CN101774031B - Ultrahigh speed precise pneumatic micro spindle unit - Google Patents

Ultrahigh speed precise pneumatic micro spindle unit Download PDF

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CN101774031B
CN101774031B CN2010101169818A CN201010116981A CN101774031B CN 101774031 B CN101774031 B CN 101774031B CN 2010101169818 A CN2010101169818 A CN 2010101169818A CN 201010116981 A CN201010116981 A CN 201010116981A CN 101774031 B CN101774031 B CN 101774031B
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gas bearing
shaft
main shaft
spindle unit
ultrahigh speed
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CN101774031A (en
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周志雄
李伟
林丞
任莹晖
周文理
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Hunan University
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Abstract

超高速精密气动微主轴单元,包括:主轴、涡轮、前端气体轴承、后端气体轴承、箱体、微型弹性联轴节、形状记忆合金夹套、执行轴、执行轴气体轴承,所述主轴上设有所述涡轮,并通过所述前端气体轴承、所述后端气体轴承支承安装在所述箱体的轴孔中;所述主轴前端设有轴向孔和微型弹性联轴节;所述执行轴通过所述执行轴气体轴承支承安装在所述箱体的轴孔中,其一端安装在所述主轴的轴向孔中;所述形状记忆合金夹套安装在所述主轴前端的外圆周上,将执行轴夹持在主轴上;本发明结构合理,制造工艺简单,转速高,跳动误差小,适于工业化生产,可作为微细切削加工机床的微主轴及其它作高速超高速、高精度回转运动机电设备或手动工具机微主轴单元。

Figure 201010116981

Ultra-high-speed precision pneumatic micro-spindle unit, including: main shaft, turbine, front-end gas bearing, rear-end gas bearing, box body, miniature elastic coupling, shape memory alloy jacket, execution shaft, execution shaft gas bearing, on the main shaft The turbine is provided, and is supported and installed in the shaft hole of the box body through the front end gas bearing and the rear end gas bearing; the front end of the main shaft is provided with an axial hole and a miniature elastic coupling; the The execution shaft is supported and installed in the shaft hole of the box through the gas bearing of the execution shaft, and one end of it is installed in the axial hole of the main shaft; the shape memory alloy jacket is installed on the outer circumference of the front end of the main shaft On the top, the execution shaft is clamped on the main shaft; the invention has reasonable structure, simple manufacturing process, high speed, small runout error, is suitable for industrial production, and can be used as a micro-spindle of a micro-cutting machine tool and other high-speed, ultra-high-speed, high-precision Rotary kinematic electromechanical devices or micro-spindle units for hand tool machines.

Figure 201010116981

Description

超高速精密气动微主轴单元Ultra-high-speed precision pneumatic micro-spindle unit

技术领域 technical field

本发明公开了一种超高速精密气动微主轴单元,属于机械制造技术领域。The invention discloses an ultra-high-speed precision pneumatic micro-spindle unit, which belongs to the technical field of mechanical manufacturing.

背景技术 Background technique

零件的小型化和尺寸的高精度化对其加工设备提出了越来越高的要求。而目前用于微型机床或手动工具机上的微电主轴的最高转速一般不超过300000rpm,且随着转速的提高,发热量不断增大,导致主轴变形,严重影响零件的加工质量。另外,现有的气动微主轴转速不高,承载能力弱,刚度低,跳动误差大,难以满足对微小型零件进行高速/超高速微铣、微钻、微磨等微细切削加工要求。The miniaturization of parts and the high precision of size have put forward higher and higher requirements for its processing equipment. At present, the maximum speed of the micro electric spindle used on the micro machine tool or manual machine tool is generally not more than 300,000rpm, and with the increase of the speed, the heat generation continues to increase, resulting in deformation of the spindle, which seriously affects the processing quality of the parts. In addition, the existing pneumatic micro-spindle has low speed, weak load capacity, low rigidity, and large runout error, which is difficult to meet the requirements of high-speed/ultra-high-speed micro-milling, micro-drilling, micro-grinding and other micro-cutting processing requirements for micro-small parts.

发明内容 Contents of the invention

本发明的目的在于克服现有之不足而提供一种结构合理、制造工艺简单、转速高、跳动误差小的超高速精密气动微主轴单元,以满足制造业对超高转速、低跳动误差微主轴的需求。The purpose of the present invention is to overcome the existing deficiencies and provide an ultra-high-speed precision pneumatic micro-spindle unit with reasonable structure, simple manufacturing process, high speed and small run-out error, so as to meet the requirements of the manufacturing industry for ultra-high-speed, low-run-out error micro-spindles. demand.

为实现上述目的,本发明采用如下技术方案:To achieve the above object, the present invention adopts the following technical solutions:

超高速精密气动微主轴单元,包括:主轴、涡轮、前端气体轴承、后端气体轴承、箱体、微型弹性联轴节、形状记忆合金夹套、执行轴、执行轴气体轴承,所述主轴前端通过所述前端气体轴承、后端通过所述后端气体轴承支承安装在所述箱体的轴孔中;在所述前端气体轴承与所述后端气体轴承之间设置有涡轮室,所述涡轮设置在所述主轴上并处于所述涡轮室中;所述前端气体轴承、所述后端气体轴承分别由至少一个静压气体径向轴承和一个静压气体止推轴承组成;所述主轴前端设有轴向孔和微型弹性联轴节;所述执行轴通过所述执行轴气体轴承支承安装在所述箱体的轴孔中,其一端安装在所述主轴前端设置的轴向孔中;所述形状记忆合金夹套安装在所述主轴前端的外圆周上,将所述执行轴夹持在所述主轴中;所述执行轴气体轴承由至少一个静压气体径向轴承组成。Ultra-high-speed precision pneumatic micro-spindle unit, including: main shaft, turbine, front-end gas bearing, rear-end gas bearing, box body, miniature elastic coupling, shape-memory alloy jacket, execution shaft, execution shaft gas bearing, the front end of the main shaft The front end gas bearing and the rear end are supported and installed in the shaft hole of the box body through the rear end gas bearing; a turbine chamber is arranged between the front end gas bearing and the rear end gas bearing, and the The turbine is arranged on the main shaft and in the turbine chamber; the front end gas bearing and the rear end gas bearing are respectively composed of at least one static pressure gas radial bearing and one static pressure gas thrust bearing; the main shaft The front end is provided with an axial hole and a miniature elastic coupling; the execution shaft is supported and installed in the shaft hole of the box through the gas bearing of the execution shaft, and one end is installed in the axial hole provided at the front end of the main shaft The shape memory alloy jacket is installed on the outer circumference of the front end of the main shaft to clamp the execution shaft in the main shaft; the gas bearing of the execution shaft is composed of at least one static pressure gas radial bearing.

本发明中,所述主轴与涡轮制为一体。In the present invention, the main shaft is integrated with the turbine.

本发明中,所述主轴后端面沿所述主轴轴线对称设有两个孔或槽。In the present invention, the rear end surface of the main shaft is symmetrically provided with two holes or grooves along the axis of the main shaft.

本发明中,所述箱体安装有后盖,所述后盖上安装有电涡流传感器,其安装位置与所述主轴后端面设置的孔或槽位置相对应。In the present invention, the box body is equipped with a rear cover, and the eddy current sensor is installed on the rear cover, and its installation position corresponds to the position of the hole or groove provided on the rear end surface of the main shaft.

本发明中,所述箱体上分别设有所述前端气体轴承、后端气体轴承、执行轴气体轴承的进气口及所述涡轮室的进气口。In the present invention, the air inlets of the front gas bearing, the rear air bearing, the air bearing of the execution shaft and the turbine chamber are respectively provided on the box body.

本发明中,所述箱体的后盖上设有所述涡轮室的排气槽。In the present invention, the exhaust groove of the turbine chamber is arranged on the rear cover of the box body.

本发明中,所述箱体上分别设有所述前端气体轴承、后端气体轴承、执行轴气体轴承的排气口。In the present invention, the air outlets of the front end gas bearing, the rear end gas bearing and the execution shaft gas bearing are respectively provided on the box body.

本发明中,所述主轴的一端安装有冒盖,所述冒盖与所述执行轴气体轴承之间形成一空腔,所述形状记忆合金夹套处于所述空腔中。In the present invention, a cap is installed at one end of the main shaft, a cavity is formed between the cap and the gas bearing of the execution shaft, and the shape memory alloy jacket is located in the cavity.

本发明中,所述执行轴与所述执行轴气体轴承之间安装有衬套。In the present invention, a bushing is installed between the execution shaft and the gas bearing of the execution shaft.

本发明中,所述微型弹性联轴节上设置有至少一组微切槽,所述一组微切槽由两对相互垂直的微切槽组成,所述每一对微切槽垂直于所述联轴节轴线并对称设置在所述联轴节上;所述联轴节中心设有轴向孔。In the present invention, at least one group of micro-cut grooves is arranged on the miniature elastic coupling, and the group of micro-cut grooves is composed of two pairs of mutually perpendicular micro-cut grooves, and each pair of micro-cut grooves is perpendicular to the The axis of the coupling is symmetrically arranged on the coupling; the center of the coupling is provided with an axial hole.

本发明由于采用上述结构,利用箱体上设置的涡轮室进气口、排气槽实现对涡轮主轴的高速驱动,转速高;利用静压气体径向轴承和静压气体止推轴承构成的轴承副分别于主轴前端、主轴后端对主轴进行支承定位,可以有效降低所述主轴高速转动时的摩擦损耗和跳动误差;利用涡轮主轴前端设置的微型弹性联轴节补偿涡轮主轴的制造误差、安装误差、跳动误差等,使涡轮主轴实现零误差传递转速和扭矩;利用静压气体径向轴承支承执行轴可以有效提高执行轴的回转精度,满足微主轴单元超高转速下高回转精度的要求;利用形状记忆合金将执行轴夹持在主轴中,并在执行轴气体轴承内安装衬套,可以方便地通过改变冒盖内的温度从而改变形状记忆合金夹套的松开和夹紧状态,便于对执行轴的安装、维修、更换;利用安装在后盖上的电涡流传感器与主轴后端面设置的两个孔或槽,实现对主轴转速的实时测量。Due to the adoption of the above-mentioned structure, the present invention utilizes the turbine chamber air inlet and the exhaust groove provided on the casing to realize the high-speed drive of the turbine main shaft, and the rotating speed is high; the bearing composed of the static pressure gas radial bearing and the static pressure gas thrust bearing is used The pair supports and positions the main shaft at the front end of the main shaft and the rear end of the main shaft, which can effectively reduce the friction loss and runout error of the main shaft when the main shaft rotates at high speed; the manufacturing error and installation error, runout error, etc., so that the turbine spindle can achieve zero error transmission speed and torque; the use of static pressure gas radial bearings to support the execution shaft can effectively improve the rotation accuracy of the execution shaft, and meet the high rotation accuracy requirements of the micro-spindle unit at ultra-high speed; The execution shaft is clamped in the main shaft by shape memory alloy, and the bushing is installed in the gas bearing of the execution shaft. It is convenient to change the loosening and clamping state of the shape memory alloy jacket by changing the temperature in the cap, which is convenient. The installation, maintenance and replacement of the execution shaft; the real-time measurement of the spindle speed is realized by using the eddy current sensor installed on the back cover and the two holes or slots on the rear end of the spindle.

综上所述,本发明结构合理,制造工艺简单,转速高,跳动误差小,安全可靠,如该执行轴为微型刀具,就特别适合于微小型零件的高速/超高速微铣、微钻、微磨等微细切削加工;适于工业化生产,可作为微细切削加工机床的微主轴及其它作高速超高速、高精度回转运动的机电设备或手动工具机的微主轴单元。In summary, the present invention has reasonable structure, simple manufacturing process, high rotating speed, small runout error, safety and reliability, and if the execution shaft is a micro-tool, it is especially suitable for high-speed/ultra-high-speed micro-milling, micro-drilling, micro-drilling, Micro-grinding and other micro-cutting processing; suitable for industrial production, it can be used as the micro-spindle of micro-cutting machine tools and other electromechanical equipment for high-speed ultra-high-speed, high-precision rotary motion or micro-spindle unit of manual tool machines.

附图说明 Description of drawings

附图1是本发明实施例的主剖视图。Accompanying drawing 1 is the main sectional view of the embodiment of the present invention.

附图2是图1的A-A剖视图。Accompanying drawing 2 is A-A sectional view of Fig. 1.

附图3为本发明中微型弹性连轴节结构示意图。Accompanying drawing 3 is the schematic diagram of the structure of the miniature elastic coupling in the present invention.

附图中:1--电涡流传感器,2--后盖,3--后端气体轴承,4--箱体,5--涡轮室,6--气体轴承进气口,7--前端气体轴承,8--前端轴向孔,9--帽盖,10--挡板,11--执行轴气体轴承衬套,12--执行轴,13--形状记忆合金夹套,14--执行轴气体轴承,15--横切槽,16--纵切槽,17联轴节轴向孔,18--涡轮,19--主轴,20--孔或槽,21--排气槽,22--涡轮室进气口,23--微型弹性联轴节。In the attached drawings: 1--eddy current sensor, 2--rear cover, 3--rear end gas bearing, 4--box, 5--turbine chamber, 6--air inlet of gas bearing, 7--front end Gas bearing, 8--front end axial hole, 9--cap, 10--baffle, 11--execution shaft gas bearing bushing, 12--execution shaft, 13--shape memory alloy jacket, 14- -Executive shaft gas bearing, 15--cross-cut groove, 16--longitudinal cut groove, 17-coupling axial hole, 18--turbine, 19--main shaft, 20--hole or groove, 21--exhaust Groove, 22---turbine chamber air inlet, 23---miniature elastic coupling.

具体实施方式 Detailed ways

下面结合实施例及附图对本发明作详细说明:Below in conjunction with embodiment and accompanying drawing, the present invention is described in detail:

参见附图1、2、3,本发明超高速精密气动微主轴单元,包括:Referring to accompanying drawings 1, 2, and 3, the ultra-high-speed precision pneumatic micro-spindle unit of the present invention includes:

1--电涡流传感器,2--后盖,3--后端气体轴承,4--箱体,5--涡轮室,6--气体轴承进气口,7--前端气体轴承,9--帽盖,10--挡板,11--执行轴气体轴承衬套,12--执行轴,13--形状记忆合金夹套,14--执行轴气体轴承,18--涡轮,19--主轴,20--孔或槽,21--排气槽,22--涡轮室进气口,23--微型弹性联轴节,所述主轴19后端面沿所述主轴19轴线对称设有两个孔或槽20;所述后盖2上安装有电涡流传感器1,其安装位置与所述主轴19后端面设置的两个孔或槽20位置相对应;所述箱体4上分别设有所述前端气体轴承7、后端气体轴承3、执行轴气体轴承14的进气口6及排气口;所述主轴19前端通过所述前端气体轴承7、后端通过所述后端气体轴承3支承安装在所述箱体4的轴孔中;所述箱体4安装有后盖2,用于安装电涡流传感器1;在所述前端气体轴承7与所述后端气体轴承3之间设置有所述涡轮室5,所述涡轮18设置在所述主轴19上并处于所述涡轮室5中;所述箱体4上设有所述涡轮室5的进气口22,在所述后盖2上设有所述涡轮室5的排气槽21;所述前端气体轴承7、所述后端气体轴承3分别由一个静压气体径向轴承和一个静压气体止推轴承组成;所述主轴19前端设有微型弹性联轴节23、轴向孔8;所述执行轴12通过所述执行轴气体轴承14安装在所述箱体4的轴孔中,其一端安装在所述主轴19前端设置的轴向孔8中,在所述执行轴12与所述执行轴气体轴承14之间安装有衬套11;所述形状记忆合金夹套13安装在所述主轴19前端的外圆周上,将所述执行轴12夹持在所述主轴19中;所述主轴19的一端安装有冒盖9,所述冒盖9与所述执行轴气体轴承12之间形成一空腔,所述形状记忆合金夹套13处于所述空腔中;所述执行轴气体轴承14由一个静压气体径向轴承组成。1--Eddy current sensor, 2--Back cover, 3--Rear end gas bearing, 4--Case body, 5--Turbine chamber, 6--Gas bearing air inlet, 7--Front end gas bearing, 9 --cap, 10--baffle, 11--execution shaft gas bearing bushing, 12--execution shaft, 13--shape memory alloy jacket, 14--execution shaft gas bearing, 18--turbine, 19 --main shaft, 20--hole or groove, 21--exhaust groove, 22--turbine chamber air inlet, 23--miniature elastic coupling, the rear end face of the main shaft 19 is arranged symmetrically along the axis of the main shaft 19 There are two holes or grooves 20; the eddy current sensor 1 is installed on the rear cover 2, and its installation position corresponds to the positions of the two holes or grooves 20 provided on the rear end surface of the main shaft 19; The front end gas bearing 7, the rear end gas bearing 3, the air inlet 6 and the exhaust port of the execution shaft gas bearing 14 are provided; the front end of the main shaft 19 passes through the front end gas bearing 7, and the rear end passes through the rear end The gas bearing 3 is supported and installed in the shaft hole of the box body 4; the box body 4 is equipped with a rear cover 2 for installing the eddy current sensor 1; between the front end gas bearing 7 and the rear end gas bearing 3 The turbine chamber 5 is arranged between, and the turbine 18 is arranged on the main shaft 19 and in the turbine chamber 5; the casing 4 is provided with the air inlet 22 of the turbine chamber 5, and The back cover 2 is provided with the exhaust groove 21 of the turbine chamber 5; the front end gas bearing 7 and the rear end gas bearing 3 are respectively composed of a static pressure gas radial bearing and a static pressure gas thrust bearing Composition; the front end of the main shaft 19 is provided with a miniature elastic coupling 23 and an axial hole 8; the execution shaft 12 is installed in the shaft hole of the box body 4 through the execution shaft gas bearing 14, and one end is installed in the In the axial hole 8 provided at the front end of the main shaft 19, a bushing 11 is installed between the execution shaft 12 and the gas bearing 14 of the execution shaft; the shape memory alloy jacket 13 is installed at the front end of the main shaft 19 On the outer circumference of the shaft, the execution shaft 12 is clamped in the main shaft 19; one end of the main shaft 19 is equipped with a cap 9, and a cavity is formed between the cap 9 and the gas bearing 12 of the execution shaft , the shape memory alloy jacket 13 is in the cavity; the execution shaft gas bearing 14 is composed of a static pressure gas radial bearing.

所述微型弹性联轴节23上设置有至少一组微切槽,所述一组微切槽由两对相互垂直的微切槽15、16组成,所述每一对微切槽15、16垂直于所述微型弹性联轴节23轴线并对称设置在所述微型弹性联轴节23上;所述微型弹性联轴节23中心设有轴向孔17。The micro-elastic coupling 23 is provided with at least one group of micro-cut grooves, and the group of micro-cut grooves is composed of two pairs of mutually perpendicular micro-cut grooves 15, 16, and each pair of micro-cut grooves 15, 16 It is perpendicular to the axis of the miniature elastic coupling 23 and arranged symmetrically on the miniature elastic coupling 23 ; the center of the miniature elastic coupling 23 is provided with an axial hole 17 .

本实施例中,所述主轴19与涡轮18制为一体。In this embodiment, the main shaft 19 and the turbine 18 are integrally made.

本发明的工作原理简述于下:气源经进气口6进入后端气体轴承3驱动主轴后端静压气体径向轴承及主轴后端静压气体止推轴承与主轴前端静压气体径向轴承及静压气体止推轴承对主轴进行支承定位,可以有效降低主轴高速转动时的摩擦损耗和跳动误差;气源经2个进气口22进入涡轮室5,推动涡轮主轴高速旋转,进而驱动主轴前端设置的中心轴向孔夹持的刀具,实现对工件的加工。本发明采用微型弹性联轴节,补偿涡轮主轴的制造误差、安装误差、跳动误差等,使涡轮主轴能够零误差地传递转速和扭矩;将执行轴采用气体轴承支承,回转精度高;采用形状记忆合金夹套夹持执行轴的末端,并在执行轴气体轴承内增加了衬套,实现了执行轴的可更换要求。The working principle of the present invention is briefly described as follows: the gas source enters the rear end gas bearing 3 through the air inlet 6 to drive the static pressure gas radial bearing at the rear end of the main shaft and the static pressure gas thrust bearing at the rear end of the main shaft and the static pressure gas diameter at the front end of the main shaft Bearings and static pressure gas thrust bearings support and locate the main shaft, which can effectively reduce the friction loss and runout error when the main shaft rotates at high speed; the air source enters the turbine chamber 5 through two air inlets 22, and drives the turbine main shaft to rotate at high speed, and then Drive the tool clamped by the central axial hole set at the front end of the spindle to realize the machining of the workpiece. The invention adopts miniature elastic couplings to compensate the manufacturing error, installation error and jump error of the turbine main shaft, so that the turbine main shaft can transmit the speed and torque with zero error; the execution shaft is supported by gas bearings, and the rotation accuracy is high; the shape memory is adopted The alloy jacket clamps the end of the execution shaft, and a bush is added in the gas bearing of the execution shaft to meet the replaceable requirements of the execution shaft.

Claims (10)

1. ultrahigh speed precise pneumatic micro spindle unit, comprise: main shaft, turbine, front end gas bearing, rear end gas bearing, casing, miniature elastic coupling, marmem chuck, execution axle, an execution axle gas bearing is characterized in that: described front-end of spindle is installed in the axis hole of described casing by the supporting of described rear end gas bearing by described front end gas bearing, rear end; Be provided with turbine room between described front end gas bearing and rear end gas bearing, described turbine is arranged on the described main shaft and is in the described turbine room; Described front end gas bearing, described rear end gas bearing are made up of at least one pressurized air journal bearing and a pressurized air thrust bearing respectively; Described front-end of spindle is provided with axial hole and miniature elastic coupling; Described execution axle is installed in the axis hole of described casing by the supporting of described execution axle gas bearing, and the one end is installed in the axial hole of described front-end of spindle setting; Described marmem chuck is installed on the excircle of described front-end of spindle, and described execution axle clamp is held in the described main shaft; Described execution axle gas bearing is made up of at least one pressurized air journal bearing.
2. ultrahigh speed precise pneumatic micro spindle unit according to claim 1 is characterized in that: described main shaft and turbine are made one.
3. ultrahigh speed precise pneumatic micro spindle unit according to claim 2 is characterized in that: described rear-end of spindle face is arranged with two holes or groove along described main-shaft axis.
4. ultrahigh speed precise pneumatic micro spindle unit according to claim 3 is characterized in that: described casing is equipped with bonnet, on the described bonnet current vortex sensor is installed, and its installation site is corresponding with hole or groove position that described rear-end of spindle face is provided with.
5. ultrahigh speed precise pneumatic micro spindle unit according to claim 4 is characterized in that: be respectively equipped with described front end gas bearing, rear end gas bearing on the described casing, carry out the air inlet of axle gas bearing and the air inlet of described turbine room.
6. ultrahigh speed precise pneumatic micro spindle unit according to claim 5 is characterized in that: the bonnet of described casing is provided with the air discharge duct of described turbine room.
7. ultrahigh speed precise pneumatic micro spindle unit according to claim 6 is characterized in that: the exhaust outlet that is respectively equipped with described front end gas bearing, rear end gas bearing, execution axle gas bearing on the described casing.
8. ultrahigh speed precise pneumatic micro spindle unit according to claim 7, it is characterized in that: an end of described main shaft is equipped with and emits lid, described emitting between lid and the described execution axle gas bearing forms a cavity, and described marmem chuck is in the described cavity.
9. ultrahigh speed precise pneumatic micro spindle unit according to claim 8 is characterized in that: between described execution axle and the described execution axle gas bearing lining is installed.
10. ultrahigh speed precise pneumatic micro spindle unit according to claim 9, it is characterized in that: described miniature elastic coupling is provided with at least one group of little grooving, described each organize little grooving and form by two pairs of orthogonal little groovings, described each to little grooving perpendicular to described shaft coupling axis and be symmetricly set on the described shaft coupling; Described shaft coupling center is provided with axial hole.
CN2010101169818A 2010-03-03 2010-03-03 Ultrahigh speed precise pneumatic micro spindle unit Expired - Fee Related CN101774031B (en)

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CN102615297B (en) * 2012-04-18 2014-02-26 清华大学深圳研究生院 Turbine pneumatic main shaft
CN103056397B (en) * 2012-12-31 2014-12-17 哈尔滨工业大学 Large-diameter ultra-precise air static pressure rotating shafting
CN103302316B (en) * 2013-04-28 2015-09-23 湖南大学 High speed and precision pneumatic micro spindle
CN106424771B (en) * 2016-11-30 2018-03-13 湖南大学 A kind of micro- main shaft of Fine Machinery processing
CN110202394B (en) * 2019-04-19 2021-03-09 广州市昊志机电股份有限公司 Ultra-precise air floatation motorized spindle

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TW200402344A (en) * 2002-08-09 2004-02-16 Hitachi Via Mechanics Ltd Spindle device
JP4264731B2 (en) * 2004-01-30 2009-05-20 株式会社安川電機 Hydrostatic air bearing spindle
JP4912120B2 (en) * 2005-11-22 2012-04-11 日立ビアメカニクス株式会社 Spindle device
CN200991756Y (en) * 2006-12-18 2007-12-19 广州市大族高精电机有限公司 Main axle device

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