CN106524932A - Symmetrical optical bridge type self-stabilizing laser diameter measurement system, and calibration method and measurement method thereof - Google Patents
Symmetrical optical bridge type self-stabilizing laser diameter measurement system, and calibration method and measurement method thereof Download PDFInfo
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- CN106524932A CN106524932A CN201611245890.8A CN201611245890A CN106524932A CN 106524932 A CN106524932 A CN 106524932A CN 201611245890 A CN201611245890 A CN 201611245890A CN 106524932 A CN106524932 A CN 106524932A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
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Abstract
The invention relates to a symmetrical optical bridge type self-stabilizing laser diameter measurement system, and a calibration method and a measurement method thereof. The symmetrical optical bridge type self-stabilizing laser diameter measurement system comprises a parallel laser source, a symmetrical corner reflector, two condensers and two photoelectric detectors, wherein parallel laser generated by the parallel laser source is divided into two parts by the symmetrical corner reflector, and the two parts are separately reflected to each condenser; each photoelectric detector detects the intensity of laser converged by the corresponding condenser. According to the symmetrical optical bridge type self-stabilizing laser diameter measurement system and the calibration method and the measurement method thereof, the measurement precision is not affected by scanning speed, thus the measurement precision is higher, the structure of the diameter measurement system is simpler and the cost is lower.
Description
Technical field
The present invention relates to diameter measurement technical field, more particularly to a kind of symmetrical beam bridge-type from stabilized laser measurement diameter system and its
Scaling method, measuring method.
Background technology
Laser diameter measurement technology is a kind of on-line dynamic measurement technology that the 70's of last century occur, usually laser, machine
The novel test technology that tool, electronics, computer combine.With optoelectronic fast development, laser diameter measurement technology is also gradually
Move to maturity, laser diameter measuring instrument common at present has laser-Doppler caliper, laser diffraction caliper, laser scanning caliper
With projection imaging caliper etc., wherein, it is diameter measurement side more conventional at present that laser scanning is calibrated and calibrated with CCD projections
Method.
As shown in figure 1, laser scanning measurement diameter system conventional at present includes laser instrument, colimated light system, reflective mirror, scanning rib
Mirror, synchronous motor, two lens and photodetector, the light beam produced by laser instrument, after line focus colimated light system shaping, Jing is anti-
Light microscopic is reflexed on scan prism, and scan prism is driven by synchronous motor and rotated with CAV, forms scanning light beam, scanning
Light beam by after lens 1, be formed at the uniform velocity, and the parallel scanning light beam of optical axis, and inswept part to be measured, then light beam pass through
Lens 2 are received by a photoelectric detector after focusing on, and photodetector converts optical signals to electric signal, produce an anaplasia at any time
The photosignal output of change, produces low level when scanning light beam is blocked by part to be measured, when scanning light beam is not kept off by part to be measured
High level is produced when firmly, it is therefore possible for the detected that the time T that is in the light, further according to speed of gyration ω of scan prism, you can obtain measured piece
Diameter.But, in real work, after the scan prism reflection for rotating, the sweep speed of its scanning light beam is simultaneously for laser
Be not definite value, therefore its certainty of measurement affected by scan speed change, precision is not high enough, be not suitable for certainty of measurement require compared with
High occasion.
In CCD projection measurement diameter systems, collimated light beam is radiated on testee, is produced cloudy on the CCD at object rear
Shadow, by the width for measuring the shadow region, so as to obtain the diameter of testee.The system principle is simple, and mechanical is rotated
Part, compact conformation, but measurement range depend on CCD sizes, it is impossible to measure the diameter of large sized object, certainty of measurement is also limited
In CCD pixel size.
The content of the invention
It is an object of the invention to the not high deficiency of certainty of measurement in the presence of improving prior art, there is provided a kind of symmetrical
Light bridge-type is from stabilized laser measurement diameter system and its scaling method, measuring method.
In order to realize foregoing invention purpose, technical scheme below is embodiments provided：
A kind of symmetrical beam bridge-type from stabilized laser measurement diameter system, including：
Parallel laser source, for producing parallel laser；
Symmetrical corner reflector with two reflectings surface, for incident parallel laser is divided into two parts, reflexes to one respectively
Individual condenser；
Two condensers, each described condenser converge to a photodetection for will reflect the parallel laser come in
Device；
Two photodetectors, respectively positioned at the back focal plane of a condenser, for detecting the intensity of the laser for receiving.
Scaling method of the above-mentioned symmetrical beam bridge-type from stabilized laser measurement diameter system, the described symmetrical beam bridge-type of definition is from stabilized laser
Two photodetectors in measurement diameter system be respectively the first photodetector and the second photodetector, methods described include with
Lower step：
Adjust the relative position in parallel laser source and symmetrical corner reflector so that incident parallel laser is put down by symmetrical corner reflector
Two parts are divided into, and two reflectings surface of symmetrical corner reflector are equal with the angle of the parallel laser of incidence；
Control parallel laser source is according to constant power output output parallel laser；
The position of symmetrical corner reflector is adjusted along the direction perpendicular to parallel laser, the first photodetector and the is read respectively
The measured value of two photodetectors, when the measured value of the first photodetector and the second photodetector is identical, record is now
Measured value, two measured value sums are used as nominal power P0, the position of fixed symmetrical corner reflector；
Control shadow shield is moved forward along the direction perpendicular to parallel laser, when the measured value minimum of the first photodetector
When, the position of record now shadow shield, using the position as system calibrating reference zero；
Control shadow shield is continued to move along according to identical displacement, is often moved a displacement and is recorded a second smooth electrical resistivity survey
The measured value of device is surveyed, until the measured value minimum of the second photodetector；
Control shadow shield is moved backward, is back to the reference zero of the system calibrating；
Control shadow shield continues to be moved rearwards by according to identical displacement, often moves a displacement record once the first electrical resistivity survey of light
The measured value of device is surveyed, until the measured value maximum of the first photodetector；
Data fitting is carried out to displacement of the measured value of the first photodetector in calibration process with shadow shield, the first light is obtained
Displacement-the light intensity expression of electric explorer；To the measured value of the second photodetector in calibration process and the displacement of shadow shield
Data fitting is carried out, the displacement-light intensity expression of the second photodetector is obtained.
Based on above-mentioned symmetrical beam bridge-type from the measuring method of stabilized laser measurement diameter system, described symmetrical beam bridge-type is defined from surely
Two photodetectors in laser diameter measurement system are respectively the first photodetector and the second photodetector, methods described bag
Include following steps：
Control parallel laser source is according to constant power output output parallel laser；
Control workpiece for measurement is moved forward along the direction perpendicular to parallel laser, reads the first photodetector and second respectively
The measured value of photodetector, when the measured value of the first photodetector and the second photodetector is identical, records now
Measured value；
Workpiece for measurement is continued to move along along the direction perpendicular to parallel laser, when the measured value maximum of the second photodetector
When, record the measured value of now the first photodetector and the second photodetector respectively, using two measured value sums as
Measurement laser power P1；
The measured value of the first photodetector is multiplied by into measurement correction factor P1/P0Afterwards, substitute into the first photodetector displacement-
In light intensity expression, the first shift value is calculated, the measured value of the second photodetector is multiplied by into measurement correction factor P1/P0
Afterwards, substitute in the displacement-light intensity expression of the second photodetector, be calculated second displacement value, second displacement value and first
The difference of shift value is the diameter of workpiece for measurement.
If the position of parallel laser source of the symmetrical beam bridge-type from stabilized laser measurement diameter system and symmetrical corner reflector during measurement
Put improper, then in above-mentioned measuring method, it is parallel sharp according to constant power output output in the control parallel laser source
Before light step, also including step：
Adjust the relative position in parallel laser source and symmetrical corner reflector so that incident parallel laser is put down by symmetrical corner reflector
Two parts are divided into, and two reflectings surface of symmetrical corner reflector are equal with the angle of the parallel laser of incidence.
Compared with prior art, symmetrical beam bridge-type provided in an embodiment of the present invention is from stabilized laser measurement diameter system and its method,
As certainty of measurement is not affected by sweep speed, therefore certainty of measurement is higher, and measuring method is simple；Additionally, entirely calibrate being
The structure of system is also simpler, and cost is lower.
Description of the drawings
In order to be illustrated more clearly that the technical scheme of the embodiment of the present invention, below by to be used attached needed for embodiment
Figure is briefly described, it will be appreciated that the following drawings illustrate only certain embodiments of the present invention, therefore be not construed as
Restriction to scope, for those of ordinary skill in the art, on the premise of not paying creative work, can be with basis
These accompanying drawings obtain other related accompanying drawings.
Fig. 1 is the structural representation of laser scanning measurement diameter system in prior art.
Fig. 2 be in the embodiment of the present invention symmetrical beam bridge-type from the structural representation of stabilized laser measurement diameter system.
Fig. 3 be in the embodiment of the present invention symmetrical beam bridge-type from the calibration process schematic diagram of stabilized laser measurement diameter system.
Mark in figure：
Parallel laser source 11；Workpiece for measurement 12；Symmetrical corner reflector 13；First condenser 14；First photodetector 15；Second
Condenser 16；Second photodetector 17；Shadow shield 18；Displacement platform 19.
Specific embodiment
Below in conjunction with accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Ground description, it is clear that described embodiment is only a part of embodiment of the invention, rather than the embodiment of whole.Generally exist
The component of the embodiment of the present invention described and illustrated in accompanying drawing can be arranged and be designed with a variety of configurations herein.Cause
This, the detailed description of the embodiments of the invention to providing in the accompanying drawings is not intended to limit claimed invention below
Scope, but it is merely representative of the selected embodiment of the present invention.Based on embodiments of the invention, those skilled in the art are not doing
The every other embodiment obtained on the premise of going out creative work, belongs to the scope of protection of the invention.
It should be noted that：Similar label and letter represent similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined in individual accompanying drawing, then in subsequent accompanying drawing which further need not be defined and is explained.Meanwhile, the present invention's
In description, term " first ", " second " etc. are only used for distinguishing description, and it is not intended that indicating or implying relative importance.
Fig. 2 is referred to, the symmetrical beam bridge-type provided in the present embodiment is from stabilized laser measurement diameter system, including parallel laser source
11, symmetrical corner reflector 13, two condensers and two photodetectors, in the present embodiment, define two condensers and are respectively
First condenser 14 and second condenser lens 16, define two photodetectors and are respectively the first photodetector 15 and the second photoelectricity
Detector 17.
Wherein, parallel laser source 11 is used to produce parallel laser.
There is symmetrical corner reflector 13 shape between two reflectings surface, and two reflectings surface to form an angle, the such as enforcement
It is 90 ° in example, symmetrical corner reflector 13 reflexes to a condenser respectively for incident parallel laser is divided into two parts,
That is, as illustrated, upper part parallel laser is reflexed to the first condenser 14 by a reflecting surface of symmetrical corner reflector 13, symmetrically
Lower part parallel laser is reflexed to second condenser lens 16 by another reflecting surface of corner reflector 13.
First photodetector 15 is located at the back focal plane of the first condenser 14, the laser quilt Jing after the first condenser 14 is assembled
First photodetector 15 is received, the intensity of the laser that the detection of the first photodetector 15 is received；Second photodetector 17
Positioned at the back focal plane of second condenser lens 16, the laser Jing after second condenser lens 16 are assembled is received by the second photodetector 17, the
The intensity of the laser that the detection of two photodetector 17 is received.
Before being measured from stabilized laser measurement diameter system using this symmetrical beam bridge-type, needs are first demarcated to which.Its
Scaling method is comprised the following steps：
1）Adjust the relative position in parallel laser source 11 and symmetrical corner reflector 13 so that symmetrical corner reflector 13 is in parallel laser
The centre position of the parallel laser that source 11 sends, i.e. incident parallel laser is equally divided into into two parts, and symmetrical corner reflector
13 two reflectings surface are equal with the angle of the parallel laser of incidence.
2）Control parallel laser source 11 is according to constant power output output parallel laser.
3）The position of symmetrical corner reflector 13 is adjusted along the direction perpendicular to parallel laser, is in course of adjustment
The measured value of the measured value and the second photodetector 17 of the first photodetector 15 is taken, when the first photodetector 15 and second
When the measured value of photodetector 17 is identical, measured value now is recorded, and using two measured value sums as nominal power P0,
The position of fixed now symmetrical corner reflector 13.
4）Control shadow shield 18 is moved forward along the direction perpendicular to parallel laser, when the survey of the first photodetector 15
When value is minimum, the position of record now shadow shield 18, and using the position as system calibrating reference zero.
Fig. 3 is referred to, as the displacement of the shadow shield 18 in calibration process is all trickle（For example with micron order distance change
Carry out displacement）Movement, therefore when implementing, shadow shield 18 can be arranged on displacement platform 19, by command displacement
Platform 19 drives shadow shield 18 to move along the direction perpendicular to parallel laser along the direction movement perpendicular to parallel laser, displacement
The displacement of platform 19 is the displacement of shadow shield 18.
5）Control shadow shield 18 is according to identical displacement（Such as 1um, 2um, 3um etc. fix step pitch）Continue to reach
It is dynamic, the measured value that a displacement records second photodetector 17 is often moved, until the survey of the second photodetector 17
Value is minimum.
6）Control shadow shield 18 is moved backward, is back to the reference zero of the system calibrating.
7）Control shadow shield 18 continues to be moved rearwards by according to identical displacement, often moves a displacement record once light
The measured value of the first electric explorer, until the measured value maximum of the first photodetector 15.Displacement steps in this step are away from can be with
With step 5）In it is identical, it is also possible to it is different.
8）Data fitting is carried out to the measured value of the first photodetector 15 in calibration process and the displacement of shadow shield 18,
Obtain the displacement-light intensity expression of the first photodetector 15；To the measured value of the second photodetector 17 in calibration process with
The displacement of shadow shield 18 carries out data fitting, obtains the displacement-light intensity expression of the second photodetector 17, completes calibrated
Journey.
In said method description, in order to make it easy to understand, each step is distinguished with sequence number, but between each step
Without proper sequencing, the division of each step can not also be carried out in the manner described above, for example, step 8）In
Data fitting is carried out to the measured value of the first photodetector 15 in calibration process and the displacement of shadow shield 18, the first light is obtained
The process of the displacement-light intensity expression of electric explorer 15, can be incorporated to step 5）In, it is also possible to follows step 5）Perform afterwards.
Using above-mentioned symmetrical beam bridge-type in the present embodiment from stabilized laser measurement diameter system measure when, its method includes following
Step：
a）Adjust the relative position of parallel laser source 11 and symmetrical corner reflector 13 so that incident is put down by symmetrical corner reflector 13
Row laser is equally divided into two parts, and two reflectings surface of symmetrical corner reflector 13 are equal with the angle of the parallel laser of incidence.
It should be noted that this step not necessarily step, if measured, symmetrical beam bridge-type is calibrated from stabilized laser
The position suitable between parallel laser source 11 and symmetrical corner reflector 13 in system（For example after demarcating parallel laser source 11 with
The position of symmetrical corner reflector 13 does not change）, i.e., symmetrical corner reflector 13 parallel swashed in what parallel laser device sent
Parallel laser can be equally divided into two parts, and two reflectings surface of symmetrical corner reflector 13 and incidence by the centre position of light
Parallel laser angle it is equal, then this step then need not, only when parallel laser source 11 and symmetrical corner reflector 13 it
Between position it is improper（For example after demarcating, parallel laser source 11 is changed with the position of symmetrical corner reflector 13）Shi Caixu
Performing this step carries out position adjustment.
b）Control parallel laser source 11 is according to constant power output output parallel laser.
c）Control workpiece for measurement 12 is moved forward along the direction perpendicular to parallel laser, reads the first photodetection respectively
The measured value of device 15 and the second photodetector 17, when the first photodetector 15 and the measured value phase of the second photodetector 17
Meanwhile, record measured value now.
d）Workpiece for measurement 12 is continued to move along along perpendicular to the direction of parallel laser, when the second photodetector 17
When measured value is maximum, the measured value of now the first photodetector 15 and the second photodetector 17 is recorded respectively, by this two
Measured value sum is used as measurement laser power P1。
e）The measured value of the first photodetector 15 is multiplied by into measurement correction factor P1/P0Afterwards, substitute into the first photodetector
15 displacement-light intensity expression（Obtained in calibration process）In, the first shift value is calculated, by the second photodetector 17
Measured value be multiplied by measurement correction factor P1/P0Afterwards, substitute into the displacement-light intensity expression of the second photodetector 17（Calibration process
In obtain）In, second displacement value is calculated, second displacement value is the straight of workpiece for measurement 12 with the difference of the first shift value
Footpath.
Symmetrical beam bridge-type provided in an embodiment of the present invention includes parallel laser source, symmetric angle transmitting from stabilized laser measurement diameter system
Mirror, condenser and photodetector, compared to the symmetrical beam bridge that laser scanning measurement diameter system conventional at present, the present embodiment are provided
Formula is simpler from the structure of stabilized laser measurement diameter system, and cost is less expensive, and its measuring method operation is simpler, and certainty of measurement is not
Affected by measuring speed, therefore certainty of measurement is higher, the demand of high-acruracy survey can be met.
The above, the only specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, any
Those familiar with the art the invention discloses technical scope in, change or replacement can be readily occurred in, should all be contained
Cover within protection scope of the present invention.Therefore, protection scope of the present invention described should be defined by scope of the claims.
Claims (5)
1. a kind of symmetrical beam bridge-type is from stabilized laser measurement diameter system, it is characterised in that include：
Parallel laser source, for producing parallel laser；
Symmetrical corner reflector with two reflectings surface, for incident parallel laser is divided into two parts, reflexes to one respectively
Individual condenser；
Two condensers, each described condenser converge to a photodetection for will reflect the parallel laser come in
Device；
Two photodetectors, respectively positioned at the back focal plane of a condenser, for detecting the intensity of the laser for receiving.
2. symmetrical beam bridge-type according to claim 1 is from stabilized laser measurement diameter system, it is characterised in that the symmetrical corner reflection
Two reflectings surface of mirror are equal with the angle of the parallel laser of incidence, and parallel laser is equally divided into by the symmetrical corner reflector
Two parts.
3. scaling method of the symmetrical beam bridge-type described in claim 1 from stabilized laser measurement diameter system, it is characterised in that definition is described
Two photodetectors of the symmetrical beam bridge-type from stabilized laser measurement diameter system be respectively the first photodetector and the second photoelectricity
Detector, the method comprising the steps of：
Adjust the relative position in parallel laser source and symmetrical corner reflector so that incident parallel laser is put down by symmetrical corner reflector
Two parts are divided into, and two reflectings surface of symmetrical corner reflector are equal with the angle of the parallel laser of incidence；
Control parallel laser source is according to constant power output output parallel laser；
The position of symmetrical corner reflector is adjusted along the direction perpendicular to parallel laser, the first photodetector and the is read respectively
The measured value of two photodetectors, when the measured value of the first photodetector and the second photodetector is identical, record is now
Measured value, two measured value sums are used as nominal power P0, the position of fixed symmetrical corner reflector；
Control shadow shield is moved forward along the direction perpendicular to parallel laser, when the measured value minimum of the first photodetector
When, the position of record now shadow shield, using the position as system calibrating reference zero；
Control shadow shield is continued to move along according to identical displacement, is often moved a displacement and is recorded a second smooth electrical resistivity survey
The measured value of device is surveyed, until the measured value minimum of the second photodetector；
Control shadow shield is moved backward, is back to the reference zero of the system calibrating；
Control shadow shield continues to be moved rearwards by according to identical displacement, often moves a displacement record once the first electrical resistivity survey of light
The measured value of device is surveyed, until the measured value maximum of the first photodetector；
Data fitting is carried out to displacement of the measured value of the first photodetector in calibration process with shadow shield, the first light is obtained
Displacement-the light intensity expression of electric explorer；To the measured value of the second photodetector in calibration process and the displacement of shadow shield
Data fitting is carried out, the displacement-light intensity expression of the second photodetector is obtained.
4. based on the symmetrical beam bridge-type described in claim 1 from the measuring method of stabilized laser measurement diameter system, it is characterised in that definition
Two photodetectors of the described symmetrical beam bridge-type from stabilized laser measurement diameter system are respectively the first photodetector and second
Photodetector, the method comprising the steps of：
Control parallel laser source is according to constant power output output parallel laser；
Control workpiece for measurement is moved forward along the direction perpendicular to parallel laser, reads the first photodetector and second respectively
The measured value of photodetector, when the measured value of the first photodetector and the second photodetector is identical, records now
Measured value, as the measured value of first, second photodetector；
Workpiece for measurement is continued to move along along the direction perpendicular to parallel laser, when the measured value maximum of the second photodetector
When, record the measured value of now the first photodetector and the second photodetector respectively, using two measured value sums as
Measurement laser power P1；
The measured value of the first photodetector is multiplied by into measurement correction factor P1/P0Afterwards, substitute into the first photodetector displacement-
In light intensity expression, the first shift value is calculated, the measured value of the second photodetector is multiplied by into measurement correction factor P1/P0
Afterwards, substitute in the displacement-light intensity expression of the second photodetector, be calculated second displacement value, second displacement value and first
The difference of shift value is the diameter of workpiece for measurement.
5. measuring method according to claim 4, it is characterised in that in the control parallel laser source according to constant defeated
Before going out power output parallel laser step, methods described also includes step：
Adjust the relative position in parallel laser source and symmetrical corner reflector so that incident parallel laser is put down by symmetrical corner reflector
Two parts are divided into, and two reflectings surface of symmetrical corner reflector are equal with the angle of the parallel laser of incidence.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611245890.8A CN106524932A (en) | 2016-12-29 | 2016-12-29 | Symmetrical optical bridge type self-stabilizing laser diameter measurement system, and calibration method and measurement method thereof |
| CN201710166449.9A CN106969717B (en) | 2016-12-29 | 2017-03-20 | Calibration method and measurement method of symmetrical optical bridge type self-stabilizing laser diameter measuring system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611245890.8A CN106524932A (en) | 2016-12-29 | 2016-12-29 | Symmetrical optical bridge type self-stabilizing laser diameter measurement system, and calibration method and measurement method thereof |
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| CN106524932A true CN106524932A (en) | 2017-03-22 |
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| CN201611245890.8A Withdrawn CN106524932A (en) | 2016-12-29 | 2016-12-29 | Symmetrical optical bridge type self-stabilizing laser diameter measurement system, and calibration method and measurement method thereof |
| CN201710166449.9A Active CN106969717B (en) | 2016-12-29 | 2017-03-20 | Calibration method and measurement method of symmetrical optical bridge type self-stabilizing laser diameter measuring system |
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| CN201710166449.9A Active CN106969717B (en) | 2016-12-29 | 2017-03-20 | Calibration method and measurement method of symmetrical optical bridge type self-stabilizing laser diameter measuring system |
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| CN116558431A (en) * | 2023-07-11 | 2023-08-08 | 江苏永钢集团有限公司 | Bar diameter measuring device and diameter measuring method thereof |
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- 2017-03-20 CN CN201710166449.9A patent/CN106969717B/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107764208A (en) * | 2017-11-20 | 2018-03-06 | 河南工程学院 | Hair products sag tester |
| CN107764208B (en) * | 2017-11-20 | 2023-05-16 | 河南工程学院 | Hair product sagging tester |
| CN116558431A (en) * | 2023-07-11 | 2023-08-08 | 江苏永钢集团有限公司 | Bar diameter measuring device and diameter measuring method thereof |
| CN116558431B (en) * | 2023-07-11 | 2023-10-20 | 江苏永钢集团有限公司 | Bar diameter measuring device and diameter measuring method thereof |
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| Publication number | Publication date |
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| CN106969717A (en) | 2017-07-21 |
| CN106969717B (en) | 2022-12-20 |
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