CN106524944B - Non-coaxial Circular gratings angle-measuring equipment and its angle-measuring method - Google Patents

Non-coaxial Circular gratings angle-measuring equipment and its angle-measuring method Download PDF

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Publication number
CN106524944B
CN106524944B CN201510573679.8A CN201510573679A CN106524944B CN 106524944 B CN106524944 B CN 106524944B CN 201510573679 A CN201510573679 A CN 201510573679A CN 106524944 B CN106524944 B CN 106524944B
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angle
circular gratings
test table
measuring equipment
coaxial circular
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CN106524944A (en
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张书贵
张登鹏
王涛
刘立杰
贾立平
韩素超
张俊爽
白景超
孙建新
杨嘉亮
李红菊
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HEBEI TAIHANG METROLOGY INSPECTION CO Ltd
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HEBEI TAIHANG METROLOGY INSPECTION CO Ltd
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Abstract

The invention discloses a kind of non-coaxial Circular gratings angle-measuring equipment and its angle-measuring methods, and in particular to precision machinery field.The present invention includes grating angle measurement structure, it is connect at the top of the outer housing of the grating angle measurement structure with bidirectional sliding rail structure movement, the bidirectional sliding rail structure is connected by external support connecting rod and fixed frame and test table outer fixing portion split-phase, the grating angle measurement structure includes Circular gratings and reading head, and the bidirectional sliding rail structure is formed by connecting by two high-precision linear slide rail Vertical movements.In calibration, grating angle measurement structure is fixed on turntable the present invention, is rotated with test table.Test table rotates a circle, and reading head also rotates a circle with respect to Circular gratings, and the angular speed rotated is also equal.By measuring the rotation angle and angular speed of Circular gratings, to measure the orientation angles and angular speed of test table.

Description

Non-coaxial Circular gratings angle-measuring equipment and its angle-measuring method
Technical field
The present invention relates to precision machinery fields, and in particular to a kind of non-coaxial Circular gratings angle-measuring equipment and its angle-measuring method.
Background technique
In technical aspects such as NC rotary table, radar antenna test table, multiaxis Work turning table, inertia turntables, by In the particularity of test table structure, mounting table is not fully overlapped with real axis of rotation, is difficult to find in table top and is turned The centre of gyration of platform, and traditional angle measurement method standard and the concentricity of tested table top is more demanding, therefore is measuring It is difficult to realize the coaxial requirement of turntable and standard in the process.
Summary of the invention
The technical problem to be solved by the present invention is to a kind of non-coaxial Circular gratings angle-measuring methods of offer proposed adoption to realize orientation The measurement of angle.
In order to solve the above technical problems, the technical solution used in the present invention is: a kind of non-coaxial Circular gratings angle-measuring equipment, It is characterized by comprising grating angle measurement structure, outer housing top and the bidirectional sliding rail knot of the grating angle measurement structure Structure is flexibly connected, and the bidirectional sliding rail structure passes through external support connecting rod and fixed frame and test table outer fixing portion split-phase Even, the grating angle measurement structure includes Circular gratings and reading head, and the bidirectional sliding rail structure is high-precision linear by two Sliding rail Vertical movements are formed by connecting.
A further technical solution lies in, the grating angle measurement structure further include support central axis, ball bearing and Pedestal, the Circular gratings are mounted on support central axis, and the outer housing is mounted on support central axis by ball bearing, institute It states reading head to be mounted on outer housing, in the support central axis force fit fixed pedestal.
A further technical solution lies in have interval between the Circular gratings and reading head.
A further technical solution lies in the test table outer fixing portion is divided into the Auxiliary support on holder device Seat.
A further technical solution lies in a kind of angle-measuring method using non-coaxial Circular gratings angle-measuring equipment, step is such as Under:
1) test table and non-coaxial Circular gratings angle-measuring equipment are fixed on the Auxiliary support seat on holder device;
2) adjusting non-coaxial Circular gratings angle-measuring equipment makes grating angle measurement structure be located at the test table table top centre of gyration Near position;
3) rotate grating angle measurement structure with test table, the slipper of bidirectional sliding rail structure is surveyed with grating angle Measure the sliding of structure front and rear, left and right;
4) guarantee that with respect to the fixation of test table table top angle change does not occur for outer housing with reading head;
5) test table rotates a circle, by reading the rotation angle of reading head and angle on non-coaxial Circular gratings angle-measuring equipment Speed measures the orientation angles and angular speed of test table.
A further technical solution lies in the holder device includes the fixation bracket connecting with connecting rod both ends, is located at The second linear slide rail in connecting rod, the Auxiliary support seat being flexibly connected with the second linear slide rail line are connect with Auxiliary support seat Test table.
A further technical solution lies in the fixed bracket uses triangular support configurations, and the fixed bracket includes three Root support rod, the support rod open after with ground at 60 ° of angles.
A further technical solution lies in the fixed bracket further includes elevating mechanism and locking device, the support rod Assembled by fixed link and Duo Gen extension bar, the locking device includes lock sleeve and locknut, the fixed link and lengthening It is connected between bar and between the extension bar and extension bar by lock sleeve and locknut, the elevating mechanism can pass through hand Handle adjusts height, and fixed cantilever tip is enable to pass through connecting rod and the grating angle measurement structure for being installed on test table table top It is connected and fixed.
Further technical solution also resides in, and Auxiliary support seat bottom surface embeds spring and steel ball structure, the auxiliary Support base and test table table top are point contact.
The beneficial effects of adopting the technical scheme are that the present invention calibration when, grating angle measurement structure It is fixed on turntable, is rotated with test table.Since rail structure is fixed on outside platform, slipper can with before and after measurement structure, It horizontally slips, but with respect to testboard fixed part angle change does not occur for outer housing with reading head, so that reading head is with outer Shell produces relative rotation with Circular gratings, generates angle change, and the angle generated is equal with the angle that turntable turns over.Test turns Platform rotates a circle, and reading head also rotates a circle with respect to Circular gratings, and the angular speed rotated is also equal.By the rotation for measuring Circular gratings Gyration and angular speed, to measure the orientation angles and angular speed of test table.
Detailed description of the invention
The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
Fig. 1-3 is the non-coaxial Circular gratings angle-measuring equipment structural schematic diagram of the present invention;
Fig. 4 is the structural schematic diagram that holder device of the present invention is connect with test table;
Fig. 5 is the partial structure diagram that holder device of the present invention is connect with test table;
Fig. 6 is fixing rack structure schematic diagram of the present invention;
Wherein: 1, grating angle measurement structure;2, bidirectional sliding rail structure;3, linear slide rail;4, supporting linkage;5, circle light Grid;6, reading head;7, ball bearing;8, central axis is supported;9, pedestal;10, outer housing;11, the second linear slide rail;12, it assists Support base;13, test table;14, connecting rod;15, holder device;16, support rod;17, extension bar;18, locknut;19, it locks Set;20, fixing sleeve;21, handle;22, elevating mechanism.
Specific embodiment
With reference to the attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear, complete Ground description, it is clear that described embodiment is only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
In the following description, numerous specific details are set forth in order to facilitate a full understanding of the present invention, but the present invention can be with Implemented using other than the one described here other way, those skilled in the art can be without prejudice to intension of the present invention In the case of do similar popularization, therefore the present invention is not limited by the specific embodiments disclosed below.
As shown in Figs. 1-5, the present invention includes grating angle measurement structure 1, and the outer housing 10 of grating angle measurement structure 1 pushes up Portion is flexibly connected with bidirectional sliding rail structure 2, and bidirectional sliding rail structure 2 passes through external support connecting rod 4 and fixed frame and test table 13 outer fixing portion split-phases connect, and grating angle measurement structure 1 includes Circular gratings 5 and reading head 6, and bidirectional sliding rail structure 2 is by two height 3 Vertical movements of linear slide rail of precision are formed by connecting.
Preferably, grating angle measurement structure 1 further includes support central axis 8, ball bearing 7 and pedestal 9, and Circular gratings 5 are pacified On support central axis 8, outer housing 10 is mounted on support central axis 8 by ball bearing 7, and reading head 6 is mounted on shell On body 10, support in 8 force fit fixed pedestal 9 of central axis.
Preferably, there is interval between Circular gratings 5 and reading head 6.
Preferably, 13 outer fixing portion of test table is divided into the Auxiliary support seat 12 on holder device 15.
Preferably, a kind of angle-measuring method using non-coaxial Circular gratings angle-measuring equipment, its step are as follows:
1) test table 13 and non-coaxial Circular gratings angle-measuring equipment are fixed on the Auxiliary support seat 12 on holder device 15 On;
2) adjusting non-coaxial Circular gratings angle-measuring equipment is located at grating angle measurement structure 1 in the revolution of 13 table top of test table Near heart position;
3) rotate grating angle measurement structure 1 with test table 13, the slipper of bidirectional sliding rail structure 2 is with grating angle It is slided around degree measurement structure 1;
4) guarantee that with respect to the fixation of 13 table top of test table angle change does not occur for outer housing 10 with reading head 6;
5) test table 13 rotates a circle, by the rotation angle for reading reading head 6 on non-coaxial Circular gratings angle-measuring equipment And angular speed, measure the orientation angles and angular speed of test table 13.
Preferably, holder device 15 includes the fixation bracket connecting with 14 both ends of connecting rod, and in connecting rod 14 Bilinear sliding rail 11, the Auxiliary support seat 12 being flexibly connected with 11 line of the second linear slide rail, the survey being connect with Auxiliary support seat 12 Preliminary operation platform.
Preferably, fixed bracket uses triangular support configurations, and fixed bracket includes three support rods 16, and support rod 16 is opened Afterwards with ground at 60 ° of angles.
Preferably, fixed bracket further includes elevating mechanism 22 and locking device, and support rod 16 is lengthened by fixed link and Duo Gen Bar assembles, and locking device includes lock sleeve 19 and locknut 18, between fixed link and extension bar 17 and extension bar 17 with It is connected between extension bar 17 by lock sleeve 19 and locknut 18, elevating mechanism 22 can adjust height by handle 21, make to fix Cantilever tip can be connected and fixed by connecting rod 14 and the grating angle measurement structure 1 for being installed on 13 table top of test table.
Preferably, 12 bottom surface of Auxiliary support seat embeds spring and steel ball structure, Auxiliary support seat 12 with test table 13 Face is point contact.
The non-coaxial Circular gratings angle-measuring method of proposed adoption of the present invention measures test table, realizes continuous within the scope of 360 degree Dynamic angle measurement.
By taking radar antenna test table as an example,
As shown in Figure 1-3, Circular gratings 5 and reading head 6 are assembled together by grating angle measurement structure 1 when designing, and energy It produces relative rotation.Grating angle measurement structure 1 is fixed on 13 table top of test table close to centre of gyration position, minimizes light The moving range of grid angle measurement structure 1.10 top of outer housing of grating angle measurement structure 1 and 2 activity of bidirectional sliding rail structure Connection, bidirectional sliding rail structure 2 are vertically formed by connecting by two high-precision linear slide rails 3.Bidirectional sliding rail structure 2 passes through external branch It supports connecting rod 4 and fixed frame and 13 outer fixing portion split-phase of test table connects.
When calibration, grating angle measurement structure 1 is fixed on 13 outer fixing portion of test table point, with 13 turns of test table It is dynamic.Since bidirectional sliding rail structure 2 is fixed on outside platform, slipper can be slided with grating angle measurement structure front and rear, left and right, but outer With respect to 13 fixed part of test table angle change does not occur for shell 10 with reading head 6, so that reading head 6 is with outer housing 10 It produces relative rotation with Circular gratings 5, generates angle change, the angle generated is equal with the angle that test table 13 turns over.It surveys Preliminary operation platform 13 rotates a circle, and reading head 6 also rotates a circle with respect to Circular gratings 5, and the angular speed rotated is also equal.Justified by measurement The rotation angle and angular speed of grating 5, to measure the orientation angles and angular speed of test table 13.
Using non-coaxial Circular gratings angle-measuring method, obtained according to its principle analysis influence azimuth determination accuracy it is main because Be known as: linear slide rail installation gap in the precision of Circular gratings 5, bidirectional sliding rail structure 2, linear slide rail deflection.Diameter 200mm The limits of error of Circular gratings are ± 1 ", the requirement relative to this project azimuth ± 0.01 ° accuracy of measurement can be ignored Disregard.The shadow of the deflection azimuthal accuracy of measurement of linear slide rail installation gap and linear slide rail in bidirectional sliding rail structure 2 Sound is analyzed as follows:
As shown in Figs. 1-2,13 table top of test table drives grating angle measurement structure 1 to rotate around a certain center of circle, angle Measurement structure 1 is influenced by tangential force F, is decomposed into F1And F2The component of both direction, power F1Make 1 edge of grating angle measurement structure Vertical linearity sliding rail upward sliding, power F2Move horizontally vertical linearity sliding rail along horizontal linearity sliding rail, to guarantee reading head 6 Opposite 13 stage body fixed part of test table does not relatively rotate.Grating angle measurement structure 1 and vertical linearity sliding rail are installed The rigid of gap, vertical linearity sliding rail and horizontal linearity sliding rail installation gap and vertical linearity sliding rail decides grating angle The accuracy of measurement of measurement structure 1 is spent, installing influence of the gap to measurement result can be calculate by the following formula:
Δl1--- grating angle measurement structure and vertical linearity sliding rail install gap;
Δl2--- vertical linearity sliding rail and vertical linearity sliding rail install gap;
Δl3--- guide rail deflection caused by vertical linearity sliding rail rigid;
D --- Circular gratings diameter
Linear slide rail Force Calculation formula:
F=μ × (W+P)+S (2)
F --- frictional force (N)
S --- oil-scrapping sheet resistance (N)
μ --- friction coefficient (coefficient of friction of linear slide rail is about 0.01)
P --- precompression (N)
W --- motion vertical direction load (N)
According to Newton's third law, tangential force F is two linear slide rail damping force Fs1And F2Resultant force, the resistance of linear slide rail Buddhist nun's power is negligible relative to the maximum endurance of linear slide rail, therefore linear slide rail is rotated through in grating angle measurement structure Substantially deformation occurs in journey, i.e. Δ l3=0.
High-precision linear sliding rail installs gap at 5 μm, such as uses diameter for the Circular gratings of 200mm, then installation gap pair The influence of measurement result is calculated by formula (1):
Bidirectional linear sliding rail is to meet 0.01 ° of accuracy of measurement degree requirement.
Circular gratings 5 are mounted on support central axis 8 by grating angle measurement structure 1 (as shown in Figure 3) by round nut, Outer housing 10 is mounted on support central axis 8 by 2 high-precision centripetal ball bearings 7.To guarantee that overall structure can be opposite Steady flexible rotating is intended selecting 4 grades of high-precision bearings.After assembling grating angle measurement structure 1 by technique guarantee, axis hole is same Axis, shell and support central axis 8 relatively rotate steadily, reduce the swing between support central axis 8 and outer housing 10, and reading head 6 is pacified On outer housing 10, so that Circular gratings 5 and reading head 6 is kept suitable distance, and be directed at grating reading head 6, make Circular gratings 5 and Gap controls in valid reading distance range in relative rotational motion between grating reading head 6, keeps accuracy of reading reliable.Branch It supports in 8 force fit fixed pedestal 9 of central axis, enables the relatively steady flexible rotating of overall structure.
In addition, fixed bracket is to azimuth determination unit in this calibrating installation according to non-coaxial Circular gratings angle-measuring method principle Play fixed supporting role, design, set up whether rationally, will affect azimuthal measurement result, therefore to support bracket fastened Design and erected on site become difficult point of the invention.
As shown in figure 4, holder device 15 is high using the strength of materials, composable the stretching of the composite winding material production of light weight The fixation bracket of contracting gusseted is preferred plan.
Fixed bracket is made of elevating mechanism 22, support rod 16, locking device.Support rod 16 is lengthened by fixed link and Duo Gen Bar 17 assembles, and locking device includes lock sleeve 19 and locknut 18, between fixed link and extension bar 17 and extension bar 17 with It is connected between extension bar 17 by lock sleeve 19 and locknut 18, elevating mechanism 22 can adjust height by handle 21, make to fix Cantilever tip can be connected and fixed by connecting rod 14 and the grating angle measurement structure 1 for being installed on 13 table top of test table.
With ground at the fixation bracket of 60 ° of angles, root after using triangular support configurations, support rod 16 to open when field calibration It selects length made of respective numbers composite material for the extension bar 17 of 1m according to table surface height, elevating mechanism is adjusted by handle 21 22 height enables fixed cantilever tip to connect by connecting rod 14 with the orientation angles measuring unit for being installed on table top to be used in combination Round nut is locked, plays the role of fixed angle measuring unit.
Common radar antenna test table daylight opening DLO 2~3m of ground, according to calculating by taking the composite material support bar of 1m as an example, Every supporting leg needs 4, and fixed support needs 24 altogether.In addition after table surface height is more than 2~3m, not only support rod quantity needs to increase Add, it is also necessary to increase assistant reinforcement muscle guarantee support bracket fastened stabilization in measurement process, a whole set of calibrating installation is support bracket fastened Composite material support bar about needs 62.It is simply required to meet fixed bracket erected on site easy to carry simultaneously, also needs to pass through Mechanical structure analysis rationally designs support bracket fastened assembling stretching structure, and can also use laser at the scene as needed Tracker test, analysis, carry out structural adjustment.
Second linear slide rail, 11 both ends need to be connected by connecting rod 14 with fixed bracket, due to the second linear slide rail 11 Self weight reason may be such that connecting rod 14 is deformed, and influence the stability of holder device 15, and then influence measurement result, design Flexible Auxiliary support seat 12,12 bottom surface of Auxiliary support seat embed spring and steel ball structure (as shown in Figure 5), make Auxiliary support seat 12 Point contact is formed with radar antenna test table table top, while can be free to slide, linear slide rail is offset by reactive spring force Self weight, the connecting rod 14 for reducing generation deform.
Due to the particularity of radar antenna test table structure, mounting table is not fully weighed with real axis of rotation It closes, is difficult to find the centre of gyration of turntable in table top, and the concentricity of traditional angle measurement method standard and tested table top It is more demanding, thus in measurement process be difficult to realize turntable and standard coaxial requirement.Therefore non-coaxial Circular gratings are used Angle-measuring method realizes the measurements of orientation angles.This method is mainly derived from grating angle to the influence amount of measurement result accuracy The factors such as measurement structure processing and assembly degree, bidirectional sliding rail structure installation gap, linear slide rail intensity.
In addition, bidirectional sliding rail structure 2 follows table top is servo-actuated to play an important role grating angle measurement structure 1.Its middle line Property sliding rail 3 be used for straight reciprocating motion occasion, possess high nominal load, while certain torque can be undertaken, can be in high load In the case where realize high-precision linear motion.The especially gap very little of stiction and kinetic force of friction, even if in microfeed When the phenomenon that there will not be slipping, analytic ability is best with reproducibility, therefore micron-sized positioning accuracy may be implemented.It is quasi- Using high-precision linear sliding rail, the linear slide rail that precompressed post gap is 2 μm is calculated according to formula (1), and sliding rail gap is able to satisfy measurement Accuracy requirement.
For the influence of these factors of the reduction of more great dynamics, can also be utilized respectively as needed in laboratory and scene Multiteeth indexing table and laser tracker test, analysis, carry out structural adjustment and data correction, until measuring unit meets radar day The calibration requirements of line test table.
The present invention illustrates the non-coaxial Circular gratings angle-measuring method of proposed adoption and turns to radar antenna test from theory into action Platform measures, and realizes continuous dynamic angle measurement within the scope of 360 degree.It solves and is difficult to find the centre of gyration of turntable in table top The problem of, solve the problems, such as that traditional angle measurement method standard relies on and the requirement of the concentricity of tested table top.In addition, this Invention is also applied to NC rotary table, radar antenna test table, multiaxis Work turning table, inertia turntable etc. and needs to survey Try the technical aspect of test table orientation angles and angular speed.

Claims (9)

1. a kind of non-coaxial Circular gratings angle-measuring equipment, it is characterised in that: including grating angle measurement structure, the grating angle is surveyed Measure structure outer housing at the top of connect with bidirectional sliding rail structure movement, the bidirectional sliding rail structure pass through external support connecting rod with Fixed frame and test table outer fixing portion split-phase connect, and the grating angle measurement structure includes Circular gratings and reading head, described double It is formed by connecting to rail structure by two high-precision linear slide rail Vertical movements;The grating angle measurement structure turns with test With respect to the fixation of test table table top angle change does not occur for platform rotation, outer housing with reading head.
2. non-coaxial Circular gratings angle-measuring equipment according to claim 1, it is characterised in that: the grating angle measurement structure It further include support central axis, ball bearing and pedestal, the Circular gratings are mounted on support central axis, and the outer housing passes through rolling Pearl bearing is mounted on support central axis, and the reading head is mounted on outer housing, and the support central axis force fit is fixed In pedestal.
3. non-coaxial Circular gratings angle-measuring equipment according to claim 1 or 2, it is characterised in that: the Circular gratings and reading There is interval between head.
4. non-coaxial Circular gratings angle-measuring equipment according to claim 1, it is characterised in that: fixed outside the test table Part is the Auxiliary support seat on holder device.
5. a kind of angle-measuring method of non-coaxial Circular gratings angle-measuring equipment described in any one of -4 claims according to claim 1, It is characterized by: its step are as follows:
1) test table and non-coaxial Circular gratings angle-measuring equipment are fixed on the Auxiliary support seat on holder device;
2) adjusting non-coaxial Circular gratings angle-measuring equipment makes grating angle measurement structure be located at test table table top centre of gyration position Near;
3) rotate grating angle measurement structure with test table, the slipper of bidirectional sliding rail structure is measured with grating angle to be tied Sliding around structure;
4) guarantee that with respect to the fixation of test table table top angle change does not occur for outer housing with reading head;
5) test table rotates a circle, by reading the rotation angle of reading head and angle speed on non-coaxial Circular gratings angle-measuring equipment Degree, measures the orientation angles and angular speed of test table.
6. a kind of angle-measuring method of non-coaxial Circular gratings angle-measuring equipment according to claim 5, it is characterised in that: the branch Rack device includes the fixation bracket connecting with connecting rod both ends, and the second linear slide rail in connecting rod is linear sliding with second The Auxiliary support seat of path flexible connection, the test table being connect with Auxiliary support seat.
7. a kind of angle-measuring method of non-coaxial Circular gratings angle-measuring equipment according to claim 6, it is characterised in that: described solid Fixed rack uses triangular support configurations, and the fixed bracket includes three support rods, with ground at 60 ° after the support rod opening Angle.
8. a kind of angle-measuring method of non-coaxial Circular gratings angle-measuring equipment according to claim 7, it is characterised in that: described solid Fixed rack further includes elevating mechanism and locking device, and the support rod is assembled by fixed link and Duo Gen extension bar, the lock Tight device includes lock sleeve and locknut, is led between the fixed link and extension bar and between the extension bar and extension bar It crosses lock sleeve and locknut is connected, the elevating mechanism can adjust height by handle, and fixed cantilever tip is enable to pass through connection Bar is connected and fixed with the grating angle measurement structure for being installed on test table table top.
9. a kind of angle-measuring method of non-coaxial Circular gratings angle-measuring equipment according to claim 5, it is characterised in that: described auxiliary Support base bottom surface is helped to embed spring and steel ball structure, the Auxiliary support seat and test table table top are point contact.
CN201510573679.8A 2015-09-10 2015-09-10 Non-coaxial Circular gratings angle-measuring equipment and its angle-measuring method Active CN106524944B (en)

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CN107907959B (en) * 2017-11-24 2020-11-24 黑龙江哈工华粹智能装备有限公司 Ultra-precise six-degree-of-freedom five-axis adjusting device for optical adjustment and detection
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