CN106514917B - Device and method for being poured into annular plastics frame in the rotor disk gap of double-side processing machine - Google Patents
Device and method for being poured into annular plastics frame in the rotor disk gap of double-side processing machine Download PDFInfo
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- CN106514917B CN106514917B CN201610940389.7A CN201610940389A CN106514917B CN 106514917 B CN106514917 B CN 106514917B CN 201610940389 A CN201610940389 A CN 201610940389A CN 106514917 B CN106514917 B CN 106514917B
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- casting
- annular
- gap
- plastic frame
- rotor disk
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- 239000004033 plastic Substances 0.000 title claims abstract description 118
- 229920003023 plastic Polymers 0.000 title claims abstract description 118
- 238000000034 method Methods 0.000 title claims abstract description 42
- 238000005266 casting Methods 0.000 claims abstract description 148
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 description 24
- 239000004065 semiconductor Substances 0.000 description 11
- 238000005498 polishing Methods 0.000 description 9
- 238000010276 construction Methods 0.000 description 5
- 239000004744 fabric Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 241000397426 Centroberyx lineatus Species 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- 239000011800 void material Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009750 centrifugal casting Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000289 melt material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000012815 thermoplastic material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/02—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles
- B29C39/10—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. casting around inserts or for coating articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/22—Component parts, details or accessories; Auxiliary operations
- B29C39/26—Moulds or cores
- B29C39/265—Moulds or cores comprising two large plates positioned at a small distance from each other, e.g. for making panels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D12/00—Producing frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/30—Mounting, exchanging or centering
- B29C33/306—Exchangeable mould parts, e.g. cassette moulds, mould inserts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/22—Component parts, details or accessories; Auxiliary operations
- B29C39/26—Moulds or cores
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/22—Component parts, details or accessories; Auxiliary operations
- B29C39/38—Heating or cooling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/1418—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles the inserts being deformed or preformed, e.g. by the injection pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14336—Coating a portion of the article, e.g. the edge of the article
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/1459—Coating annular articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/27—Sprue channels ; Runner channels or runner nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2705/00—Use of metals, their alloys or their compounds, for preformed parts, e.g. for inserts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
- B29L2031/3481—Housings or casings incorporating or embedding electric or electronic elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/736—Grinding or polishing equipment
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
Abstract
The present invention relates to a kind of equipment of pouring loop shape plastic frame in rotor disk gap for double-side processing machine, gap in double-side processing machine for keeping workpiece during two-sided processing, equipment includes two casting mold components and a casting core, two casting mold components accommodate rotor disk between them, casting core is partially filled with gap when rotor disk is contained between casting mold component, being poured core has at least one casting channel, it is passed through the mold volumes for plastic frame with one end and can be connect with the feedway of the plastics for plasticizing with its other end, at least one described casting mold component has at least one annular receiving portion, at least one annular casting mold inserts can be embedded at least one described annular receiving portion with loosening, to at least one described annular casting mold inserts and casting core and gap side Edge defines the mold volumes jointly.The invention further relates to a kind of corresponding method and a kind of rotor disks accordingly manufactured.
Description
Technical field
The present invention relates to a kind of equipment of pouring loop shape plastic frame in rotor disk gap for double-side processing machine,
In, for keeping workpiece in double-side processing machine during two-sided processing, the equipment includes two casting mold components in gap
With a casting core, described two casting mold components accommodate rotor disk between them, and the casting core is accommodated in rotor disk
Gap is partially filled in the case where between casting mold component, wherein casting core has at least one casting channel, the casting
Channel is passed through the mold volumes that setting is used for plastic frame with one end, and the casting channel with its other end can with for moulding
The feedway of the plastics of change connects.The present invention additionally relates to a kind of corresponding method.Finally, the present invention relates to a kind of two-sided plus
The rotor disk of work machine.
Background technique
Double-side processing machine with rotor disk is for example disclosed by DE10228441B4.Rotor disk generally has multiple gaps,
Workpiece, particularly semiconductor chip float during processing in double-side processing machine and are maintained in these gaps.By suitably moving
Learn and realize: rotor disk moves across the working clearance formed between processing disk, to be maintained at half in rotor disk gap
Conductor piece describes the cycloidal path across the working clearance.Rotor disk is generally made of anti abrasive material, such as metal.To avoid
The edge of the damage of semiconductor chip, rotor disk gap is typically provided with plastic frame, and the plastic frame is with pouring procedure, such as plastics
Pouring procedure is poured into the edge for producing profile of rotor disk.
In addition, to semiconductor chip, such as the silicon wafer geometry to be generated, there is high requests.This geometry
Consumptive material depending on using in processing is affected.Such as in twin polishing, in grinding-polishing or fogless polishing (Haze-
The whole depth of parallelism (GBIR) tolerance, partly flat degree (SFQR) when Free-Polieren), on semiconductor chip edge (ZDD)
Curvature tolerance on the upside of tolerance, flatness of edges (ESQFR) tolerance and chip with downside constantly becomes smaller.Rotor disk and especially modeling
Material frame frame plays special effect in this regard, because they influence the phase of the polishing cloth and Waffer edge that are placed on scratch diskette
Interaction.Plastic frame interacts to polishing cloth dependent on its thickness relevant with semiconductor chip thickness, thus influences again
Polish pressure on Waffer edge.Therefore, by acutely compressed by polishing cloth caused by plastic frame come so that polishing cloth to crystalline substance
The pressure at piece edge is very weak, and vice versa.
Therefore, for the workpiece geometry of (especially also on the edge of work) restriction, the essence of plastic frame
True arragement construction and geometry is of great significance.It cannot be controlled in a desired manner using disclosed method critical
Parameter, such as plastic frame relative to the orientation of rotor disk matrix and therefore the ladder of the restriction between rotor disk and plastic frame
Highly.Thus it will appear the plastic frame of the axially asymmetric setting (referring to rotor disk).This leads to semiconductor chip after processing again
The non-uniform curvature in edge and therefore also damage local flatness.For manufacturing in method disclosed in plastic frame
The deviation of existing frame geometry, particularly frame thickness also leads to the undesirable several of the semiconductor chip processed on machine
What structural deviation.During disclosed pouring procedure, for example, due to used material retractable property and be poured
Parameter used in method also results in geometry deviation.
Summary of the invention
From the prior art introduced, the object of the present invention is to provide a kind of method of the type mentioned at the beginning and
A kind of rotor disk, wherein arragement construction of the geometry and plastic frame of plastic frame in rotor disk and therefore utilize
The processing effect of the workpiece of rotor disk processing can be precisely controlled in a flexible way.
For equipment of the type mentioned at the beginning, the purpose of the present invention passes through a kind of rotor for double-side processing machine
The equipment of pouring loop shape plastic frame is achieved in gap of circling or whirl in the air, wherein gap is used for during two-sided processing in two-sided processing
Workpiece is kept in machine, the equipment includes that two casting mold components and a casting core, described two casting mold components exist
Rotor disk is accommodated between them, the casting core is partially filled with sky in the case where rotor disk is contained between casting mold component
Gap, wherein casting core has at least one casting channel, which is passed through the mould that setting is used for plastic frame with one end
Have volume, and the casting channel can be connect with its other end with the feedway of the plastics for plasticizing, wherein at least one
The casting mold component has the receiving portion of at least one annular, and the casting mold inserts of at least one annular can loosen embedding
In the receiving portion for entering at least one annular, thus the casting mold inserts and casting core of at least one annular and gap
The mold volumes that setting is used for plastic frame are defined jointly in edge.
Furthermore the purpose of the present invention shapes material frame by pouring loop in a kind of rotor disk gap for double-side processing machine
The method of frame, wherein gap in double-side processing machine for keeping workpiece during two-sided processing, which is characterized in that this method
Include the following steps:
Rotor disk is contained between two casting mold components and is contained in casting in rotor disk using a casting core
Gap is partially filled in the case where between mold component, wherein casting core have at least one casting channel, the casting channel with
One end is passed through the mold volumes that setting is used for plastic frame, and the casting channel can be with the modeling for plasticizing with its other end
The feedway of material connects,
The casting mold inserts of at least one annular can be embedded at least one described casting mold component extremely with loosening
In a few annular receiving portion, thus the casting mold inserts and casting core of at least one annular and the common boundary of void edges
Fixed setting is used for the mold volumes of plastic frame,
The plastics of plasticizing are then poured into setting by least one casting channel described in casting core from feedway
For in the mold volumes of plastic frame,
After the plastics being poured reach enough shape stabilities, by rotor disk together with the plastics being poured into gap
Frame takes out.
Rotor disk can be for example made of metal material.But it is also contemplated that plastic material.Rotor disk have at least one,
Usual multiple gaps, float during two-sided processing, such as twin polishing in the gap and keep workpiece, such as semiconductor chip
(chip).As beginning introduce as, rotor disk during two-sided processing rotationally pass through double-side processing machine scratch diskette it
Between working clearance, thus workpiece description to be processed pass through the working clearance cycloidal path.Workpiece, such as semiconductor chip and
The setting of rotor disk for example can be circular for the gap of the workpiece.Correspondingly, the plastic frame being poured into gap
It can be circular ring shape.The plastic frame defines gap with what pouring procedure, such as plastic pouring method were poured into rotor disk
Inner surface on.This is commonly known per se.But using the present invention it is also contemplated that other pouring procedure, such as centrifugal casting sides
Method.
According to the present invention, rotor disk is especially clamped between casting mold component.Casting mold component can be casting
Die and mould plate.Casting mold component especially can be casting mold half portion.More than two casting mold components can also be equipped with.Turn
The inner surface of the interspaces of sub-disk, the casting mold inserts of casting mold component or its annular and casting core define profiling plastics
The mould cavity of frame.The plastic pouring of plasticizing is for example molded into the mould cavity.For this purpose, casting core has at least one
It is poured channel, the one end in the casting channel is connect with the feedway for plastic melt in such as extruder and the other end
It is connect with mould cavity.Casting core especially can have multiple such casting channels.It can certainly be equipped with multiple
Such casting core.
At least one described casting mold component has the receiving portion of at least one annular, the casting moulds of at least one annular
Tool inserts can be embedded in the receiving portion of at least one annular with loosening.It is described at least one annular casting mold inserts with
Casting core and the edge in gap define the mold volumes that setting is used for plastic frame jointly.At least one described casting mold inserts
Such as it can be bolted at least one described casting mold component.But it is also contemplated that other fixed forms.Casting
Mold insert equally can be for example made of metal material as casting mold component.The casting mold inserts can have
The special surface roughness to match with the plastic material to be poured, to avoid the attachment of melt material.
Casting mold inserts according to the present invention in casting tool allows accurate control to be in a flexible way poured
Arragement construction and geometry, particularly thickness of the plastic frame relative to rotor disk matrix.It is poured by according to the present invention
Mold insert is infused, plastic frame can be carried out relative to the position of on the upside of rotor disk or downside in the range of such as +/- 20 μm
Adjustment.Thus such as -40 μm to+40 μm of possible thickness difference is generated between plastic frame and rotor disk matrix.Pass through root
The fluctuation of be poured plastic frame thickness value can be made to minimize according to annular casting mold inserts of the invention.It can be with flexible
Mode reliably adjust targeted plastic frame thickness.Identical content be suitable for plastic frame and rotor disk matrix it
Between step size.By according to the present invention targetedly adjust plastic frame geometry and arragement construction, in plastics
The uniform crystal structure of low injection pressure and plastics in pouring procedure, plastic frame geometry can be most preferably according to two-sided
The requirement of process, particularly twin polishing process determines.By using with the frame of plastic to manufacture according to the present invention
The rotor disk of frame can manufacture the workpiece, particularly semiconductor chip of the geometry with optimization, this is especially also applied for work
The edge of part.It therefore, can be by the inclined of the thickness of plastic frame using according to the method for the present invention or equipment according to the present invention
Difference is limited in 5 μm for example +/-, 2 μm preferably +/-, +/- 1 μm further preferred.
According to a kind of design scheme it can be stated that casting mold component is respectively provided with the receiving portion of at least one annular, point
The casting mold inserts of not at least one annular can be embedded in the receiving portion of at least one annular with loosening, thus the ring
The casting mold inserts and casting core and void edges of shape define the mold volumes that setting is used for plastic frame jointly.It is set this
It is embedding by the casting mold being releasably secured in casting mold component in order to improve flexibility and accuracy in meter scheme
Part comes in two sides profiling plastic frame.
According to another design scheme, which has the annular casting mold inserts of multiple and different sizes, they have choosing
It can be embedded in capable of loosening with selecting in the receiving portion of at least one annular, thus by being embedded in various sizes of annular casting moulds
Various sizes of mold volumes can be generated for plastic frame by having inserts.Thus flexibility is further increased.It is poured using only one
Note tool can realize that different plastic frames is several by replacing annular casting mold inserts in a manner of simple and is flexible
What structure.
According to another design scheme it can be stated that the casting mold inserts and casting core that pass through at least one annular
Mold volumes of define jointly with the void edges, setting for plastic frame have in the axial direction in gap greater than rotor disk
Extension size.By this design scheme, although occurring inevitably shrinking in the cooling and hardening process of plastics,
Constitute the plastic frame having with rotor disk same thickness.
According to another design scheme, setting can have one or more for emitting for the mold volumes of plastic frame
The cavity of mouth.Then riser gas outlet in other words is constituted in manufactured plastic frame, they resist the contracting in hardening process
Hole is formed.
It can be equipped with heating device according to another design scheme, utilize at least one casting described in the heating devices heat
Channel.It is this heating channel use so that plastic melt temperature uniformly and runner can be remained short.In addition, it is possible thereby to
Pouring pressure is reduced, to guarantee the molding of the optimization of accurate tool geometry structure and the uniform knot of especially thermoplastic material
It is brilliant.It is uniform to crystallize the bigger dimensional stability so that manufactured plastic frame.
By the cast gate geometry of optimization, (it has the equal of enough regions for being vented to casting mold and exhaust outlet
Even arragement construction), further simplifying will be poured and pressure is kept to be maintained in low-level.
It can use equipment according to the present invention according to the method for the present invention to implement.Correspondingly, equipment according to the present invention
It can be adapted to implement according to the method for the present invention.
The invention further relates to a kind of rotor disks of double-side processing machine, have at least one gap and at least one annular modeling
Material frame frame, at least one described annular plastics frame, which utilizes, to be poured into according to the method for the present invention at least one described gap.
Rotor disk especially can be the rotor disk for double-side processing machine.
According to the present invention, the thermoplasticity material listed in following table is for example considered as the material for plastic frame
Material, wherein list unfilled material in left column, the material being for example partially filled with fiber or equipped with fiber part is listed in right column
Material:
Detailed description of the invention
By attached drawing, the present invention is described in detail below.Wherein schematically illustrate:
Fig. 1 shows the cross-sectional view for the equipment of pouring loop shape plastic frame in the rotor disk gap to double-side processing machine；
Fig. 2 shows the parts in the region of equipment according to the present invention showing at A under the first operating status in Fig. 1
Enlarged drawing；
Fig. 3 shows the view under the second operating status in Fig. 2；
Fig. 4 shows the view under third operating status in Fig. 2；
Fig. 5 shows the view according to another embodiment in Fig. 4；
Fig. 6 shows the partial sectional view of multiple rotor disks, these rotor disks have using made according to the method for the present invention
Different plastic frames；And
Fig. 7 show using according to the method for the present invention or equipment according to the present invention production plastic frame.
Specific embodiment
As long as no other explanations, the same reference numbers in the drawings refer to identical objects.Equipment shown in FIG. 1 has
12 (the especially second casting of first casting mold component 10 (especially the first casting mold half portion) and the second casting mold component
Mold half portion).The rotor disk 14 of double-side processing machine (especially Twp-sided polishing machine) is clamped simultaneously between casting mold component 10,12
Therefore it is kept.Rotor disk 14 have multiple for example circular gaps 16, can only see in Fig. 1 these circular gaps it
In one.It, in operation will for example circular semiconductor chip (such as silicon wafer) in order to be processed in double-side processing machine
Floating ground is maintained in each gap 16.Furthermore equipment shown in Fig. 1 has a casting core 18, which is embedded in gap 16
Mould cavity 20 interior and that the gap is filled into always to annular.At appended drawing reference 22,24, casting is schematically illustrated in Fig. 1
The casting channel constituted in core 18.Center casting channel 22 on its upper end in Fig. 1 with plastics not shown further
Melt feedway (such as extruder) connection.The casting channel 24 connecting with center casting channel 22 is passed through mould cavity 20
It is interior.In operation, plastic melt is imported in mould cavity 20 from feedway by casting channel 22,24, as by Fig. 1
Arrow shown in like that.
Figure it is seen that in the device in accordance with the invention, casting mold component 10,12 is respectively provided with an annular
, the receiving portion of such as circular ring shape, wherein annular, such as circular ring shape a casting mold inserts 26,28 is releasable respectively
In the receiving portion of ground insertion annular.Casting mold inserts 26,28 can be for example bolted with casting mold component 10,12.As
As can be seen in Fig. 2, same circular, such as circular ring shape mould cavity 20 passes through casting core 18, rotor disk 14
The internal edge in formation gap 16 and the inside of annular casting mold inserts 26,28 define.The mould cavity 20, which forms, to be set
Set the mold volumes for the plastic frame in rotor disk 14 to be poured into.
It is shown in Fig. 3 or the plastics 30 of melt shape is poured into mould cavity 20 later not via casting channel 22,24
Long operating status.In figs 2 and 3 it is clear that setting is used for axis of the mould cavity 20 in gap 16 of plastic frame
There is the extension size bigger than rotor disk 14 (in figs 2 and 3 that is, from bottom to top) upwards.Correspondingly, in Fig. 3, Shang Nengliu
The upper side and lower side of dynamic plastic material slightly beyond rotor disk 14.By this design scheme, plastic material cooling and
The contraction generated in drying process is compensated.Fig. 4 shows the hardening state to form the plastic material 30 of plastic frame.As
As can be seen that in Fig. 4, under this hardening state, plastic material 30 flushes ground with the upper side and lower side of rotor disk 14
Terminate.Be only for sake of completeness it should be pointed out that for example can be seen that in Fig. 3 rotor disk 14 upside or under
Gap between side and the inner surface of casting mold inserts 26,28 distributed is so small, so that the plastic material 30 of plasticizing
Since its viscosity not can enter in the gap.
The difference of the shown design scheme of the design scheme and Fig. 2 of Fig. 5 to 4 is, is embedded in upper mold component 10
Annular casting mold inserts 26' ratio annular casting mold inserts 26 shown in Fig. 2 to 4 it is thick.Fig. 5 shows plastics again herein
The cooling of material 30 and hardening state.In fig. 5 it can be seen that due to the bigger thickness of casting mold inserts 26', the modeling of hardening
Material 30 is not entirely to the upside of rotor disk 14.
Therefore, using equipment according to the present invention or according to the method for the present invention, by proper choice of each casting mold
Inserts can generate the accurate desired geometry knot of the plastic frame formed by plastic material 30 in a flexible way
Structure.Such as it is shown in FIG. 6 and utilizes the issuable different frame geometry of the present invention.
Shown in Fig. 7 using according to the method for the present invention or equipment according to the present invention generate plastic frame 32, for
Rotor disk is not shown in the reason of diagram illustrating.As can be seen that plastic frame 32 has swallow-tail form geometry knot on its excircle
Structure 34, the swallow-tail form geometry and corresponding swallow-tail form geometry on 16 inner surface of gap of rotor disk 14 are corresponding.This
It can be seen that the riser being distributed on the inside of plastic frame 32 with uniform distance at external appended drawing reference 36,38 or say
Port, they are generated during plastic pouring.The riser is also to be removed in the finished product process of plastic frame 32.
The riser is especially for avoiding the shrinkage cavity during plastic pouring process from being formed and can be realized lesser injection and guarantor
Hold pressure.Therefore this crystallization for causing plastic material 30 more uniform again simultaneously leads to the better shape retention of plastic frame 32.
The plastic frame of the accurate centered fit in the axial direction in rotor disk gap can be manufactured using the present invention.In the axial direction
On thickness deviation for example may be limited to it is 5 μm for example +/-, 2 μm preferably +/-, further preferably +/- 1 μm.This is particularly suitable for modeling
The interior seamed edge of any following position of material frame frame, the position and plastic frame is at a distance of at least 0.5mm and highest 1mm.Such as it is right
Extend laterally size at least 90% in the range of the 0.5mm to 1mm of the seamed edge in away from plastic frame of plastic frame
It says, the thickness deviation of plastic frame for example may be at 10 μm, preferably 4 μm, further preferred 2 μm of band near rated value
In width.
The whole numerical value introduced are related to the rotor disk of room gently dried, and the plastic frame of the rotor disk only passes through normally
Outside air absorb moisture.
Claims (14)
1. for the equipment to the interior pouring loop shape plastic frame (32) in rotor disk (14) gap (16) of double-side processing machine, wherein
For keeping workpiece in double-side processing machine during two-sided processing, the equipment includes two casting mold components in gap (16)
(10,12) and a casting core (18), described two casting mold components accommodate rotor disk (14), the casting between them
Core is partially filled with gap (16) in the case where rotor disk (14) is contained between casting mold component (10,12), wherein casting
Core (18) has at least one casting channel (22,24), which is passed through setting for plastic frame (32) with one end
Mold volumes, and the casting channel can be connect with its other end with the feedway of the plastics (30) for plasticizing, special
Sign is that at least one described casting mold component (10,12) has the receiving portion of at least one annular, at least one annular
Casting mold inserts (26,26', 28) can be embedded in the receiving portion of at least one annular with loosening, thus described at least one
The casting mold inserts (26,26', 28) and casting core (18) and gap (16) edge of a annular define setting for plastics jointly
The mold volumes of frame (32).
2. equipment according to claim 1, which is characterized in that casting mold component (10,12) is respectively provided at least one ring
The receiving portion of shape, respectively casting mold inserts (26,26', 28) of at least one annular can be embedded in loosening it is described at least one
In the receiving portion of annular, thus the casting mold inserts (26,26', 28) of the annular and casting core (18) and gap (16) side
Edge defines the mold volumes that setting is used for plastic frame (32) jointly.
3. equipment as described in claim 1 or 2, which is characterized in that the equipment has the casting of the annular of multiple and different sizes
Mold insert (26,26', 28), they can be embedded in the receiving portion of at least one annular in which can selectively loosen, thus
Casting mold inserts (26,26', 28) by being embedded in various sizes of annular can generate different sizes for plastic frame (32)
Mold volumes.
4. equipment as described in claim 1 or 2, which is characterized in that pass through the casting mold inserts of at least one annular
The setting that (26,26', 28) and casting core (18) and gap (16) edge define jointly is used for the mold volumes of plastic frame (32)
There is the extension size greater than rotor disk (14) in the axial direction of gap (16).
5. equipment as described in claim 1 or 2, which is characterized in that mold volumes of the setting for plastic frame (32) have
One or more is used for the cavity of riser (36,38).
6. equipment as described in claim 1 or 2, which is characterized in that heating device is equipped with, using described in the heating devices heat
At least one casting channel (22,24).
7. for the method to the interior pouring loop shape plastic frame (32) in rotor disk (14) gap (16) of double-side processing machine, wherein
Gap (16) in double-side processing machine for keeping workpiece during two-sided processing, which is characterized in that this method includes following step
It is rapid:
Rotor disk (14) is contained between two casting mold components (10,12) and using a casting core (18) in rotor
Disk (14) is partially filled with gap (16) in the case where being contained between casting mold component (10,12), wherein casting core (18) tool
There is at least one to be poured channel (22,24), which is passed through mold of the setting for plastic frame (32) with one end and holds
Product, and the casting channel can be connect with its other end with the feedway of the plastics (30) for plasticizing,
The casting mold inserts (26,26', 28) of at least one annular can be embedded at least one described casting mold with loosening
In the annular receiving portion of at least one of component (10,12), thus at least one annular casting mold inserts (26,26',
28) mold volumes that setting is used for plastic frame (32) are defined jointly with casting core (18) and gap (16) edge,
Then by the plastics of plasticizing (30) from feedway by casting core (18) it is described at least one casting channel (22,
24) setting is poured into be used in the mold volumes of plastic frame (32),
After the plastics (30) being poured reach enough shape stabilities, by rotor disk (14) together with being poured into gap (16)
Interior plastic frame (32) takes out.
8. method according to claim 7, which is characterized in that respectively by least one annular casting mold inserts (26,
26', 28) it can with loosening be embedded in each at least one annular receiving portion of each casting mold component (10,12), so that annular is poured
Note mold insert (26,26', 28) and casting core (18) and gap (16) edge define setting for plastic frame (32) jointly
Mold volumes.
9. method as described in claim 7 or 8, which is characterized in that for the different rulers of casting into different rotor disks (14)
Various sizes of annular casting mold inserts (26,26', 28) is embedded at least one described annular by very little plastic frame (32)
In receiving portion.
10. method as described in claim 7 or 8, which is characterized in that pass through the casting mold inserts of at least one annular
Molds that (26,26', 28) and casting core (18) and gap (16) edge define jointly, that setting is for plastic frame (32) hold
Product has the extension size greater than rotor disk (14) in the axial direction of gap (16).
11. method as described in claim 7 or 8, which is characterized in that constitute one or more riser on plastic frame (32)
(36、38)。
12. method as described in claim 7 or 8, which is characterized in that at least by least one described casting channel (22,24)
The heating during the plastics (30) of casting plasticizing.
13. method as described in claim 7 or 8, which is characterized in that this method is utilized by described in one of claim 1 to 6
Equipment is implemented.
14. the rotor disk (14) of double-side processing machine has at least one gap (16) and at least one annular plastics frame (32),
At least one described annular plastics frame, which is utilized, is poured at least one described sky by method described in one of claim 7 to 13
In gap (16).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102015112527.7 | 2015-07-30 | ||
| DE102015112527.7A DE102015112527B4 (en) | 2015-07-30 | 2015-07-30 | Apparatus and method for pouring a ring-shaped plastic frame into a recess of a rotor disk of a double-side processing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106514917A CN106514917A (en) | 2017-03-22 |
| CN106514917B true CN106514917B (en) | 2019-02-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610940389.7A Active CN106514917B (en) | 2015-07-30 | 2016-07-29 | Device and method for being poured into annular plastics frame in the rotor disk gap of double-side processing machine |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US10543625B2 (en) |
| JP (1) | JP6858943B2 (en) |
| KR (1) | KR101855197B1 (en) |
| CN (1) | CN106514917B (en) |
| DE (1) | DE102015112527B4 (en) |
| SG (1) | SG10201605952TA (en) |
| TW (1) | TWI642528B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104493684B (en) * | 2014-12-16 | 2016-10-05 | 天津大学 | A kind of cylindrical component milling apparatus and workpiece propulsion plant thereof and Ginding process |
| JP7113694B2 (en) * | 2018-07-31 | 2022-08-05 | 株式会社三井ハイテック | Iron core product manufacturing method and iron core product manufacturing apparatus |
| CN112590087A (en) * | 2020-12-21 | 2021-04-02 | 大连理工大学 | Modular submarine cable protection pipe casting mold |
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Also Published As
| Publication number | Publication date |
|---|---|
| DE102015112527A1 (en) | 2017-02-02 |
| DE102015112527B4 (en) | 2018-11-29 |
| US20200114549A1 (en) | 2020-04-16 |
| KR20170015241A (en) | 2017-02-08 |
| KR101855197B1 (en) | 2018-05-08 |
| US20170028596A1 (en) | 2017-02-02 |
| JP2017030354A (en) | 2017-02-09 |
| US10543625B2 (en) | 2020-01-28 |
| JP6858943B2 (en) | 2021-04-14 |
| US10987835B2 (en) | 2021-04-27 |
| SG10201605952TA (en) | 2017-02-27 |
| TWI642528B (en) | 2018-12-01 |
| CN106514917A (en) | 2017-03-22 |
| TW201706103A (en) | 2017-02-16 |
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