CN106482874A - A kind of positive tetrahedron formula three-dimensional force flexible touch sensation sensor array - Google Patents

A kind of positive tetrahedron formula three-dimensional force flexible touch sensation sensor array Download PDF

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Publication number
CN106482874A
CN106482874A CN201611053555.8A CN201611053555A CN106482874A CN 106482874 A CN106482874 A CN 106482874A CN 201611053555 A CN201611053555 A CN 201611053555A CN 106482874 A CN106482874 A CN 106482874A
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China
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dimensional force
positive tetrahedron
sensing unit
haptic perception
downside
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CN106482874B (en
Inventor
胡广宇
许玉云
杜肖肖
张鹏
赵星
潘宏青
孙玉香
曹会彬
双丰
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Hefei Institutes of Physical Science of CAS
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Hefei Institutes of Physical Science of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/18Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

Abstract

The present invention provides a kind of positive tetrahedron formula three-dimensional force flexible touch sensation sensor array, if including the stem structure identical three-dimensional force softness haptic perception sensing unit being arranged in array in flexible substrate, described three-dimensional force softness haptic perception sensing unit is all the positive tetrahedron structure being prepared from by the compliant conductive rubber with piezoresistive effect;The upper surface of all positive tetrahedron structures is respectively positioned in same plane, and meet when setting up the three-dimensional cartesian coordinate system of this tetrahedral structure with the intersection point of three downsides of certain positive tetrahedron structure for initial point O, the wherein a line of the upper surface of this tetrahedral structure falls in X-axis forward parallel to Y-axis, the intersection point projection on two other side;The upper surface of described positive tetrahedron structure is equivalent with three downsides respectively to constitute three resistance, and the center of described downside is equipped with the electric contact for exporting corresponding resistor signal.Present invention reduces the degree of coupling of sensor resistance data, significantly improve decoupling precision and response speed.

Description

A kind of positive tetrahedron formula three-dimensional force flexible touch sensation sensor array
Technical field
The present invention relates to sensor technical field, specifically a kind of positive tetrahedron formula three-dimensional force flexible touch sensation sensor battle array Row.
Background technology
Developing rapidly with robotic sensor technology, the research of touch sensor is increasingly subject to various countries' academia and work The extensive concern of industry.The flexible touch sensation sensor developed now all possesses one-dimensional tactile sensing function substantially, but robot Safely and reliably to capture relative slip preferably between control machinery hand and target object for the target needs, this requires tactile Sensor good flexible can detect multi-dimensional force possessing simultaneously.Moreover, in such as surgical operation, rehabilitation kimonos The fields such as business, space flight need also exist for thering is the flexible touch sensation sensor that can detect multidimensional force information.
At present, multiple three-dimensional force sensors are had now been developed both at home and abroad, but the touch sensor based on Grazing condition structure Fewer.Hefei Institute Of Intelligent Machines Chinese Academy Of Sciences Xu Fei et al. with conductive rubber as matrix material, by adopting parallel resistance The flexible touch sensation sensor that model is developed, can be to three-dimensional force examinations.This sensor has certain flexibility, but right The requirement of fabrication and processing is very high, and longer to the response time applying power from the teeth outwards.
The patent (CN103335754A) of HeFei University of Technology's Huang English et al. application discloses a kind of Grazing condition three-dimensional force and touches Feel the making of sensor and pressure sensitive cells, it is characterized in that each three-dimensional force tactile sensing unit is in battle array in detected region surface Row arrangement, utilizes flexible substrate to fill each other.The patent of Hefei Institute Of Intelligent Machines Chinese Academy Of Sciences Sun Xin et al. application (CN103134622A) disclose a kind of three-dimensional force flexible touch sensation sensor array preparation method, made using " N " type three-dimensional bracket For the tactile sensor array micro structure of three-dimensional force can be detected, between each micro structure, fill electro-insulating rubber.Above-mentioned two parts of patents In, fabrication and processing is simple, but there is coupling to microstructure unit, and decoupling algorithm complexity is it is impossible to real-time detection is applied to sensing Power on device surface.
Content of the invention
It is an object of the invention to provide a kind of structure is simple, easily decoupling, sensitivity is high and stability is strong positive four sides Body formula three-dimensional force flexible touch sensation sensor array.
The technical scheme is that:
A kind of positive tetrahedron formula three-dimensional force flexible touch sensation sensor array, if including being arranged in array in flexible substrate Stem structure identical three-dimensional force softness haptic perception sensing unit, described three-dimensional force softness haptic perception sensing unit be all by have pressure drag effect The positive tetrahedron structure that the compliant conductive rubber answered is prepared from;The upper surface of all positive tetrahedron structures is respectively positioned on same plane Interior, and meet when the three-dimensional straight setting up this tetrahedral structure with the intersection point of three downsides of certain positive tetrahedron structure for initial point O During angular coordinate system, parallel to Y-axis, the intersection point projection on two other side falls the wherein a line of the upper surface of this tetrahedral structure X-axis is forward;The upper surface of described positive tetrahedron structure is equivalent with three downsides respectively to constitute three resistance, described downside Center be equipped with the electric contact for exporting corresponding resistor signal.
Described positive tetrahedron formula three-dimensional force flexible touch sensation sensor array, the length of side of described positive tetrahedron structure is 7~ 11mm, the centre distance being in two adjacent positive tetrahedron structures of same a line or same row is 14~18mm.
Described positive tetrahedron formula three-dimensional force flexible touch sensation sensor array, described three-dimensional force softness haptic perception sensing unit Three-dimensional force, is parsed by below equation and obtains:
Wherein, Fx、FyAnd FzRepresent the effect suffered in the x, y, and z directions of three-dimensional force softness haptic perception sensing unit respectively Power;F1Represent the pressure that its projection falls suffered by the downside of XOY plane third and fourth quadrant, F2Represent that its projection falls in XOY The pressure suffered by downside of plane first and second quadrant, F3Represent that its projection falls in XOY plane second and third quadrant Pressure suffered by downside;F1、F2And F3Power quick state equation F according to three-dimensional force softness haptic perception sensing uniti=f (Ri), i= 1,2,3 acquisition, Ri, i=1,2,3 represent the resistance of corresponding downside respectively.
Beneficial effects of the present invention are:
(1) the three-dimensional force softness haptic perception sensing unit of the present invention adopts positive tetrahedron structure, dexterously by sensor surface Suffered Force decomposition, on three downsides, reduces the degree of coupling of sensor resistance data, improves decoupling algorithm Efficiency is such that it is able to reach the purpose of real-time detection.
(2) the three-dimensional force softness haptic perception sensing unit of the present invention is standby using the compliant conductive rubber system with piezoresistive effect, Whole sensor array has good flexibility characteristics, and sensor can achieve flexural deformation, can reliably be attached on robot skin, Realize the effectively perceive of active force to external world.
(3) present invention can be made using layering mould Canning Technique and obtain, process is simple, compact conformation, and globality is strong, from And working stability, sensitivity height.
Brief description
Fig. 1 is the structural representation of the present invention;
Fig. 2 is the three-dimensional force softness haptic perception sensing unit structures schematic diagram of the present invention;
Fig. 3 is the three-dimensional force softness haptic perception sensing unit F of the present invention1、F2Force analysis schematic diagram;
Fig. 4 is the three-dimensional force softness haptic perception sensing unit F of the present invention3Force analysis schematic diagram.
Specific embodiment
Further illustrate the present invention with specific embodiment below in conjunction with the accompanying drawings.
As shown in Figure 1 and Figure 2, a kind of positive tetrahedron formula three-dimensional force flexible touch sensation sensor array, including some ordered arrangement Three-dimensional force softness haptic perception sensing unit 1, be filled between three-dimensional force softness haptic perception sensing unit 1 by electro-insulating rubber (PDMS) or The flexible substrate 3 that other flexible insulating materials of person are prepared from, three-dimensional force softness haptic perception sensing unit 1 is positive tetrahedron structure, Standby by the compliant conductive rubber system with piezoresistive effect.Above-mentioned ordered arrangement refers to three-dimensional force softness haptic perception sensing unit 1 and exists Detected region surface is in regular shape plane distribution.
Parallel to the XOY plane of three-dimensional cartesian coordinate system, upper surface wherein a line is put down for the upper surface of positive tetrahedron structure Row falls in X-axis forward in Y-axis, the intersection point projection on two other side, and the intersection point of three downsides is as three-dimensional cartesian coordinate system XOY plane initial point O, upper surface respectively with the three equivalent formation in downside resistance R1, resistance R2With resistance R3, three downsides Electric contact 2 is all posted in the center in face, records the resistance on each downside by gathering the resistance signal on electric contact 2 Value.The length of side of positive tetrahedron structure is 7~11mm, is in the centre-to-centre spacing of two adjacent positive tetrahedron structures of same a line or same row From for 14~18mm.
The three-dimensional force flexible touch sensation sensor array of the present invention in use, when its surface be subject to active force when, its Suffered power decomposes on three downsides of positive tetrahedron structure, causes positive tetrahedron structure to deform upon, three downsides Face is pressurized, and its resistance occurs corresponding change according to the size of pressure.State equation F according to pressure drag and pressurei=f (Ri), i =1,2,3, the pressure size that each downside is subject to can be tried to achieve, wherein, f is by the physical property of positive tetrahedron structure material therefor Determine.
As shown in Figure 3, Figure 4, the three-dimensional stress of three-dimensional force softness haptic perception sensing unit 1 is as follows:
Fz=F1cosθ+F2cosθ+F3cosθ
In above formula, F1Represent the pressure that its projection falls suffered by the downside of XOY plane third and fourth quadrant, F2Represent The pressure that its projection falls suffered by the downside of XOY plane first and second quadrant, F3Represent that its projection falls in XOY plane second With the pressure suffered by the downside of third quadrant;Represent F1And F2Projection on XOY plane and the angle of X-axis, θ represents F1、 F2And F3Angle with Z axis.According to the characteristic of positive tetrahedron structure,For 60 °, θ is arccos (1/3).Fx、FyAnd FzTable respectively Show three-dimensional force softness haptic perception sensing unit 1 active force suffered in the x, y, and z directions.
The three-dimensional force flexible touch sensation sensor array of the present invention can be adopted using layering mould Canning Technique, flexible substrate 3 High molecular polymer, positive tetrahedron structure is placed in corresponding hole in mould, then waters absolutely in the remaining space of mould Edge rubber (PDMS) or other flexible insulating materials, can get three-dimensional force flexible touch sensation sensor array prototype after the demoulding.
The three-dimensional force flexible touch sensation sensor array of the present invention needs to carry out demarcating and could use:By different size of power edge X, Y, Z-direction are iteratively operating on sensor surface, and record three-dimensional force softness haptic perception sensing unit 1 at various pressures each Resistance and the relation of applying power, then obtain three-dimensional force softness haptic perception sensing through neutral net or method of least square decoupling again Mathematical relationship between each resistance and three-dimensional force of unit 1.
The above embodiment is only that the preferred embodiment of the present invention is described, the not model to the present invention Enclose and be defined, on the premise of without departing from design spirit of the present invention, the technical side to the present invention for the those of ordinary skill in the art Various modifications and improvement that case is made, all should fall in the protection domain of claims of the present invention determination.

Claims (3)

1. a kind of positive tetrahedron formula three-dimensional force flexible touch sensation sensor array, some in flexible substrate including being arranged in array Structure identical three-dimensional force softness haptic perception sensing unit it is characterised in that:Described three-dimensional force softness haptic perception sensing unit is all served as reasons There is the positive tetrahedron structure that the compliant conductive rubber of piezoresistive effect is prepared from;The equal position in upper surface of all positive tetrahedron structures In same plane, and meet and this tetrahedron knot ought be set up for initial point O with the intersection point of three downsides of certain positive tetrahedron structure During the three-dimensional cartesian coordinate system of structure, the wherein a line of the upper surface of this tetrahedral structure is parallel to Y-axis, the friendship on two other side Spot projection falls in X-axis forward;The upper surface of described positive tetrahedron structure is equivalent with three downsides respectively to constitute three resistance, The center of described downside is equipped with the electric contact for exporting corresponding resistor signal.
2. positive tetrahedron formula three-dimensional force flexible touch sensation sensor array according to claim 1 it is characterised in that:Described just The length of side of tetrahedral structure is 7~11mm, and the centre distance being in two adjacent positive tetrahedron structures of same a line or same row is 14~18mm.
3. positive tetrahedron formula three-dimensional force flexible touch sensation sensor array according to claim 1 it is characterised in that:Described three The three-dimensional force of dimension power softness haptic perception sensing unit, is parsed by below equation and obtains:
F x = 1 2 F 1 + 1 2 F 2 + 2 3 3 F 3
F y = 3 2 F 1 - 3 2 F 2
F z = 1 3 F 1 + 1 3 F 2 + 1 3 F 2
Wherein, Fx、FyAnd FzRepresent three-dimensional force softness haptic perception sensing unit active force suffered in the x, y, and z directions respectively;F1Table Show the pressure that its projection falls suffered by the downside of XOY plane third and fourth quadrant, F2Represent that its projection falls in XOY plane the One and second quadrant the pressure suffered by downside, F3Represent that its projection falls in the downside of XOY plane second and third quadrant Suffered pressure;F1、F2And F3Power quick state equation F according to three-dimensional force softness haptic perception sensing uniti=f (Ri), i=1,2,3 Obtain, Ri, i=1,2,3 represent the resistance of corresponding downside respectively.
CN201611053555.8A 2016-11-25 2016-11-25 Regular four-surface three-dimensional force flexible touch sensor array Active CN106482874B (en)

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CN108362410A (en) * 2018-04-26 2018-08-03 中国科学院合肥物质科学研究院 A kind of three-dimensional force flexible sensor
CN111964821A (en) * 2020-08-05 2020-11-20 清华大学深圳国际研究生院 Pressure touch prediction method and pressure touch prediction model for electronic skin
WO2021128761A1 (en) * 2019-12-23 2021-07-01 马洪文 Distributed multi-dimensional force measurement system and measurement method

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CN111964821A (en) * 2020-08-05 2020-11-20 清华大学深圳国际研究生院 Pressure touch prediction method and pressure touch prediction model for electronic skin

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