CN106525914B - A kind of preparation method of barium strontium titanate modifying titanium dioxide film hydrogen gas sensor - Google Patents
A kind of preparation method of barium strontium titanate modifying titanium dioxide film hydrogen gas sensor Download PDFInfo
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Abstract
The invention proposes a kind of nano-particle modified titanium deoxid film hydrogen gas sensor of barium strontium titanate and preparation methods, it is combined using magnetron sputtering method, spin-coating method and hydro-thermal method, realizes the modification to titanium deoxid film surface by regulating and controlling size and the dispersibility of spin coating barium strontium titanate nano particle.Titanium dioxide seed layer is prepared with magnetron sputtering method on FTO substrate, titanium deoxid film is prepared on having seed layer with hydro-thermal method, the surface of titanium deoxid film will be spin-coated on barium strontium titanate nano particle prepared by hydro-thermal method in advance using spin-coating method again, it is made annealing treatment after every step preparation, metal foil electrodes finally is prepared on its surface with magnetron sputtering method.Sensitivity through the nano-particle modified titanium deoxid film of barium strontium titanate hydrogen detection at room temperature significantly improves.Preparation cost of the present invention is low, and method is simple to operation, and hydrogen gas sensor obtained is at room temperature to hydrogen detection high sensitivity, and reproducible, stability is good, can be widely applied to hydrogen new energy field.
Description
Technical field
The invention belongs to oxide hydrogen gas sensor preparation fields, and in particular to a kind of barium strontium titanate nano-particle modified two
The preparation method of thin film of titanium oxide hydrogen gas sensor.
Background technique
Hydrogen is as emerging important renewable sources of energy carrier and most important industrial gasses and special gas, in petroleum
Work, electronics industry, metallurgical industry, food processing, float glass, Minute Organic Synthesis, aerospace etc. have widely
Using, but be just easily to explode when the hydrogen content in air reaches 4%, this brings greatly to the application and storage of hydrogen
Security risk, therefore a kind of high sensitivity, performance is stable and cheap hydrogen gas sensor becomes current industrial circle
Urgent need.
Currently, having occurred a variety of gas sensors in the market, mainly there are electrochemistry type, semi-conductor type, electrothermic type, metal mold
With optical type etc., wherein TiO2Become hydrogen because of its stable surface property and preferable hydrogen detection sensitivity and sense
Most popular one of the material in device field, about TiO2The mechanism of hydrogen is detected, mainly includes hydrogen ion in TiO2Adsorption and
Desorption process, in adsorption process, the electronics in hydrogen ion enters TiO2Conduction band, TiO2Surface charge accumulation, resistance reduce；
During desorption, charge is left, TiO2Surface recovery electroneutral, resistance are restored to initial value.But oxide air-sensitive passes
The operating temperature point of sensor is high, generally reaches optimum Working at 200~300 DEG C, exists studies have shown that high temperature can reduce hydrogen
The activation energy of sensor surface absorption and parsing, is conducive to the raising of detection sensitivity, but also bring great safety simultaneously
Hidden danger, while also increasing energy consumption.
For oxide hydrogen gas sensor to the detection temperature of hydrogen up to room temperature, minimum detection limit is 1ppm at present, spirit
Sensitivity is 4%, and the present invention will be by that will sputter, several preparation methods such as hydro-thermal and spin coating are combined and made annealing treatment, the metatitanic acid prepared
The nano-particle modified titanium dioxide hydrogen gas sensor of strontium barium can not only detect low 1ppm hydrogen in ambient-temp-stable, and sensitivity is never repaired
When decorations 8.5% improve to modify after 7.4%-21%, the response time from it is unmodified when 16.3s be down to modification after
8.5s-12.6s, turnaround time from it is unmodified when 54.7s foreshorten to modification after 34.6-42.3s.
Summary of the invention
The purpose of the present invention is the deficiencies not high for existing titanium deoxid film hydrogen gas sensor sensitivity, provide Gao Ling
The preparation method of the barium strontium titanate modifying titanium dioxide film hydrogen gas sensor of sensitivity, it is effective to improve titanium deoxid film hydrogen
The requirement of its efficient detection low-concentration hydrogen at room temperature is realized in the sensitivity of sensor.
The preparation method of the nano-particle modified titanium deoxid film hydrogen gas sensor of barium strontium titanate provided by the invention uses
The method that magnetron sputtering, hydro-thermal and spin-coating method combine, is aided with and makes annealing treatment respectively, to titanium deoxid film sensor progressive
Can improve, by regulate and control barium strontium titanate nano particle size and dispersibility and be spin-coated on titanium deoxid film surface come in fact
Now to the modification of titanium deoxid film, hydrogen detection sensitivity is improved.
It is of the invention that specific preparation process is as follows:
1) hydro-thermal method prepares barium strontium titanate nano particle: weighing 0-1.45g barium acetate, 0-1.73g strontium acetate powder is dissolved in
In 75ml deionized water, 30min is stirred.25ml dehydrated alcohol is measured, 2ml butyl titanate and 0-1ml oleic acid, stirring is added
30mim；Acquired solution is mixed, 5ml potassium hydroxide is added, stirring 5min falls back thermal response kettle, and hydrothermal temperature is
It 200 DEG C, reaction time 8h, is washed and is dried with ethyl alcohol and deionized water after cooling；Barium strontium titanate nanometer prepared by hydro-thermal method
Particle is annealed in air, and annealing temperature is 500 DEG C, and annealing time is 5 hours, spare；
2) FTO substrate is successively put into acetone, dehydrated alcohol, is successively cleaned by ultrasonic 20min in deionized water, and dried；
3) titanium dioxide seed layer is prepared on FTO substrate with magnetron sputtering method: adjusting radio frequency TiO2The power of target is
120W is passed through the argon gas of 36sccm high-purity 99.9999% and the oxygen of 1sccm high-purity 99.9999%, control chamber to chamber
Chamber pressure is 1Pa, sputtering time 15min；Anneal to the titanium dioxide seed layer of magnetron sputtering method preparation: annealing is in Ar
It is carried out in protection, annealing temperature is 500 DEG C, annealing time 10min；
4) oriented-growth titanium dioxide film is prepared in titanium dioxide seed crystal surface with hydro-thermal method: hydro-thermal reaction object proportion
For 15ml deionized water, the dehydrated alcohol that 15ml purity is 99.9%, the hydrochloric acid that 30ml purity is 36~38%, 1ml purity >=
98% tetra-n-butyl titanate immerses the sample of step 3) in hydro-thermal reaction object, and hydrothermal temperature is 150 DEG C, when reaction
Between 8 hours；Sample is annealed in Ar gas shielded after taking out, and temperature is 400 DEG C, annealing time 20min；
5) again with spin-coating method by spare barium strontium titanate nano particle coat the titanium deoxid film surface to annealing into
Row modification: weighing 0.01g barium strontium titanate powder and be scattered in 9ml ethyl alcohol, ultrasonic disperse about 2 hours in ultrasonic cleaning instrument.With
Dropper is drawn 1-3ml dispersion liquid and is slowly dripped on the titanium deoxid film being placed on sol evenning machine sucker, and revolving speed is maintained at
2000r/min carries out spin coating；
6) secondary move back is carried out in Ar gas shielded to the titanium deoxid film after barium strontium titanate nano particle spin coating modification
Fire, annealing temperature are 500 DEG C, annealing time 10min.
7) then, the titanium deoxid film surface of the barium strontium titanate modified with magnetron sputtering method after annealing prepares metal
Platinum interdigital electrode forms hydrogen gas sensor: thin in barium strontium titanate modified titanic oxide with magnetron sputtering method using the method for exposure mask
Film surface prepares finger tip away from for 0.4mm, and with a thickness of the platinum interdigital electrode of 800nm, sputtering power 40W, sputtering pressure is
0.5Pa, sputtering time 5min.
Detailed description of the invention
Fig. 1 is the X ray diffracting spectrum of prepared barium strontium titanate particle, and prepared powder size is nanoscale,
Grain size can be controlled by dispersing agent additive amount.
Fig. 2 is the surface SEM figure without the nano-particle modified titanium deoxid film of barium strontium titanate
Fig. 3 is the surface SEM figure of the nano-particle modified titanium deoxid film of barium strontium titanate, and barium strontium titanate nano particle is uniform
It is dispersed in titanium deoxid film surface.
Fig. 4 is the titanium deoxid film various concentration hydrogen gas sensor performance test nano-particle modified without barium strontium titanate
Figure, sample used correspond to case study on implementation 1.
Fig. 5 is titanium deoxid film various concentration hydrogen gas sensor performance test figure after barium strontium titanate is nano-particle modified,
Sample used corresponds to case study on implementation 4.
Specific implementation method
With embodiment, the present invention is further described below, and the implementation case is under the premise of being technical solution with the present invention
Implement, but protection scope of the present invention is not limited to following case study on implementation.
Case study on implementation 1
FTO substrate is successively put into acetone, dehydrated alcohol, is successively cleaned by ultrasonic 20min in deionized water, is placed after drying
On magnetron sputtering pallet.The TiO for being 99.99% by purity2Target is installed on magnetic control sputtering system cathode target position, adjusts target and lining
The distance at bottom is 60mm.When base vacuum is extracted into 10-4When the Pa order of magnitude, it is passed through 36sccm argon gas and 1sccm oxygen to chamber, is controlled
Chamber pressure processed is 1Pa, adjusts radio frequency TiO2The power of target is 120W, the cleaning of 10min aura is carried out to target, later in radio frequency
Continue sputtering sedimentation 15min under the conditions of 120W on FTO substrate, one layer of TiO is sputtered on FTO substrate2Seed layer；From vacuum chamber
Sample is taken out, and in Ar protection, anneal 10min at 500 DEG C.
Sample after annealing is leaned against on hydrothermal reaction kettle polytetrafluoroethyllining lining wall with " V " font, pours into and is gone by 15ml
Ionized water, 15ml dehydrated alcohol, 30ml hydrochloric acid, the reaction solution of 1ml tetra-n-butyl titanate configuration react 8h at 150 DEG C and obtain
To TiO2Film.Film is dipped in deionized water 6-12 hours later, is annealed under the conditions of 400 DEG C after being dried up with hair dryer
20min is spare.
The Pt target that purity is 99.99% is installed on magnetic control sputtering system cathode target position, adjust target is at a distance from substrate
60mm, in TiO2It is covered with X-shape mask plate on film, pumping system is opened, when base vacuum is extracted into 10-4When the Pa order of magnitude, to
Chamber is passed through 15sccm argon gas, and control chamber pressure is 0.5Pa, and the power for adjusting direct current Pt target is 40W, carries out 5min to target
Sputter coating prepares Pt metal electrode；It is passed at room temperature to without the nano-particle modified titanium deoxid film hydrogen of barium strontium titanate
Sensor is detected, and detecting concentration can reach 8.5% to 1ppm, sensitivity, response time 16.3s, and turnaround time is
54.7s；
Case study on implementation 2
FTO substrate is successively put into acetone, dehydrated alcohol, is successively cleaned by ultrasonic 20min in deionized water, is placed after drying
?
On magnetron sputtering pallet.The TiO for being 99.99% by purity2Target is installed on magnetic control sputtering system cathode target position, adjusts
Target is 60mm at a distance from substrate.When base vacuum is extracted into 10-4When the Pa order of magnitude, 36sccm argon gas and 1sccm are passed through to chamber
Oxygen, control chamber pressure are 1Pa, adjust radio frequency TiO2The power of target is 120W, carries out the cleaning of 10min aura to target, it
Continue sputtering sedimentation 15min on FTO substrate under the conditions of radio frequency 120W afterwards, one layer of TiO is sputtered on FTO substrate2Seed layer；
It is taken out from vacuum chamber by sample, and in Ar protection, anneal 10min at 500 DEG C.
Sample after annealing is leaned against on hydrothermal reaction kettle polytetrafluoroethyllining lining wall with " V " font, pours into and is gone by 15ml
Ionized water, 15ml dehydrated alcohol, 30ml hydrochloric acid, the reaction solution of 1ml tetra-n-butyl titanate configuration react 8h at 150 DEG C and obtain
To TiO2Film.Film is dipped in deionized water 6-12 hours later, is annealed under the conditions of 400 DEG C after being dried up with hair dryer
20min is spare.
1.45g barium acetate is weighed with electronic balance to be dissolved in 75ml deionized water, stirs 30min；Measure the anhydrous second of 25ml
2ml butyl titanate and 0.5ml oleic acid is added in alcohol, stirs 30mim；The two mixing, is added 5ml potassium hydroxide, stirs 5min
Thermal response of falling back kettle reacts 8h at 200 DEG C, is distinguished in ultrasonic cleaning instrument after cooling with dehydrated alcohol and deionized water
Cleaning 3 times, 80 DEG C of water-baths dry to obtain the barium strontium titanate nano particle of hydro-thermal method preparation, spare.
Barium strontium titanate nano powder dispersion prepared by 0.01g is weighed in 9ml ethyl alcohol, the ultrasound point in ultrasonic cleaning instrument
It dissipates about 2 hours.It draws 3ml dispersion liquid with dropper slowly to drip on the titanium deoxid film being placed on sol evenning machine sucker, revolving speed
It is maintained at 2000r/min and carries out spin coating；It is protected to the titanium deoxid film after barium strontium titanate nano particle spin coating modification in Ar gas
Double annealing is carried out in shield, annealing temperature is 500 DEG C, annealing time 10min.
The Pt target that purity is 99.99% is installed on magnetic control sputtering system cathode target position, adjust target is at a distance from substrate
60mm, in the TiO of spin coating barium strontium titanate particle2It is covered with X-shape mask plate on film, opens pumping system, when base vacuum is taken out
To 10-4When the Pa order of magnitude, it is passed through 15sccm argon gas to chamber, control chamber pressure is 0.5Pa, adjusts the power of direct current Pt target
For 40W, 5min sputter coating is carried out to target and prepares Pt metal electrode.
Barium strontium titanate modifying titanium dioxide film gas sensor is detected at room temperature, detecting concentration can be extremely
1ppm, sensitivity 7.4%, response time 23.2s, turnaround time 42.1s.
Case study on implementation 3
FTO substrate is successively put into acetone, dehydrated alcohol, is successively cleaned by ultrasonic 20min in deionized water, is placed after drying
On magnetron sputtering pallet.The TiO for being 99.99% by purity2Target is installed on magnetic control sputtering system cathode target position, adjusts target and lining
The distance at bottom is 60mm.When base vacuum is extracted into 10-4When the Pa order of magnitude, it is passed through 36sccm argon gas and 1sccm oxygen to chamber, is controlled
Chamber pressure processed is 1Pa, adjusts radio frequency TiO2The power of target is 120W, the cleaning of 10min aura is carried out to target, later in radio frequency
Continue sputtering sedimentation 15min under the conditions of 120W on FTO substrate, one layer of TiO is sputtered on FTO substrate2Seed layer；From vacuum chamber
Sample is taken out, and in Ar protection, anneal 10min at 500 DEG C.Sample after annealing is leaned against into hydro-thermal reaction with " V " font
On kettle polytetrafluoroethyllining lining wall, pour by 15ml deionized water, 15ml dehydrated alcohol, 30ml hydrochloric acid, 1ml tetra-n-butyl titanate
The reaction solution of configuration reacts 8h at 150 DEG C and obtains TiO2Film.It is small that film is dipped to 6-12 in deionized water later
When, the 20min that anneals under the conditions of 400 DEG C after being dried up with hair dryer is spare.
1.45g barium acetate is weighed with electronic balance, 0.58g strontium acetate powder is dissolved in 75ml deionized water, stirring
30min；25ml dehydrated alcohol is measured, 2ml butyl titanate and 0.5ml oleic acid is added, stirs 30mim；The two mixing, is added
5ml potassium hydroxide, stirring 5min thermal response kettle of falling back react 8h at 200 DEG C, use dehydrated alcohol and deionization after cooling
Water is respectively washed 3 times in ultrasonic cleaning instrument, and 80 DEG C of water-baths dry to obtain the barium strontium titanate nano particle of hydro-thermal method preparation, spare
Barium strontium titanate nano powder dispersion prepared by 0.01g is weighed in 9ml ethyl alcohol, the ultrasound point in ultrasonic cleaning instrument
It dissipates about 2 hours.It draws 3ml dispersion liquid with dropper slowly to drip on the titanium deoxid film being placed on sol evenning machine sucker, revolving speed
It is maintained at 2000r/min and carries out spin coating；It is protected to the titanium deoxid film after barium strontium titanate nano particle spin coating modification in Ar gas
Double annealing is carried out in shield, annealing temperature is 500 DEG C, annealing time 10min.
The Pt target that purity is 99.99% is installed on magnetic control sputtering system cathode target position, adjust target is at a distance from substrate
60mm, in the TiO of spin coating barium strontium titanate particle2It is covered with X-shape mask plate on film, opens pumping system, when base vacuum is taken out
To 10-4When the Pa order of magnitude, it is passed through 15sccm argon gas to chamber, control chamber pressure is 0.5Pa, adjusts the power of direct current Pt target
For 40W, 5min sputter coating is carried out to target and prepares Pt metal electrode；At room temperature to barium strontium titanate modifying titanium dioxide film
Gas sensor is detected, and detecting concentration can reach 15.9% to 1ppm, sensitivity, response time 23.4s, turnaround time
For 76.2s.
Case study on implementation 4
FTO substrate is successively put into acetone, dehydrated alcohol, is successively cleaned by ultrasonic 20min in deionized water, is placed after drying
On magnetron sputtering pallet.The TiO for being 99.99% by purity2Target is installed on magnetic control sputtering system cathode target position, adjusts target and lining
The distance at bottom is 60mm.When base vacuum is extracted into 10-4When the Pa order of magnitude, it is passed through 36sccm argon gas and 1sccm oxygen to chamber, is controlled
Chamber pressure processed is 1Pa, adjusts radio frequency TiO2The power of target is 120W, the cleaning of 10min aura is carried out to target, later in radio frequency
Continue sputtering sedimentation 15min under the conditions of 120W on FTO substrate, one layer of TiO is sputtered on FTO substrate2Seed layer；From vacuum chamber
Sample is taken out, and in Ar protection, anneal 10min at 500 DEG C.Sample after annealing is leaned against into hydro-thermal reaction with " V " font
On kettle polytetrafluoroethyllining lining wall, pour by 15ml deionized water, 15ml dehydrated alcohol, 30ml hydrochloric acid, 1ml tetra-n-butyl titanate
The reaction solution of configuration reacts 8h at 150 DEG C and obtains TiO2Film.It is small that film is dipped to 6-12 in deionized water later
When, the 20min that anneals under the conditions of 400 DEG C after being dried up with hair dryer is spare.
1.45g barium acetate is weighed with electronic balance, 1.73g strontium acetate powder is dissolved in 75ml deionized water, stirring
30min；25ml dehydrated alcohol is measured, 2ml butyl titanate and 0.5ml oleic acid is added, stirs 30mim；The two mixing, is added
5ml potassium hydroxide, stirring 5min thermal response kettle of falling back react 8h at 200 DEG C, use dehydrated alcohol and deionization after cooling
Water is respectively washed 3 times in ultrasonic cleaning instrument, obtains the barium strontium titanate nano particle of hydro-thermal method preparation after 80 DEG C of water-bath drying, standby
With.
Barium strontium titanate nano powder dispersion prepared by 0.01g is weighed in 9ml ethyl alcohol, the ultrasound point in ultrasonic cleaning instrument
It dissipates about 2 hours.It draws 3ml dispersion liquid with dropper slowly to drip on the titanium deoxid film being placed on sol evenning machine sucker, revolving speed
It is maintained at 2000r/min and carries out spin coating；It is protected to the titanium deoxid film after barium strontium titanate nano particle spin coating modification in Ar gas
Double annealing is carried out in shield, annealing temperature is 500 DEG C, annealing time 10min.
The Pt target that purity is 99.99% is installed on magnetic control sputtering system cathode target position, adjust target is at a distance from substrate
60mm, in the TiO of spin coating barium strontium titanate particle2It is covered with X-shape mask plate on film, opens pumping system, when base vacuum is taken out
To 10-4When the Pa order of magnitude, it is passed through 15sccm argon gas to chamber, control chamber pressure is 0.5Pa, adjusts the power of direct current Pt target
For 40W, 5min sputter coating is carried out to target and prepares Pt metal electrode；At room temperature to barium strontium titanate modifying titanium dioxide film
Gas sensor is detected, and detecting concentration can reach 21% to 1ppm, sensitivity, response time 8.5s, and turnaround time is
34.6s。
Case study on implementation 5
FTO substrate is successively put into acetone, dehydrated alcohol, is successively cleaned by ultrasonic 20min in deionized water, is placed after drying
On magnetron sputtering pallet.The TiO for being 99.99% by purity2Target is installed on magnetic control sputtering system cathode target position, adjusts target and lining
The distance at bottom is 60mm.When base vacuum is extracted into 10-4When the Pa order of magnitude, it is passed through 36sccm argon gas and 1sccm oxygen to chamber, is controlled
Chamber pressure processed is 1Pa, adjusts radio frequency TiO2The power of target is 120W, the cleaning of 10min aura is carried out to target, later in radio frequency
Continue sputtering sedimentation 15min under the conditions of 120W on FTO substrate, one layer of TiO is sputtered on FTO substrate2Seed layer；From vacuum chamber
Sample is taken out, and in Ar protection, anneal 10min at 500 DEG C.Sample after annealing is leaned against into hydro-thermal reaction with " V " font
On kettle polytetrafluoroethyllining lining wall, pour by 15ml deionized water, 15ml dehydrated alcohol, 30ml hydrochloric acid, 1ml tetra-n-butyl titanate
The reaction solution of configuration reacts 8h at 150 DEG C and obtains TiO2Film.It is small that film is dipped to 6-12 in deionized water later
When, the 20min that anneals under the conditions of 400 DEG C after being dried up with hair dryer is spare.
1.15g strontium acetate powder is weighed with electronic balance to be dissolved in 75ml deionized water, stirs 30min；Measure 25ml without
2ml butyl titanate and 0.5ml oleic acid is added in water-ethanol, stirs 30mim；5ml potassium hydroxide, stirring is added in the two mixing
5min thermal response kettle of falling back reacts 8h at 200 DEG C, it is cooling after with dehydrated alcohol and deionized water in ultrasonic cleaning instrument
It is respectively washed 3 times, 80 DEG C of water-baths dry to obtain the barium strontium titanate nano particle of hydro-thermal method preparation, spare.
Barium strontium titanate nano powder dispersion prepared by 0.01g is weighed in 9ml ethyl alcohol, the ultrasound point in ultrasonic cleaning instrument
It dissipates about 2 hours.It draws 3ml dispersion liquid with dropper slowly to drip on the titanium deoxid film being placed on sol evenning machine sucker, revolving speed
It is maintained at 2000r/min and carries out spin coating；It is protected to the titanium deoxid film after barium strontium titanate nano particle spin coating modification in Ar gas
Double annealing is carried out in shield, annealing temperature is 500 DEG C, annealing time 10min.
The Pt target that purity is 99.99% is installed on magnetic control sputtering system cathode target position, adjust target is at a distance from substrate
60mm, in the TiO of spin coating barium strontium titanate particle2It is covered with X-shape mask plate on film, opens pumping system, when base vacuum is taken out
To 10-4When the Pa order of magnitude, it is passed through 15sccm argon gas to chamber, control chamber pressure is 0.5Pa, adjusts the power of direct current Pt target
For 40W, 5min sputter coating is carried out to target and prepares Pt metal electrode；At room temperature to barium strontium titanate modifying titanium dioxide film
Gas sensor is detected, and detecting concentration can reach 11% to 1ppm, sensitivity, response time 12.6s, and turnaround time is
42.3s。
Test result see the table below:
| Sensitivity (%) | Response time | Turnaround time | |
| Case study on implementation 1 | 8.5 | 16.3 | 54.7 |
| Case study on implementation 2 | 7.4 | 23.3 | 42.1 |
| Case study on implementation 3 | 15.9 | 23.4 | 76.2 |
| Case study on implementation 4 | 21 | 8.5 | 34.6 |
| Case study on implementation 5 | 11 | 12.6 | 42.3 |
Claims (1)
1. a kind of preparation method of the nano-particle modified titanium deoxid film hydrogen gas sensor of barium strontium titanate, it is characterised in that this two
Thin film of titanium oxide hydrogen gas sensor follows these steps to prepare:
A. it is cleaned by ultrasonic FTO substrate, prepares titanium dioxide seed layer with magnetron sputtering method on FTO substrate, and in Ar protection
It anneals, temperature is 500 DEG C, time 10min；
B. hydro-thermal method prepares titanium deoxid film in titanium dioxide seed crystal surface；Then sample is moved back in Ar gas shield
Fire, temperature are 400 DEG C, annealing time 20min；
C. the barium strontium titanate nano particle after annealing is coated and is repaired on the titanium deoxid film surface to annealing by spin-coating method
Decorations；Then double annealing is carried out in Ar gas shielded, annealing temperature is 500 DEG C, annealing time 10min；
D. the barium strontium titanate of magnetron sputtering method after annealing is nano-particle modified crosses titanium deoxid film surface preparation metal platinum fork
Refer to that electrode forms hydrogen gas sensor；
Under the titanium deoxid film hydrogen gas sensor 1ppm density of hydrogen sensitivity from it is unmodified when 8.5% improve to after modification
11%-21%, the response time from it is unmodified when 16.3s be down to the 8.5s-12.6s after modification, turnaround time is from unmodified
When 54.7s foreshorten to modification after 34.6-42.3s.
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