For Kaifeng window is less than the device to be broken a seal of 5mm, the position that need not be broken a seal to device pin etc. using aluminium foil
Protected.
Beneficial effects of the present invention：Seal opening device of the present invention combines the advantage of drop acid system, can complete plastic packaging device well
The Kaifeng of part, can obtain the Kaifeng region for determining, while ensure that the integrity of plastic device structure.
Description of the drawings
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the structural representation of sour drip apparatus；
Fig. 3 is the structural representation of mobile platform；
Fig. 4 is the structural representation of ventilation unit；
In figure：1- acid drip apparatus, 2- sealing devices, 3- heating modules, 4- microcomputer controlling modules, 5- heating vessels, 6- movements
Platform, 7- ventilation units, 11- glue head air bags, 12- drop bottles, 13- frosteds switch, 14- frosted pistons, 61-X axle knobs, 62-Y axles
Knob, 71- fans, 72- vent hoses, 73- adapter couplings.
Specific embodiment
For making the object, technical solutions and advantages of the present invention clearer, the present invention is made into one below in conjunction with accompanying drawing
Step ground is described in detail.
Present invention drop acid system seal opening device includes sour drip apparatus 1, heater, mobile platform 6, sealing device 2 and ventilation
Device 7.Wherein：
The outer housing that sealing device 2 is made up of clear glass, is provided with the installing hole for installing sour drip apparatus 1 in outer housing upper end,
The air vent for installing ventilation unit 7 is provided with its side walls.
Heater is made up of microcomputer controlling module 4 and heating module 3, and heating module 3 includes heater strip, aluminium block and temperature
Degree sensor, wherein heater strip and temperature sensor is placed in aluminium block, and is connected with microcomputer controlling module 4, in aluminium block
Post the aluminium foil of resistance to strong acid corrosion in surface.The function of microcomputer controlling module 4 is detection 3 temperature of heating module, in heating module 3
When temperature is less than temperature is arranged, to 3 output of heating module, heating module 3 is made to heat up, when 3 temperature of heating module is higher than to set
When constant temperature is spent, stop to 3 output of heating module.
Sour drip apparatus 1 are made up of drop bottle 12, glue head air bag 11, frosted switch 13 and frosted piston 14, wherein, glue head air bag
11 are connected with drop bottle 12 by frosted switch 13, are provided with frosted piston 14 in 12 upper opening of drop bottle, are gone out below drop bottle 12
Mouth is also provided with frosted switch 13, and the rapidoprint of the sour device of drop is clear quartz material, and sour drip apparatus 1 are arranged on sealing device
In 2 installing hole.
Ventilation unit 7 includes fan 71,71 controlling switch of vent hose 72 and fan, wherein fan 71 and vent hose 72
Connection, fan 71 are arranged on the air vent of sealing device 2.The function of ventilation unit 7 is the poisonous and harmful gas for producing experiment
Body discharges Experimental Area, and the sour gas produced during high temperature after drop acid is mainly discharged by the effect in this project.Using plus
The power supply of the microcomputer controlling module 4 of thermal modules 3, is assembled into ventilation unit 7, when 3 power supply opening of heating module, ventilation unit
7 start working.The fan 71 of ventilation unit 7 is powered for 220V AC, and 71 power of fan is 5W, by 71 plant-grid connection temperature control of fan
On the on and off switch of module, when temperature control module on and off switch is opened, fan 71 is started working.The paint of 71 outer surface of fan
Layer can protect the metal of fan 71 not by acid gas corrosion.Fan 71 is connected with vent hose 72 by adapter coupling 73, is tried
The waste gas for testing middle discharge discharges outdoor by vent hose 72.
Mobile platform 6 is XY axles mobile platform 6, and its principle is to control X-direction by X-axis knob 61 to move left and right, and is led to
Cross the control Y direction of Y-axis knob 62 to move forward and backward.The effect of XY axles mobile platform 6 is to drive 3 shift position of heating module, from
And make the device to be broken a seal being placed on heating module 3 be moved to the underface of the sour device of drop, it is easy to instill acid solution and waits to break a seal
The Kaifeng region of device.X-axis effective travel is more than 10cm, and Y-axis effective travel is more than 5cm.XY axle table bases have four spiral shells
Silk draw-in groove, can be fixed on workbench on the base of glass outer, XY axle mobile work platforms is fixed.
The operational approach of present invention drop acid system seal opening device is comprised the following steps：
The first step：It is 80 DEG C seal opening device to be powered and arranges temperature, heats 10 ~ 25 minutes, makes heating platen temperature stable.
Second step：Add appropriate fuming nitric aicd in the sour device of drop, and put it into sealing device 2 top mounting holes it
In, cover frosted piston 14.
3rd step：For the Kaifeng window in the pre- Kaifeng of laser is more than the device of 5mm, device is directly placed into into quartz glass and is added
Among hot vessel 5, many devices are arranged in a line along X-axis；For the Kaifeng window in the pre- Kaifeng of laser is less than the device of 5mm,
The position that device pin etc. need not break a seal is protected using aluminium foil, specific practice is the device aluminum after laser is broken a seal
Paper tinsel is wrapped up, and firmly presses device, displays the Kaifeng window of device, and the aluminium foil of Kaifeng window is removed, Kaifeng is made
Window comes out, and the unnecessary corner of aluminium foil of parcel device is cut, and makes remaining part become the square or rectangular of rule,
And among putting it into quartz glass heating vessel 5, many devices are arranged in a line along X-axis.
4th step：The quartz glass heating vessel 5 for placing device to be broken a seal is put on heating module 3, to device plus
Heat 5 minutes；Mobile platform 6 is adjusted, device to be broken a seal is moved to into the underface of sour drip apparatus 1.
5th step：The sour drip apparatus 1 of control are aligned in the laser Kaifeng window of device to be broken a seal and instill 2 ~ 4 drop acid, adjust and move
An other device to be broken a seal is moved to the underface of the sour device of drop by 6 position of moving platform, and the sour device of control drop is aligned and waits out
2 ~ 4 drop acid are instilled in the laser Kaifeng window of envelope device, is so repeated, it would be desirable to which the device in Kaifeng is entered using the method for drop acid
Row Kaifeng.
The above, the only specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, any
Those familiar with the art the invention discloses technical scope in, change or replacement can be readily occurred in, should all be contained
Cover within protection scope of the present invention, therefore, protection scope of the present invention should be defined by the scope of the claims.
Claims (10)
1. it is a kind of for plastic device Kaifeng drop acid system seal opening device, including sour drip apparatus（1）, it is characterised in that：Also include
Heater, mobile platform（6）, sealing device（2）And ventilation unit（7）, the ventilation unit（7）With sealing device（2）Even
It is logical, the sour drip apparatus（1）, heater and mobile platform（6）It is placed in sealing device（2）It is interior, wherein, the sour drip apparatus
（1）It is placed in sealing device（2）Internal upper part, the heater are placed on mobile platform（6）On.
It is 2. according to claim 1 to drip acid system seal opening device, it is characterised in that：The sealing device（2）It is by transparent glass
The outer housing of glass composition.
It is 3. according to claim 1 to drip acid system seal opening device, it is characterised in that：The sour drip apparatus（1）By drop bottle（12）、
Glue head air bag（11）, frosted switch（13）With frosted piston（14）Composition, wherein, glue head air bag（11）Switched by frosted（13）
With drop bottle（12）Connection, in drop bottle（12）Upper opening is provided with frosted piston（14）, in drop bottle（12）Lower exit port is provided with mill
Sand is switched（13）.
It is 4. according to claim 1 to drip acid system seal opening device, it is characterised in that：The heater includes micro computer control
Module（4）And heating module（3）, microcomputer controlling module（4）With heating module（3）Connection.
It is 5. according to claim 4 to drip acid system seal opening device, it is characterised in that：The heating module（3）Including heater strip,
Aluminium block and temperature sensor, wherein heater strip and temperature sensor are placed in aluminium block, and and microcomputer controlling module（4）Even
Connect.
It is 6. according to claim 5 to drip acid system seal opening device, it is characterised in that：Resistance to strong acid is posted on the aluminium block surface rotten
The aluminium foil of erosion.
It is 7. according to claim 1 to drip acid system seal opening device, it is characterised in that：The mobile platform（6）Move for XY axles
Platform（6）.
It is 8. according to claim 1 to drip acid system seal opening device, it is characterised in that：The ventilation unit（7）Including fan
（71）, vent hose（72）And fan（71）Controlling switch, wherein fan（71）With vent hose（72）Connection, fan（71）Peace
It is mounted in sealing device（2）It is interior.
9. the operational approach of acid system seal opening device is dripped as described in claim 1 to 8 is arbitrary, it is characterised in that：Comprise the following steps：
The first step：Suitable temperature is set, starting heater carries out heated at constant temperature；
Second step：In sour drip apparatus（1）It is middle to add appropriate acidic materials, it is placed in sealing device（2）Top；
3rd step：Device to be broken a seal is placed in into heating vessel（5）In, then by heating vessel（5）It is placed on heating platform and adds
Heat；
4th step：Adjust mobile platform（6）, device to be broken a seal is moved to into sour drip apparatus（1）Underface；
5th step：The sour drip apparatus of control（1）Being directed at device to be broken a seal carries out drop acid, so repeats, it would be desirable to Kaifeng by adjusting
Section mobile platform（6）And control sour drip apparatus（1）Carry out dripping sour Kaifeng.
10. it is according to claim 9 drop acid system seal opening device operational approach, it is characterised in that：It is little for Kaifeng window
In the device to be broken a seal of 5mm, the position that device pin etc. need not break a seal is protected using aluminium foil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611165354.7A CN106531668A (en) | 2016-12-16 | 2016-12-16 | Unpackaging device and method for unpackaging plastic packaging device by employing acid dropping method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611165354.7A CN106531668A (en) | 2016-12-16 | 2016-12-16 | Unpackaging device and method for unpackaging plastic packaging device by employing acid dropping method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106531668A true CN106531668A (en) | 2017-03-22 |
Family
ID=58340042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611165354.7A Pending CN106531668A (en) | 2016-12-16 | 2016-12-16 | Unpackaging device and method for unpackaging plastic packaging device by employing acid dropping method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106531668A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108878308A (en) * | 2017-05-11 | 2018-11-23 | 上海新微技术研发中心有限公司 | De-packaging method based on IGBT module |
| CN110095706A (en) * | 2018-12-24 | 2019-08-06 | 纳瑞科技(北京)有限公司 | A kind of DECAP case |
| CN111180361A (en) * | 2019-12-13 | 2020-05-19 | 贵州航天计量测试技术研究所 | Wet unsealing method for plastic package device |
| CN115027770A (en) * | 2022-05-10 | 2022-09-09 | 深圳市汇芯通信技术有限公司 | Chip unsealing system and chip unsealing method |
| CN116013817A (en) * | 2023-01-17 | 2023-04-25 | 上海季丰电子股份有限公司 | Chip packaging breaking device and method |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108878308A (en) * | 2017-05-11 | 2018-11-23 | 上海新微技术研发中心有限公司 | De-packaging method based on IGBT module |
| CN110095706A (en) * | 2018-12-24 | 2019-08-06 | 纳瑞科技(北京)有限公司 | A kind of DECAP case |
| CN110095706B (en) * | 2018-12-24 | 2021-01-08 | 纳瑞科技(北京)有限公司 | DECAP case |
| CN111180361A (en) * | 2019-12-13 | 2020-05-19 | 贵州航天计量测试技术研究所 | Wet unsealing method for plastic package device |
| CN115027770A (en) * | 2022-05-10 | 2022-09-09 | 深圳市汇芯通信技术有限公司 | Chip unsealing system and chip unsealing method |
| CN116013817A (en) * | 2023-01-17 | 2023-04-25 | 上海季丰电子股份有限公司 | Chip packaging breaking device and method |
| CN116013817B (en) * | 2023-01-17 | 2024-03-19 | 上海季丰电子股份有限公司 | Chip packaging breaking device and method |
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Application publication date: 20170322 |