CN106392309A - Imaging system and method of square scanning head of dual-light-path dual-imaging visual galvanometer - Google Patents
Imaging system and method of square scanning head of dual-light-path dual-imaging visual galvanometer Download PDFInfo
- Publication number
- CN106392309A CN106392309A CN201510454115.2A CN201510454115A CN106392309A CN 106392309 A CN106392309 A CN 106392309A CN 201510454115 A CN201510454115 A CN 201510454115A CN 106392309 A CN106392309 A CN 106392309A
- Authority
- CN
- China
- Prior art keywords
- image
- mark
- galvanometer
- coordinate
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to the technical field of laser processing, and discloses an imaging system and method of a square scanning head of a dual-light-path dual-imaging visual galvanometer. The imaging method comprises the steps that external laser beams reach the galvanometer through a second lens, and act on a to-be-marked object through a first lens after being reflected by the galvanometer, and then the to-be-marked object is marked; a white light source emits an illuminating light path to brighten the to-be-marked object, the illuminating light path is reflected to the first lens, then partially reflected to a large-visual-field image acquisition module through the first lens, and used for acquiring the overall image of the to-be-marked object, coordinates of an image in a pre-marking position are obtained accordingly, the swinging angle of the galvanometer is further obtained, and the galvanometer is driven to rotate by the swinging angle; and part of the illuminating light path reaches the galvanometer through the first lens, enters a small-visual-field image acquisition module after being reflected to the second lens, and is used for acquiring detailed images of the to-be-marked object, and the accurate coordinates of the pre-marking position are obtained according to the detailed images. By adoption of the imaging system and method of the square scanning head of the dual-light-path dual-imaging visual galvanometer, the marking precision of the square marking head can be greatly improved.
Description
Technical field
The present invention relates to technical field of laser processing, in particular, double particularly to a kind of double light path
The imaging system of imaging vision vibration mirror scanning square toes and imaging method.
Background technology
Traditional mark square toes do not have vision to be assisted, and it is in the state of touch system, typically pass through folder
Tool or fixing coordinate position carry out mark, require for high-precision mark, traditional mark
Square toes have a lot of factors and limit, and its difficulty is big, and complexity is also high.
Content of the invention
Present invention aims to the technical problem that prior art exists, provide a kind of double light path double
The imaging system of imaging vision vibration mirror scanning square toes and imaging method, can substantially increase mark square toes
Mark precision.
In order to solve posed problems above, the technical solution used in the present invention is：
A kind of imaging system of the double imaging vision vibration mirror scanning square toes of double light path, includes white light source, greatly
View field image acquisition module, the first eyeglass, the second eyeglass, small field of view image capture module and galvanometer；
Outside laser beam passes through the second eyeglass and reaches galvanometer, after vibration mirror reflected, through the first eyeglass
Act on and treat to carry out mark to it on mark object；
Described white light source send illumination path beat bright treat mark object, treat mark object by illumination path
Reflex on the first eyeglass, partial illumination light path is through the first lens reflecting to big view field image acquisition module
In, treat the general image of mark object for collection, pre- mark location is obtained according to described general image
Image coordinate, and then obtain the pendulum angle of galvanometer, drive galvanometer to rotate described pendulum angle；
Partial illumination light path reaches galvanometer through the first eyeglass, and the galvanometer after rotating is reflected to the
On two eyeglasses, entered small field of view image capture module after the second lens reflecting, treated mark for collection
The detail pictures of object, obtain the accurate coordinates of pre- mark location, for complete according to described detail pictures
Become mark operation.
Described big view field image acquisition module and small field of view image capture module are respectively adopted big visual field camera
Positioned with small field of view camera.
A kind of imaging method of the double imaging vision vibration mirror scanning square toes of double light path, this imaging method specifically walks
Suddenly as follows：
Step 1：Gather mark using big view field image acquisition module and small field of view image capture module respectively
Fixed board image and cross image, respectively obtain big visual field camera and small field of view camera calibration coefficient,
Position relationship between deflection angle, and image coordinate and mark region origin；
Step 2：Treat the general image of mark object using the collection of big view field image acquisition module, according to step
Rapid 1 deflection angle obtaining big visual field camera, the described general image treating mark object is rotated to water
Prosposition is put, and obtains the image coordinate of pre- mark location；
Step 3：According between image coordinate obtained in step 1 and mark region origin position close
It is, and the calibration coefficient of big visual field camera carries out Coordinate Conversion, the pre- mark position that step 2 is obtained
The image coordinate put is converted into mark visual field coordinate；
Step 4：Obtain the deflection angle of galvanometer according to described mark visual field coordinate, drive galvanometer to rotate institute
State deflection angle to corresponding position, galvanometer after rotating for the illumination path that white light source sends is anti-
It is mapped in small field of view image capture module；
Step 5：The detail pictures of mark object are treated in the collection of small field of view image capture module, according to described thin
Save image and with reference to the calibration coefficient obtaining small field of view camera in step 1 and deflection angle, obtain pre- beating
The accurate coordinates of cursor position, are used for completing mark operation.
Described step 1 specifically includes：
Step S11：Gather scaling board image using big view field image acquisition module, according to described scaling board
Image obtains the coordinate of angle point in scaling board image, using the coordinate of described angle point and the mark of scaling board
Quasi- value is calculated the calibration coefficient of big visual field camera；
Step S12：Gather cross-shaped image using big view field image acquisition module, obtain cross-shaped image
The coordinate of middle right-angled intersection point, is calculated cross-shaped image according to the coordinate of described right-angled intersection point
Position relationship between the origin of coordinates and mark region origin, and the deflection angle of big visual field camera；
Step S13：Gather scaling board image using small field of view image capture module, according to described scaling board
Image obtains the coordinate of angle point in scaling board image, using the coordinate of described angle point and the mark of scaling board
Quasi- value is calculated the calibration coefficient of small field of view camera；
Step S14：Gather cross-shaped image using small field of view image capture module, obtain cross-shaped image
The coordinate of middle right-angled intersection point, is calculated cross-shaped image according to the coordinate of described right-angled intersection point
Position relationship between the origin of coordinates and mark region origin, and the deflection angle of small field of view camera.
Compared with prior art, the beneficial effects of the present invention is：
In the present invention, coarse positioning is carried out to pre- mark location by big view field image acquisition module, by little
View field image acquisition module carries out fine positioning to pre- mark location, you can to obtain the accurate of mark location
Coordinate, whole imaging system is simple, reliable, and imaging method is easily achieved, and can substantially increase
The mark precision of mark square toes.
Brief description
Fig. 1 is the imaging system schematic diagram of the double imaging vision vibration mirror scanning square toes of double light path of the present invention.
Fig. 2 is the imaging method flow chart of the double imaging vision vibration mirror scanning square toes of double light path of the present invention.
Fig. 3 is that size view field image acquisition module of the present invention gathers scaling board image and cross image
Flow chart.
Fig. 4 is the schematic diagram of actual imaging method of the present invention.
Description of reference numerals：11- treats mark object, 12- white light source, and the big view field image of 13- gathers mould
Block, 14- first eyeglass, 15- second eyeglass, 16- small field of view image capture module, 17- galvanometer, 18-
Laser beam.
Specific embodiment
For the ease of understanding the present invention, below with reference to relevant drawings, the present invention is more fully retouched
State.Presently preferred embodiments of the present invention is given in accompanying drawing.But, the present invention can be different with many
Form is realizing however it is not limited to embodiment described herein.On the contrary, providing these embodiments
Purpose is to make the understanding to the disclosure more thoroughly comprehensive.
Unless otherwise defined, all of technology used herein and scientific terminology with belong to the present invention's
The implication that those skilled in the art are generally understood that is identical.Institute in the description of the invention herein
Use term be intended merely to describe specific embodiment purpose it is not intended that in limit the present invention.
Refering to a kind of double imaging vision vibration mirror scanning square toes of double light path that shown in Fig. 1, the present invention provides
Imaging system, including white light source 12, big view field image acquisition module 13, the first eyeglass 14, second
Eyeglass 15, small field of view image capture module 16 and galvanometer 17.
Outside laser beam 18 passes through the second eyeglass 15 and reaches galvanometer 17, after galvanometer 17 reflection,
After the first eyeglass 14, act on and treat to carry out mark to it on mark object 11.
Described white light source 12 send illumination path beat bright treat mark object 11, treat mark object 11 will
Illumination path reflexes on the first eyeglass 14 of the anti-blue light of laser, and partial illumination light path is through the first eyeglass
14 reflex in big view field image acquisition module 13, and mark is treated in big view field image acquisition module 13 collection
The general image of object 11, and the general image collecting is carried out graphical analysis, calculate pre- mark position
The image coordinate put, described image Coordinate Conversion is become plane coordinates, then by two-dimensional assemblage Cheng Zhen
The pendulum angle of mirror 17, drives galvanometer 17 to rotate described pendulum angle to target location.
Partial illumination light path reaches galvanometer 17 through the first eyeglass 14, galvanometer 17 quilt after rotating
Reflex on the second eyeglass 15 of the anti-ruddiness of laser, after being reflected by the second eyeglass 15, enter small field of view
Image capture module 16, is acquired treating mark object 11 using small field of view image capture module 16
Detail pictures, obtain the accurate coordinates of mark location, for completing mark through the analysis of detail pictures
Operation.
Above-mentioned imaging system carries out coarse positioning using big view field image acquisition module 13, using small field of view figure
As acquisition module 16 carries out fine positioning, both of which is big visual field camera using camera and small field of view camera comes
Positioned, as shown in Figure 2, concrete imaging method is as follows：
Step 1：It is utilized respectively big view field image acquisition module 13 and small field of view image capture module 16
Collection scaling board image and cross image, respectively obtain big visual field camera and the mark of small field of view camera
Determine the position relationship between coefficient, deflection angle, and image coordinate and mark region origin, described
Mark region carries out region during mark for mark square toes, and its initial point is normally at the center in mark region.
As shown in Figure 3, specifically include：
Step S11：Gather scaling board image using big view field image acquisition module 13, using described mark
Fixed board image obtains the coordinate of angle point in scaling board image with reference to image processing method, using described angle point
Coordinate and the standard value of scaling board be calculated the calibration coefficient of big visual field camera；
In this step, after scaling board determines, then the standard value of scaling board is namely fixed.
Step S12：Gather cross-shaped image, described cross using big view field image acquisition module 13
Image comprises a series of planche cross crosspoint of mark region origin, that is, obtain right-angled intersection
The coordinate of point, the right-angled intersection point wherein carrying numeral 0 is mark region origin, thus calculating
Position relationship between the origin of coordinates of cross-shaped image and the mark region origin of reality, Yi Ji great
The deflection angle of visual field camera.
Step S13：Gather scaling board image using small field of view image capture module 16, using described mark
Fixed board image obtains the coordinate of angle point in scaling board image with reference to image processing method, using described angle point
Coordinate and the standard value of scaling board be calculated the calibration coefficient of small field of view camera；
Step S14：Gather cross-shaped image, described cross using small field of view image capture module 16
Image comprises a series of planche cross crosspoint of mark region origin, that is, obtain right-angled intersection
The coordinate of point, the right-angled intersection point wherein carrying numeral 0 is mark region origin, thus calculating
Position relationship between the origin of coordinates of cross-shaped image and the mark region origin of reality, Yi Ji little
The deflection angle of visual field camera.
In above-mentioned, obtained using big view field image acquisition module 13 and small field of view image capture module 16
Image coordinate be the same.
Step 2：Treat the general image of mark object 11 using the collection of big view field image acquisition module 13,
Obtain the deflection angle of big visual field camera according to step 1, by the described general image treating mark object 11
Rotate to horizontal level, recycle image processing method to obtain the image coordinate of pre- mark location.
The image of mark object 11 in this step, is treated using the collection of big view field image acquisition module 13,
The size of image f iotaeld-of-view to be ensured meets the mark scope of galvanometer 17 place mark square toes.Obtained figure
As coordinate is a general position.
Step 3：According between image coordinate obtained in step 1 and mark region origin position close
It is, and the calibration coefficient of big visual field camera carries out Coordinate Conversion, the pre- mark position that step 2 is obtained
The image coordinate put is converted into mark visual field coordinate.
In above-mentioned, for image coordinate system is both for due to the image that obtains and image coordinate, figure
As the initial point of coordinate system is normally at its upper left corner, and the coordinate signal of the reception such as swing of galvanometer is all
According to mark visual field coordinate system, therefore the coordinate obtaining on image is applied to the mark visual field of reality
In, need to carry out image coordinate conversion.
Step 4：Mark visual field coordinate after conversion is transferred to mark square toes, drives galvanometer 17 to deflect
To specified location, illumination path that white light source 12 the sends galvanometer 17 after rotating is made to reflex to
For grabgraf in small field of view image capture module 15.
In this step, comprise a checking list having corrected that inside mark square toes, in conjunction with checking list
Data and step 3 in the mark visual field coordinate obtaining sit it is possible to obtain described mark visual field
The actual deflection angle of the corresponding galvanometer 17 of mark, makes two galvanometer pieces now by Motor drive galvanometer 17
Swing to corresponding position.
Step 5：Treat the detail pictures of mark object 11 using small field of view image capture module 16 collection,
According to described detail pictures and with reference to the calibration coefficient obtaining small field of view camera in step 1 and deflection angle,
Image processing method is recycled to obtain the accurate coordinates of pre- mark location, to carry out the mark operation of reality.
In this step, on the basis of step 4, according to galvanometer 17 reflected light effect and using neglecting
Field picture acquisition module 16 carries out IMAQ, to collection detail pictures carry out image procossing obtain pre-
The accurate coordinates of mark location.
To illustrate above-mentioned imaging method below by example：
As shown in Figure 4, in figure A is the image of gridiron pattern scaling board, and B is the demarcation marking angle point
The image of plate, C is the cross graph image of big view field image acquisition module 13, and D is to neglect field picture to adopt
The cross graph image of collection module 15.E is that in big view field image acquisition module 13, camera has angle
Schematic diagram, F is that in small field of view image capture module 15, camera has angle schematic diagram, and wherein dotted line is
The horizontal line of picture centre, solid line is the line of each cross dot center, if there is not angle in camera,
Two lines are parallel.G is image coordinate system, and wherein the upper left corner is the initial point of coordinate system, and H is platform
Coordinate system, wherein the initial point of platform coordinate system be galvanometer initial point.
In order to more intuitively embody the process of demarcation with the calibration process of big view field image acquisition module 13
As a example illustrate, the calibration process of small field of view is identical with the calibration process of big visual field.
Assume gridiron pattern scaling board specification be：The size of each lattice is n*n (mm).
Concrete implementation process is：
(1) it is set to using the angular coordinate that image processing method extracts gridiron pattern scaling board：
p1(x1,y1)～pn(xn,yn), if total n angle point, each can be calculated by the coordinate of n angle point
The horizontal direction of adjacent corner points and the pixel distance of vertical direction, and obtain the average of both direction
Distance is set to DisHAnd DisV, then shown in the calibration coefficient of camera is calculated as follows：
Calibration_X=n/DisH
Calibration_Y=n/DisV
(2) pixel coordinate of a series of right-angled intersection point is obtained using image processing method, wherein 0
The coordinate of point is set to O (xo,yo), this point actual for mark initial point i.e. (0,0) point, if in figure any one
The coordinate of non-zero point is set to p (xp,yp) it is assumed that the deflection angle of camera is a degree, then the coordinate on image
Rotation transformation formula is as follows：Its pivot is 0 point of its coordinate is O (xo,yo)；
(3) mode being converted into plane coordinates is：
X=Xnew-xo
Y=Ynew-yo
Now (X, Y) is the coordinate in plane, and unit is pixel.
(4) pixel coordinate is converted into millimeter, conversion regime is：
Xmm=X*Calibration_X
Ymm=Y*Calibration_Y
X nowmmAnd YmmFor actual mark plane coordinates, by coordinate points now according to mark side
Checking list within head is converted into the pendulum angle of galvanometer 17, drives galvanometer 17 just to swing to this angle
The detail pictures comprising P can be collected using small field of view image capture module 16.
Above-described embodiment is the present invention preferably embodiment, but embodiments of the present invention are not subject to
State the restriction of embodiment, that is made under other any Spirit Essences without departing from the present invention and principle changes
Become, modify, substitute, combine, simplify, all should be equivalent substitute mode, be included in the present invention
Protection domain within.
Claims (4)
1. a kind of double imaging vision vibration mirror scanning square toes of double light path imaging system it is characterised in that：Bag
Include white light source (12), big view field image acquisition module (13), the first eyeglass (14), the second eyeglass
(15), small field of view image capture module (16) and galvanometer (17)；Outside laser beam (18) is thoroughly
Cross the second eyeglass (15) and reach galvanometer (17), after galvanometer (17) reflection, through the first eyeglass
(14) act on and treat to carry out mark to it on mark object (11)；
Described white light source (12) send illumination path beat bright treat mark object (11), treat mark object
(11) illumination path is reflexed on the first eyeglass (14), partial illumination light path is through the first eyeglass (14)
Reflex in big view field image acquisition module (13), treat the overall diagram of mark object (11) for collection
Picture, obtains the image coordinate of pre- mark location, and then obtains galvanometer (17) according to described general image
Pendulum angle, drives galvanometer (17) to rotate described pendulum angle；
Partial illumination light path reaches galvanometer (17) through the first eyeglass (14), the galvanometer after rotating
(17) it is reflected on the second eyeglass (15), after being reflected by the second eyeglass (15), enter small field of view figure
As acquisition module (16), treat the detail pictures of mark object (11) for collection, according to described details
Image obtains the accurate coordinates of pre- mark location, is used for completing mark operation.
2. the imaging system of the double imaging vision vibration mirror scanning square toes of double light path according to claim 1,
It is characterized in that：Described big view field image acquisition module (13) and small field of view image capture module (16)
It is respectively adopted big visual field camera and small field of view camera to be positioned.
3. a kind of double imaging vision vibration mirror scanning square toes of double light path imaging method it is characterised in that：Should
Imaging method comprises the following steps that：
Step 1：Using big view field image acquisition module (13) and small field of view image capture module (16)
Collection scaling board image and cross image respectively, respectively obtains big visual field camera and small field of view camera
Position relationship between calibration coefficient, deflection angle, and image coordinate and mark region origin；
Step 2：Treat the entirety of mark object (11) using the collection of big view field image acquisition module (13)
Image, obtains the deflection angle of big visual field camera according to step 1, by the described mark object (11) treated
General image rotates to horizontal level, and obtains the image coordinate of pre- mark location；
Step 3：According between image coordinate obtained in step 1 and mark region origin position close
It is, and the calibration coefficient of big visual field camera carries out Coordinate Conversion, the pre- mark location that step 2 is obtained
Image coordinate be converted into mark visual field coordinate；
Step 4：Obtain the deflection angle of galvanometer (17) according to described mark visual field coordinate, drive galvanometer
(17) rotate described deflection angle to corresponding position, the illumination path that white light source (12) sends leads to
Cross the galvanometer (17) after rotating to reflex in small field of view image capture module (16)；
Step 5：The detail pictures of mark object (11) are treated in small field of view image capture module (16) collection,
According to described detail pictures and with reference to the calibration coefficient obtaining small field of view camera in step 1 and deflection angle,
Obtain the accurate coordinates of pre- mark location, be used for completing mark operation.
4. the imaging side of double imaging vision vibration mirror scanning square toes of a kind of double light path as claimed in claim 3
Method it is characterised in that：Described step 1 specifically includes：
Step S11：Gather scaling board image using big view field image acquisition module (13), according to described
Scaling board image obtains the coordinate of angle point in scaling board image, using coordinate and the scaling board of described angle point
Standard value be calculated the calibration coefficient of big visual field camera；
Step S12：Gather cross-shaped image using big view field image acquisition module (13), obtain cross
The coordinate of right-angled intersection point in shape image, is calculated cross figure according to the coordinate of described right-angled intersection point
Position relationship between the origin of coordinates of picture and mark region origin, and the deflection angle of big visual field camera
Degree；
Step S13：Gather scaling board image using small field of view image capture module (16), according to described
Scaling board image obtains the coordinate of angle point in scaling board image, using coordinate and the scaling board of described angle point
Standard value be calculated the calibration coefficient of small field of view camera；
Step S14：Gather cross-shaped image using small field of view image capture module (16), obtain cross
The coordinate of right-angled intersection point in shape image, is calculated cross figure according to the coordinate of described right-angled intersection point
Position relationship between the origin of coordinates of picture and mark region origin, and the deflection angle of small field of view camera
Degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510454115.2A CN106392309B (en) | 2015-07-29 | 2015-07-29 | The imaging system and imaging method of the double imaging vision vibration mirror scanning square toes of double light path |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510454115.2A CN106392309B (en) | 2015-07-29 | 2015-07-29 | The imaging system and imaging method of the double imaging vision vibration mirror scanning square toes of double light path |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106392309A true CN106392309A (en) | 2017-02-15 |
| CN106392309B CN106392309B (en) | 2018-07-06 |
Family
ID=58008699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510454115.2A Active CN106392309B (en) | 2015-07-29 | 2015-07-29 | The imaging system and imaging method of the double imaging vision vibration mirror scanning square toes of double light path |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106392309B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107138860A (en) * | 2017-05-31 | 2017-09-08 | 武汉森托尼激光有限公司 | A kind of interior engraving system quick and precisely positioned |
| CN108406089A (en) * | 2018-01-26 | 2018-08-17 | 大族激光科技产业集团股份有限公司 | A kind of double light path laser marking equipment and its marking method |
| CN109848138A (en) * | 2018-12-10 | 2019-06-07 | 北京电子工程总体研究所 | A kind of aiming point Calibration Method of power grid foreign matter laser cleaning plant |
| CN112108776A (en) * | 2020-09-17 | 2020-12-22 | 广东吉洋视觉技术有限公司 | High-precision laser marking method for LED lamp bead defective product marking |
| CN113260479A (en) * | 2018-12-20 | 2021-08-13 | Etxe-Tar有限公司 | Method and system for processing an object with a light beam |
| CN113520594A (en) * | 2021-05-31 | 2021-10-22 | 浙江大学 | Assembling method of double-light-path 3D imaging module |
| CN113703250A (en) * | 2020-12-31 | 2021-11-26 | 苏州立创致恒电子科技有限公司 | Imaging system and imaging method based on scanning galvanometer |
| CN116140832A (en) * | 2023-04-20 | 2023-05-23 | 深圳市岑科实业有限公司 | Method and system for automatically correcting precision of intelligent inductance coil laser cutting system |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07260416A (en) * | 1994-03-25 | 1995-10-13 | Toshio Honda | Vibration-proof interferometer |
| WO1996004532A1 (en) * | 1994-08-04 | 1996-02-15 | Bayerische Motoren Werke Aktiengesellschaft | Process for determining the vibration characteristics of a body |
| CN201721134U (en) * | 2010-06-04 | 2011-01-26 | 深圳市大族激光科技股份有限公司 | Near wavelength coaxial positioning laser marking system |
| CN102000917A (en) * | 2010-10-25 | 2011-04-06 | 苏州德龙激光有限公司 | LED wafer laser inner cutting and scribing device |
| KR20110129791A (en) * | 2010-05-26 | 2011-12-02 | 한국기계연구원 | Laser processing system and laser processing method using the same |
| CN103128450A (en) * | 2013-02-19 | 2013-06-05 | 深圳市海目星激光科技有限公司 | Ultraviolet laser processing device |
| JP2014210276A (en) * | 2013-04-17 | 2014-11-13 | 三菱マテリアル株式会社 | Laser processing method and processing device for rotating body |
-
2015
- 2015-07-29 CN CN201510454115.2A patent/CN106392309B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07260416A (en) * | 1994-03-25 | 1995-10-13 | Toshio Honda | Vibration-proof interferometer |
| WO1996004532A1 (en) * | 1994-08-04 | 1996-02-15 | Bayerische Motoren Werke Aktiengesellschaft | Process for determining the vibration characteristics of a body |
| KR20110129791A (en) * | 2010-05-26 | 2011-12-02 | 한국기계연구원 | Laser processing system and laser processing method using the same |
| CN201721134U (en) * | 2010-06-04 | 2011-01-26 | 深圳市大族激光科技股份有限公司 | Near wavelength coaxial positioning laser marking system |
| CN102000917A (en) * | 2010-10-25 | 2011-04-06 | 苏州德龙激光有限公司 | LED wafer laser inner cutting and scribing device |
| CN103128450A (en) * | 2013-02-19 | 2013-06-05 | 深圳市海目星激光科技有限公司 | Ultraviolet laser processing device |
| JP2014210276A (en) * | 2013-04-17 | 2014-11-13 | 三菱マテリアル株式会社 | Laser processing method and processing device for rotating body |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107138860A (en) * | 2017-05-31 | 2017-09-08 | 武汉森托尼激光有限公司 | A kind of interior engraving system quick and precisely positioned |
| CN108406089B (en) * | 2018-01-26 | 2020-07-14 | 大族激光科技产业集团股份有限公司 | Double-light-path laser marking equipment and marking method thereof |
| CN108406089A (en) * | 2018-01-26 | 2018-08-17 | 大族激光科技产业集团股份有限公司 | A kind of double light path laser marking equipment and its marking method |
| CN109848138B (en) * | 2018-12-10 | 2021-09-10 | 北京电子工程总体研究所 | Aiming point calibration method of power grid foreign matter laser cleaning device |
| CN109848138A (en) * | 2018-12-10 | 2019-06-07 | 北京电子工程总体研究所 | A kind of aiming point Calibration Method of power grid foreign matter laser cleaning plant |
| CN113260479A (en) * | 2018-12-20 | 2021-08-13 | Etxe-Tar有限公司 | Method and system for processing an object with a light beam |
| CN112108776A (en) * | 2020-09-17 | 2020-12-22 | 广东吉洋视觉技术有限公司 | High-precision laser marking method for LED lamp bead defective product marking |
| CN113703250A (en) * | 2020-12-31 | 2021-11-26 | 苏州立创致恒电子科技有限公司 | Imaging system and imaging method based on scanning galvanometer |
| CN113703250B (en) * | 2020-12-31 | 2023-04-07 | 苏州立创致恒电子科技有限公司 | Imaging system and imaging method based on scanning galvanometer |
| CN113520594A (en) * | 2021-05-31 | 2021-10-22 | 浙江大学 | Assembling method of double-light-path 3D imaging module |
| CN113520594B (en) * | 2021-05-31 | 2023-08-08 | 浙江大学 | Assembling method of double-light-path 3D imaging module |
| CN116140832A (en) * | 2023-04-20 | 2023-05-23 | 深圳市岑科实业有限公司 | Method and system for automatically correcting precision of intelligent inductance coil laser cutting system |
| CN116140832B (en) * | 2023-04-20 | 2023-07-04 | 深圳市岑科实业有限公司 | Method and system for automatically correcting precision of intelligent inductance coil laser cutting system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106392309B (en) | 2018-07-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106392309A (en) | Imaging system and method of square scanning head of dual-light-path dual-imaging visual galvanometer | |
| US10132611B2 (en) | Laser scanner | |
| JP5997039B2 (en) | Defect inspection method and defect inspection apparatus | |
| WO2012020696A1 (en) | Device for processing point group position data, system for processing point group position data, method for processing point group position data and program for processing point group position data | |
| AU2014208262B2 (en) | Apparatus and method for image super-resolution using integral shifting optics | |
| JP4885584B2 (en) | Rangefinder calibration method and apparatus | |
| US20130121564A1 (en) | Point cloud data processing device, point cloud data processing system, point cloud data processing method, and point cloud data processing program | |
| JP2015017992A (en) | Method and device for optically scanning and measuring environment | |
| JP2001524228A (en) | Machine vision calibration target and method for determining position and orientation of target in image | |
| CN104469112A (en) | Imaging method and device of large view field | |
| US7620235B2 (en) | Device for scanning three-dimensional objects | |
| Li et al. | Laser scanning based three dimensional measurement of vegetation canopy structure | |
| JP3545542B2 (en) | Wafer rotation direction detection method | |
| CN112254676B (en) | Portable intelligent 3D information acquisition equipment | |
| KR20200046789A (en) | Method and apparatus for generating 3-dimensional data of moving object | |
| CN109506629A (en) | A kind of method of underwater nuclear fuel assembly detection device rotation center calibration | |
| CN205808362U (en) | A kind of Model Reconstruction device | |
| TW202129269A (en) | Laser based inclusion detection system and methods | |
| CN116592766A (en) | Precise three-dimensional measurement method and device based on fusion of laser and monocular vision | |
| KR101436572B1 (en) | 3d shape measuring apparatus using optical triangulation method | |
| CN206583440U (en) | A kind of projected image sighting distance detecting system | |
| CN112304250B (en) | Three-dimensional matching equipment and method between moving objects | |
| Palka et al. | 3D object digitization devices in manufacturing engineering applications and services | |
| JP3637416B2 (en) | Three-dimensional measurement method, three-dimensional measurement system, image processing apparatus, and computer program | |
| JP2022191000A (en) | Dimension measurement device and dimension measurement method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20180614 Address after: 518000 9 new West Road, North Nanshan District high tech park, Shenzhen, Guangdong Applicant after: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD. Applicant after: Shenzhen Dazu robot Co., Ltd. Address before: 518000 9 new West Road, North Nanshan District high tech park, Shenzhen, Guangdong Applicant before: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD. Applicant before: Shenzhen Hans Electric Motor Co., Ltd. |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210914 Address after: 518103 workshop 601, building 3, Zhizao Center Park, No. 12, Chongqing Road, Heping community, Fuhai street, Bao'an District, Shenzhen, Guangdong Province Patentee after: Shenzhen Dazu robot Co.,Ltd. Address before: 518000 9 new West Road, North Nanshan District high tech park, Shenzhen, Guangdong Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. Patentee before: Shenzhen Dazu robot Co.,Ltd. |