CN106370725A - Integrated system for resonant micro-nano biochemical device - Google Patents
Integrated system for resonant micro-nano biochemical device Download PDFInfo
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- CN106370725A CN106370725A CN201610796608.9A CN201610796608A CN106370725A CN 106370725 A CN106370725 A CN 106370725A CN 201610796608 A CN201610796608 A CN 201610796608A CN 106370725 A CN106370725 A CN 106370725A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
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Abstract
An integrated system for a resonant micro-nano biochemical device comprises a fixing support, a bottom plate, a cover plate, a top plate, a circuit interface, an analog circuit and a digital circuit. The bottom plate is arranged in the upper middle of the fixing support; one side of the middle of the cover plate is provided with a groove to make it convenient for pressing of the micro-nano biochemical device, and the cover plate is positioned on one side of the bottom plate; the top plate is positioned above the cover plate; upper surfaces of the cover plate and the top plate are provided with micro channels in communication, each micro channel comprises a liquid inlet and a liquid outlet, and the micro channels are communicated with grooves of the micro-nano biochemical device; the fixing support, the bottom plate, the cover plate and the top plate are fixed through bolts; the circuit interface is arranged on the other upper side of the bottom plate; the fixing support is fixed to the analog circuit which is connected with the circuit interface, and the analog circuit is used for tracing resonant frequency of the resonant micro-nano biochemical device, extracting, denoising and amplifying alternating-current signals outputted by the resonant micro-nano biochemical device and feeding back to the resonant micro-nano biochemical device for driving; the digital circuit is connected with the analog circuit and used for measuring the resonant frequency and data processing of the resonant micro-nano biochemical device.
Description
Technical field
The technical field of the present invention is related to micro nano biochemical sensitive device, is more particularly to used for resonant mode micro nano biochemical device
Integrated system.
Background technology
With the continuous development and progress of microelectromechanical systems (mems) technology, the sensor based on micro-nano structure is wide
General for biochemical substances detection field., by the use of biochemical substances as recognition component, biochemical reaction is transformed into can for biochemical sensor
Quantitative physics, chemical signal, thus carry out detection and the monitoring of biological substance and chemical substance.This is accomplished by biochemical molecular
Unit or functional molecular are modified in the specific region of micro-nano device as identification material, in order to realize the identification to measured object.
The biological or chemical variable quantity sensing identification afterwards is converted into the output signal that can be used for measuring, and carries out the inspection of biological sample
Survey.
In order to complete the detection to biochemical substances, need to provide an airtight reaction environment for micro nano biochemical device and shake
Rotating ring border, and integrated with signal detection system, follow the trail of and measure the resonant frequency of micro nano biochemical device.The system integration will keep micro-
The activity of the biochemical sensitive material modified received on biochemical device.Signal detection system needs the resonant frequency to micro-nano device to carry out
Follow the trail of, quick high accuracy measurement frequency, data processing and the control to measurement process.
Content of the invention
It is an object of the invention to, provide a kind of integrated system for resonant mode micro nano biochemical device it is ensured that micro-nano is given birth to
Change the activity that device does not destroy biochemical sensitive materials in integrating process, and can accurately and timely follow the trail of and measure multiple micro-nano lifes
Change resonant frequency and its change of device, obtain quality or the concentration of detection sample.
The present invention provides a kind of integrated system for resonant mode micro nano biochemical device, comprising:
One fixed support；
One base plate, it is produced on the centre above fixed support；
One cover plate, the side in the middle of it has groove, is easy to fixing compacting micro nano biochemical device, and this cover plate is located at base plate
Side；
One top board, it is produced on above cover plate；
This cover plate with have the fluid channel connecting above top board, this fluid channel include pass in and out liquid port, this fluid channel with
Groove connection on micro nano biochemical device；
This fixed support, base plate, cover plate and top board are bolted；
One circuit interface, it is produced on the opposite side of substrate；
One analog circuit, is fixed with fixed support thereon, and this analog circuit is connected with circuit interface, and this analog circuit is used for
Follow the trail of the resonant frequency of micro nano biochemical device, AC signal extraction, denoising and the amplification that micro-nano device is exported, and feed back to micro-
Nano parts drive to it；
One digital circuit, it is connected with analog circuit, and this digital circuit is used for measuring the resonant frequency of micro nano biochemical device
And data processing.
From technique scheme as can be seen that the invention has the beneficial effects as follows:
Combine that semi-solid preparation is polymer-bonded and mechanical means in the integrated system of micro nano biochemical device, realize to micro-
Receive the assembling of biochemical device and sealing, it is to avoid integrating process destroys the activity of the biochemical substances modified on device.In signal detection
In system, the frequency response characteristic according to micro-nano device adjusts closed loop, realizes to different components resonant frequency in array structure
Tracking.By the regulation and control to circuit and micro nano biochemical device working condition, the frequency of devices multiple in array structure is carried out
Quickly, in high precision, automatic measurement.
Brief description
For making the object, technical solutions and advantages of the present invention become more apparent, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in more detail, wherein:
Fig. 1 is the integrated system schematic diagram of micro nano biochemical device；
Fig. 2 is the structure chart of the micro nano biochemical device of integrated fluid channel；
Fig. 3 is the signal deteching circuit block diagram of micro nano biochemical device integrated system.
Specific embodiment
Refer to shown in Fig. 1-Fig. 3, the present invention provides a kind of integrated system for resonant mode micro nano biochemical device, bag
Include:
One fixed support 5；
One base plate 9, it is produced on the centre above fixed support 5；
One cover plate 8, the side in the middle of it has groove, is easy to fixing compacting micro nano biochemical device 3, and this cover plate 8 is located at bottom
The side of plate 9, the material of described cover plate 8 is pmma, su8 or pdms；
One top board 7, it is produced on above cover plate 8；
This cover plate 8 with have the fluid channel 6 connecting above top board 7, this fluid channel 6 include pass in and out liquid port 10, this is micro-
Runner 6 is connected with the groove on micro nano biochemical device 3；
This fixed support 5, base plate 9, cover plate 8 and top board 7 are bolted；
One circuit interface 4, it is produced on the opposite side above base plate 9；
One analog circuit 1, is fixed with fixed support 5 thereon, and this analog circuit 1 is connected with circuit interface 4, this analog circuit
1 is used for following the trail of the resonant frequency of micro nano biochemical device, AC signal extraction, denoising and the amplification that micro-nano device is exported, and instead
It is fed to micro-nano device it is driven, described analog circuit 1 includes: a micro-nano device 11 (3) and the detection list circulating connection therewith
Unit 12, amplifying unit 13, exciting unit 14, the detector unit 12 in described analog circuit 1 includes a multidiameter option switch；
One digital circuit 2, it is connected with analog circuit 1, and this digital circuit 2 is used for measuring the resonance frequency of micro nano biochemical device
Rate and data processing, described digital circuit 2 includes a frequency detecting unit 21；One data processing unit 22, its input and frequency
The outfan of rate detector unit 21 connects；One outfan of one result display unit 23, its input and data processing unit 22
Connect；One storage transmission unit 24, its input is connected with another outfan of data processing unit 22.
It is coated with the colloid of one layer of semi-solid preparation between wherein said micro nano biochemical device 3 and base plate 9.
Integrated system provided by the present invention for resonant mode micro nano biochemical device.As shown in Figure 1 integrated system include with
Lower part: analog circuit 1, for being detected to the resonant frequency of micro nano biochemical devices multiple in array structure and following the trail of, complete
Physics and the extraction of electrical signal that one-tenth micro nano biochemical device 3 is obtained, and give subsequent conditioning circuit to carry out data processing.Numeral electricity
Road 2, for the frequency measurement of micro nano biochemical device, data processing and the control to analog circuit in measurement process, and passes through
The concentration of biological sample and quality that display output calculates.The micro nano biochemical device 3 of integrated fluid channel is connect by circuit interface 4
Enter analog circuit and constitute frequency detecting loop.
Fig. 2 illustrates the micro nano biochemical device of integrated fluid channel.Device is mainly by the poly- methyl-prop with turnover liquid port
E pioic acid methyl ester (pmma) top board 7, there is polydimethylsiloxane (pdms) upper cover plate of micro-flow groove structurally and mechanically fixed via
8th, polymethyl methacrylate (pmma) base plate 9 of surface spin coating polydimethylsiloxane (pdms), be mechanically fixed support 5 and
Electrical output signal connecting interface 4 forms.Above-mentioned four layers of platy structure are all marked be aligned by screw, realize fluid channel knot
The accurate assembling of structure, this mechanical means can avoid realizing sealing using heating or plasma process, thus keeping repairing
The activity of the biochemical substances of decorations.The micro nano biochemical device 3 of bio-modification is then aligned by optical microscope it is ensured that reaction chamber
Room be located at directly over it so that tested sample liquid and bio-modification composition completely attach to it is ensured that the verity of subsequent detection with complete
Property；Electrical output signal connecting interface 4 is connected with bio-modification chip by gold thread bonding, completes in micro nano biochemical device
Electrical signal line rearrangement and be connected with signal deteching circuit.There is in upper cover plate 8 fluid channel groove, common with base plate 9
The reaction chamber constituting, provides an airtight vibration environment and reaction environment for resonant mode micro nano biochemical device, can with outer
Portion's pipeline connects composition microfluidic circuit, and by Micropump and micro-valve, the biochemical reaction in micro-nano device and fluid treatment is carried out
Adjust.In fluid channel integrating process, spin coating between upper cover plate 8 and base plate 9 has the polydimethylsiloxanes of one layer of semi-cured state
Alkane (pdms) is sealed, it is emphasized that semi-solid preparation pdms layer on the one hand ensure the tightness of sealing, on the other hand will not flow
Move and cause pipeline to stain.Make on polymethyl methacrylate (pmma) top board 7 and have turnover liquid port 10, outside microfluid system
Portion's pipeline connects composition microfluidic circuit, and external connection flexible pipe simultaneously seals, and realizes sample liquid circulating in microfluid system.
Fixed support 5 passes through precision optical machinery processing and fabricating, and position makes the fixed groove having micro nano biochemical device driver therebetween,
There is special colloid coating at base plate position above groove, realizes driving coupling between exciter component and micro nano biochemical device 3, makes
Device can reach expected working effect.The perforate of middle part is realized accurately being aligned with superstructure, and electrical output signal is even
It is mechanically fixed between connection interface 4 and support 5, to ensure to be bonded the fixation of gold thread, improved system reliability so as to continue steady
Surely work.
Fig. 3 illustrates the signal deteching circuit theory diagram of micro nano biochemical device integrated system.Circuit is by analog circuit 1 He
2 two parts of digital circuit form.Analog circuit 1 is used for the resonant frequency of micro nano biochemical device is tracked, with micro-nano life
Based on changing the frequency response characteristic of device 3, build close loop resonance loop, component frequency follows the trail of circuit.By closed loop, make
Micro nano biochemical device 3 is in self-excitation state, stable vibration at its resonant frequency, and when its resonant frequency because biochemical reaction produces
During changing, resonance circuit can adapt to automatically, realizes the tracking to its resonant frequency in its operating frequency range.Excitation is single
Unit 14 is piezoelectric ceramic piece (pzt), applies excitation external force to micro nano biochemical device 3 so as to produce vibration using inverse piezoelectric effect,
The exciting unit 14 of pzt composition micro nano biochemical device is driven it is ensured that micro-nano device 11 (3) be in continue, stable humorous
Shake state, the mechanical signal of micro-nano device is converted to by electricity by the detector unit 12 that voltage dependent resistor bridge (Wheatstone bridge) forms
Output signal.Amplifier circuit unit 13 is made up of modules such as instrument amplifier, phaselocked loop, phase-shift circuits, for adjusting micro-nano device
The signal amplitude of part resonant tank and phase place.The hardware circuit that digital circuit 2 is built with microcontroller (mcu) as core, in conjunction with
Software program, realizes measurement to micro nano biochemical device resonant frequency, frequency measurement error in 1hz, and complete data processing with
And the control to measurement process, finally by display 23, the testing result of measured object is shown.Signal detection system leads to
Crossing MUX provides running voltage for array micro nano biochemical device, and controls selection array junctions successively by digital circuit 2
One of structure micro-nano device 11 (3) works.By selection that micro nano biochemical device is powered and to circuit working state
Adjustment, carries out automatic detection, and the change according to device resonant frequency to the resonant frequency of micro-nano devices multiple in array structure
Calculate quality or the concentration of measured object.
The work process of the present invention is:
Refer to shown in Fig. 1-Fig. 3, the integrated system work process for resonant mode micro nano biochemical device is:
Measured object (in reaction liquid) passes through turnover liquid port 10 and flows into the miniflow being made up of upper cover plate 8 and base plate 9
In road 6, reach in the groove of micro nano biochemical device 3, measured object is anti-with the surface-sensitive layer modifying micro nano biochemical device 3 in advance
Answer certain time, after by turnover liquid port 10 discharge.It is passed through the removal that cleaning liquid carries out non-specific adsorption again, then carry out
It is dried.So, the specific reaction of measured object and sensitive layer can cause the change of the resonant frequency of micro nano biochemical device 3.Pass through
Resistance pressure type Wheatstone bridge detects this resonant frequency variable quantity so that it may calculate the information such as the quality of measured object, concentration.This resonance
The measurement of frequency variation, is realized by analog circuit 1 and digital circuit 2.It is mutual that pressure drag signal passes through metal from micro nano biochemical device 3
Connection is connected to interface 4 by the electricity outfan of micro nano biochemical device 3, then is connected to analog circuit 1 by interface 4.In analog circuit 1
Detector unit 12 and after amplifier circuit unit 13 is identified and amplifies to signal, micro nano biochemical is fed back to by exciting unit 14
Device 11 (3), completes the system detectio of closed loop；The output signal of the detector unit 12 to analog circuit 1 for the digital circuit 2 is entered
Line frequency detection data is processed, and completes result and show and store transmission.
Particular embodiments described above, has carried out detailed further to the purpose of the present invention, technical scheme and beneficial effect
Describing in detail bright it should be understood that the foregoing is only the specific embodiment of the present invention, being not limited to the present invention, all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvement done etc., should be included in the protection of the present invention
Within the scope of.
Claims (6)
1. a kind of integrated system for resonant mode micro nano biochemical device, comprising:
One fixed support；
One base plate, it is produced on the centre above fixed support；
One cover plate, the side in the middle of it has groove, is easy to fixing compacting micro nano biochemical device, and this cover plate is located at the one of base plate
Side；
One top board, it is produced on above cover plate；
This cover plate with have the fluid channel connecting above top board, this fluid channel includes passing in and out liquid port, this fluid channel and micro-nano
Groove connection on biochemical device；
This fixed support, base plate, cover plate and top board are bolted；
One circuit interface, it is produced on the opposite side of substrate；
One analog circuit, is fixed with fixed support thereon, and this analog circuit is connected with circuit interface, and this analog circuit is used for following the trail of
The resonant frequency of micro nano biochemical device, AC signal extraction, denoising and the amplification that micro-nano device is exported, and feed back to micro-nano device
Part drives to it；
One digital circuit, it is connected with analog circuit, and this digital circuit is used for measuring resonant frequency and the number of micro nano biochemical device
According to process.
2. the integrated system of resonant mode micro nano biochemical device according to claim 1, the material of wherein said cover plate is
Pmma, su8 or pdms.
3. the integrated system of resonant mode micro nano biochemical device according to claim 1, wherein said micro nano biochemical device and
It is coated with the colloid of one layer of semi-solid preparation between base plate.
4. the integrated system of resonant mode micro nano biochemical device according to claim 1, wherein said analog circuit includes: one
Micro-nano device and circulate the detector unit of connection, amplifying unit, exciting unit therewith.
5. the integrated system of resonant mode micro nano biochemical device according to claim 4, the inspection in wherein said analog circuit
Survey unit and include a multidiameter option switch.
6. the integrated system of resonant mode micro nano biochemical device according to claim 1, wherein said digital circuit includes one
Frequency detecting unit；One data processing unit, its input is connected with the outfan of frequency detecting unit；One result display is single
Unit, its input is connected with an outfan of data processing unit；One storage transmission unit, its input and data processing unit
Another outfan connect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610796608.9A CN106370725A (en) | 2016-08-31 | 2016-08-31 | Integrated system for resonant micro-nano biochemical device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610796608.9A CN106370725A (en) | 2016-08-31 | 2016-08-31 | Integrated system for resonant micro-nano biochemical device |
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| CN106370725A true CN106370725A (en) | 2017-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610796608.9A Pending CN106370725A (en) | 2016-08-31 | 2016-08-31 | Integrated system for resonant micro-nano biochemical device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113456966A (en) * | 2017-02-27 | 2021-10-01 | 第三极股份有限公司 | System and method for mobile generation of nitric oxide |
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Application publication date: 20170201 |