CN106380198B - Cadmium-zinc-teiluride target, preparation method and application - Google Patents
Cadmium-zinc-teiluride target, preparation method and application Download PDFInfo
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- CN106380198B CN106380198B CN201610836897.0A CN201610836897A CN106380198B CN 106380198 B CN106380198 B CN 106380198B CN 201610836897 A CN201610836897 A CN 201610836897A CN 106380198 B CN106380198 B CN 106380198B
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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Abstract
The present invention provides a kind of preparation methods of cadmium-zinc-teiluride target, comprising the following steps: A) cadmium telluride powder, zinc telluridse powder and cuprous telluride powder are uniformly mixed, obtain mixed powder；B the mixed powder) is subjected to vacuum heating-press sintering, obtains cadmium-zinc-teiluride target.Raw material of the present invention using cadmium telluride powder, zinc telluridse powder and cuprous telluride powder as preparation cadmium-zinc-teiluride target, cadmium-zinc-teiluride target is made by vacuum hot-pressing, preparation method is simple, it is easy to industrialization production, the cadmium-zinc-teiluride target consistency as made from this method is higher, better mechanical property.In addition, cadmium-zinc-teiluride target produced by the present invention can be applied in solar film battery.The experimental results showed that the density of cadmium-zinc-teiluride target prepared by the present invention has been more than the 99% of theoretical density, consistency is higher；Meanwhile bending strength is in 12MPa or more.
Description
Technical field
The present invention relates to sputtering target material more particularly to a kind of cadmium-zinc-teiluride targets, preparation method and application.
Background technique
With the rapid development of electronics and information industry, membrane science is using increasingly extensive, using film preparation solar-electricity
The industry in pond is also more and more prosperous.Sputtering method is to prepare one of major technique of thin-film material, and the source material of sputter-deposited thin films
Material is target.
Specifically, target is by magnetron sputtering, multi-arc ion coating or other kinds of coating system in work appropriate
The sputtering source that various function films are formed on substrate is sputtered under the conditions of skill.It is found in the developmental research of target, target is different
(such as aluminium target, copper target, stainless steel target, titanium target, nickel target), obtained membrane system (such as superhard, wear-resisting, corrosion-resistant alloy film etc.) also if
Difference, final solar film battery obtained also will be provided with different characteristics.
Target huge number disclosed in the prior art can be divided into metal targets, alloy target material and ceramics according to composition
Compound target.However, the particularity of solar battery makes and not all target is suitable for preparing solar energy film
Battery.In disclosed ceramic compound target, suitable for solar film battery and the target of industrialization production may be implemented
Material type is simultaneously few, meanwhile, rarely have document to refer to the preparation method of corresponding target, thus, still need continual exploitation have compared with
The target and its preparation process of high-compactness and preferable mechanical performance, to expand the industrialization production of target.
Summary of the invention
In view of this, the technical problem to be solved in the present invention is that providing a kind of cadmium-zinc-teiluride target, preparation method and answering
With cadmium-zinc-teiluride target consistency disclosed by the invention is higher, and better mechanical property can be applied in solar film battery.
The present invention provides a kind of cadmium-zinc-teiluride targets, comprising: cadmium telluride, zinc telluridse and cuprous telluride.
Preferably, the molar ratio of the cadmium telluride and the zinc telluridse is 0.9~1.2:0.8~1.1；
Content of the cuprous telluride in the cadmium-zinc-teiluride target is 250mg/kg~330mg/kg.
The present invention provides a kind of preparation methods of cadmium-zinc-teiluride target, comprising the following steps:
A) cadmium telluride powder, zinc telluridse powder and cuprous telluride powder are uniformly mixed, obtain mixed powder；
B the mixed powder) is subjected to vacuum heating-press sintering, obtains cadmium-zinc-teiluride target.
Preferably, the granularity of the cadmium telluride powder is less than 100 mesh, and the granularity of the zinc telluridse powder is less than 100 mesh, institute
The granularity of cuprous telluride powder is stated less than 325 mesh.
Preferably, the molar ratio of the cadmium telluride powder and the zinc telluridse powder is 0.9~1.2:0.8~1.1；It is described
Content of the cuprous telluride powder in mixed powder is 250mg/kg~330mg/kg.
Preferably, step B) in, the vacuum heating-press sintering specifically:
It heats under conditions of vacuum, when temperature reaches 500 DEG C~900 DEG C, is kept the temperature.
Preferably, described keep the temperature includes:
After keeping the temperature 10~50min, start heat-insulating pressurizing, then heat preservation decompression.
Preferably, the pressure of the heat-insulating pressurizing is 10MPa~40MPa, time of the heat-insulating pressurizing be 20min~
40min。
Preferably, after the heat preservation, further includes:
Cooling, decompression, then cools down.
The cadmium-zinc-teiluride target prepared the present invention also provides above-mentioned cadmium-zinc-teiluride target or above-mentioned preparation method is thin in solar energy
The application in film battery field.
The present invention provides a kind of cadmium-zinc-teiluride targets, comprising: cadmium telluride, zinc telluridse and cuprous telluride.This target is fine and close
Degree is higher, and better mechanical property can be applied in solar film battery.
The present invention also provides a kind of preparation methods of cadmium-zinc-teiluride target, comprising the following steps: A) by cadmium telluride powder, tellurium
Change zinc powder body and cuprous telluride powder is uniformly mixed, obtains mixed powder；B the mixed powder) is subjected to vacuum heating-press sintering,
Obtain cadmium-zinc-teiluride target.The present invention is using cadmium telluride powder, zinc telluridse powder and cuprous telluride powder as preparation cadmium-zinc-teiluride target
Cadmium-zinc-teiluride target is made by vacuum hot-pressing in the raw material of material, and preparation method is simple, is easy to industrialization production, by this
Cadmium-zinc-teiluride target consistency made from method is higher, better mechanical property.In addition, cadmium-zinc-teiluride target produced by the present invention can answer
For in solar film battery.The experimental results showed that the density of cadmium-zinc-teiluride target prepared by the present invention has been more than theoretical close
The 99% of degree, consistency is higher；Meanwhile bending strength is in 12MPa or more.
Specific embodiment
Below in conjunction with the embodiment of the present invention, technical solution of the present invention is clearly and completely described, it is clear that institute
The embodiment of description is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention,
Every other embodiment obtained by those of ordinary skill in the art without making creative efforts, belongs to this hair
The range of bright protection.
The present invention provides a kind of cadmium-zinc-teiluride targets, comprising: cadmium telluride, zinc telluridse and cuprous telluride.Include these three groups
The target consistency divided is higher, better mechanical property, meanwhile, also there is preferably electric conductivity, can be applied to solar energy film
In battery.
In above-mentioned cadmium-zinc-teiluride target, the molar ratio of the cadmium telluride and the zinc telluridse be preferably 0.9~1.2:0.8~
1.1；More preferably 0.9~1.1:0.8~1.1.Content of the cuprous telluride in the cadmium-zinc-teiluride target be preferably
250mg/kg~330mg/kg；More preferably 270mg/kg~310mg/kg.
The present invention also provides a kind of preparation methods of cadmium-zinc-teiluride target, comprising the following steps:
A) cadmium telluride powder, zinc telluridse powder and cuprous telluride powder are uniformly mixed, obtain mixed powder；
B the mixed powder) is subjected to vacuum heating-press sintering, obtains cadmium-zinc-teiluride target.
Cadmium telluride powder, zinc telluridse powder and cuprous telluride powder are first uniformly mixed by the present invention, obtain mixed powder.This
Invention has no special limitation, Ke Yiwei to the source of used cadmium telluride powder, zinc telluridse powder and cuprous telluride powder
It is general commercially available.In the present invention, the granularity of the cadmium telluride powder is preferably smaller than 100 mesh；The granularity of the zinc telluridse powder is excellent
Choosing is less than 100 mesh；The granularity of the cuprous telluride powder is preferably smaller than 325 mesh.
In the present invention, the molar ratio of the cadmium telluride powder and the zinc telluridse powder be preferably 0.9~1.2:0.8~
1.1；More preferably 0.9~1.1:0.8~1.1；In certain embodiments of the present invention, the cadmium telluride powder and the telluride
The molar ratio of zinc powder body is 1:1,0.9:1.1 or 1.2:0.8.Content of the cuprous telluride powder in the mixed powder is excellent
It is selected as 250mg/kg~330mg/kg；More preferably 270mg/kg~310mg/kg；In certain embodiments of the present invention, described
Content of the cuprous telluride powder in the mixed powder is 280mg/kg, 290mg/kg or 300mg/kg.
After obtaining mixed powder, the mixed powder is carried out vacuum heating-press sintering by the present invention, obtains cadmium-zinc-teiluride target.It is excellent
Choosing, specifically: the mixed powder is packed into mold, vacuum heating-press sintering is carried out, cadmium-zinc-teiluride target is obtained after demoulding.
In the present invention, the mold is preferably graphite jig；The equipment of the vacuum heating-press sintering is preferably Vacuum Heat
Press furnace.
The vacuum heating-press sintering is preferred are as follows:
It heats under conditions of vacuum, when temperature reaches 500 DEG C~900 DEG C, is kept the temperature.
The present invention has no special limitation to the vacuum degree of the vacuum, under vacuum condition, the present invention preferably≤
5Pa.The present invention has no special limitation to the mode of the heating, is using heating method well known to those skilled in the art
It can.Present invention preferably employs graphite rod heating.The heating rate of the heating is preferably 2~10 DEG C/min, in certain of the invention
In a little embodiments, the heating rate of the heating is 2 DEG C/min, 3 DEG C/min, 5 DEG C/min, 8 DEG C/min, 10 DEG C/min.This hair
It is bright that the uniformity of crystal grain in target is improved by the control rate of heat addition, it has been avoided as much as occurring inside target layering now
As being more advantageous to the mechanical performance for improving target.
When the temperature of heating reaches sintering temperature, kept the temperature.The sintering temperature is 500 DEG C~900 DEG C, in this hair
In bright some embodiments, the sintering temperature is 500 DEG C, 600 DEG C, 700 DEG C, 800 DEG C, 900 DEG C.The present invention is burnt by control
Junction temperature is more advantageous to the consistency for improving target, while being avoided as much as possible the case where target fragmentation occurs and falls side, improves
The mechanical performance of target.The total time of the heat preservation is preferably 1~3h, in certain embodiments of the present invention, the heat preservation
Total time be 1.2h, 1.5h, 1.9h or 2h.
Preferably, the heat preservation specifically: after 10~50min of heat preservation, start heat-insulating pressurizing, then heat preservation decompression.It is more excellent
It is selected as: after 20~30min of heat preservation, starting heat-insulating pressurizing, then heat preservation decompression.
The pressure of the heat-insulating pressurizing is preferably 10MPa~40MPa, more preferably 25MPa~35MPa；The heat preservation adds
The time of pressure is preferably 20min~40min, more preferably 35min~40min.
After the heat-insulating pressurizing, heat preservation decompression is carried out.Preferably, specifically: after the heat-insulating pressurizing, lay down the heat preservation
The pressure of pressurization carries out nature decompression under conditions of heat preservation.
After above-mentioned heat preservation, it is also preferable to include following steps:
Cooling, decompression, then cools down.
The cooling preferably cools down under conditions of being depressured naturally.The present invention to the rate of temperature fall of the cooling simultaneously
Without special limitation, the preferred natural cooling of the present invention.The temperature of the cooling is preferably dropped to 400 DEG C~600 DEG C, is more preferably down to
500 DEG C~600 DEG C, in certain embodiments of the present invention, the temperature of the cooling is down to 400 DEG C, 500 DEG C, 550 DEG C or 600
℃。
After the cooling, depressurized.Pressure after the decompression is preferably 3MPa~15MPa, and more preferably 12MPa~
15MPa。
After the decompression, cooled down.After the cooling, it is also preferable to include demouldings, and then obtain cadmium-zinc-teiluride target.This hair
The bright mode to the cooling has no special limitation, and the present invention is preferably natural cooling.The temperature of the cooling is preferably 35
DEG C hereinafter, more preferably 25~35 DEG C.
The present invention provides a kind of preparation methods of cadmium-zinc-teiluride target, comprising the following steps: A) by cadmium telluride powder, telluride
Zinc powder body and cuprous telluride powder are uniformly mixed, and obtain mixed powder；B the mixed powder) is subjected to vacuum heating-press sintering, is obtained
To cadmium-zinc-teiluride target.The present invention is using cadmium telluride powder, zinc telluridse powder and cuprous telluride powder as preparation cadmium-zinc-teiluride target
Raw material, cadmium-zinc-teiluride target is made by vacuum hot-pressing, preparation method is simple, is easy to industrialization production, by this side
Cadmium-zinc-teiluride target consistency made from method is higher, better mechanical property.The present invention passes through the processing step to vacuum heating-press sintering
And Parameter Conditions further limit, and are more advantageous to cadmium-zinc-teiluride target obtained and obtain higher consistency and preferably mechanicalness
Energy.Meanwhile processing step disclosed by the invention is simple, and process conditions more mitigate, and it is lower to equipment requirement, it is more advantageous to industry
Metaplasia produces.The experimental results showed that the density of cadmium-zinc-teiluride target prepared by the present invention has been more than the 99% of theoretical density, consistency
It is higher；Meanwhile bending strength is in 12MPa or more.
The cadmium-zinc-teiluride target prepared the present invention also provides above-mentioned cadmium-zinc-teiluride target or above-mentioned preparation method is thin in solar energy
The application in film battery field.The applicant can apply the study found that cadmium-zinc-teiluride target electric conductivity prepared by the present invention is preferable
In solar film battery, and higher transfer efficiency can be obtained.Thus, above-mentioned cadmium-zinc-teiluride target or above-mentioned preparation is claimed
Application of the cadmium-zinc-teiluride target of method preparation in solar film battery field.
In order to further illustrate the present invention, with reference to embodiments to a kind of cadmium-zinc-teiluride target provided by the invention, its system
Preparation Method and application are described in detail, but cannot be understood as limiting the scope of the present invention.
Embodiment 1
By granularity less than the cadmium telluride powders of 100 mesh, granularity less than 100 mesh zinc telluridse powder and granularity less than 325
Purpose cuprous telluride powder is uniformly mixed, and obtains mixed powder.The molar ratio of the cadmium telluride powder and the zinc telluridse powder
For 1:1, content of the cuprous telluride powder in the mixed powder is 300mg/kg.
Mixed powder is packed into graphite jig, is placed in vacuum hotpressing stove.Vacuum hotpressing stove is vacuumized, vacuum is worked as
It when degree reaches 5Pa, begins to warm up, the rate of the heating is that 5 DEG C/min is kept the temperature when temperature reaches 700 DEG C.It is described
The total time of heat preservation is 1.5h.The specific steps of the heat preservation are as follows: after heat preservation 20min, start heat-insulating pressurizing, then heat preservation drop
Pressure；The pressure of the heat-insulating pressurizing is 30MPa, and the time of the heat-insulating pressurizing is 40min；After the heat-insulating pressurizing, institute is laid down
The pressure for stating heat-insulating pressurizing carries out nature decompression under conditions of heat preservation.Then, cool down under conditions of being depressured naturally,
After temperature is down to 600 DEG C, start to depressurize, after pressure is down to 12MPa, naturally cools to 25~35 DEG C.Open fire door, demoulding
Afterwards, cadmium-zinc-teiluride target is obtained.
The detection that obtained cadmium-zinc-teiluride target is carried out to consistency, specifically, the cadmium-zinc-teiluride target measured using drainage
The density of material, the experimental results showed that, the density for the cadmium-zinc-teiluride target that the present embodiment obtains is the 99.1% of theoretical density, consistency
It is higher.
According to GB/T 14452-93 " metal bending mechanical test method " standard, to the cadmium-zinc-teiluride target of above-mentioned acquisition
The detection of material progress bending strength.Wherein, specimen size b*h*L (mm)=10*20*100, the experimental results showed that, the present embodiment
The bending strength of obtained cadmium-zinc-teiluride target is 12.5MPa.
Embodiment 2
By granularity less than the cadmium telluride powders of 100 mesh, granularity less than 100 mesh zinc telluridse powder and granularity less than 325
Purpose cuprous telluride powder is uniformly mixed, and obtains mixed powder.The molar ratio of the cadmium telluride powder and the zinc telluridse powder
For 1:1, content of the cuprous telluride powder in the mixed powder is 300mg/kg.
Mixed powder is packed into graphite jig, is placed in vacuum hotpressing stove.Vacuum hotpressing stove is vacuumized, vacuum is worked as
It when degree reaches 5Pa, begins to warm up, the rate of the heating is that 10 DEG C/min is kept the temperature when temperature reaches 800 DEG C.It is described
The total time of heat preservation is 2h.The specific steps of the heat preservation are as follows: after heat preservation 25min, start heat-insulating pressurizing, then heat preservation decompression；
The pressure of the heat-insulating pressurizing is 25MPa, and the time of the heat-insulating pressurizing is 40min；After the heat-insulating pressurizing, the guarantor is laid down
The pressure of temperature pressurization carries out nature decompression under conditions of heat preservation.Then, cool down under conditions of being depressured naturally, work as temperature
After degree is down to 500 DEG C, starts to depressurize, after pressure is down to 12MPa, naturally cool to 25~35 DEG C.Fire door is opened, after demoulding, is obtained
To cadmium-zinc-teiluride target.
The detection that obtained cadmium-zinc-teiluride target is carried out to consistency, specifically, the cadmium-zinc-teiluride target measured using drainage
The density of material, the experimental results showed that, the density for the cadmium-zinc-teiluride target that the present embodiment obtains is the 99.3% of theoretical density, consistency
It is higher.
According to GB/T 14452-93 " metal bending mechanical test method " standard, to the cadmium-zinc-teiluride target of above-mentioned acquisition
The detection of material progress bending strength.Wherein, specimen size b*h*L (mm)=10*20*100, the experimental results showed that, the present embodiment
The bending strength of obtained cadmium-zinc-teiluride target is 12.3MPa.
Embodiment 3
By granularity less than the cadmium telluride powders of 100 mesh, granularity less than 100 mesh zinc telluridse powder and granularity less than 325
Purpose cuprous telluride powder is uniformly mixed, and obtains mixed powder.The molar ratio of the cadmium telluride powder and the zinc telluridse powder
For 1:1, content of the cuprous telluride powder in the mixed powder is 300mg/kg.
Mixed powder is packed into graphite jig, is placed in vacuum hotpressing stove.Vacuum hotpressing stove is vacuumized, vacuum is worked as
It when degree reaches 5Pa, begins to warm up, the rate of the heating is that 8 DEG C/min is kept the temperature when temperature reaches 900 DEG C.It is described
The total time of heat preservation is 1.2h.The specific steps of the heat preservation are as follows: after heat preservation 30min, start heat-insulating pressurizing, then heat preservation drop
Pressure；The pressure of the heat-insulating pressurizing is 35MPa, and the time of the heat-insulating pressurizing is 35min；After the heat-insulating pressurizing, institute is laid down
The pressure for stating heat-insulating pressurizing carries out nature decompression under conditions of heat preservation.Then, cool down under conditions of being depressured naturally,
After temperature is down to 600 DEG C, start to depressurize, after pressure is down to 15MPa, naturally cools to 25~35 DEG C.Open fire door, demoulding
Afterwards, cadmium-zinc-teiluride target is obtained.
The detection that obtained cadmium-zinc-teiluride target is carried out to consistency, specifically, the cadmium-zinc-teiluride target measured using drainage
The density of material, the experimental results showed that, the density for the cadmium-zinc-teiluride target that the present embodiment obtains is the 99.2% of theoretical density, consistency
It is higher.
According to GB/T 14452-93 " metal bending mechanical test method " standard, to the cadmium-zinc-teiluride target of above-mentioned acquisition
The detection of material progress bending strength.Wherein, specimen size b*h*L (mm)=10*20*100, the experimental results showed that, the present embodiment
The bending strength of obtained cadmium-zinc-teiluride target is 12.2MPa.
Embodiment 4
By granularity less than the cadmium telluride powders of 100 mesh, granularity less than 100 mesh zinc telluridse powder and granularity less than 325
Purpose cuprous telluride powder is uniformly mixed, and obtains mixed powder.The molar ratio of the cadmium telluride powder and the zinc telluridse powder
For 0.9:1.1, content of the cuprous telluride powder in the mixed powder is 280mg/kg.
Mixed powder is packed into graphite jig, is placed in vacuum hotpressing stove.Vacuum hotpressing stove is vacuumized, vacuum is worked as
It when degree reaches 4Pa, begins to warm up, the rate of the heating is that 2 DEG C/min is kept the temperature when temperature reaches 600 DEG C.It is described
The total time of heat preservation is 1.9h.The specific steps of the heat preservation are as follows: after heat preservation 30min, start heat-insulating pressurizing, then heat preservation drop
Pressure；The pressure of the heat-insulating pressurizing is 30MPa, and the time of the heat-insulating pressurizing is 35min；After the heat-insulating pressurizing, institute is laid down
The pressure for stating heat-insulating pressurizing carries out nature decompression under conditions of heat preservation.Then, cool down under conditions of being depressured naturally,
After temperature is down to 550 DEG C, start to depressurize, after pressure is down to 12MPa, naturally cools to 25~35 DEG C.Open fire door, demoulding
Afterwards, cadmium-zinc-teiluride target is obtained.
The detection that obtained cadmium-zinc-teiluride target is carried out to consistency, specifically, the cadmium-zinc-teiluride target measured using drainage
The density of material, the experimental results showed that, the density for the cadmium-zinc-teiluride target that the present embodiment obtains is the 99.3% of theoretical density, consistency
It is higher.
According to GB/T 14452-93 " metal bending mechanical test method " standard, to the cadmium-zinc-teiluride target of above-mentioned acquisition
The detection of material progress bending strength.Wherein, specimen size b*h*L (mm)=10*20*100, the experimental results showed that, the present embodiment
The bending strength of obtained cadmium-zinc-teiluride target is 12.3MPa.
Embodiment 5
By granularity less than the cadmium telluride powders of 100 mesh, granularity less than 100 mesh zinc telluridse powder and granularity less than 325
Purpose cuprous telluride powder is uniformly mixed, and obtains mixed powder.The molar ratio of the cadmium telluride powder and the zinc telluridse powder
For 1.2:0.8, content of the cuprous telluride powder in the mixed powder is 290mg/kg.
Mixed powder is packed into graphite jig, is placed in vacuum hotpressing stove.Vacuum hotpressing stove is vacuumized, vacuum is worked as
It when degree reaches 3Pa, begins to warm up, the rate of the heating is that 3 DEG C/min is kept the temperature when temperature reaches 500 DEG C.It is described
The total time of heat preservation is 2h.The specific steps of the heat preservation are as follows: after heat preservation 25min, start heat-insulating pressurizing, then heat preservation decompression；
The pressure of the heat-insulating pressurizing is 35MPa, and the time of the heat-insulating pressurizing is 25min；After the heat-insulating pressurizing, the guarantor is laid down
The pressure of temperature pressurization carries out nature decompression under conditions of heat preservation.Then, cool down under conditions of being depressured naturally, work as temperature
After degree is down to 400 DEG C, starts to depressurize, after pressure is down to 12MPa, naturally cool to 25~35 DEG C.Fire door is opened, after demoulding, is obtained
To cadmium-zinc-teiluride target.
The detection that obtained cadmium-zinc-teiluride target is carried out to consistency, specifically, the cadmium-zinc-teiluride target measured using drainage
The density of material, the experimental results showed that, the density for the cadmium-zinc-teiluride target that the present embodiment obtains is the 99.1% of theoretical density, consistency
It is higher.
According to GB/T 14452-93 " metal bending mechanical test method " standard, to the cadmium-zinc-teiluride target of above-mentioned acquisition
The detection of material progress bending strength.Wherein, specimen size b*h*L (mm)=10*20*100, the experimental results showed that, the present embodiment
The bending strength of obtained cadmium-zinc-teiluride target is 12.1MPa.
The above description of the embodiment is only used to help understand the method for the present invention and its core ideas.To these embodiments
A variety of modifications will be readily apparent to those skilled in the art, the general principles defined herein can be with
Without departing from the spirit or scope of the present invention, it realizes in other embodiments.Therefore, the present invention will not be limited
In the embodiments shown herein, and it is to fit to widest model consistent with the principles and novel features disclosed in this article
It encloses.
Claims (6)
1. a kind of cadmium-zinc-teiluride target, which is characterized in that be made of cadmium telluride, zinc telluridse and cuprous telluride；
The cadmium-zinc-teiluride target is prepared in accordance with the following methods:
A) cadmium telluride powder, zinc telluridse powder and cuprous telluride powder are uniformly mixed, obtain mixed powder；
B the mixed powder) is subjected to vacuum heating-press sintering, obtains cadmium-zinc-teiluride target；
The vacuum heating-press sintering specifically:
It heats under conditions of vacuum, when temperature reaches 500 DEG C~900 DEG C, is kept the temperature；The total time of the heat preservation be 1~
3h；
The heating rate of the heating is 2~10 DEG C/min；
The heat preservation includes:
After keeping the temperature 10~50min, starts heat-insulating pressurizing, then lay down the pressure of the heat-insulating pressurizing, under conditions of heat preservation, into
Row is depressured naturally；
The pressure of the heat-insulating pressurizing is 10MPa~40MPa, and the time of the heat-insulating pressurizing is 20min~40min；
After the heat preservation, further includes:
400 DEG C~600 DEG C are cooled under conditions of being depressured naturally, then is decompressed to 3MPa~15MPa, is then cooled down.
2. cadmium-zinc-teiluride target according to claim 1, which is characterized in that
The molar ratio of the cadmium telluride and the zinc telluridse is 0.9~1.2:0.8~1.1；
Content of the cuprous telluride in the cadmium-zinc-teiluride target is 250mg/kg~330mg/kg.
3. a kind of preparation method of cadmium-zinc-teiluride target, which comprises the following steps:
A) cadmium telluride powder, zinc telluridse powder and cuprous telluride powder are uniformly mixed, obtain mixed powder；
B the mixed powder) is subjected to vacuum heating-press sintering, obtains cadmium-zinc-teiluride target；
The vacuum heating-press sintering specifically:
It heats under conditions of vacuum, when temperature reaches 500 DEG C~900 DEG C, is kept the temperature；The total time of the heat preservation be 1~
3h；
The heating rate of the heating is 2~10 DEG C/min；
The heat preservation includes:
After keeping the temperature 10~50min, starts heat-insulating pressurizing, then lay down the pressure of the heat-insulating pressurizing, under conditions of heat preservation, into
Row is depressured naturally；
The pressure of the heat-insulating pressurizing is 10MPa~40MPa, and the time of the heat-insulating pressurizing is 20min~40min；
After the heat preservation, further includes:
400 DEG C~600 DEG C are cooled under conditions of being depressured naturally, then is decompressed to 3MPa~15MPa, is then cooled down.
4. preparation method according to claim 3, which is characterized in that the granularity of the cadmium telluride powder is less than 100 mesh, institute
The granularity of zinc telluridse powder is stated less than 100 mesh, the granularity of the cuprous telluride powder is less than 325 mesh.
5. preparation method according to claim 3, which is characterized in that
The molar ratio of the cadmium telluride powder and the zinc telluridse powder is 0.9~1.2:0.8~1.1；
Content of the cuprous telluride powder in mixed powder is 250mg/kg~330mg/kg.
6. preparation side described in cadmium-zinc-teiluride target or claim 3~5 any one described in claim 1~2 any one
Application of the cadmium-zinc-teiluride target of method preparation in solar film battery field.
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| CN108179387A (en) * | 2017-12-28 | 2018-06-19 | 清远先导材料有限公司 | A kind of preparation method of copper indium gallium selenide base system row target |
| CN109704766A (en) * | 2019-01-21 | 2019-05-03 | 江西科泰新材料有限公司 | Zinc telluridse mixes the production technology of cuprous telluride target |
| CN111647857A (en) * | 2020-05-27 | 2020-09-11 | 先导薄膜材料（广东）有限公司 | Method for recycling residual target of cadmium telluride thin film battery |
| CN113121232A (en) * | 2021-04-23 | 2021-07-16 | 先导薄膜材料（广东）有限公司 | Preparation method of conductive zinc telluride target |
| CN113233870B (en) * | 2021-04-25 | 2023-01-13 | 先导薄膜材料（广东）有限公司 | Cadmium oxide-doped target material and preparation method and application thereof |
| CN113372117B (en) * | 2021-06-11 | 2023-03-10 | 先导薄膜材料有限公司 | Preparation method of zinc telluride copper-doped target material |
| CN113336549B (en) * | 2021-06-15 | 2023-10-10 | 先导薄膜材料（广东）有限公司 | Tellurium-selenium-cadmium target material and preparation method thereof |
| CN113526955A (en) * | 2021-07-30 | 2021-10-22 | 广东先导稀材股份有限公司 | Preparation method of cadmium zinc telluride target |
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