CN106403794A - Device used for dynamic and static calibration of eddy current sensor - Google Patents
Device used for dynamic and static calibration of eddy current sensor Download PDFInfo
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- CN106403794A CN106403794A CN201610839367.1A CN201610839367A CN106403794A CN 106403794 A CN106403794 A CN 106403794A CN 201610839367 A CN201610839367 A CN 201610839367A CN 106403794 A CN106403794 A CN 106403794A
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- calibration
- fixed
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- magnetic pole
- eddy current
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
Abstract
The invention provides a device used for dynamic and static calibration of an eddy current sensor. The device comprises a pedestal, wherein a vibrating stand module and a clamp for clamping a sensor to be calibrated, a motion executing module of the clamp and a grating ruler assembly are arranged on the pedestal; a sensing disc and a standard acceleration sensor are installed on a working tableboard of the vibrating stand module, and the sensing disc is arranged between the working tableboard and the clamp; the motion executing module consists of a position-adjusting driving assembly which drives the clamp to move along the radial direction of the sensing disc, and a calibration driving assembly which drives the clamp to move along the axial direction of the sensing disc; when static calibration is carried out, the vibrating stand module is in a non-operating state, the calibration driving assembly drives the clamp to do lineal reciprocating motion to be close to or away from the sensing disc, and the grating ruler assembly obtains actual displacement of a calibrated sensor at each test point; and when dynamic calibration is carried out, the calibration driving assembly is in a non-operating state, and the vibrating stand module drives the sensing disc to generate sinusoidal vibration. The device provided by the invention has the advantages of wide calibration frequency range.
Description
Technical field
The present invention relates to a kind of device that current vortex sensor is carried out with dynamic calibration and static calibration.
Technical background
Current vortex sensor can measure relative between metal conductor measured and transducer probe face in a non-contact manner
Displacement, is a kind of non-contacting linearisation metering outfit.
Chinese patent 200810036312.2, discloses a kind of full-automatic eddy current sensor dynamic static checking instrument, bag
Include the static test unit being made up of static demarcating test specimen disk and static check probe mounting frame, popped one's head in by dynamic check and install
Frame, dynamic swash plate, the dynamic test unit that dynamic swash plate motor is constituted.Concrete structure is:Driven by stepper motors
On linear module, a packaged type guide rail extensible frame being driven by it is set, setting static demarcating examination on guide rail extensible frame
Part disk and dynamic check probe mounting frame, in addition, being provided with fixing static check probe mounting frame on meter panel, dynamic
State verifies below the probe mounting holes of probe mounting frame, is correspondingly arranged dynamic swash plate and its main drive motor.This fully automatic electric
The shortcoming that eddy current sensor moves static checking instrument is:
1st, because dynamic swash plate adopts Motor drive, its rotary speed isr/min(General difficult to reach 10000r/min with
On), the calibration frequency therefore inputing to current vortex sensor only hasHz, i.e. the dynamic calibration frequency range ratio of this device
Narrower.
2nd, static calibration and dynamic calibration to be executed positioning and calibration motion, overall machinery knot respectively by different motors
Structure is complicated, the functional module repeating is not carried out effectively integrated.
Content of the invention
In order to overcome using dynamic swash plate current vortex sensor is carried out dynamic calibration calibration frequency scope narrow
Shortcoming, the invention provides one kind carries out dynamic calibration, calibration frequency wide ranges using vibration table module to current vortex sensor
Eddy current sensor dynamic static calibration device.
For the device of eddy current sensor dynamic static calibration, this device has pedestal, on pedestal setting vibration table module,
The fixture of clamping sensor to be calibrated, the Motor execution module of fixture and grating scale assembly;On the work top of vibration table module
Inductive disks and standard acceler are installed, inductive disks are located between work top and fixture;Motor execution module is by driving
Fixture transposing drive component and driving the calibration drive component along inductive disks axially-movable for the fixture along inductive disks radial motion;Do
During static calibration, for off working state, it is straight closer or far from inductive disks that calibration drive component makes fixture do to vibration table module
Line moves back and forth, and grating scale assembly obtains the actual displacement being calibrated sensor in each test point;When doing dynamic calibration, calibration
Drive component makes inductive disks do sinusoidal vibration for off working state, vibration table module.
Further, positioning drive component includes the first screw mechanism and guide rail-slide block combination;Fixture is fixed on guide rail-cunning
On the slide block of block combination;The axial direction of the first screw mechanism is radial parallel with inductive disks, and the first of guide rail and the first screw mechanism
Leading screw is parallel, and the first nut and the slide block of the first screw mechanism are fixed;Leading screw one end arranges knob.Knob turns with the first leading screw
When dynamic, the first nut with slide block along the first leading screw axial translation.Turning knob, makes the first nut with fixture along inductive disks
Radial translation, make current vortex sensor to be calibrated in the induction region of inductive disks.
Further, calibration drive component includes the second screw mechanism, heavily loaded guide rail and motor;Motor passes through connection
Second leading screw of axial organ and the second screw mechanism is fixed, and the slide block of heavily loaded guide rail is fixed with the second nut;Positioning drive component leads to
Cross contiguous block to be fixed on the slide block of heavily loaded guide rail.Motor pass through the second nut with positioning drive component and fixture along
The axial translation of inductive disks, in static calibration, makes to be calibrated sensor and is moved forward and backward according to test requirements document.
Grating scale assembly includes the grating reading head being fixed on pedestal and the grating scale fixing with the slide block of heavily loaded guide rail.
The slide block that grating scale follows heavily loaded guide rail moves, and grating reading head reads the actual displacement of slide block in real time.The slide block of heavily loaded guide rail
Fix with fixture, the therefore actual displacement of slide block is fixture and the actual displacement of the sensor to be calibrated being clamped on fixture.
Further, vibration table module includes cylinder, drive end bearing bracket, rear end cap, permanent magnet, central magnetic pole, moving component and limit
Position part;Drive end bearing bracket and rear end cap close off front opening and the open rearward end of cylinder, permanent magnet respectively with rear end cap and in
Heart magnetic pole is fixed;Permanent magnet, central magnetic pole, rear end cap and drive end bearing bracket are coaxially disposed;Through hole is opened up on drive end bearing bracket, central magnetic pole
Head stretches in this through hole, forms uniform air-gap field between central magnetic pole and through hole;
Moving component includes moving-coil, moving-coil frame and work top, and moving-coil is wound on moving-coil frame, and limiting component makes moving-coil and center
Magnetic pole is coaxial and is located in air-gap field;Inductive disks are fixed on the front exposed of work top;Standard acceler is solid
The back side due to work top.
The drive end bearing bracket positioning mode coaxial with central magnetic pole be:Drive end bearing bracket have annular positioning boss, positioning boss with
Through hole is coaxial(Positioning boss and through hole coaxially can be accurately positioned when making drive end bearing bracket), positioning boss and locating ring coordinate
(I.e. one section of locating ring is enclosed within positioning boss), locating ring fixed with drive end bearing bracket;Central magnetic pole be inserted in locating ring and with positioning
Annular face contacts.
Central magnetic pole with the fixed form of permanent magnet is:The rear end face of central magnetic pole is pasted completely with the front end face of permanent magnet
Close, the centrally disposed axial through hole of permanent magnet, the centrally disposed axial screw of central magnetic pole, a central strut passes through through hole
Engage with the screw of central magnetic pole, the centrally disposed axial jack of rear end cap, the other end of this central strut inserts this jack
And fix with rear end cap.
The fixing mode of central strut and rear end cap is:The threaded portion of central strut exposes to the jack of rear end cap, fixing
Nut is screwed with threaded portion.In order to avoid central strut exposes to rear end cap, rear end cap arranges counterbore, central strut and fixation
Nut is located in counterbore.
The shape of cross section of the leading portion of central magnetic pole and the cooperation of moving-coil frame gap, the shape of cross section of back segment and permanent magnet is complete
Deng.
The fixed form of inductive disks, standard acceler and work top is:Inductive disks are pacified by the first studs
It is loaded on the front of work top, standard acceler is installed on the back side of work top by the second studs.
Further, limiting component is mainly made up of support frame and support spring;Support frame and drive end bearing bracket fix and
Coaxial with drive end bearing bracket, support spring connects support frame for one end, the other end connects the reed of moving-coil frame.Reed is in annular.
Or reed is rectangular, the reed of multiple rectangles is along the even circumferential distribution of moving-coil frame.Reed passes through pressing plate and bolt and support
Skeleton is fixed.Support spring plays the support positioning action to moving-coil frame, makes moving-coil frame be maintained at put down coaxial with central magnetic pole
Weighing apparatus position.
Further, protective cover is set outside limiting component, and protective cover includes cover body and rubber film, and cover body is solid with drive end bearing bracket
Fixed and coaxial;Rubber film is in annular, and the head of moving-coil frame exposes to rubber film, and rubber film passes through annular pressing plate and spiral shell
Nail is fixed with cover body.Dust cover intercepts dust and other impurities and falls in movement clearance, extends the service life of vibration table module.
Standard transducer, when using, is arranged on the back side of work top, then work top is installed by the present invention first
On moving-coil frame, then with studs, inductive disks will be arranged on the front of work top again, then again by sensing to be calibrated
Device is fixed on clamp of sensor.Positioning adjustment is carried out by Motor execution module to sensor:Turning knob makes first
Obtain the first leading screw to rotate, and clamp of sensor motion is driven by the first nut, and then drive sensor moves to and inductive disks
The position of center be aligned is it is ensured that sensor is in the induction region of inductive disks.Then control the rotation of step motor drive second leading screw
Turn, and moved forward and backward by the clamp of sensor on the heavily loaded guide rail of the second nut drive and sensor, and read electricity in real time
The DC voltage that eddy current sensor is exported, until making magnitude of voltage in the linear work voltage range of sensor, now electric whirlpool
Flow sensor positioning adjustment finishes.
When carrying out electric eddy transducer dynamic calibration, by sinusoidal current signalIt is passed through in moving-coil, in having of moving-coil conductor
Effect lengthAnd the induction in magnetic field residing for conductorIn the case of certain, the electromagnetic force that moving-coil is subject toIn mark
Accurate sinusoidal rule change, therefore moving-coil will drive moving-coil frame, work top and the inductive disks of connection fixed thereto in electromagnetic forceIn the presence of do the sinusoidal vibration of same frequency in the axial direction.According to the normal acceleration sensing being arranged on work top
The output voltage of device, is calculated the actual vibration level of vibration table, and by being gradually increased/reducing the amplitude of input current signal,
The vibration level of vibration table is made to progressively reach target vibration level.Then pass through to change the frequency of input current signal, you can be calibrated
Sensor carries out Frequency Response calibration, due to the signal frequency of inputCan be changed, therefore current vortex can be sensed
Device completes the calibration operation of broad frequency band.
When carrying out the static calibration of current vortex sensor, according to the stroke points of static calibration, step-length, direction of motion etc.
Parameter request, similar to sensor position fixing process, using Motor execution module, again by control step motor drive ball wire
Thick stick rotates, and is moved forward and backward by the clamp of sensor on the heavily loaded guide rail of feed screw nut drive and sensor, in addition, straight line
Grating scale is fixed on heavily loaded guide rail side, moves forward and backward together with sensor to be calibrated, and be fixed on the reading of pedestal
Head cooperation, obtains the actual displacement of each test point sensor to be calibrated.According to sensor actual output voltageAnd straight line
The actual displacement D of grating scale, by calculating reference sensitivity S that can obtain sensor.Motor execution module both can conduct
The sensor positioning executable portion of dynamic static calibration, again can be used as the calibration Motor execution part of static calibration.
The beneficial effects of the present invention is:
1st, dynamic calibration is carried out to sensor using vibration table, compare inclined disc type dynamic calibration side
Formula, can by change input current signal frequency, to realize sensor to be calibrated in the calibration of different frequency so as to
It is applied to more wide band calibration operation.
2nd, Motor execution module both can position executable portion as the sensor of dynamic static calibration,
Conveniently and efficiently can realize sensor respectively and move static calibration as the calibration executable portion of static calibration again,
Improve the calibration efficiency of sensor.
Brief description
Fig. 1 calibrating installation general illustration.
Fig. 2 Motor execution modular structure front view.
Fig. 3 Motor execution modular structure top view.
Fig. 4 vibration table modular structure schematic diagram.
Specific embodiment
As shown in figure 1, eddy current sensor dynamic static state self-checking device includes vibration table module 1, with vibration table work
The inductive disks 2 that table top connects, the standard acceler 5 being connected with work top, clamp of sensor 3, Motor execution module 4
And fix the pedestal 6 of vibration table and Motor execution module.
Motor execution module by drive fixture along inductive disks 2 radial motion positioning drive component and drive fixture along sensing
The calibration drive component of disk 2 axially-movable.
Positioning drive component includes the first screw mechanism and guide rail 416- slide block 417 combines;Fixture is fixed on guide rail 416-
On the slide block 417 of slide block 417 combination;The axial direction of the first leading screw 418 mechanism is radial parallel with inductive disks 2, guide rail 416 and first
First leading screw 418 of screw mechanism is parallel, and the first nut 411 of the first screw mechanism is fixing with slide block 417;First leading screw 418
One end arranges knob 49.When knob 49 rotates with the first leading screw 418, the first nut 411 is with slide block 417 along the first leading screw
418 axial translation.Turning knob 49, makes the first nut 411 with fixture 3 along the radial translation of inductive disks 2, makes to be calibrated
In the induction region for inductive disks 2 for the current vortex sensor.
Calibration drive component includes the second screw mechanism, heavily loaded guide rail 410 and motor 41;Motor 41 passes through connection
Second leading screw 45 of axial organ and the second screw mechanism is fixing, and the slide block of heavily loaded guide rail 410 and the second nut 47 pass through contiguous block 44
Fixing;Positioning drive component is fixed on the slide block of heavily loaded guide rail 410 by contiguous block.Motor 41 passes through the second nut 47
With positioning drive component and fixture 3 along inductive disks 2 axial translation, in static calibration, make to be calibrated sensor according to
Test requirements document moves forward and backward.
Pedestal 6 is a casing, and calibration drive component is located at the box house of pedestal 6.Casing top has opening, to calibrate
Drive component is connected with positioning drive component and moves.
The grating that the grating reading head 415 that grating scale assembly includes being fixed on pedestal is fixedly connected with heavily loaded guide rail 410
Installing plate 414 and the grating scale 413 of grating installing plate 414 fixation.Grating scale 413 follows the grating installing plate of heavily loaded guide rail 410
414 is mobile, and grating reading head 415 reads grating installing plate 414 in real time, i.e. the actual displacement of heavily loaded guide rail 410, heavily loaded guide rail
410 are fixed with fixture, and the therefore actual displacement of grating installing plate 414 is fixture and the sensor to be calibrated being clamped on fixture
Actual displacement.
Described vibration table module 1 includes permanent magnet 11, central magnetic pole 13, cylinder 12, drive end bearing bracket 15, rear end cap 116, fortune
Dynamic component, limiting component etc..Central magnetic pole 13, cylinder 12 and front and rear cover 15,116 all using magnetic conductive material, and at center
Uniform air-gap field is produced between magnetic pole 13 and drive end bearing bracket 15.Drive end bearing bracket 15 and rear end cap 116 are fixed on by bolt
On pedestal 6, moving component is arranged in the middle of central magnetic pole 13 and the gap of drive end bearing bracket 15, and moving component can be along axis in gap
Move in direction, limiting component is arranged on drive end bearing bracket 15 by bolt.
Described limiting component includes support frame 17 and support spring 112.Support frame 17 is fixed on by bolt
On drive end bearing bracket 15, the support spring 112 being uniformly distributed surrounding passes through pressing plate 113, bolt connection moving component and support frame 17,
Thus adjusting the tightness of support spring 112, and then play effect that is spacing and keeping equilbrium position.Outside support frame 17
There is protective cover 16, protective cover 16 is arranged on drive end bearing bracket 15 by bolt, in the end face of protective cover 16, rubber film 114 is put
Put under annular pressing plate 115, and fixed with screw, play and prevent dust and other impurities from dropping to the effect in the middle of movement clearance.
Described moving component includes moving-coil 18, moving-coil frame 19, work top 110 and inductive disks 2, moving-coil 18 and moving-coil frame 19
It is fixedly connected, work top 110 is bolted with moving-coil frame 19, inductive disks 2 pass through studs 111 and work top
110 are connected.Moving-coil frame 19 is cylindrical shape, and there is containing cavity inside, and standard acceler 5 is pacified by studs 111
It is contained in the end face of work top 110, positioned at the accommodating intracavity of moving-coil frame 19.There is through hole at permanent magnet 11 center, in central magnetic pole 13
The heart has screwed hole, and the two ends car of central strut 118 has screw thread, and central strut 118 passes through the through hole of permanent magnet 11, in being then screwed in
On the screwed hole of heart magnetic pole 13, last central strut 118 is tightened on rear end cap 116 by round nut 117, primarily serves
Positioning action to permanent magnet 11 and central magnetic pole 13.Locating ring 14 adopts non-magnet material, and one end is coordinated with central magnetic pole 13,
The other end is fixed on drive end bearing bracket 15 by bolt, plays the positioning action to central magnetic pole 13.
The present invention, when using, first standard transducer 5 is arranged on inside work top 110, then by work top 110
It is arranged on moving-coil frame 19, then inductive disks 2 is arranged on work top 110 by studs 111 again, then will treat school
Quasi- sensor 7 is fixed on clamp of sensor 3, treats calibration sensor 7 by Motor execution module and carries out positioning adjustment,
Turning knob 49 makes ball-screw 418 rotate first, and drives clamp of sensor 3 to move by feed screw nut 412, and then carries
The dynamic sensor to be calibrated 7 being arranged on fixture 3 is so as to move to the position being aligned with inductive disks 2 center it is ensured that biography to be calibrated
Sensor 7, in the induction region of inductive disks 2, then controls motor 41 to drive ball-screw 45 to rotate, and passes through leading screw spiral shell
Female 47 and contiguous block 44 drive clamp of sensor 3 on heavily loaded guide rail 410 and sensor to be calibrated 7 to be moved forward and backward, in real time
Read the DC voltage that sensor 7 to be calibrated is exported, until output voltage values are in the linear work voltage of sensor 7 to be calibrated
In the range of, illustrate that now sensor 7 positioning adjustment to be calibrated finishes, ensuing sound calibration can be carried out.
When carrying out electric eddy transducer dynamic calibration, by sinusoidal current signalIt is passed through in moving-coil 18, in moving-coil 18 conductor
Effective lengthAnd the induction in magnetic field residing for conductorIn the case of certain, the electromagnetic force that moving-coil 18 is subject toSinusoidal rule change in standard, therefore moving-coil 18 will drive the moving-coil frame 19 being mutually permanently connected, work top
110 and inductive disks 2 in electromagnetic forceIn the presence of do in the axial direction same frequency standard sine vibration.And by being arranged on
The output voltage of the standard acceler 5 of work top 110, is calculated the actual vibration level of vibration table, is gradually increased/contracts
The amplitude of little input current signal, makes the vibration level of vibration table progressively reach target vibration level.Then pass through to change input current signal
Frequency, then Frequency Response calibration can be carried out to sensor, due to the signal frequency of inputCan be changed, therefore may be used
So that current vortex sensor is completed with the calibration of broad frequency band.
When carrying out the static calibration of current vortex sensor, according to the stroke points of static calibration, step-length, direction of motion etc.
Parameter request, similar to sensor position fixing process, using Motor execution module, drive ball again by controlling motor 41
Leading screw 45 rotates, and drives heavily loaded guide rail 410 by feed screw nut 47 and contiguous block 43, makes the sensor on heavily loaded guide rail 410
Fixture 3 and sensor to be calibrated 7 enter and move forward and backward as requested, and linear grating chi 413 is fixed on heavily loaded guide rail 410 side, with
Sensor 7 to be calibrated moves forward and backward together, and uses cooperatively with the grating reading head 415 being fixed on pedestal 6, can obtain
The actual displacement of each test point sensor to be calibrated 7.According to sensor 7 actual output voltage to be calibratedAnd linear grating
The reality output displacement D of chi 413, by calculating reference sensitivity S that can obtain sensor 7 to be calibrated.Motor execution module
Both executable portion can be positioned as the sensor of dynamic static calibration, again can be used as the calibration Motor execution portion of static calibration
Point, conveniently and efficiently can realize sensor respectively and move static calibration, improve the calibration efficiency of sensor.
Content described in this specification embodiment is only enumerating of the way of realization to present inventive concept, the guarantor of the present invention
Shield scope is not construed as being only limitted to the concrete form that embodiment is stated, protection scope of the present invention is also and in this area skill
Art personnel according to present inventive concept it is conceivable that equivalent technologies mean.
Claims (10)
1. be used for eddy current sensor dynamic static calibration device it is characterised in that:This device has pedestal, and setting on pedestal is shaken
Dynamic platform module, the fixture of clamping sensor to be calibrated, the Motor execution module of fixture and grating scale assembly;The work of vibration table module
Make to install inductive disks and standard acceler on table top, inductive disks are located between work top and fixture;Motor execution mould
Block by drive fixture along inductive disks radial motion positioning drive component and drive fixture along inductive disks axially-movable calibration drive
Dynamic assembly;When doing static calibration, for off working state, calibrate drive component makes fixture do closer or far from sense to vibration table module
The straight reciprocating motion that should coil, grating scale assembly obtains the actual displacement being calibrated sensor in each test point;Do dynamic school
On time, for off working state, vibration table module makes inductive disks do sinusoidal vibration to calibration drive component.
2. be used for as claimed in claim 1 the device of eddy current sensor dynamic static calibration it is characterised in that:Positioning driving group
Part includes the first screw mechanism and guide rail-slide block combination;Fixture is fixed on the slide block of guide rail-slide block combination;First leading screw machine
The axial direction of structure is radial parallel with inductive disks, and guide rail is parallel with the first leading screw of the first screw mechanism, and the of the first screw mechanism
One nut and slide block are fixed;Leading screw one end arranges knob.
3. be used for as claimed in claim 2 the device of eddy current sensor dynamic static calibration it is characterised in that:Calibration driving group
Part includes the second screw mechanism, heavily loaded guide rail and motor;Motor passes through the second of shaft coupling and the second screw mechanism
Leading screw is fixed, and the slide block of heavily loaded guide rail is fixed with the second nut;Positioning drive component is fixed on heavily loaded guide rail by contiguous block
On slide block.
4. be used for as claimed in claim 3 the device of eddy current sensor dynamic static calibration it is characterised in that:Grating scale assembly
Including the grating reading head being fixed on pedestal and the grating scale fixing with the slide block of heavily loaded guide rail.
5. the device for eddy current sensor dynamic static calibration as described in one of claim 1-4 it is characterised in that:Vibration
Platform module includes cylinder, drive end bearing bracket, rear end cap, permanent magnet, central magnetic pole, moving component and limiting component;Drive end bearing bracket and rear end
Lid closes off front opening and the open rearward end of cylinder, and permanent magnet is fixed with rear end cap and central magnetic pole respectively;Permanent magnet, in
Heart magnetic pole, rear end cap and drive end bearing bracket are coaxially disposed;Through hole is opened up on drive end bearing bracket, the head of central magnetic pole stretches in this through hole, in
Form uniform air-gap field between heart magnetic pole and through hole;
Moving component includes moving-coil, moving-coil frame and work top, and moving-coil is wound on moving-coil frame, and limiting component makes moving-coil and center
Magnetic pole is coaxial and is located in air-gap field;Inductive disks are fixed on the front exposed of work top;Standard acceler is solid
The back side due to work top.
6. be used for as claimed in claim 5 the device of eddy current sensor dynamic static calibration it is characterised in that:Drive end bearing bracket has
The positioning boss of annular, positioning boss is coaxial with through hole, and positioning boss is coordinated with locating ring, and locating ring is fixed with drive end bearing bracket;In
Heart magnetic pole be inserted in locating ring and with positioning annular face contacts.
7. be used for as claimed in claim 6 the device of eddy current sensor dynamic static calibration it is characterised in that:Central magnetic pole
Rear end face is fitted completely with the front end face of permanent magnet, the centrally disposed axial through hole of permanent magnet, the centrally disposed axle of central magnetic pole
To screw, a central strut engaged through through hole with the screw of central magnetic pole, the centrally disposed axial jack of rear end cap,
The other end of this central strut is inserted this jack and is fixed with rear end cap.
8. be used for as claimed in claim 7 the device of eddy current sensor dynamic static calibration it is characterised in that:Central strut
Threaded portion exposes to the jack of rear end cap, and fixing nut is screwed with threaded portion.
9. be used for as claimed in claim 5 the device of eddy current sensor dynamic static calibration it is characterised in that:Limiting component master
To be made up of support frame and support spring;Support frame and drive end bearing bracket are fixed and coaxial with drive end bearing bracket, and support spring is one
End connects support frame, the other end connects the reed of moving-coil frame.
10. be used for as claimed in claim 9 the device of eddy current sensor dynamic static calibration it is characterised in that:Limiting component
Outside protective cover is set, protective cover includes cover body and rubber film, and cover body and drive end bearing bracket are fixed and coaxially;Rubber film is in annulus
Shape, the head of moving-coil frame exposes to rubber film, and rubber film is fixed with cover body by annular pressing plate and screw.
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CN107121055A (en) * | 2017-06-05 | 2017-09-01 | 大连理工大学 | A kind of three-dimensional scaling method of eddy current displacement sensor array |
CN107144211A (en) * | 2017-05-24 | 2017-09-08 | 大连理工大学 | A kind of eddy current displacement sensor quick calibrating method |
CN107621220A (en) * | 2017-08-03 | 2018-01-23 | 大连理工大学 | A kind of space geometry scaling method of eddy current displacement sensor display |
CN108871512A (en) * | 2018-07-20 | 2018-11-23 | 宁波恒帅微电机有限公司 | A kind of detection device of liquid level sensor |
CN113074768A (en) * | 2021-03-30 | 2021-07-06 | 宁夏计量质量检验检测研究院 | Dynamic and static continuous calibration method for eddy current sensor |
CN113074767A (en) * | 2021-03-30 | 2021-07-06 | 宁夏计量质量检验检测研究院 | Eddy current sensor dynamic and static integrated calibrating device |
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