CN106505518A - A kind of earth leakage protective device - Google Patents
A kind of earth leakage protective device Download PDFInfo
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- CN106505518A CN106505518A CN201611228165.XA CN201611228165A CN106505518A CN 106505518 A CN106505518 A CN 106505518A CN 201611228165 A CN201611228165 A CN 201611228165A CN 106505518 A CN106505518 A CN 106505518A
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- Prior art keywords
- power
- controller
- earth leakage
- leakage protective
- module
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H3/00—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection
- H02H3/26—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection responsive to difference between voltages or between currents; responsive to phase angle between voltages or between currents
- H02H3/32—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection responsive to difference between voltages or between currents; responsive to phase angle between voltages or between currents involving comparison of the voltage or current values at corresponding points in different conductors of a single system, e.g. of currents in go and return conductors
- H02H3/325—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection responsive to difference between voltages or between currents; responsive to phase angle between voltages or between currents involving comparison of the voltage or current values at corresponding points in different conductors of a single system, e.g. of currents in go and return conductors involving voltage comparison
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- Emergency Protection Circuit Devices (AREA)
Abstract
The invention discloses a kind of earth leakage protective device, is related to security protection technology field, the earth leakage protective device includes:Controller, automatic power-off control module, execution power-off/upper Electric drive module and contact measure loop;The controller, automatic power-off control module and execution power-off/upper Electric drive module is sequentially connected, and the execution power-off/upper Electric drive module is connected with power contact, and the contact measure loop is connected with the controller.The present invention detects the break-make situation of power contact by contact measure loop, and the break-make situation is fed back to controller, it is achieved thereby that break-make situation self-inspection, avoid and potential safety hazard caused by the unsuccessful institute of a power-off is caused because executing electronic component potential failure or actuator abrasion, further increase safety.
Description
Technical field
The present invention relates to security protection technology field, more particularly to a kind of earth leakage protective device.
Background technology
Electric heater refers to the water heater heated using electricity as the energy.It is and gas heater, solar water heater
One of three big water heaters mutually arranged side by side, development of the electric heater through more than ten years, the technology of water heater constantly improve, also increasingly
Favored by consumer.
In order to improve the security performance of electric heater, it is proposed that water outlet power down function, consequently, it is frequently necessary to realize electricity and
Power down function, in prior art automatically upper electricity with automatically power off control type earth leakage protective device using the control of electronics and mechanical bond
Mode processed, electronic controller are responsible for receiving and assign instruction act on and the mechanism's then finally upper electricity of execution tele command realization or power-off
Control.As power-off control is the implementing result of realizing earth leakage protective and program requirements power-off, under extreme conditions because executing electricity
Subcomponent potential failure or actuator are worn and torn and cause a power-off unsuccessful, and the exception will cause potential safety hazard.
Content of the invention
(1) technical problem to be solved
The technical problem to be solved in the present invention is:How to avoid because executing electronic component potential failure or actuator abrasion
And cause potential safety hazard caused by the unsuccessful institute of a power-off.
(2) technical scheme
For solving above-mentioned technical problem, the invention provides a kind of earth leakage protective device, the earth leakage protective device includes:Control
Device, automatic power-off control module, execution power-off/upper Electric drive module and contact measure loop;The controller, automatically power off control
Molding block is sequentially connected with power-off/upper Electric drive module is executed, and the execution power-off/upper Electric drive module and power contact connect
Connect, the contact measure loop is connected with the controller;
The controller, for being sent out to the execution power-off/upper Electric drive module by the automatic power-off control module
Send cut-offing instruction;
The execution power-off/upper Electric drive module, touches for when the cut-offing instruction is received, disconnecting the power supply
Point;
The contact measure loop, between the live wire and zero line of power supply, for detecting the break-make of the power contact
Situation, and the break-make situation of detection is fed back to the controller.
Preferably, the contact measure loop is made up of the first photoelectrical coupler and voltage drop element;
The input of first photoelectrical coupler is located at the live wire and zero of the power supply with the voltage drop element after connecting
Between line, the outfan of first photoelectrical coupler is located between the controller and ground.
Preferably, the voltage drop element is electric capacity C, resistance R or RC series circuit.
Preferably, the earth leakage protective device also includes:The automatically upper electric control module being connected with the controller;
The controller, is additionally operable to by the automatically upper electric control module to the execution power-off/upper Electric drive module
Electricity instruction in transmission;
The execution power-off/upper Electric drive module, for when electricity instruction on described is received, closing the power supply and touching
Point.
Preferably, the earth leakage protective device also includes:The water outlet power-off modular being connected with the controller;
The water outlet power-off modular, for obtaining out water state, and by described go out water state send to the controller.
Preferably, the water outlet power-off modular includes:Second photoelectrical coupler;
The input of second photoelectrical coupler is connected with water flow sensing unit control loop, second photoelectrical coupler
Outfan be located between the controller and ground.
Preferably, the earth leakage protective device also includes:The earth leakage protective control module being connected with each other and zero sequence detection of electrical leakage
Module, the earth leakage protective control module are connected respectively with the controller and execution power-off/upper Electric drive module;
The zero sequence detection of electrical leakage module, for when electric leakage occurs in the power supply, to the earth leakage protective control module
Send electric leakage signal;
The earth leakage protective control module, for when the electric leakage signal is received, the electric leakage signal being forwarded to
The controller sends cut-offing instruction to the execution power-off/upper Electric drive module.
Preferably, the earth leakage protective device also includes:Ground line current detection module and ground wire electrified detection module, describedly
Line current detection module is connected with the earth leakage protective control module, the ground wire electrified detection module and the controller phase
Even;
The ground wire electrified detection module, for detecting the voltage difference between the zero line and ground wire of the power supply, described
When voltage difference is less than predetermined voltage threshold, the earth leakage protective control module is closed by the controller;
The ground line current detection module, for detecting the electric current of the ground wire of the power supply, and the electric current for detecting is sent out
Deliver to the earth leakage protective control module;
The earth leakage protective control module, the electric current for being additionally operable to send in the ground line current detection module exceed default electricity
During stream threshold value, electric leakage signal is sent to the controller or send cut-offing instruction to the execution power-off/upper Electric drive module.
Preferably, the earth leakage protective device also includes:The high temperature protection module being connected with the controller;
The high temperature protection module, for obtaining high temperature information, and the high temperature information is sent to the controller.
Preferably, the earth leakage protective device also includes:The high-low pressure protection module being connected with the controller;
The high-low pressure protection module, for obtaining the information of voltage of supply voltage, and by the information of voltage send to
The controller.
The present invention detects the break-make situation of power contact by contact measure loop, and the break-make situation is fed back to control
Device processed, it is achieved thereby that break-make situation self-inspection, it is to avoid cause because executing electronic component potential failure or actuator abrasion
Potential safety hazard caused by the unsuccessful institute of power-off, further increases safety.
Description of the drawings
Fig. 1 is the structural representation of the earth leakage protective device of one embodiment of the present invention.
Specific embodiment
With reference to the accompanying drawings and examples, the specific embodiment of the present invention is described in further detail.Hereinafter implement
Example is for illustrating the present invention, but is not limited to the scope of the present invention.
Fig. 1 is the structural representation of the earth leakage protective device of one embodiment of the present invention.With reference to Fig. 1, the earth leakage protective
Device includes:Controller IC 1, automatic power-off control module, execution power-off/upper Electric drive module and contact measure loop;The control
Device IC1 processed, automatic power-off control module and execution power-off/upper Electric drive module is sequentially connected, the execution power-off/upper electric drive
Module is connected with power contact, and the contact measure loop is connected with the controller IC 1;
The controller IC 1, for executing power-off/upper Electric drive module by the automatic power-off control module to described
Send cut-offing instruction;
The execution power-off/upper Electric drive module, touches for when the cut-offing instruction is received, disconnecting the power supply
Point;
The contact measure loop, between the live wire and zero line of power supply, for detecting the break-make of the power contact
Situation, and the break-make situation of detection is fed back to the controller.
For ease of realizing the detection of break-make situation, in implementing, the contact measure loop is by the first photoelectric coupling
Device U1 and voltage drop element composition, the input of the first photoelectrical coupler U1 are located at the electricity after connecting with the voltage drop element
Between the live wire and zero line in source, the outfan of the first photoelectrical coupler U1 is located between the controller IC 1 and ground.
The voltage drop element is electric capacity C, resistance R or RC series circuit, and in the present embodiment, the blood pressure lowering original paper is gone here and there using RC
Connection circuit (" R " and " C " composition i.e. in respective figure).
The present embodiment detects the break-make situation of power contact by contact measure loop, and the break-make situation is fed back to
Controller, it is achieved thereby that break-make situation self-inspection, it is to avoid make because executing electronic component potential failure or actuator abrasion
The potential safety hazard into caused by the unsuccessful institute of a power-off, further increases safety.
The earth leakage protective device of the present embodiment can adopt following operation principle when power-off is carried out:In power contact in energization
State, disconnects the power contact, power contact because when a variety of causes executes power-off to trip, executing power-off/upper Electric drive module
Disconnected by synchronous full pole, now the input of U1 detection input circuits no-voltage, cause optocoupler output cut-off, controller IC 1_J feet to be tieed up
High level is held, the permanent High level via controller IC1 inner cores are judged to that to after power-off is tripped successfully;If executing power-off/upper electricity
When drive module disconnects the power contact and power contact is persistently closed, optocoupler U1 input terminal voltages No is through U1, resistance R, electricity
Hold C and Lo and constitute loop, optocoupler is turned on, optocoupler turn-on frequency is supply voltage frequency, the frequency effect causes to control in outfan
Device IC1_J feet processed synchronously produce energy supply periodic change, and change via controller IC1 is judged to that power-off tripping operation is unsuccessful, can be according to
Program setting exports cut-offing instruction from controller IC 1_k feet again and is sent to execution power-off/upper electricity through automatic power-off control module
Drive module disconnects the power contact, waits upper electricity instruction if now power-off success, if unsuccessful again according to program from
Controller IC 1_k feet output cut-offing instruction is simultaneously sent to execution power-off/upper Electric drive module disconnection institute through automatic power-off control module
State power contact, and or execute alert program, there is power-off abnormal phenomena to warn earth leakage protective device.
For ease of realizing upper electricity, in the present embodiment, the earth leakage protective device also includes:Automatic with what the controller was connected
Upper electric control module;
The controller, is additionally operable to by the automatically upper electric control module to the execution power-off/upper Electric drive module
Electricity instruction in transmission;
The execution power-off/upper Electric drive module, for when electricity instruction on described is received, closing the power supply and touching
Point.
The earth leakage protective device of the present embodiment can adopt following operation principle during electricity on carrying out:In power contact in disconnection
State, when executing upper electricity because of a variety of causes, the upper electricity instruction of controller IC 1_L feet output is sent to through automatic upper electric control module and holds
Row power-off/upper Electric drive module realizes upper Electricity Functional;On this, whether electricity execution synchronous detecting load contact is effectively closed in place, when
When upper electric unsuccessful (U1 is without lock-out pulse output action in controller IC 1_J feet), controller IC 1_L is exported again according to program
Electricity instruction, if continue 2 times or program agreement number of times fail when if enter protection alarm mode, to show upper electric unsuccessful warning.
For ease of realizing water outlet power-off, in the present embodiment, the earth leakage protective device also includes:It is connected with the controller
Water outlet power-off modular;
The water outlet power-off modular, for obtaining out water state, and by described go out water state send to the controller.
For ease of realizing Phototube Coupling, in the present embodiment, the water outlet power-off modular may include:Second photoelectrical coupler
U2;
The input of the second photoelectrical coupler U2 is connected with water flow sensing unit control circuit, second photoelectric coupling
The outfan of device U2 is located between the controller IC 1 and ground.
The earth leakage protective device of the present embodiment can adopt following operation principle when water outlet power-off is carried out:When there is water to flow,
Water flow sensing unit control circuit output pulse signal (going out water state) acts on controller IC 1_C feet through U2, and the signal is through control
Cut-offing instruction is exported from controller IC 1_K feet after device IC1 discriminatory analysises processed are effective and execution is sent to through automatic power-off control module
Power-off/upper Electric drive module disconnects the power contact, realizes output power down function;When anhydrous flowing, U2 output cut-offs, control
Device IC1_C feet processed are permanent High level, according to electronic work in program performing and from control after level via controller IC1 analyses effectively
The upper electricity instruction of device IC1_L feet output, is sent to execution power-off/upper Electric drive module through automatic upper electric control module and closes the power supply
Contact;On this, electricity executes whether synchronous detecting load contact is effectively closed in place, and when upper electric unsuccessful, (U1 is defeated without lock-out pulse
Go out to act on controller IC 1_J feet), controller IC 1_L exports upper electricity instruction again according to program, if continuing 2 times or program agreement
Number of times then enters protection alarm mode when failing, unsuccessful to show upper electricity.
For ease of realizing zero sequence earth leakage protective, in the present embodiment, the earth leakage protective device also includes:The electric leakage being connected with each other
Protection control module and zero sequence detection of electrical leakage module, the earth leakage protective control module and the controller and execute power-off/on
Electric drive module connects respectively;
The zero sequence detection of electrical leakage module, for when electric leakage occurs in the power supply, to the earth leakage protective control module
Send electric leakage signal;
The earth leakage protective control module, for when the electric leakage signal is received, the electric leakage signal being forwarded to
The controller sends cut-offing instruction to the execution power-off/upper Electric drive module.
The earth leakage protective device of the present embodiment can adopt following operation principle when zero sequence earth leakage protective is carried out:In power contact
Be in "on" position, load outputs Lo or No over the ground or Eo produce electric leakage by zero sequence detection of electrical leakage Coil Detector to and reach pre-
If during scope, earth leakage protective control module IC2 exports high level and touches to executing power-off/upper Electric drive module and disconnect the power supply
Point, at the same time, IC2 electric leakage signals are synchronously sent to controller IC 1_H feet and realize communication, when the tripping operation of power-off first is unsuccessful,
Cut-offing instruction is exported from controller IC 1_k feet again and execution power-off/upper Electric drive module is sent to through automatic power-off control module
The power contact is disconnected, and electric leakage self-locking program (must manually go up electricity) is entered if now power-off success, if unsuccessful again
Then according to program performing power-down procedure or alert program, there is power-off abnormal phenomena to warn earth leakage protective device;(control during earth leakage protective
Device IC1_H feet processed detect permanent High level), controller IC 1 is according to agreement procedure from controller IC 1_F feet output specified pulse width letter
Turn on number Q1, control of realizing carrying out IC2 protection chips to reset is again introduced into earth leakage protective detection state with this.
For ease of realizing ground wire exception electrization protection, in the present embodiment, the earth leakage protective device also includes:Ground line current is examined
Module and ground wire electrified detection module is surveyed, the ground line current detection module is connected with the earth leakage protective control module, described
Ground wire electrified detection module is connected with the controller;
The ground wire electrified detection module, for detecting the voltage difference between the zero line and ground wire of the power supply, described
When voltage difference is less than predetermined voltage threshold, the earth leakage protective control module is closed by the controller;
The ground line current detection module, for detecting the electric current of the ground wire of the power supply, and the electric current for detecting is sent out
Deliver to the earth leakage protective control module;
The earth leakage protective control module, the electric current for being additionally operable to send in the ground line current detection module exceed default electricity
During stream threshold value, electric leakage signal is sent to the controller or send cut-offing instruction to the execution power-off/upper Electric drive module.
The earth leakage protective device of the present embodiment can adopt following operation principle when ground wire exception electrization protection is carried out:In power supply
Contact is in "on" position, and the terminal voltage between power input Ni and Ei is less than systemic presupposition value (such as:When 36V), ground wire electrification
Detection module exports high level to controller IC 1_D feet, and now controller IC 1_G feet output high level turns on Q2, and Q2 is turned on
Positive closing IC2 ground line currents are detected function, it is to avoid ground line current is made beyond preset value during low-pressure state between Ni and Ei
Into ground line current abnormal protection;When the terminal voltage between Ni and Ei is more than systemic presupposition value (such as:>36V), now ground wire electrification
Detection module exports low level to controller IC 1_D feet, and now controller IC 1_G feet export low level ends Q2, and Q2 ends
IC2 ground line current detections function is caused to be opened, if now ground line current detection coil detects electric current and meets protection, electric leakage
Protection control module IC2 output high level disconnects the power contact, at the same time, IC2 to power-off/upper Electric drive module is executed
Electric leakage signal is synchronously sent to controller IC 1_H feet and realizes communication, when disconnecting the power contact first and being unsuccessful, again from control
Device IC1_k feet processed export cut-offing instruction and are sent to execution power-off/upper Electric drive module through automatic power-off control module realizes power-off
Action, enters electric leakage self-locking program (must manually go up electricity), if now power-off success according to program performing if unsuccessful again
, there is power-off abnormal phenomena to warn earth leakage protective device in power-down procedure or alert program;(controller IC 1_H feet during earth leakage protective
Detect permanent High level), controller IC 1 turns on Q1 according to agreement procedure from controller IC 1_F feet output specified pulse width signal,
Realize IC2 protection chips are carried out resetting control earth leakage protective detection state to be again introduced into this.
For ease of realizing high temperature protection, in the present embodiment, the earth leakage protective device also includes:It is connected with the controller
High temperature protection module;
The high temperature protection module, for obtaining high temperature information, and the high temperature information is sent to the controller.
The earth leakage protective device of the present embodiment can adopt following operation principle when high temperature protection is carried out:It is in power contact
"on" position, when temperature reaches systemic presupposition value, high temperature protection module output high level (i.e. high temperature information) acts on control
Device IC1_A feet, controller IC 1_k feet output cut-offing instruction are simultaneously sent to execution power-off/upper electric drive through automatic power-off control module
Module disconnects the power contact, realizes output power down function;When temperature is less than systemic presupposition value, controller IC1_A feet are ground
Level, refers to according to electronic work in program performing and from the upper electricity of controller IC 1_L feet output after level via controller IC1 analyses effectively
Order, is sent to execution power-off/upper Electric drive module through automatic upper electric control module and realizes upper Electricity Functional.Certainly, high temperature protection function
It is likewise supplied with the secondary of automatic upper electricity/automatically power off and controls defencive function above.
For ease of realizing that high-low pressure is protected, in the present embodiment, the earth leakage protective device also includes:It is connected with the controller
High-low pressure protection module;
The high-low pressure protection module, for obtaining the information of voltage of supply voltage, and by the information of voltage send to
The controller.
The earth leakage protective device of the present embodiment can adopt following operation principle when high temperature protection is carried out:It is in power contact
"on" position, when supply voltage is below or above rated voltage bound, high-low pressure protection module output voltage information function
Controller IC 1_B foot linear changes, according to program performing after voltage via controller IC1 analysis judgements, when below or above specified
When voltage is limited, controller IC 1_k feet output cut-offing instruction is simultaneously sent to execution power-off/upper electric drive through automatic power-off control module
Module disconnects the power contact, realizes output power down function;When controller IC 1_B foot voltages are returned in the range of bound
When, the upper electricity instruction of controller IC 1_L feet output is sent to execution power-off/upper Electric drive module through automatic upper electric control module and realizes
Upper Electricity Functional.Certainly, high-low pressure protection is likewise supplied with the secondary of automatic upper electricity/automatically power off and controls defencive function above.
Embodiment of above is merely to illustrate the present invention, and not limitation of the present invention, about the common of technical field
Technical staff, without departing from the spirit and scope of the present invention, can also make a variety of changes and modification, therefore own
The technical scheme of equivalent falls within scope of the invention, and the scope of patent protection of the present invention should be defined by the claims.
Claims (10)
1. a kind of earth leakage protective device, it is characterised in that the earth leakage protective device includes:Controller, automatic power-off control module, hold
Row power-off/upper Electric drive module and contact measure loop;The controller, automatic power-off control module and execution power-off/upper electricity
Drive module is sequentially connected, and the execution power-off/upper Electric drive module is connected with power contact, the contact measure loop and institute
State controller connection;
The controller, disconnected for being sent to the execution power-off/upper Electric drive module by the automatic power-off control module
Electricity instruction;
The execution power-off/upper Electric drive module, for when the cut-offing instruction is received, disconnecting the power contact;
The contact measure loop, between the live wire and zero line of power supply, for detecting the break-make situation of the power contact,
And the break-make situation of detection is fed back to the controller.
2. earth leakage protective device as claimed in claim 1, it is characterised in that the contact measure loop is by the first photoelectrical coupler
Constitute with voltage drop element;
The input of first photoelectrical coupler connect with the voltage drop element after located at the power supply live wire and zero line it
Between, the outfan of first photoelectrical coupler is located between the controller and ground.
3. earth leakage protective device as claimed in claim 2, it is characterised in that the voltage drop element is that electric capacity C, resistance R or RC go here and there
Connection circuit.
4. the earth leakage protective device as any one of claims 1 to 3, it is characterised in that the earth leakage protective device also includes:
The automatically upper electric control module being connected with the controller;
The controller, is additionally operable to send to the execution power-off/upper Electric drive module by the automatically upper electric control module
Upper electricity instruction;
The execution power-off/upper Electric drive module, for when electricity instruction on described is received, closing the power contact.
5. the earth leakage protective device as any one of claims 1 to 3, it is characterised in that the earth leakage protective device also includes:
The water outlet power-off modular being connected with the controller;
The water outlet power-off modular, for obtaining out water state, and by described go out water state send to the controller.
6. earth leakage protective device as claimed in claim 5, it is characterised in that the water outlet power-off modular includes:Second smooth thermocouple
Clutch;
The input of second photoelectrical coupler is connected with water flow sensing unit control loop, second photoelectrical coupler defeated
Go out end to be located between the controller and ground.
7. the earth leakage protective device as any one of claims 1 to 3, it is characterised in that the earth leakage protective device also includes:
The earth leakage protective control module being connected with each other and zero sequence detection of electrical leakage module, the earth leakage protective control module and the controller
And execution power-off/upper Electric drive module connects respectively;
The zero sequence detection of electrical leakage module, for when electric leakage occurs in the power supply, sending to the earth leakage protective control module
Electric leakage signal;
The earth leakage protective control module, for when the electric leakage signal is received, the electric leakage signal being forwarded to described
Controller sends cut-offing instruction to the execution power-off/upper Electric drive module.
8. earth leakage protective device as claimed in claim 7, it is characterised in that the earth leakage protective device also includes:Ground line current is examined
Module and ground wire electrified detection module is surveyed, the ground line current detection module is connected with the earth leakage protective control module, described
Ground wire electrified detection module is connected with the controller;
The ground wire electrified detection module, for detecting the voltage difference between the zero line and ground wire of the power supply, in the voltage
When difference is less than predetermined voltage threshold, the earth leakage protective control module is closed by the controller;
The ground line current detection module, for detecting the electric current of the ground wire of the power supply, and by the electric current for detecting send to
The earth leakage protective control module;
The earth leakage protective control module, the electric current for being additionally operable to send in the ground line current detection module exceed predetermined current threshold
During value, electric leakage signal is sent to the controller or send cut-offing instruction to the execution power-off/upper Electric drive module.
9. the earth leakage protective device as any one of claims 1 to 3, it is characterised in that the earth leakage protective device also includes:
The high temperature protection module being connected with the controller;
The high temperature protection module, for obtaining high temperature information, and the high temperature information is sent to the controller.
10. the earth leakage protective device as any one of claims 1 to 3, it is characterised in that the earth leakage protective device is also wrapped
Include:The high-low pressure protection module being connected with the controller;
The high-low pressure protection module, for obtaining the information of voltage of supply voltage, and the information of voltage is sent to described
Controller.
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CN108933427A (en) * | 2017-05-27 | 2018-12-04 | 芜湖美的厨卫电器制造有限公司 | Electric heater and its protective device |
CN109217236A (en) * | 2017-06-29 | 2019-01-15 | 芜湖美的厨卫电器制造有限公司 | Gas heater and its protective device |
CN110554271A (en) * | 2019-08-29 | 2019-12-10 | 格力电器(武汉)有限公司 | Air conditioner wiring detection device, test system and detection method |
CN112462824A (en) * | 2020-11-12 | 2021-03-09 | 宣城睿晖宣晟企业管理中心合伙企业(有限合伙) | Heating control system and method for thin film deposition equipment |
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