CN106483942A - 一种半导体制造设备和工艺的智能控制系统及方法 - Google Patents
一种半导体制造设备和工艺的智能控制系统及方法 Download PDFInfo
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108198268A (zh) * | 2017-12-19 | 2018-06-22 | 江苏极熵物联科技有限公司 | 一种生产设备数据标定方法 |
CN108470699A (zh) * | 2018-03-29 | 2018-08-31 | 深圳市创艺工业技术有限公司 | 一种半导体制造设备和工艺的智能控制系统 |
CN108510615A (zh) * | 2018-04-02 | 2018-09-07 | 深圳智达机械技术有限公司 | 一种半导体制造设备和工艺的控制系统 |
CN109656795A (zh) * | 2018-12-11 | 2019-04-19 | 北京安和瑞福信息技术有限公司 | 测试方法及装置 |
CN110431503A (zh) * | 2017-03-24 | 2019-11-08 | Abb瑞士股份有限公司 | 用于监测工业过程系统的技术状态的计算机系统和方法 |
CN110852558A (zh) * | 2019-09-24 | 2020-02-28 | 连云港耀科铝业有限公司 | 一种车轮彀生产数据的计算机辅助质量控制方法 |
CN111340063A (zh) * | 2020-02-10 | 2020-06-26 | 北京华电天仁电力控制技术有限公司 | 一种磨煤机数据异常检测方法 |
CN112230056A (zh) * | 2020-09-07 | 2021-01-15 | 国网河南省电力公司电力科学研究院 | 基于OFMMK-Means聚类和复合分位数回归多谐波源贡献计算方法 |
CN114247661A (zh) * | 2020-09-24 | 2022-03-29 | 长鑫存储技术有限公司 | 半导体产品分级方法和分级系统 |
CN114757000A (zh) * | 2022-06-14 | 2022-07-15 | 山东嘉通专用汽车制造有限公司 | 一种高精度自适应弹簧钢拉拔过程优化控制方法 |
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CN103020642A (zh) * | 2012-10-08 | 2013-04-03 | 江苏省环境监测中心 | 水环境监测质控数据分析方法 |
CN103473556A (zh) * | 2013-08-30 | 2013-12-25 | 中国科学院自动化研究所 | 基于拒识子空间的分层支持向量机分类方法 |
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CN102129242A (zh) * | 2011-04-12 | 2011-07-20 | 上海大学 | 基于两层混合智能优化的批处理生产过程产品质量控制方法 |
CN103020642A (zh) * | 2012-10-08 | 2013-04-03 | 江苏省环境监测中心 | 水环境监测质控数据分析方法 |
CN103473556A (zh) * | 2013-08-30 | 2013-12-25 | 中国科学院自动化研究所 | 基于拒识子空间的分层支持向量机分类方法 |
CN105511445A (zh) * | 2015-12-01 | 2016-04-20 | 沈阳化工大学 | 基于局部近邻标准化矩阵的多模态过程故障检测方法 |
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Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110431503B (zh) * | 2017-03-24 | 2021-02-09 | Abb瑞士股份有限公司 | 用于监测工业过程系统的技术状态的计算机系统和方法 |
CN110431503A (zh) * | 2017-03-24 | 2019-11-08 | Abb瑞士股份有限公司 | 用于监测工业过程系统的技术状态的计算机系统和方法 |
CN108198268A (zh) * | 2017-12-19 | 2018-06-22 | 江苏极熵物联科技有限公司 | 一种生产设备数据标定方法 |
CN108470699A (zh) * | 2018-03-29 | 2018-08-31 | 深圳市创艺工业技术有限公司 | 一种半导体制造设备和工艺的智能控制系统 |
CN108510615A (zh) * | 2018-04-02 | 2018-09-07 | 深圳智达机械技术有限公司 | 一种半导体制造设备和工艺的控制系统 |
CN109656795A (zh) * | 2018-12-11 | 2019-04-19 | 北京安和瑞福信息技术有限公司 | 测试方法及装置 |
CN109656795B (zh) * | 2018-12-11 | 2022-06-28 | 北京安和瑞福信息技术有限公司 | 测试方法及装置 |
CN110852558A (zh) * | 2019-09-24 | 2020-02-28 | 连云港耀科铝业有限公司 | 一种车轮彀生产数据的计算机辅助质量控制方法 |
CN111340063A (zh) * | 2020-02-10 | 2020-06-26 | 北京华电天仁电力控制技术有限公司 | 一种磨煤机数据异常检测方法 |
CN111340063B (zh) * | 2020-02-10 | 2023-08-29 | 国能信控互联技术有限公司 | 一种磨煤机数据异常检测方法 |
CN112230056B (zh) * | 2020-09-07 | 2022-04-26 | 国网河南省电力公司电力科学研究院 | 一种基于OFMMK-Means聚类和复合分位数回归多谐波源贡献计算方法 |
CN112230056A (zh) * | 2020-09-07 | 2021-01-15 | 国网河南省电力公司电力科学研究院 | 基于OFMMK-Means聚类和复合分位数回归多谐波源贡献计算方法 |
CN114247661A (zh) * | 2020-09-24 | 2022-03-29 | 长鑫存储技术有限公司 | 半导体产品分级方法和分级系统 |
CN114757000A (zh) * | 2022-06-14 | 2022-07-15 | 山东嘉通专用汽车制造有限公司 | 一种高精度自适应弹簧钢拉拔过程优化控制方法 |
CN114757000B (zh) * | 2022-06-14 | 2022-08-12 | 山东嘉通专用汽车制造有限公司 | 一种高精度自适应弹簧钢拉拔过程优化控制方法 |
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