CN106430081A - Method for manufacturing cylindrical mould - Google Patents
Method for manufacturing cylindrical mould Download PDFInfo
- Publication number
- CN106430081A CN106430081A CN201610896868.3A CN201610896868A CN106430081A CN 106430081 A CN106430081 A CN 106430081A CN 201610896868 A CN201610896868 A CN 201610896868A CN 106430081 A CN106430081 A CN 106430081A
- Authority
- CN
- China
- Prior art keywords
- cylindrical
- formwork
- circular ring
- metal layer
- shaped metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
- B82B3/0004—Apparatus specially adapted for the manufacture or treatment of nanostructural devices or systems or methods for manufacturing the same
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Nanotechnology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
The invention discloses a method for manufacturing a cylindrical mould. The main steps are as follows: (1) processing a micro structure on a substrate, and making the micro structure into a planar template; (2) pouring a material on the planar template, and manufacturing a flexible motherboard; (3) fixing the flexible motherboard to a cylindrical inner surface to form a cylindrical flexible motherboard, and performing an electric conduction treatment on the surface of the cylindrical flexible motherboard; (4) using the conductive flexible motherboard as a cathode, performing electroforming in an electric sedimentation tank for a certain time, and stripping off circular-arc-shaped metal layers deposited on the surface of the flexible motherboard; (5) splicing multiple circular-arc-shaped metal layers to form a circular ring-shaped metal layer, wherein seams for connecting the metal layers form a circular ring-shaped metal layer; and (6) assembling the circular ring-shaped metal layer on a metal cylinder, filling a polymer material in the gap between the circular ring-shaped metal layer and the metal cylinder, and manufacturing the cylindrical mould after the polymer material solidifies. The cylindrical mould manufactured by the method has the advantages of easy process realization, low cost and capability of realizing continuous graph transfer.
Description
Technical field
The present invention relates to a kind of manufacture method of formwork for cylindrical columns, especially a kind of for row graph processing formwork for cylindrical columns
Manufacture method, belongs to field of micro-Na manufacture.
Background technology
In recent years, can be to the raising of properties of product and quality, micro-nano along with large area functional surface micronano structure
Rice process technology has gradually obtained widely accepting.Traditional micro-nano processing technique mostly is plane machining, needed for figure transfer
Mould is flat plate mold, and technical maturity is widely used aborning.But during large area or batch are continuously produced, flat board
The gap problem that the extremely low productivity ratio of mould, the transfer of step-by-step movement figure are formed between adjacent pattern all limits which and extensively should
With.
Formwork for cylindrical columns carries out rolling continuous transition diagram technology and is inheriting the advantages of planar graph shifts high resolution
Meanwhile, also there is continuous replication so that low production cost, production rate are higher, with boundless application prospect.Often
Flat plate mold processing technique includes conventional lithography, beamwriter lithography, laser interference lithography and Laser ablation etc., its
Have the characteristics that figure transfer high precision, technical maturity, nanoscale and micron-sized planar graph array can be manufactured, but due to
When formwork for cylindrical columns is manufactured, on the face of cylinder, the paving of photoresist applies and exposure technology is difficult to carry out, laser ablation process manufactures large area
The more low problems of mould productivity ratio, are difficult to the manufacture of formwork for cylindrical columns using the technique of traditional mode of production flat plate mold.
Content of the invention
It is an object of the invention to, provide a kind of technique easily realize, the formwork for cylindrical columns manufacture method of low cost, big to realize
Area and the production and processing of row graph transfer.
For reaching above-mentioned purpose, the present invention is achieved through the following technical solutions：
（1）A smooth substrate is taken, processing micro structure, makes plane template on the substrate；
（2）Using normal temperature molding technique in the good material of plane template upper Adhesion Resistance, turn over and make flexible mother matrix；
（3）The bending of flexible mother matrix is fixed on a cylinder inner surface, the cylindrical pliable mother matrix with certain radian is formed, right
Cylindrical pliable master surfaces carry out conductive processing；
（4）With conductive cylindrical pliable mother matrix as negative electrode, electroforming in galvanic deposition cell, after certain time, peel off cylindrical soft
The arc-shaped metal level of property master surfaces electroformed deposit；
（5）The arc-shaped metal level of several electroformed deposit is stitched together, circular ring metal layer is formed, coupled using metallic plate
Seam between technique connection adjacent metal, forms a seamless, complete circular ring metal layer；
（6）Circular ring metal layer is assemblied on a metal cylinder, between keeping between annulus metal and the metal cylinder of center
Gap is uniform, the cast of liquid macroimolecule material is filled in the gap between circular ring metal layer and metal cylinder, is repaiied after solidification
Whole, make formwork for cylindrical columns.
A kind of formwork for cylindrical columns manufacture method proposed by the present invention, process is simple, easily realizes, and processing cost is low, the answering of figure
High precision processed, the continuous transfer of achievable figure and manufacture.
Description of the drawings
Fig. 1 is plane template schematic diagram.
Fig. 2 is the flexible mother matrix schematic diagram of the system of turning on plane template.
Fig. 3 is flexible master structure schematic diagram.
Fig. 4 is fixed on cylinder inner surface schematic diagram for flexible mother matrix.
Fig. 5 carries out conductive processing schematic diagram for flexible mother matrix mould.
Fig. 6 is electroformed deposit schematic diagram.
Fig. 7 is the single arc-shaped metal-layer structure schematic diagram of electroformed deposit gained.
Fig. 8 is arc-shaped metal level assembling schematic diagram.
Fig. 9 is the overall structure diagram of formwork for cylindrical columns.
Figure 10 is the overall structure diagram of formwork for cylindrical columns.
The label of in figure represents respectively：
1 is plane template；2 is the good material of Adhesion Resistance；3 is flexible mother matrix；4 is cylinder；5 is cylindrical pliable mother matrix；6
It is galvanic deposition cell；7 is arc-shaped metal level；8 is the seam of arc-shaped metal interlevel；9 is circular ring metal layer；10 is round metal
Post；11 is macromolecular material.
Specific embodiment
（1）A smooth substrate is taken, processes micro structure on the substrate, plane template 1 is made, as shown in Figure 1；
Preferably, described substrate has certain strong hardness and good processing characteristics, material is as being nickel plate, copper coin or aluminum
Plate.
Preferably, the shape of described plane template 1 can be rectangle.
（2）Using normal temperature molding technique in the good material 2 of 1 upper Adhesion Resistance of plane template, turn over and make flexible mother
Version 3；Specifically, as shown in Fig. 2 the method that material 2 good for Adhesion Resistance is poured into a mould using room temperature is poured into a mould under vacuum
On plane template 1, the good material 2 of Adhesion Resistance is peeled off after solidification from plane template 1, is turned over and make flexible mother matrix 3.
Preferably, the good material 2 of Adhesion Resistance is using PDMS or politef.
（3）The bending of flexible mother matrix 3 is fixed on 4 inner surface of a cylinder, forms the cylindrical pliable with certain radian
Mother matrix 5, as shown in figure 4, conductive processing is carried out to 5 surface of cylindrical pliable mother matrix, as shown in Figure 5.
Preferably, cylinder 4 play fixed supporting role, can be the material with certain strong hardness, such as ABS engineering plastics,
Steel, aluminum or copper.
Preferably, cylindrical pliable mother matrix 5 is with certain radian, it is 3 that central angle is 360/N, the preferred N of the present invention.
Preferably, 5 surface conductance of cylindrical pliable mother matrix is processed can be realized using conductive film technique is prepared, such as chemical
Plating, evaporation, magnetron sputtering plating or spraying copper oil, graphite technology.
（4）With the cylindrical pliable mother matrix 5 after conductive processing as negative electrode, electroforming in galvanic deposition cell 6, after certain time,
The arc-shaped metal level 7 of 5 surface electroformed deposit of cylindrical pliable mother matrix is peeled off, as shown in Figure 6 and Figure 7.
Preferably, on cylindrical pliable mother matrix 5 the arc-shaped metal level 7 of electroformed deposit shape after follow-up machining
Become formwork for cylindrical columns surface, its material is the metal material good with certain strong hardness, electro-deposition energy, such as nickel or aluminum.
Preferably, the arc-shaped metal level 7 of electroformed deposit is with certain radian, central angle is that 360/N, the present invention is excellent
Central angle is selected for 120 °.
Preferably, the thickness of arc-shaped metal level 7 should make it have certain intensity and hardness, the present invention preferably 4～
5mm.
（5）The arc-shaped metal level 7 of several electroformed deposit is spliced into circular ring metal layer, as shown in Figure 8；Using gold
Seam 8 between category plate connecting process connection adjacent metal, forms a seamless, complete circular ring metal layer 9, such as Fig. 9
Shown.
Preferably, the number of the arc-shaped metal level 7 of electroformed deposit is determined by its central angle, and it is N number of, the present invention is preferred
For 3, a circular ring metal layer can be constituted.
Preferably, the connecting process of the seam 8 between adjacent circular arc shape metal level 7 can be entered using metallic plate connecting process
Row is processed, such as electric resistance welding, Laser Welding, gas welding or soldering.
（6）Circular ring metal layer 9 is assemblied on a metal cylinder 10, keeps the metal cylinder of annulus metal and center
Gap uniformity between 10, as shown in Figure 10, the cast of liquid macroimolecule material 11 is filled in circular ring metal layer 9 and metal cylinder
In gap between 10, repair after solidification, make formwork for cylindrical columns.
Preferably, described macromolecular material 11 is the macromolecular material with certain elasticity and viscosity, such as acrylic acid
Ester rubber and epoxide-resin glue.
Preferably, described metal cylinder 10 is the material with some strength and corrosion resistance, such as rustless steel.
Claims (9)
1. a kind of manufacture method of formwork for cylindrical columns, it is characterised in that comprise the following steps：（1）A smooth substrate is taken, in the base
Micro structure is processed on plate, make plane template 1；（2）Good in 1 upper Adhesion Resistance of plane template using normal temperature molding technique
Good material 2, turns over and makes flexible mother matrix 3；（3）The bending of flexible mother matrix 3 is fixed on 4 inner surface of a cylinder, is formed and have one
Determine the cylindrical pliable mother matrix 5 of radian, conductive processing is carried out to 5 surface of cylindrical pliable mother matrix；（4）Soft with conductive cylinder
Sexupara version 5 is negative electrode, electroforming in galvanic deposition cell 6, after certain time, peels off 5 surface electroformed deposit of cylindrical pliable mother matrix
Arc-shaped metal level 7；（5）The arc-shaped metal level 7 of several electroformed deposit is stitched together, forms circular ring metal layer 9；Adopt
With the seam 8 between metallic plate connecting process connection adjacent metal, a seamless, complete circular ring metal layer 9 is formed；
（6）Circular ring metal layer 9 is assemblied on a metal cylinder 10, keeps the metal cylinder 10 of circular ring metal layer 9 and center
Between gap uniformity, liquid macroimolecule material 11 is poured into a mould and is filled in gap between circular ring metal layer 9 and metal cylinder 10
In, repair after solidification, make formwork for cylindrical columns.
2. a kind of manufacture method of formwork for cylindrical columns according to claim 1, it is characterised in that step（2）Described is anti-stick
The good material 2 of attached property is using PDMS or politef.
3. a kind of manufacture method of formwork for cylindrical columns according to claim 1, it is characterised in that step（3）Described surface
Conductive processing can be realized using conductive film technique is prepared, such as chemical plating, evaporation, magnetron sputtering plating or spraying copper oil, graphite
Technique.
4. a kind of manufacture method of formwork for cylindrical columns according to claim 1, it is characterised in that step（4）Electroformed deposit
Arc-shaped metal level 7 is with certain radian, and central angle is 360/N.
5. a kind of manufacture method of formwork for cylindrical columns according to claim 1, it is characterised in that step（4）Described circular arc
7 number of shape metal level is determined by its central angle, is N number of, can collectively constitute a circular ring metal layer.
6. a kind of manufacture method of formwork for cylindrical columns according to claim 1, it is characterised in that step（4）Described in
The thickness of arc-shaped metal level 7 is the metallic film of 4～5mm.
7. a kind of manufacture method of formwork for cylindrical columns according to claim 1, it is characterised in that step（5）Described is adjacent
The connecting process of the seam 8 between arc-shaped metal level 7 can be processed using metallic plate connecting process, such as electric resistance welding, laser
Weldering, gas welding or soldering.
8. a kind of manufacture method of formwork for cylindrical columns according to claim 1, it is characterised in that step（6）Described liquid
Macromolecular material is acrylate rubber or epoxide-resin glue.
9. a kind of manufacture method of formwork for cylindrical columns according to claim 1, it is characterised in that step（6）Described metal
Cylinder 10 is the material with some strength and corrosion resistance, such as rustless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610896868.3A CN106430081A (en) | 2016-10-14 | 2016-10-14 | Method for manufacturing cylindrical mould |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610896868.3A CN106430081A (en) | 2016-10-14 | 2016-10-14 | Method for manufacturing cylindrical mould |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106430081A true CN106430081A (en) | 2017-02-22 |
Family
ID=58174864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610896868.3A Pending CN106430081A (en) | 2016-10-14 | 2016-10-14 | Method for manufacturing cylindrical mould |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106430081A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110676195A (en) * | 2019-09-10 | 2020-01-10 | 博宇（天津）半导体材料有限公司 | Heater preparation mold and heater preparation method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0481753A2 (en) * | 1990-10-19 | 1992-04-22 | Canon Kabushiki Kaisha | Molding roll, method for manufacturing it, and apparatus for forming substrate sheet for optical recording medium |
| CN101671837A (en) * | 2008-09-08 | 2010-03-17 | 索尼株式会社 | Die manufacturing method, functional film manufacturing method and functional film |
| CN102758226A (en) * | 2012-07-17 | 2012-10-31 | 西安交通大学 | Accurate electroplating machining method for long-grating roller stamping mould for machine tool |
| CN103052491A (en) * | 2011-03-30 | 2013-04-17 | 绿点高新科技股份有限公司 | Molding tool with a three dimensional surface relief pattern and method of making the same |
| CN105051259A (en) * | 2013-03-28 | 2015-11-11 | 富士胶片株式会社 | Manufacturing method for metal component, and casting mold and mold release film used for same |
-
2016
- 2016-10-14 CN CN201610896868.3A patent/CN106430081A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0481753A2 (en) * | 1990-10-19 | 1992-04-22 | Canon Kabushiki Kaisha | Molding roll, method for manufacturing it, and apparatus for forming substrate sheet for optical recording medium |
| CN101671837A (en) * | 2008-09-08 | 2010-03-17 | 索尼株式会社 | Die manufacturing method, functional film manufacturing method and functional film |
| CN103052491A (en) * | 2011-03-30 | 2013-04-17 | 绿点高新科技股份有限公司 | Molding tool with a three dimensional surface relief pattern and method of making the same |
| CN102758226A (en) * | 2012-07-17 | 2012-10-31 | 西安交通大学 | Accurate electroplating machining method for long-grating roller stamping mould for machine tool |
| CN105051259A (en) * | 2013-03-28 | 2015-11-11 | 富士胶片株式会社 | Manufacturing method for metal component, and casting mold and mold release film used for same |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110676195A (en) * | 2019-09-10 | 2020-01-10 | 博宇（天津）半导体材料有限公司 | Heater preparation mold and heater preparation method |
| CN110676195B (en) * | 2019-09-10 | 2020-11-06 | 博宇（天津）半导体材料有限公司 | Heater preparation mold and heater preparation method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4104964B2 (en) | MASK FOR FORMING THIN FILM PATTERN OF LAMINATED STRUCTURE COMPRISING PATTERNED MASK COATING AND SUPPORT AND METHOD FOR PRODUCING THE SAME | |
| KR100431676B1 (en) | Microstructure array, and methods of fabricating a microstructure array, a mold for forming a microstructure array, and a microlens array | |
| JP3554228B2 (en) | Microlens mold or mold master, and method for producing them | |
| JP2002122707A (en) | Aspheric microstructure and method for manufacturing the same | |
| US20040031404A1 (en) | Seamless embossing shim | |
| CN101403125B (en) | Metal master mold for electroforming and use thereof | |
| CN106430081A (en) | Method for manufacturing cylindrical mould | |
| CN102480001B (en) | Preparation method of metamaterial | |
| KR101365211B1 (en) | Method for copy mold manufacture | |
| CN105858591A (en) | Metal micro-structure and manufacturing method thereof | |
| KR102010001B1 (en) | Electroforming mother plate used in manufacturing oled picture element forming mask | |
| US8510951B2 (en) | Method for producing a lens pattern on roll | |
| KR20130027613A (en) | Film with metal fine pattern and manufacturing method therefor | |
| CN104816410A (en) | Lens die, making method thereof, and lens substrate making method | |
| CN113766727B (en) | Flexible circuit board and manufacturing method thereof | |
| CN103203984B (en) | A kind of printing Three-dimensional mask plate | |
| JP2006052448A (en) | Patterned metal sheet and preparing method therefor | |
| CN111621816A (en) | Method for manufacturing metal micro-column array with ultrahigh depth-to-width ratio | |
| CN1503010A (en) | Method for making light guiding board | |
| TW201421150A (en) | High strength precision metal mask and its fabrication method | |
| CN109097727A (en) | Mask plate and preparation method thereof and display device | |
| JPH0627302A (en) | Matrix for optical element and its production | |
| US20050037290A1 (en) | Method for manufacturing light guide plate stamper | |
| KR101651593B1 (en) | An Electroforming Master and Manufacturing Method thereof | |
| US20110156295A1 (en) | Embossing assembly, manufacturing method thereof, and embossing method using the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170222 |