CN106424771B - A kind of micro- main shaft of Fine Machinery processing - Google Patents

A kind of micro- main shaft of Fine Machinery processing Download PDF

Info

Publication number
CN106424771B
CN106424771B CN201611082459.6A CN201611082459A CN106424771B CN 106424771 B CN106424771 B CN 106424771B CN 201611082459 A CN201611082459 A CN 201611082459A CN 106424771 B CN106424771 B CN 106424771B
Authority
CN
China
Prior art keywords
rear end
micro
bearing
air
pressurized air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201611082459.6A
Other languages
Chinese (zh)
Other versions
CN106424771A (en
Inventor
李伟
任莹晖
周文理
周志雄
肖航
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hunan University
Original Assignee
Hunan University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hunan University filed Critical Hunan University
Priority to CN201611082459.6A priority Critical patent/CN106424771B/en
Publication of CN106424771A publication Critical patent/CN106424771A/en
Application granted granted Critical
Publication of CN106424771B publication Critical patent/CN106424771B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/70Stationary or movable members for carrying working-spindles for attachment of tools or work

Abstract

The invention discloses a kind of micro- main shaft of Fine Machinery processing, turbine 19 is arranged among spindle rotor 16, the high velocity air provided by turbine nozzle 18 drives, spindle rotor 16 uses front end Porous pressurized air journal bearing 13, the radial support of rear end Porous pressurized air journal bearing 4, the rear end of spindle rotor 16 is provided with baffle plate 21, using front end Porous pressurized air thrust bearing 3, the axially supporting of rear end Porous pressurized air thrust bearing 2, rear end bearing supporting member 20, turbine nozzle 18, front end bearing support 17 is sequentially arranged in casing 1, and fixed by installing plate 11, micro- cutter 15 is clamped in the front end of spindle rotor 16 by effect of expanding with heat and contract with cold.It is reasonable in design, the simple in construction, small volume of the present invention, easily manufactured, and rotating speed is high, runout error is small, can be used as micro- main shaft of microcomputer bed for Fine Machinery processing, it can also be used to micro- main shaft of other high speed and super precision micro-electromechanical devices or hand tool etc..

Description

A kind of micro- main shaft of Fine Machinery processing
Technical field
The present invention relates to a kind of main shaft, more particularly to a kind of Fine Machinery processing ultrahigh speed precise pneumatic micro spindle, Belong to machine-building equipment field.
Background technology
The miniaturization of part and the high precision int of size propose higher and higher requirement to its process equipment.Micro- main shaft is made For the critical component of microcomputer bed, the Fine Machinery process technology such as the performance of microcomputer bed and the fine grinding of micro-cutting is directly determined Development and application.Existing micro- main shaft is divided into two kinds of micro- electro spindle and micro- pneumatic main shaft, is primarily present following three aspects problem: First, complicated, volume is largerLimit the miniaturization of microcomputer bed.Meet that microcomputer bed will Ask,Draw ratio is not more than 3:1;Second, the loss of motor is sent out in by micro- electro spindle With the frictional heating using rolling bearing or using hole throttle type hydrostatic gas-lubricated bearing rigidity is low etc., problem influences heat, turns Speed is relatively low (mostly<Below 200000r/min), Fine Machinery processing efficiency and crudy are not only have impact on, and exacerbate micro- The abrasion of cutter and more slip velocity degree.The fine grinding of micro-cutting with the external diameter of micro- cutter typically several microns to hundreds of microns it Between, the rotating speed that the micro-cutting speed recommended according to material property can be derived from micro- main shaft should exceed 500000r/min;Three It is that existing micro- main shaft can be directly delivered to cutter using the micro- cutter of collet clamping, the manufacture alignment error of collet etc. On, the runout error of cutter is significantly increased.Runout error during such as micro- main shaft ultrahigh speed rotation greatly exceed micro- up to 10 μm The Fine Machinery processing thickness of meter level.Therefore actual Fine Machinery processing in order to avoid micro- main shaft big runout error often Micro- speed of mainshaft can be limited.
If only weighed from volume size, micro- main shaft is simply than conventional master spindle small volume.But in fact, with volume Significantly reduce, the continuous improvement of rotating speed, its thermal deformation, rigidity, frequency, amplitude etc. has very big difference with conventional master spindle.For This, it is necessary to start with from innovation structure design, develop the micro- main shaft of ultra-speed precise for Fine Machinery processing.And micro- electro spindle It is complicated, and limited by radiating condition, rotating speed is relatively low;Main shaft is declined due to gas using the air floatation turbine of air stream drives and supporting The friction factor of body is low, temperature rise is small, flow velocity is high, can reach very high rotating speed, theoretically disclosure satisfy that high speed micro-cutting Processing request.Inventor herein has designed two new ultrahigh speed precise pneumatic micro spindles (see patent: ZL201010116981.8, ZL201310157777.4), but volume is larger, rotating speed can't fully meet requirement.Therefore, Design the new micro- main shaft for being used for Fine Machinery processing, its external structure<Diameter 30mm × long 60mm, maximum speed exceed 400000r/min。
The content of the invention
The technical problems to be solved by the invention are to provide a kind of rotating speed height, runout error is small and simple and compact for structure, makes Make conveniently, the micro- main shaft of ultra-speed precise for Fine Machinery processing such as minuteness milling, fine drilling, fine grindings.
In order to solve the above problems, the micro- main shaft of Fine Machinery provided by the invention processing, including casing, equal pressing plate, after End bearing supporting member, turbine nozzle, front end bearing support, spindle rotor, micro- cutter and installing plate, the turbine is directly in institute To state and be process among spindle rotor, the blade on the turbine is regular cylindrical face shape, and the aperture on face turbine nozzle, The turbine nozzle is provided with two circle apertures and rotated at a high speed to provide high velocity air drive shaft rotor, the spindle rotor Front end Porous pressurized air journal bearing, rear end Porous pressurized air journal bearing radial support is respectively adopted in front and back ends Installation, the spindle rotor rear end are provided with baffle plate, and front end Porous pressurized air thrust is respectively adopted in the baffle plate front and back ends The axially supporting installation of bearing, rear end Porous pressurized air thrust bearing, the spindle rotor rear end is additionally provided with rear end bearing To discharge air-flow, the front end Porous pressurized air journal bearing is arranged in the bearing support of front end exhaust duct, described Front end bearing support is circumferentially evenly equipped with 4 front end air-flow air intake ducts, the rear end Porous pressurized air journal bearing and institute " L " shape that front end Porous pressurized air thrust bearing is formed integrally is stated, and in rear end bearing supporting member, the rear end Bearing support is circumferentially evenly equipped with 4 rear end air-flow air intake ducts, and the rear end Porous pressurized air thrust bearing is by pressing Plate provides air-flow, and pressing plate, the rear end Porous pressurized air thrust bearing are sequentially arranged at box back, the rear axle Hold supporting member, turbine nozzle, front end bearing support to be sequentially arranged in casing, and be fixedly mounted by installing plate, screw, institute State casing and be provided with rear end Porous pressurized air thrust bearing air supply opening and corresponding thrust bearing air intake duct, thrust bearing row Air flue, thrust bearing exhaust outlet, rear end Porous hydrostatic gas-lubricated bearing air supply opening, turbine rear end exhaust outlet, nozzle air supply opening, whirlpool Front end exhaust outlet is taken turns, front end Porous pressurized air journal bearing air supply opening, is provided with axle at the axis of the spindle rotor front end Xiang Kong, micro- cutter or other microactuators such as micro- milling cutter, micro drill, micro- frotton are clamped by effect of expanding with heat and contract with cold, and axially Hole depth is more than micro- knife handle length, so as to can adjust micro- cutter cantilevered length.
The turbine nozzle is not limited to set two circle apertures, can set single-turn or multi-turn according to output speed, torque request Aperture.
The front end bearing support is not limited to uniform 4 front ends air-flow air intake duct, and the rear end bearing supporting member is unlimited In uniform 4 rear ends air-flow air intake duct, the pressing plate is also not necessarily limited to uniform 4 balancing orifices, can be uniformly arranged it as needed The air intake duct or balancing orifice of its quantity.
Using the micro- main shaft of Fine Machinery processing of above-mentioned technical proposal, the high velocity air provided by turbine nozzle impacts whirlpool Wheel drive spindle rotor rotates at a high speed, realizes micro- main shaft ultrahigh rotating speed performance;It is quiet that Porous is respectively adopted in spindle rotor front and back ends Gas lubricated journal bearing supporting positioning is pressed, spindle rotor rear end is provided with baffle plate, and Porous static pressure gas is respectively adopted in baffle plate front and back ends The supporting positioning of body thrust bearing, realize the ultra-precise revolving of micro- main shaft;Axial hole is provided with the axis of spindle rotor front end, is passed through Effect of expanding with heat and contract with cold clamps micro- cutter.
Using the Fine Machinery processing of above-mentioned technical proposal with micro- main shaft, its advantage and good effect compared with prior art It is significant, major embodiment is in the following areas:
1. the nozzle arrangements of liang circle or multi-turn aperture.In the pneumatic microturbines of impact type, in order to obtain ultrahigh rotating speed, nozzle In orifice size it is typically small.But orifice size is smaller, its impact forces is with regard to smaller.It is if small using conventional individual pen Hole arrangement, limited by micro- main axle structure size, its limited amount, thus cause torque caused by microturbines and power compared with It is small, it is difficult to meet Fine Machinery processing request.And set up two circles or multi-turn aperture the week of face turbo blade in nozzle, Can be multiplied nozzle orifice quantity, can not only realize the ultrahigh rotating speed performance of pneumatic microturbines, and can effectively lift its turn Square and power.
2. the integral structure of spindle rotor and turbine.After supporting rotor and turbine are much processing in existing rotating machinery It is assembled together, the manufacture installation equal error of turbine can be directly delivered on supporting rotor, exacerbate the imbalance of rotor.Especially It is the micro- main shaft of ultra-speed precise, the amount of unbalance of very little is possible to cause very big runout error under macro-scale.It is and existing Dynamic balancing technique can not also solve the dynamic balance calibration that grade rotor hundreds of thousands turns, therefore machining accuracy can only be relied on to protect Card.And spindle rotor is formed integrally by the technical program with turbine, the alignment error of turbine, and the leaf on turbine not only avoid Piece is regular cylindrical face shape, and machining accuracy easily ensures, therefore balance quality is good, so as to be advantageous to micro- speed of mainshaft and rotating accuracy Raising.
3. microminiature Porous hydrostatic gas-lubricated bearing supporting structure.The micro- main shaft of ultra-speed precise is by physical dimension and small zero Part processing conditions limits, and is mainly supported at present using rolling bearing and hole throttle type hydrostatic gas-lubricated bearing.Rolling bearing is at a high speed Temperature rise during operation is higher, need to set cooling system, and this just makes micro- main axle structure complicated.Hole throttle type hydrostatic gas-lubricated bearing is held Carry that small, rigidity is low, cause the bounce of main shaft constantly to aggravate with the raising of rotating speed.The technical program uses microminiature Porous Hydrostatic gas-lubricated bearing supports, and not only avoid problem of temperature rise, and bearing capacity and stiffness is all lifted, and ensure that micro- main shaft superelevation High rotating accuracy under rotating speed.
4. the method for clamping that expands with heat and contract with cold of micro- cutter.Existing micro- main shaft clamps micro- cutter, bullet frequently with small collet The manufacture alignment error of spring chuck can be not only directly delivered on micro- cutter, cause the runout error of micro- cutter to increase, and The amount of unbalance of spindle rotor is increased, influences the rotating speed of micro- main shaft.And the technical program is set at the axis of spindle rotor front end Axial hole is equipped with, micro- cutter is clamped by effect of expanding with heat and contract with cold, i.e., the clamping of cutter and replacing are realized by the change of temperature It is required that with the amount of unbalance that this is avoided the manufacture alignment error of collet and its brought into, so as to be advantageous to micro- main shaft gyration essence The raising of degree and its rotating speed.
5. micro- cutter cantilevered length adjustable structure.Axial hole depth at the axis of spindle rotor front end is more than micro- cutter knife Handle length, not only micro- cutter cantilevered length can be adjusted according to processing request, to meet the processing request in larger size range, more It is important that before and after the baffle plate coordination guarantee spindle rotor that can be set by adjusting micro- cutter cantilevered length with spindle rotor rear end Mass balance is held, reduces the runout error of spindle rotor.
6. spindle rotor is simple in construction and symmetrical.Turbo blade on spindle rotor is the regular cylindrical of even number, The axial hole that the baffle plate and front end that spindle rotor rear end is set are set all is cylinder or columnar structured, it is seen that whole spindle rotor Structure is very simple and symmetrical, and machining accuracy is easily guaranteed that, that is to say, that easily ensures spindle rotor by fabricating precision Amount of unbalance, so as to be advantageously implemented the ultrahigh rotating speed of micro- main shaft and low runout error performance.
In summary, the present invention reasonable, simple in construction, small volume novel in design (<Diameter 30mm × long 45mm), manufacturer Just, the product requirement of the marketization is met, and rotating speed is high, runout error is small, particularly suitable for the fine of ultraprecise micro parts Milling, fine drilling, it is fine grinding etc. Fine Machinery processing, can as microcomputer bed micro- main shaft and it is other make high speed and ultrahigh speed, The electromechanical equipment of high-precision rotary motion or micro- main shaft of hand tool.
Brief description of the drawings
Fig. 1 is the main sectional view of the embodiment of the present invention.
Fig. 2 is Fig. 1 of the present invention A-A sectional views (i.e. the equal pressure passageway of rear end Porous pressurized air thrust bearing air inlet).
Fig. 3 is Fig. 1 of the present invention B-B sectional views (i.e. Porous pressurized air thrust bearing exhaust passage).
Fig. 4 is Fig. 1 of the present invention C-C sectional views (i.e. rear end Porous pressurized air journal bearing inlet channel).
Fig. 5 is Fig. 1 of the present invention D-D sectional views (i.e. turbine rear end exhaust passage).
Fig. 6 is Fig. 1 of the present invention E-E sectional views (i.e. turbine inflow passages).
Fig. 7 is Fig. 1 of the present invention F-F sectional views (i.e. turbine front end exhaust passage).
Fig. 8 is Fig. 1 of the present invention G-G sectional views (i.e. spindle rotor rear end bearing exhaust duct)
In accompanying drawing 1-8:1-casing, 2-rear end Porous pressurized air thrust bearing, 3-front end Porous pressurized air Thrust bearing, 4-rear end Porous pressurized air journal bearing, 5-rear end air-flow air intake duct, 6-rear end Porous static pressure gas Body bearing air supply opening, 7-aperture, 8-nozzle air supply opening, 9-front end Porous pressurized air journal bearing air supply opening, 10-preceding End air-flow air intake duct, 11-installing plate, 12-screw, 13-front end Porous pressurized air journal bearing, 14-axial hole, 15-micro- cutter, 16-spindle rotor, 17-front end bearing support, 18-turbine nozzle, 19-turbine, 20-rear end bearing Supporting member, 21-baffle plate, 22-rear end Porous pressurized air thrust bearing air supply opening, 23-thrust bearing exhaust outlet, 24- Turbine rear end exhaust outlet, 25-turbine rear end exhaust duct, 26-turbine front end exhaust outlet, 27-turbine front end exhaust duct, 28- Thrust bearing air intake duct, 29-blade, 30-equal pressing plate, 31-balancing orifice, 32-thrust bearing exhaust duct, 33-rear end bearing Exhaust duct.
Embodiment
The present invention is elaborated with reference to embodiment and accompanying drawing.
Referring to accompanying drawing 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, Fig. 6, Fig. 7 and Fig. 8, the turbine 19 is directly in the spindle rotor 16 Centre is process, i.e., turbine 19 is formed integrally with spindle rotor 16, avoids the alignment error of turbine 16, on the turbine 19 Blade 29 be regular cylindrical face shape, and the aperture 7 on face turbine nozzle 18, the turbine nozzle 18 are provided with two circle apertures 7 are rotated at a high speed to provide high velocity air drive shaft rotor 16, i.e., the ultrahigh speed for realizing micro- main shaft using pneumatic microturbines is returned Turn, front end Porous pressurized air journal bearing 13, rear end Porous static pressure gas is respectively adopted in the front and back ends of spindle rotor 16 The radial support of body journal bearing 4, the rear end of spindle rotor 16 are provided with baffle plate 21, and the front and back ends of baffle plate 21 are respectively adopted Front end Porous pressurized air thrust bearing 3, rear end Porous pressurized air thrust bearing 2 axially supporting, i.e., using Porous Hydrostatic gas-lubricated bearing realizes the ultra-precise revolving of micro- main shaft, and the rear end of spindle rotor 16 is additionally provided with rear end bearing exhaust duct 33 To discharge air-flow, the front end Porous pressurized air journal bearing 13 is arranged in front end bearing support 17, before described End bearing supporting member 17 is circumferential to be evenly equipped with 4 front end air-flow air intake ducts 10, the rear end Porous pressurized air journal bearing 4 with " L " shape that the front end Porous pressurized air thrust bearing 3 is formed integrally, and in rear end bearing supporting member 20, institute State rear end bearing supporting member 20 and be circumferentially evenly equipped with 4 rear end air-flow air intake ducts 5, the rear end Porous pressurized air thrust bearing 2 provide air-flow by equal pressing plate 30, and pressing plate 30, the rear end Porous pressurized air thrust bearing 2 are sequentially arranged at casing 1 Rear end, the rear end bearing supporting member 20, turbine nozzle 18, front end bearing support 17 are sequentially arranged in casing 1, and passed through Installing plate 11, screw 12 are fixedly mounted, it is seen that entirely the number of parts of micro- main shaft is few, simple in construction, processing cost is low, is advantageous to Product the marketization requirement, the casing 1 be provided with rear end Porous pressurized air thrust bearing air supply opening 22 and it is corresponding only Thrust bearing air intake duct 28, thrust bearing exhaust duct 32, thrust bearing exhaust outlet 23, rear end Porous hydrostatic gas-lubricated bearing air supply opening 6th, turbine rear end exhaust outlet 24, nozzle air supply opening 8, turbine front end exhaust outlet 26, front end Porous pressurized air journal bearing supply Gas port 9, axial hole 14 is provided with the front end axis of spindle rotor 16, pass through effect of expanding with heat and contract with cold and clamp micro- milling cutter, micro- brill Micro- cutter 15 or other microactuators such as head, micro- frotton, avoid the manufacture alignment error using collet, and axial hole 14 depth are more than micro- shank length of cutter 15, so as to can adjust micro- cantilevered length of cutter 15, can not only realize larger size range Fine Machinery processing, it is often more important that can with the rear end of spindle rotor 16 set baffle plate 21 coordinate ensure spindle rotor 16 before and after Mass balance is held, reduces the runout error of spindle rotor 16, lifts the rotating accuracy of micro- cutter 15.
Referring to accompanying drawing 1 and Fig. 6, the turbine nozzle 18 is not limited to set two circle apertures 7, and more the aperture of small size is certain Scope interior energy provides the air-flow of more speed, but active force is small, thus can be set according to output speed, torque request individual pen or Multi-turn aperture 7, i.e., while 19 ultrahigh rotating speed of turbine is realized, also to ensure output torque, to meet that Fine Machinery processing will Ask.
Referring to accompanying drawing 1 and Fig. 4, the front end bearing support 17 is not limited to uniform 4 front ends air-flow air intake duct 10, described Rear end bearing supporting member 20 is also not necessarily limited to uniform 4 rear ends air-flow air intake duct 5, and the pressing plate 30 is also not necessarily limited to uniform 4 Hole 31 is pressed, the air intake duct or balancing orifice of other quantity can be arranged as required to, but need to circumferentially be uniformly arranged, it is therefore an objective to reduce superelevation Influence of the fast airflow asymmetry impact to porous bearings deformation, and then ensure the high rotating accuracy of spindle rotor.
The operation principle of the present invention is briefly described as below:Source of the gas enters in turbine nozzle 18 through two nozzle air supply openings 8, is passed through after Aperture 7 forms ultrahigh speed air-flow, the blade 29 acted on turbine 19, promotes spindle rotor 16 to rotate, the air-flow thereafter let out A part is through turbine front end exhaust duct 27, turbine front end exhaust outlet 26, and another part is through turbine rear end exhaust duct 25, turbine rear end Exhaust outlet 24 is discharged, so as to realize the ultrahigh speed rotation performance of micro- main shaft;The radial support of the front end of spindle rotor 16 is in source of the gas Enter through front end Porous pressurized air journal bearing air supply opening 9 in front end bearing support 17, then through front end air-flow air inlet Road 10 is flowed into front end Porous pressurized air journal bearing 13, passes through the rear portion air-flow of hydrostatic pressure supporting spindle rotor 16 It is expelled directly out, another part air-flow is discharged through turbine front end exhaust duct 27, turbine front end exhaust outlet 26, the rear end of spindle rotor 16 Radial support is to enter in source of the gas through rear end Porous hydrostatic gas-lubricated bearing air supply opening 6 in rear end bearing supporting member 20, is passed through after Rear end air-flow air intake duct 5 enters in rear end Porous pressurized air journal bearing 4, after hydrostatic pressure supporting spindle rotor 16 A part of air-flow is discharged through turbine rear end exhaust duct 25, turbine rear end exhaust outlet 24, and another part air-flow is vented through rear end bearing Road 33, thrust bearing exhaust duct 32 are discharged, so as to realize the radial support positioning to spindle rotor 16;The axial direction of spindle rotor 16 Supporting is realized by the baffle plate 21 of setting, specifically can enter gear into a part of air-flow in rear end bearing supporting member 20 In the front end Porous pressurized air thrust bearing 3 of plate 21, pass through the rear portion of baffle plate 21 of hydrostatic pressure supporting spindle rotor 16 Flowed out through thrust bearing exhaust outlet 23, another part is discharged through rear end bearing exhaust duct 33, thrust bearing exhaust duct 32, baffle plate 21 The supporting of rear end is pressed from rear end Porous pressurized air thrust bearing air supply opening 22, thrust bearing air intake duct 28 in source of the gas After balancing orifice 31 on plate 30, into rear end Porous pressurized air thrust bearing 2, pass through hydrostatic pressure supporting spindle rotor After 16 baffle plate 21, a part of air-flow is discharged through thrust bearing exhaust outlet 23, and another part air-flow is through thrust bearing exhaust duct 32 Discharge, so as to realize the axial direction supporting positioning to spindle rotor 16, supported using Porous hydrostatic gas-lubricated bearing, not only can be effective Reduce using frictional power loss during rolling bearing supporting, and compare hole throttle type hydrostatic gas-lubricated bearing, bearing capacity is more It is high, rigidity is bigger, therefore big runout error when can effectively solve the problems, such as micro- main shaft ultrahigh speed rotation;Micro- cutter 15 passes through heat expansion Shrinkage effect is clamped in the axial hole 14 of spindle rotor 16, avoids the manufacture alignment error using collet, Er Qieyou It is more than the length of micro- handle of a knife of cutter 15 in the depth of axial hole 14, therefore can adjust the cantilevered length of micro- cutter 15, so not only The processing request in larger size range can be met, it is often more important that the baffle plate 21 that can be set with the rear end of spindle rotor 16 coordinates reality The fine balance requirement of the existing front and back end of spindle rotor 16, it is very beneficial for the realization of micro- main shaft ultra-precise revolving requirement.

Claims (3)

1. a kind of Fine Machinery processing micro- main shaft, including casing (1), equal pressing plate (30), rear end bearing supporting member (20), turbine Nozzle (18), front end bearing support (17), spindle rotor (16), micro- cutter (15) and installing plate (11), it is characterized in that:It is described Turbine (19) is directly process among the spindle rotor (16), and the blade (29) on the turbine (19) is regular cylindrical Face shape, and the aperture (7) on face turbine nozzle (18), the turbine nozzle (18) are provided with two circle apertures (7) to provide High velocity air drive shaft rotor (16) rotates at a high speed, and it is quiet that front end Porous is respectively adopted in spindle rotor (16) front and back ends Press gas lubricated journal bearing (13), the installation of rear end Porous pressurized air journal bearing (4) radial support, the spindle rotor (16) Rear end is provided with baffle plate (21), baffle plate (21) front and back ends be respectively adopted front end Porous pressurized air thrust bearing (3), Rear end Porous pressurized air thrust bearing (2) axially supporting installation, spindle rotor (16) rear end is additionally provided with rear axle Exhaust duct (33) is held to discharge air-flow, the front end Porous pressurized air journal bearing (13) supports installed in preceding end bearing In part (17), the front end bearing support (17) is circumferentially evenly equipped with (4) individual front end air-flow air intake duct (10), and the rear end is porous " L " shape that matter pressurized air journal bearing (4) is formed integrally with the front end Porous pressurized air thrust bearing (3), and pacify In rear end bearing supporting member (20), the rear end bearing supporting member (20) is circumferentially evenly equipped with (4) individual rear end air-flow air intake duct (5), the rear end Porous pressurized air thrust bearing (2) by equal pressing plate (30) provide air-flow, it is described pressing plate (30), after End Porous pressurized air thrust bearing (2) is sequentially arranged at casing (1) rear end, the rear end bearing supporting member (20), turbine Nozzle (18), front end bearing support (17) are sequentially arranged in casing (1), and fixed by installing plate (11), screw (12) Installation, the casing (1) is provided with rear end Porous pressurized air thrust bearing air supply opening (22) and corresponding thrust bearing enters Air flue (28), thrust bearing exhaust duct (32), thrust bearing exhaust outlet (23), rear end Porous hydrostatic gas-lubricated bearing air supply opening (6), turbine rear end exhaust outlet (24), nozzle air supply opening (8), turbine front end exhaust outlet (26), front end Porous pressurized air footpath To bearing air supply opening (9), axial hole (14) is provided with the axis of spindle rotor (16) front end, effect is pressed from both sides by expanding with heat and contract with cold Micro- cutter (15) or other microactuators are held, and axial hole (14) depth is more than micro- cutter (15) shank length, so as to adjustable Save the cantilevered length of micro- cutter (15).
2. a kind of micro- main shaft of Fine Machinery processing according to claim 1, it is characterized in that:The turbine nozzle (18) is no It is limited to set two circle apertures (7), single-turn or multi-turn aperture (7) can be set according to output speed, torque request.
A kind of 3. micro- main shaft of Fine Machinery processing according to claim 2, it is characterized in that the front end bearing support (17) uniform 4 front ends air-flow air intake duct (10) is not limited to, the rear end bearing supporting member (20) is not limited to uniform 4 rear end gas Flow inlet port (5), the pressing plate (30) are also not necessarily limited to uniform 4 balancing orifices (31), can be uniformly arranged other numbers as needed The air intake duct or balancing orifice of amount.
CN201611082459.6A 2016-11-30 2016-11-30 A kind of micro- main shaft of Fine Machinery processing Active CN106424771B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201611082459.6A CN106424771B (en) 2016-11-30 2016-11-30 A kind of micro- main shaft of Fine Machinery processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201611082459.6A CN106424771B (en) 2016-11-30 2016-11-30 A kind of micro- main shaft of Fine Machinery processing

Publications (2)

Publication Number Publication Date
CN106424771A CN106424771A (en) 2017-02-22
CN106424771B true CN106424771B (en) 2018-03-13

Family

ID=58223220

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201611082459.6A Active CN106424771B (en) 2016-11-30 2016-11-30 A kind of micro- main shaft of Fine Machinery processing

Country Status (1)

Country Link
CN (1) CN106424771B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107322013A (en) * 2017-08-29 2017-11-07 孙嘉骏 The noncontact driven using air motor supports rotary main shaft device
CN108188417B (en) * 2018-02-06 2024-03-08 中国计量大学 Multiple throttling type static pressure air floatation motorized spindle and application method thereof
CN114542324A (en) * 2022-02-28 2022-05-27 北京盈天航空动力科技有限公司 Porous two-phase bearing of micro turbojet engine and rotor supporting structure thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2294801Y (en) * 1997-09-23 1998-10-21 史景璋 High-precision high-speed drilling-cutting pneumatic master shaft
CN2500430Y (en) * 2001-10-11 2002-07-17 蔡贵钧 High speed pneumatic main axle head
JP4667816B2 (en) * 2004-10-01 2011-04-13 Ntn株式会社 Air turbine spindle device
CN201618856U (en) * 2010-03-03 2010-11-03 湖南大学 Ultra-high-speed precise pneumatic micro-spindle
CN101774031B (en) * 2010-03-03 2011-11-30 湖南大学 Ultrahigh speed precise pneumatic micro spindle unit
CN103302316B (en) * 2013-04-28 2015-09-23 湖南大学 High speed and precision pneumatic micro spindle

Also Published As

Publication number Publication date
CN106424771A (en) 2017-02-22

Similar Documents

Publication Publication Date Title
CN106424771B (en) A kind of micro- main shaft of Fine Machinery processing
WO2020134433A1 (en) Centrifugal compressor and air conditioning apparatus
CN108869558A (en) A kind of control method of bearing, rotor-support-foundation system and bearing
CN102172877A (en) Grinding device for high-precision ultrathin wafer
US6412173B1 (en) Miniature turbomolecular pump
CN114909399A (en) Anti-overturning load large-bearing air-floating main shaft structure
CN207709894U (en) A kind of composite throttling formula static pressure air-bearing electro spindle
CN109812501A (en) The flexible support tilting bush squeeze film gas thrust bearing to be suspended based on near-field ultrasound
CN207873151U (en) A kind of multiple throttle type static pressure air-bearing electro spindle
CN109322917A (en) A kind of radial and axial protection structure of magnetic suspension bearing
CN211343737U (en) Axial thrust structure of rotating shaft
CN108941623A (en) A kind of composite throttling formula static pressure air-bearing electro spindle
CN209340198U (en) Bearing support assemblies and centrifugal compressor
CN103302316B (en) High speed and precision pneumatic micro spindle
Li et al. Development of a high-speed and precision micro-spindle for micro-cutting
CN110863910A (en) Long-span rotor system and gas turbine generator set
CN103121112A (en) Gas-self-supplying gas bearing supporting motorized spindle
CN108188417B (en) Multiple throttling type static pressure air floatation motorized spindle and application method thereof
JP2003074555A (en) Static pressure gas bearing
CN209195802U (en) Thrust bearing assembly, compressor and coolant circulating system
Thang et al. Simulation in design air spindle with orifice and distribution grooves
CN212217108U (en) Ultra-precise micro-machining air static pressure main shaft
Aurich et al. High-frequency tool-spindle for multifunctional, replaceable rotor-modules
JP2005342878A (en) Grinding wheel spindle using air bearing
CN109737088B (en) Eccentric compressor experimental device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant