CN106454668A - MEMS sound production apparatus and electronic device - Google Patents
MEMS sound production apparatus and electronic device Download PDFInfo
- Publication number
- CN106454668A CN106454668A CN201610941793.6A CN201610941793A CN106454668A CN 106454668 A CN106454668 A CN 106454668A CN 201610941793 A CN201610941793 A CN 201610941793A CN 106454668 A CN106454668 A CN 106454668A
- Authority
- CN
- China
- Prior art keywords
- magnetic material
- material layer
- vibrating diaphragm
- substrate
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000696 magnetic material Substances 0.000 claims abstract description 87
- 239000000758 substrate Substances 0.000 claims abstract description 54
- 230000008021 deposition Effects 0.000 claims abstract description 10
- 238000007747 plating Methods 0.000 claims description 10
- 230000004888 barrier function Effects 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 9
- 238000005507 spraying Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 238000007639 printing Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 3
- 238000009434 installation Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
Abstract
The invention discloses an MEMS sound production apparatus and an electronic device. The MEMS sound production apparatus comprises a substrate provided with a hollow inner cavity and a vibrating diaphragm formed above the substrate in a deposition manner, the vibrating diaphragm comprises at least one magnetized magnetic material layer, and the vibrating diaphragm further comprises a first coil arranged to align to the magnetic material layer; and the first coil is configured to provide a driving force whose direction is vertical to the vibrating diaphragm for the magnetic material layer. According to the sound production apparatus disclosed by the invention, the first coil and the magnetic material layer are correspondingly arranged together, when alternating current is input to the first coil, the magnetic materials of the magnetic material layer penetrates through the coil, the magnetic material layer generates vibration vertical to the direction of the vibrating diaphragm under the counterforce of an Ampere force of the coil, and thus the vibration sound production of the vibrating diaphragm is realized. This sound production apparatus disclosed by the invention can be used in telephone receivers or loudspeakers, and breaks through the installation structures of traditional coils and magnets, so that the volume of the sound production apparatus is smaller, and the sound production apparatus can be manufactured by the MEMS process.
Description
Technical field
The present invention relates to field of transducer, more precisely, the present invention relates to a kind of sound-producing device；The invention still further relates to one
Plant electronic equipment.
Background technology
Sound-producing device is the important acoustic element in electronic equipment, is changed into the transducing of acoustical signal as a kind of signal of telecommunication
Device, it has been commonly utilized on the electronic products such as mobile phone, notebook computer.Existing speaker module, including shell, with
And it is arranged on the vibrational system of inside the shell, magnetic circuit system, wherein vibrational system includes vibrating diaphragm and is arranged on vibrating diaphragm and is used for driving
The voice coil loudspeaker voice coil of dynamic vibrating diaphragm sounding, magnetic circuit system includes Magnet, washer etc..One end of coil is connected on vibrating diaphragm, and the other end stretches to
In the magnetic gap of magnetic circuit system.
The structure of this sound-producing device is complex so that the volume of sound-producing device is larger, and mostly artificial streamline
Assembling, automaticity is not high, far can not meet the growth requirement of modernization.
Content of the invention
It is an object of the present invention to provide a kind of new solution of MEMS sound-producing device.
According to the first aspect of the invention, there is provided a kind of MEMS sound-producing device, including have the substrate of hollow cavity with
And it is formed at vibrating diaphragm above substrate by way of deposition, described vibrating diaphragm includes at least one of which through magnetized magnetic material
Layer；
Including the first coil just to setting with magnetic material layer on vibrating diaphragm；Described first coil is configured to magnetic material
Layer provides direction the driving force vertical with vibrating diaphragm.
Alternatively, described vibrating diaphragm is generally through magnetized magnetic material layer, between described magnetic material layer and substrate
It is additionally provided with insulating barrier.
Alternatively, described vibrating diaphragm includes the layer of non-magnetic material being deposited on substrate, and described magnetic material layer is arranged on non-
The lower section of magnetic material layer, top or inside.
Alternatively, described vibrating diaphragm includes being used for connecting the connecting portion of substrate positioned at edge, and is located at shaking of medium position
Dynamic portion, described magnetic material layer is distributed on the vibration section of vibrating diaphragm.
Alternatively, described magnetic material layer by deposition, printing, spraying, plating or chemical plating by way of with non magnetic
Material layer is combined together.
Alternatively, the housing also including substrate and constituting encapsulating structure with substrate, described substrate is located in encapsulating structure
And be arranged on substrate, described first coil is arranged on position corresponding with magnetic material layer on substrate；On the housing
It is provided with sound hole.
Alternatively, on the housing with substrate just to position be additionally provided with being combined together with magnetic material layer
Two coil；Described second coil provides the driving force with first coil equidirectional for magnetic material layer.
Alternatively, described substrate is circuit board.
Alternatively, described sound-producing device is speaker or receiver.
According to a further aspect in the invention, additionally provide a kind of electronic equipment, including above-mentioned sound-producing device.
The sound-producing device of the present invention, together with first coil is correspondingly arranged with magnetic material layer, when first coil is passed through friendship
After stream electricity, the magnetic line of force of magnetic material layer passes through coil, so that magnetic material layer occurs under the counteracting force of coil Ampere force
Perpendicular to the vibration in vibrating diaphragm direction, it is achieved thereby that the vibration sounding of vibrating diaphragm.This sound-producing device of the present invention, may apply to
In the middle of receiver or speaker, it breaches the mounting structure of conventional coil, Magnet so as to volume is less, and can adopt
Manufactured with MEMS technology.
It was found by the inventors of the present invention that in the prior art, the structure of sound-producing device is complex, and its volume is larger, and
And mostly artificial streamline assembling, automaticity is high, far can not meet the growth requirement of modernization.Therefore, the present invention
Technical assignment to be realized or technical problem to be solved are that those skilled in the art never expect or not pre-
Phase arrives, therefore the present invention is a kind of new technical scheme.
By the detailed description to the exemplary embodiment of the present invention referring to the drawings, the further feature of the present invention and its
Advantage will be made apparent from.
Brief description
Combined in the description and the accompanying drawing of the part that constitutes description shows embodiments of the invention, and even
It is used for together explaining the principle of the present invention with its explanation.
Fig. 1 is the structural representation of sound-producing device of the present invention.
Fig. 2 is that a kind of of vibrating diaphragm of the present invention implements structural representation.
Specific embodiment
To describe the various exemplary embodiments of the present invention now with reference to accompanying drawing in detail.It should be noted that：Unless other have
Body illustrates, the positioned opposite, numerical expression of the part otherwise illustrating in these embodiments and step and numerical value do not limit this
The scope of invention.
Description only actually at least one exemplary embodiment is illustrative below, never as to the present invention
And its application or any restriction using.
May be not discussed in detail for technology, method and apparatus known to person of ordinary skill in the relevant, but suitable
When in the case of, described technology, method and apparatus should be considered a part for description.
In all examples with discussion shown here, any occurrence should be construed as merely exemplary, and not
It is as restriction.Therefore, other examples of exemplary embodiment can have different values.
It should be noted that：Similar label and letter represent similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined in individual accompanying drawing, then do not need it is further discussed in subsequent accompanying drawing.
With reference to Fig. 1, the invention provides a kind of MEMS sound-producing device, it includes substrate 2, vibrating diaphragm 4, coil 3 etc..The present invention
Substrate 2 can adopt silicon substrate, the material of this silicon substrate belongs to the common knowledge of those skilled in the art.Described vibrating diaphragm 4
The connecting portion positioned at marginal position, and the vibration section positioned at medium position can be included, in certain embodiments, also include position
Ring portion between vibration section and connecting portion.It is formed with the cavity volume of hollow, the connecting portion of described vibrating diaphragm 4 at the middle part of substrate 2
Carry on the substrate 2, the vibration section of vibrating diaphragm 4 central region can be suspended at the top of substrate 2 cavity volume.This structure of vibrating diaphragm and
Itself position relationship and substrate between belongs to the common knowledge of those skilled in the art, and here no longer illustrates.
The vibrating diaphragm 4 of the present invention forms on the substrate 2 by way of deposition, etching, for example, can deposit vibrating diaphragm on the substrate 2
Layer, forms the pattern of vibrating diaphragm 4 afterwards by way of etching.In order to ensure the insulating properties between substrate 2 and vibrating diaphragm 4, described
The region contacting between substrate 2 and vibrating diaphragm 4 can arrange insulating barrier, and this insulating barrier can adopt the those skilled in the art such as silicon oxide
Known insulant.It is also to be noted that described insulating barrier can apply other in sound-producing device to need to insulate
Device between, here no longer illustrates.
The vibrating diaphragm 4 of the present invention includes at least one of which through magnetized magnetic material layer, the such as this area such as ferrum, cobalt, nickel skill
Magnetic material known to art personnel etc..In one specific embodiment of the present invention, described vibrating diaphragm 4 is generally through magnetization
Magnetic material layer, this magnetic material layer can by deposition, etching by way of arrange on the substrate 2, this magnetic material layer is entered
So that whole vibrating diaphragm defines a magnet after row magnetization.Insulating barrier is arranged between described magnetic material layer and substrate 2, with
Ensure insulation therebetween.
In another specific embodiment of the present invention, with reference to Fig. 2, described vibrating diaphragm 4 include magnetic material layer 41 and
Layer of non-magnetic material 40, this layer of non-magnetic material 40 for example can adopt diaphragm materials well-known to those skilled in the art, example
As monocrystal silicon or polysilicon etc..Layer of non-magnetic material 40 forms on the substrate 2 by way of deposition, described magnetic material layer
41 lower section, top or the inside that may be provided at layer of non-magnetic material 40.Preferably, according to magnetic material layer 41 with non magnetic
Relation between material layer 40, described magnetic material layer 41 can select by deposition, printing, spraying, plating or chemical plating
Mode be combined together with layer of non-magnetic material 40.
For example when making, can depositing insulating layer on the substrate 2 first, in the disposed thereon magnetic material of insulating barrier
The bed of material 41, in the disposed thereon layer of non-magnetic material 40 of magnetic material layer 41, thus obtain magnetic material layer 41 under, non magnetic
Material layer 40 is in upper diaphragm structure.
Or, in the disposed thereon layer of non-magnetic material 40 of insulating barrier, in disposed thereon, the print of layer of non-magnetic material 40
Brush, the mode of spraying, plating or chemical plating form magnetic material layer 41, thus obtaining magnetic material layer 41 upper, non magnetic
Material layer 40 under diaphragm structure.
Or, first in one layer of layer of non-magnetic material 40 of disposed thereon of insulating barrier, upper in layer of non-magnetic material 40
Side's deposition, printing, the mode of spraying, plating or chemical plating form magnetic material layer 41, and it is heavy to continue on magnetic material layer 41
Long-pending one layer of layer of non-magnetic material 40, thus define sandwich multiple structure.
The vibrating diaphragm 4 of the present invention it is preferred that magnetic material layer 41 be smaller in size than layer of non-magnetic material 40, and magnetic material
The bed of material 41 is distributed in the vibration section region of vibrating diaphragm, and this allows for not having annexation between magnetic material layer 41 and substrate 2, thus
Magnetic material layer 41 can be made preferably to drive vibrating diaphragm, improve the sensitivity of vibrating diaphragm.
The sound-producing device of the present invention, also includes the first coil 3 just to setting with described magnetic material layer 41；This First Line
Circle 3 can be for example annulus structure well-known to those skilled in the art.In one specific embodiment of invention, also
Including substrate 1, this substrate 1 can preferably employ circuit board.Substrate 2 is arranged on the upper end of substrate 1 so that substrate 1 closes lining
The cavity volume at bottom 2.First coil 3 is arranged on substrate 1 on position corresponding with magnetic material layer 41, for example, be arranged on magnetic material
The underface of layer 41.Described first coil 3 is configured to magnetic material layer 41 provides direction the driving force vertical with vibrating diaphragm 4.
The sound-producing device of the present invention, together with first coil is correspondingly arranged with magnetic material layer, when first coil is passed through friendship
After stream electricity, the magnetic line of force of magnetic material layer passes through coil, so that magnetic material layer occurs under the counteracting force of coil Ampere force
Perpendicular to the vibration in vibrating diaphragm direction, it is achieved thereby that the vibration sounding of vibrating diaphragm.This sound-producing device of the present invention, may apply to
In the middle of receiver or speaker, it breaches the mounting structure of conventional coil, Magnet so as to volume is less, and can adopt
Manufactured with MEMS technology.
The sound-producing device of the present invention, can also include arranging housing 6 on substrate 1, and described housing 6 is fixed on substrate 1
After upper, define encapsulating structure.The structures such as substrate 2, vibrating diaphragm 4 are arranged at the inside of encapsulating structure.Described housing 6 also sets
It is equipped with sound hole 5, so that the sound that vibrating diaphragm 4 sends can flow out.Wherein, can arrange on position corresponding with vibrating diaphragm 4 on substrate 1
Relief hole 7, can equalize the air pressure in the operatic tunes after sound-producing device, to improve the vibrating effect of vibrating diaphragm 4 by this relief hole 7.
In one preferred embodiment of the invention, on described housing 6 with substrate 1 just to position be additionally provided with
The second coil (view is not given) that magnetic material layer 41 is combined together.The structure of this second coil can be with first coil 3
Structure consistent.Described second coil is configured：There is provided direction the driving force vertical with vibrating diaphragm 4 for magnetic material layer 41, and the
The driving force direction that two coil is provided for magnetic material layer 41 with first coil for the driving force direction that magnetic material layer 41 provides
Identical.Such as magnetic material layer 41 is all by Ampere force vertically upward or same in the presence of first coil 3, the second coil
When be subject to Ampere force vertically downward.That is, magnetic material layer 41 is acted on by first coil 3, the second coil simultaneously,
Such that it is able to provide bigger driving force for magnetic material layer 41, improve the Oscillation Amplitude of vibrating diaphragm 4.
The sound-producing device of the present invention may apply in each electronic equipment, for this present invention also offers a kind of electronics sets
Standby, it includes above-mentioned sound-producing device.
Although being described in detail to some specific embodiments of the present invention by example, the skill of this area
Art personnel it should be understood that example above is merely to illustrate, rather than in order to limit the scope of the present invention.The skill of this area
Art personnel are it should be understood that can modify to above example without departing from the scope and spirit of the present invention.This
Bright scope is defined by the following claims.
Claims (10)
1. a kind of MEMS sound-producing device it is characterised in that：Including the substrate (2) with hollow cavity and by way of deposition
It is formed at the vibrating diaphragm (4) above substrate (2), described vibrating diaphragm (4) includes at least one of which through magnetized magnetic material layer (41)；
Including the first coil (3) just to setting for the magnetic material layer (41) upper with vibrating diaphragm (4)；Described first coil (3) is configured
There is provided direction the driving force vertical with vibrating diaphragm (4) for magnetic material layer (41).
2. sound-producing device according to claim 1 it is characterised in that：Described vibrating diaphragm (4) is generally through magnetized magnetic
Material layer (41), is additionally provided with insulating barrier between described magnetic material layer (41) and substrate (2).
3. sound-producing device according to claim 1 it is characterised in that：Described vibrating diaphragm (4) includes being deposited on substrate (2)
Layer of non-magnetic material (40), described magnetic material layer (41) is arranged on lower section, top or the inside of layer of non-magnetic material (40).
4. sound-producing device according to claim 3 it is characterised in that：Described vibrating diaphragm (4) includes being used for connecting positioned at edge
The connecting portion of substrate (2), and it is located at the vibration section of medium position, described magnetic material layer (41) is distributed in shaking of vibrating diaphragm (4)
In dynamic portion.
5. sound-producing device according to claim 3 it is characterised in that：Described magnetic material layer (41) pass through deposition, printing,
Spraying, plating or the mode of chemical plating and layer of non-magnetic material (40) are combined together.
6. sound-producing device according to claim 1 it is characterised in that：Also include substrate (1) and constitute envelope with substrate (1)
The housing (6) of assembling structure, described substrate (2) is located in encapsulating structure and is arranged on substrate (1), described first coil (3) peace
It is contained on the upper position corresponding with magnetic material layer (41) of substrate (1)；Sound hole (5) is provided with described housing (6).
7. sound-producing device according to claim 6 it is characterised in that：Described housing (6) is upper and substrate (1) just to position
Put and be additionally provided with the second coil being combined together with magnetic material layer (41)；Described second coil carries for magnetic material layer (41)
For the driving force with first coil (3) equidirectional.
8. sound-producing device according to claim 7 it is characterised in that：Described substrate (1) is circuit board.
9. the sound-producing device according to any one of claim 1 to 8 it is characterised in that：Described sound-producing device be speaker or
Person receiver.
10. a kind of electronic equipment it is characterised in that：Including the sound-producing device as described in any one of claim 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610941793.6A CN106454668A (en) | 2016-10-31 | 2016-10-31 | MEMS sound production apparatus and electronic device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610941793.6A CN106454668A (en) | 2016-10-31 | 2016-10-31 | MEMS sound production apparatus and electronic device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106454668A true CN106454668A (en) | 2017-02-22 |
Family
ID=58177895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610941793.6A Pending CN106454668A (en) | 2016-10-31 | 2016-10-31 | MEMS sound production apparatus and electronic device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106454668A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110310616A (en) * | 2019-06-28 | 2019-10-08 | Oppo广东移动通信有限公司 | Sounding device, display device and terminal |
| CN112333615A (en) * | 2020-11-06 | 2021-02-05 | 地球山(北京)科技有限公司 | Loudspeaker and manufacturing method thereof |
| WO2021134686A1 (en) * | 2019-12-31 | 2021-07-08 | 瑞声声学科技(深圳)有限公司 | Mems speaker |
| CN113873407A (en) * | 2021-10-26 | 2021-12-31 | 维沃移动通信有限公司 | Loudspeaker control method, loudspeaker module and electronic equipment |
| CN114430520A (en) * | 2020-10-29 | 2022-05-03 | 美商富迪科技股份有限公司 | Packaging structure of micro loudspeaker |
| CN116828370A (en) * | 2023-08-28 | 2023-09-29 | 地球山(苏州)微电子科技有限公司 | Pixel sounding unit and digital sounding chip |
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| CN116828370A (en) * | 2023-08-28 | 2023-09-29 | 地球山(苏州)微电子科技有限公司 | Pixel sounding unit and digital sounding chip |
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Effective date of registration: 20200604 Address after: 266101 room 103, No. 396, Songling Road, Laoshan District, Qingdao, Shandong Province Applicant after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Applicant before: GOERTEK Inc. |
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Application publication date: 20170222 |