CN106406031A - Photoresist coating machine with drug recovery system - Google Patents
Photoresist coating machine with drug recovery system Download PDFInfo
- Publication number
- CN106406031A CN106406031A CN201611016640.7A CN201611016640A CN106406031A CN 106406031 A CN106406031 A CN 106406031A CN 201611016640 A CN201611016640 A CN 201611016640A CN 106406031 A CN106406031 A CN 106406031A
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- Prior art keywords
- medicament
- signal
- recovery system
- medicinal liquid
- supply
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Infusion, Injection, And Reservoir Apparatuses (AREA)
Abstract
The invention discloses a photoresist coating machine with a drug recovery system. The photoresist coating machine comprises a vacuum drying apparatus, a high-pressure cooling pump, an effluent discharge port, a drug circulation system and the drug recovery system; the vacuum drying apparatus is connected with the high-pressure cooling pump, the high-pressure cooling pump is connected with the drug circulation system through one electromagnetic value-pneumatic value structure, and the input end of the drug recovery system is connected with the high-pressure cooling pump and the effluent discharge port through the electromagnetic value while the output end of the same is connected with the drug circulation system. The photoresist coating machine has the advantages that the recovery systems is added, drug utilization is increased, material consumption is saved, cost is saved, and company cost is lowered.
Description
Technical field
The present invention relates to having the photoetching rubber coating of medicament recovery system, belong to mechanical equipment technical field.
Background technology
The photoresist that coating machine uses（Photoresistance）Through VCD（Vacuum drying board）Action is changed into gaseous dosage, by high pressure
After pump is processed, liquid form is changed into by gaseous form, is re-supplied to medicinal liquid supply side, play recycling function；At present
The coating medicament non-recovery system using, only blood circulation, if medicament supply side is in full state or not supply condition,
Then the medicament of circulation directly can be discharged from waste port, material be caused waste, therefore the present invention is directed to medicament directly from waste liquid
The problem design that end is discharged solves；
The defect that prior art is deposited in design in medicament recovery leads to medicament to be discharged from waste port, waste of materials medicine in addition
Agent material price is higher, and medicament buying expenses is higher and each monthly consumption is very big, causes company's cost of business operation to increase.Existing
Blood circulation do not consider medicament recovery situation, only board side need use when supplied, do not needing to make
Used time is expelled directly out, and causes unnecessary waste.
Content of the invention
The photoetching rubber coating being to have medicament recovery system proposed by the present invention, its objective is in original coating machine medicine
Increase medicament recovery system on the basis of agent blood circulation, when coating machine does not need to use, the medicament of discharge reclaimed and deposits,
Supplied when needing and use in board side, thus by medicament efficient recovery, reaching controlled and reasonable utilization, it is unnecessary to reduce
Consume, through calculate single month reduces cost 30%, 1 year cost-effective 2,000,000 yuan.
The technical solution of the present invention：There is the photoetching rubber coating of medicament recovery system, including Minton dryer,
High pressure cooling pump, waste liquid outlet, medicament blood circulation and medicament recovery system；Wherein Minton dryer connects high pressure cooling
Pump, high pressure cooling pump passes through 1 electromagnetic valve, a pneumatic operated valve connects medicament blood circulation, and the input of medicament recovery system leads to
Cross 1 electromagnetic valve and connect high pressure cooling pump and waste liquid outlet, the outfan of medicament recovery system connects medicament blood circulation.
Its method of work is as follows：
（1）Photoresist is changed into gaseous form after Minton dryer operation to be existed, and after high pressure cooling pump work, turns
It is changed into liquid form and form operational medicament；
（2）When certain medicine container that container liquid level sensor senses in 4 medicament storage systems is in dummy status, send
Supply signal, the corresponding electromagnetic valve of the medicine container with dummy status that supply signal controls receives signal, controls pneumatic operated valve will manage
Road is opened, and medicament is provided in the medicine container of dummy status and is filled with operation, and by supply for receptacles output system by medicine
Agent exports, and controls medicinal liquid to supply on-off control medicament by medicinal liquid signal and enters photoresist delivery outlet；
（3）When medicament storage system does not need to carry out supplying operation, supply signal-off, go out in the corresponding pipeline of signal-off
It is provided with medicament recovery system at mouthful, pneumatic operated valve is controlled by solenoid signal, the solvent of discharge is filled to C medicament storage system
In medicine container in carry out store work；When device port needs medicament, Valve controlling is guided by signal, preferentially by C
In medicine container in medicament storage system, medicament is supplied in the medicine container in 4 medicament storage systems.
Advantages of the present invention：Increase recovery system, improve medicament utilization rate, material-saving consumption, save expense, reduce public
Department's cost.
Brief description
Accompanying drawing 1 is the structural representation of the photoetching rubber coating with medicament recovery system.
Specific embodiment
As shown in Figure 1, there is the photoetching rubber coating of medicament recovery system, including Minton dryer, high pressure cooling
Pump, waste liquid outlet, medicament blood circulation and medicament recovery system；Wherein Minton dryer connects high pressure cooling pump, high pressure
Cooling pump passes through 1 electromagnetic valve, pneumatic valve configurations connect medicament blood circulation, and the input of medicament recovery system passes through 1
Individual electromagnetic valve connects high pressure cooling pump and waste liquid outlet, and the outfan of medicament recovery system connects medicament blood circulation.
Described medicament blood circulation includes 4 medicament storage systems, medicinal liquid signal controls medicinal liquid supply switch, photoresist
Delivery outlet；Wherein 4 medicament storage systems are formed by connecting by 4 electromagnetic valve-pneumatic operated valve-electromagnetic valves in parallel, 4 medicament storage
A-1 medicament storage system in system and A-2 medicament storage system pass through 1 pneumatic operated valve, an electromagnetic valve connection A medicinal liquid respectively
Signal controls medicinal liquid supply switch, B-1 medicament storage system and B-2 medicament storage system to pass through 1 pneumatic operated valve, an electricity respectively
Magnet valve connects liquid medicine B signal and controls medicinal liquid supply switch, and A medicinal liquid signal controls medicinal liquid supply switch and liquid medicine B signal to control medicine
Liquid supply switch connects photoresist delivery outlet respectively.
Described medicament recovery system includes 1 C medicament storage system, and the input of described C medicament storage system passes through 1
Individual pneumatic operated valve-electromagnetic valve structure connects the electromagnetic valve before waste liquid outlet, and the outfan of C medicament storage system passes through 1 electromagnetism
Valve, a pneumatic operated valve connect the outfan of high pressure cooling pump.
Described medicament storage system includes medicine container, supply for receptacles output system, container liquid level sensor；Wherein hold
, located at the inside of medicine container, supply for receptacles output system is located at the delivery outlet of medicine container for device liquid level sensor.
Its method of work is as follows：
（1）Photoresist is changed into gaseous form after Minton dryer operation to be existed, and after high pressure cooling pump work, turns
It is changed into liquid form and form operational medicament；
（2）When certain medicine container that container liquid level sensor senses in 4 medicament storage systems is in dummy status, send
Supply signal, the corresponding electromagnetic valve of the medicine container with dummy status that supply signal controls receives signal, controls pneumatic operated valve will manage
Road is opened, and medicament is provided in the medicine container of dummy status and is filled with operation, and by supply for receptacles output system by medicine
Agent exports, and controls medicinal liquid to supply on-off control medicament by medicinal liquid signal and enters photoresist delivery outlet；
（3）When medicament storage system does not need to carry out supplying operation, supply signal-off, go out in the corresponding pipeline of signal-off
It is provided with medicament recovery system at mouthful, pneumatic operated valve is controlled by solenoid signal, the solvent of discharge is filled to C medicament storage system
In medicine container in carry out store work；When device port needs medicament, Valve controlling is guided by signal, preferentially by C
In medicine container in medicament storage system, medicament is supplied in the medicine container in 4 medicament storage systems.
Claims (5)
1. there is the photoetching rubber coating of medicament recovery system it is characterised in that include Minton dryer, high pressure cooling pump,
Waste liquid outlet, medicament blood circulation and medicament recovery system；Wherein Minton dryer connects high pressure cooling pump, and high pressure cools down
Pump passes through 1 electromagnetic valve, a pneumatic operated valve connects medicament blood circulation, and the input of medicament recovery system passes through 1 electromagnetic valve
Connect high pressure cooling pump and waste liquid outlet, the outfan of medicament recovery system connects medicament blood circulation.
2. the photoetching rubber coating with medicament recovery system according to claim 1 is it is characterised in that described medicament
Blood circulation includes 4 medicament storage systems, medicinal liquid signal controls medicinal liquid supply switch, photoresist delivery outlet；Wherein 4 medicaments
Stocking system is connected in parallel by 4 electromagnetic valve-pneumatic operated valve-electromagnetic valves, the A-1 medicament storage system in 4 and A-2 medicament
Stocking system passes through 1 pneumatic operated valve respectively, an electromagnetic valve connects A medicinal liquid signal and controls medicinal liquid supply switch, B-1 medicament storage
System and B-2 medicament storage system are connected liquid medicine B signal and are controlled medicinal liquid supply to open by 1 pneumatic operated valve, an electromagnetic valve respectively
Close, A medicinal liquid signal controls medicinal liquid supply switch and liquid medicine B signal to control medicinal liquid supply switch to connect photoresist delivery outlet respectively.
3. the photoetching rubber coating with medicament recovery system according to claim 1 is it is characterised in that described medicament
Recovery system includes 1 C medicament storage system, and the input of described C medicament storage system passes through 1 pneumatic operated valve, an electromagnetism
Valve connects the electromagnetic valve before waste liquid outlet, and the outfan of C medicament storage system passes through 1 electromagnetic valve, a pneumatic operated valve connects
The outfan of high pressure cooling pump.
4. the photoetching rubber coating with medicament recovery system according to claim 2 and 3 is it is characterised in that described
Medicament storage system includes medicine container, supply for receptacles output system, container liquid level sensor；Wherein container liquid level sensor sets
In the inside of medicine container, supply for receptacles output system is located at the delivery outlet of medicine container.
5. there is the method for work of the photoetching rubber coating of medicament recovery system as claimed in claim 1 it is characterised in that wrapping
Include following steps：
（1）Photoresist is changed into gaseous form after Minton dryer operation to be existed, and after high pressure cooling pump work, turns
It is changed into liquid form and form operational medicament；
（2）When certain medicine container that container liquid level sensor senses in 4 medicament storage systems is in dummy status, send
Supply signal, the corresponding electromagnetic valve of the medicine container with dummy status that supply signal controls receives signal, controls pneumatic operated valve will manage
Road is opened, and medicament is provided in the medicine container of dummy status and is filled with operation, and by supply for receptacles output system by medicine
Agent exports, and controls medicinal liquid to supply on-off control medicament by medicinal liquid signal and enters photoresist delivery outlet；
（3）When medicament storage system does not need to carry out supplying operation, supply signal-off, go out in the corresponding pipeline of signal-off
It is provided with medicament recovery system at mouthful, pneumatic operated valve is controlled by solenoid signal, the solvent of discharge is filled to C medicament storage system
In medicine container in carry out store work；When device port needs medicament, Valve controlling is guided by signal, preferentially by C
In medicine container in medicament storage system, medicament is supplied in the medicine container in 4 medicament storage systems.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611016640.7A CN106406031A (en) | 2016-11-18 | 2016-11-18 | Photoresist coating machine with drug recovery system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611016640.7A CN106406031A (en) | 2016-11-18 | 2016-11-18 | Photoresist coating machine with drug recovery system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106406031A true CN106406031A (en) | 2017-02-15 |
Family
ID=58068504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611016640.7A Pending CN106406031A (en) | 2016-11-18 | 2016-11-18 | Photoresist coating machine with drug recovery system |
Country Status (1)
| Country | Link |
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| CN (1) | CN106406031A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101246311A (en) * | 2007-02-12 | 2008-08-20 | 中芯国际集成电路制造(上海)有限公司 | Photo resist air bubble eliminating system and method thereof |
| CN203630510U (en) * | 2013-12-23 | 2014-06-04 | 徐州同鑫光电科技有限公司 | Photoresist recycling system |
| CN204086808U (en) * | 2014-09-24 | 2015-01-07 | 焦作市金宇阳高科电子有限公司 | A kind of photoresist filtered and recycled circulation system be applied on glue spreader |
| CN106423755A (en) * | 2016-11-22 | 2017-02-22 | 京东方科技集团股份有限公司 | Coating equipment, method utilizing coating equipment for recycling coating liquid and cleaning method of coating equipment |
| CN206470532U (en) * | 2016-11-18 | 2017-09-05 | 南京中电熊猫液晶材料科技有限公司 | Photoetching rubber coating with medicament recovery system |
-
2016
- 2016-11-18 CN CN201611016640.7A patent/CN106406031A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101246311A (en) * | 2007-02-12 | 2008-08-20 | 中芯国际集成电路制造(上海)有限公司 | Photo resist air bubble eliminating system and method thereof |
| CN203630510U (en) * | 2013-12-23 | 2014-06-04 | 徐州同鑫光电科技有限公司 | Photoresist recycling system |
| CN204086808U (en) * | 2014-09-24 | 2015-01-07 | 焦作市金宇阳高科电子有限公司 | A kind of photoresist filtered and recycled circulation system be applied on glue spreader |
| CN206470532U (en) * | 2016-11-18 | 2017-09-05 | 南京中电熊猫液晶材料科技有限公司 | Photoetching rubber coating with medicament recovery system |
| CN106423755A (en) * | 2016-11-22 | 2017-02-22 | 京东方科技集团股份有限公司 | Coating equipment, method utilizing coating equipment for recycling coating liquid and cleaning method of coating equipment |
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