CN106370598A - Microsphere control device based on surface acoustic waves and manufacturing method thereof, and imaging system - Google Patents
Microsphere control device based on surface acoustic waves and manufacturing method thereof, and imaging system Download PDFInfo
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- CN106370598A CN106370598A CN201610807871.3A CN201610807871A CN106370598A CN 106370598 A CN106370598 A CN 106370598A CN 201610807871 A CN201610807871 A CN 201610807871A CN 106370598 A CN106370598 A CN 106370598A
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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Abstract
The invention discloses a microsphere control device based on surface acoustic waves and a manufacturing method thereof, and an imaging system. The microsphere control device comprises a substrate and a plurality of electrode parts, wherein the substrate is made from a piezoelectric material; and the electrode parts are positioned in the plane of the substrate, the electrode parts at least comprise two electrode parts, along a first direction, which are arranged symmetrically about a target area, and the target area is used for placing microsphere samples. An alternating current signal is introduced into the electrode parts, the surface acoustic waves can be stimulated and generated on the surface of the substrate, the surface acoustic waves propagating in opposite directions are laminated in the target area to form a surface acoustic wave stationary field, and microspheres are driven to move under the effect of the stationary field. According to the microsphere control device based on surface acoustic waves and the imaging system disclosed by the invention, the microspheres are controlled to move by using the surface acoustic waves, the formation of an imaging blind area can be avoided during scanning imaging, and overall area imaging of the samples can be obtained.
Description
Technical field
The present invention relates to micro-imaging technique field, more particularly to a kind of microsphere manipulation device based on surface acoustic wave and
Its manufacture method.The invention still further relates to a kind of imaging system.
Background technology
With the development of modern biology and material science, in the research of microstructure, imaging resolution is proposed more
Carry out higher requirement, scientist wishes to disclose life process and the physical essence of material property from molecular level.
For ordinary optical microscope, due to being limited by optical diffraction limit, its lateral resolution is limited in
More than 200nm, for research, deep sub-wavelength structure or cellularity far can not meet requirement for this.In order to break through diffraction
The restriction of the limit, scientific research personnel all over the world expands in-depth study to this, and wherein, most typical several method includes being subject to
Sharp launch loss microtechnique, Structured Illumination microscopy, random light field rebuild microscopy, fluorescin photoactivation location technology
Deng, but this several method is mostly based on the subsequent treatment of complex data, there is system complex, expensive, less efficient
The problems such as it is impossible to be applied generally.
Based on the super-resolution imaging technology of microsphere nano coning effect, first by Univ Manchester UK research team in
Propose within 2011, this technology adopts white-light illuminating light source, excite sample to produce evanescent waves, the microsphere coupling using micron dimension disappears
Die ripple, and carries out the virtual image that generation amplification is amplified in space, then carries out secondary imaging to the virtual image, to obtain the super-resolution of sample surfaces
Micro-image it is achieved that reach the micro-imaging of far field super-resolution based on white light Both wide field illumination.This technology is based on its system and ties
Structure is simple, efficiency high, with low cost the advantages of be subject to common concern.
At present, in the super-resolution micro-imaging technique of application microsphere, because during scanning imagery, microsphere is immovable,
Therefore the region around microsphere position can only be imaged, imaging blind area can be formed at microsphere position, therefore leading to can not
Obtain the entire area imaging of sample.
Content of the invention
In consideration of it, the present invention provides a kind of microsphere manipulation device based on surface acoustic wave, realize manipulating using surface acoustic wave
Microsphere moves, thus avoiding forming imaging blind area in scanning imagery, to ensure to obtain the entire area imaging of sample.The present invention
A kind of microsphere manipulation device manufacture method based on surface acoustic wave and imaging system are also provided.
For achieving the above object, the following technical scheme of present invention offer:
A kind of microsphere manipulation device based on surface acoustic wave, including substrate and multiple electrodes portion；
Described substrate is made with piezoelectric；
Multiple described electrode area in described substrate plane, multiple described electrode portions at least include in the first direction and with
Two described electrode portions being oppositely arranged centered on target area, described target area is used for placing microsphere sample.
Alternatively, multiple described electrode portions at least also include relatively setting in a second direction and centered on described target area
The two described electrode portions put.
Alternatively, described first direction and described second direction are vertically arranged.
Alternatively, multiple described electrode portions also include being oppositely arranged along third direction and centered on described target area
Two described electrode portions, described third direction is all intersected with described first direction and described second direction.
Alternatively, described electrode portion includes the both sides bus being parallel to each other, and is located at described both sides bus zone line
Periodic arrangement electrode, described electrode is vertical with described bus, and a periodic electrode is included being replaced with both sides bus respectively and connects
The two arrays of electrodes connecing, the middle bobbin of described electrode portion points to described target area.
Alternatively, in described each periodic electrode, one group of electrode include an electrode being connected with the same side bus or
Two electrodes of person.
Alternatively, described piezoelectric includes quartz, Lithium metaniobate, lithium tantalate or LGS.
A kind of imaging system, comprising:
Optical microscope including eyepiece and object lens；
It is arranged on microsphere manipulation device on the object stage of described optical microscope, as above.
A kind of microsphere manipulation device manufacture method based on surface acoustic wave, comprising:
Substrate is made using piezoelectric, in a face deposited metal layer of described substrate；
The mask plate with electrode pattern is formed on the metal level of described substrate；
Form electrode pattern by being dry-etched in metal level, remove photoresist, form electrode portion on the substrate.
Alternatively, also include: silver paste is bonding with the bus of electrode portion by metal wire using solidifying, and drying processes and will glue
Contact solidifies.
By technique scheme as can be seen that the microsphere manipulation device based on surface acoustic wave provided by the present invention, including
Substrate and multiple electrodes portion, wherein substrate are made with piezoelectric, and multiple electrodes portion is located in substrate plane, at least include along the
One direction and two electrode portions being oppositely arranged centered on target area, this target area is used for placing microsphere sample.To electricity
Pole portion is passed through ac signal, and due to piezoelectric effect, the substrate being made with piezoelectric can produce mechanical strain, can swash on surface
Encourage generation surface acoustic wave；The surface acoustic wave that two relative electrode portion excitations produce is propagated in opposite directions, and frequency is identical, in target area
Form standing wave, microsphere is subject to active force in the standing surface acoustic wave field being formed, thus driving microsphere to move after superposition.
Therefore, the microsphere manipulation device based on surface acoustic wave for the present invention and imaging system, realizes manipulating using surface acoustic wave
Microsphere moves, and can avoid the formation of imaging blind area in scanning imagery, can obtain the entire area imaging of sample.
Brief description
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
Have technology description in required use accompanying drawing be briefly described it should be apparent that, drawings in the following description be only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, acceptable
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is that the principle that a kind of microsphere manipulation device based on surface acoustic wave provided in an embodiment of the present invention manipulates microsphere is shown
It is intended to；
Fig. 2 is a kind of schematic diagram of microsphere manipulation device based on surface acoustic wave provided in an embodiment of the present invention；
Fig. 3 is the schematic diagram of the electrode portion of microsphere manipulation device shown in Fig. 2；
Fig. 4 is a kind of flow process of microsphere manipulation device manufacture method based on surface acoustic wave provided in an embodiment of the present invention
Figure；
Fig. 5 is the schematic diagram of the microsphere manipulation device manufacture method based on surface acoustic wave provided in an embodiment of the present invention.
Specific embodiment
In order that those skilled in the art more fully understand the technical scheme in the present invention, real below in conjunction with the present invention
Apply the accompanying drawing in example, the enforcement it is clear that described is clearly and completely described to the technical scheme in the embodiment of the present invention
Example is only a part of embodiment of the present invention, rather than whole embodiments.Based on the embodiment in the present invention, this area is common
The every other embodiment that technical staff is obtained under the premise of not making creative work, all should belong to present invention protection
Scope.
The embodiment of the present invention provides a kind of microsphere manipulation device based on surface acoustic wave, including substrate and multiple electrodes portion；
Described substrate is made with piezoelectric；
Multiple described electrode area in described substrate plane, multiple described electrode portions at least include in the first direction and with
Two described electrode portions being oppositely arranged centered on target area, described target area is used for placing microsphere sample.
As can be seen that the microsphere manipulation device based on surface acoustic wave that the present embodiment provides, including substrate and multiple electrodes
Portion, wherein substrate are made with piezoelectric, and multiple electrodes portion is located in substrate plane, at least includes in the first direction and with target
Two electrode portions being oppositely arranged centered on region, this target area is used for placing microsphere sample.It is passed through alternating current to electrode portion
Signal, due to piezoelectric effect, the substrate being made with piezoelectric can produce mechanical strain, can produce surface sound in surface actuator
Ripple；The surface acoustic wave that two relative electrode portion excitations produce is propagated in opposite directions, and frequency is identical, is formed and stay after the superposition of target area
Ripple, in the standing surface acoustic wave field being formed, microsphere is subject to active force, thus driving microsphere to move, refers to shown in Fig. 1, Fig. 1
Manipulate the principle schematic of microsphere for the present embodiment device.
Therefore, the microsphere manipulation device based on surface acoustic wave for the present invention is realized manipulating microsphere movement using surface acoustic wave,
Imaging blind area can be avoided the formation of during scanning imagery, the entire area imaging of sample can be obtained.
In the standing surface acoustic wave field being formed, the acoustic force that microsphere is subject to includes primary radiation power and time radiant force to microsphere.
Primary radiation power is the active force to microsphere for the stationary field itself, and secondary radiant force is then the power of the scattered sound waves generation of microsphere.Wherein, main
Radiant force plays a leading role, and primary radiation power can be decomposed into axial thrust load and transverse component, axial thrust load along sonic propagation direction,
Its amount of force is more than transverse component, and axial thrust load pushes microsphere to standing wave node, and such microsphere is in the presence of stationary field
Mobile.The axial thrust load f that microsphere is subject torIt is expressed as follows:
Wherein, p0Represent the amplitude of standing wave, vcFor the volume of microsphere, βcRepresent the coefficient of compressibility of microsphere, βwLiquid around representing
The coefficient of compressibility of body, ρcRepresent the density of microsphere, ρwRepresent the density of surrounding liquid, λ is the wavelength of surface acoustic wave, k is wave number, x
Represent the distance of microsphere nearest node in stationary field.
Below the present invention is described in further detail based on the microsphere manipulation device of surface acoustic wave.
The present embodiment microsphere manipulation device, substrate is made with piezoelectric, applies exchange telecommunications to the electrode portion on substrate
Number when, piezoelectric substrate produce mechanical strain.Surface acoustic wave can be produced in surface actuator.The characteristic of piezoelectric determines to produce surface
The performance of sound wave, to consider when selecting piezoelectric the orientation of material, electromechanical coupling factor, temperature stability, wave beam deflection,
The performance parameters such as propagation loss, dielectric constant.In the present embodiment, piezoelectric adopts monocrystalline piezoelectric material, adoptable piezoelectricity
Monocrystal material includes quartz, Lithium metaniobate (linbo3), lithium tantalate (litao3) or LGS (la3ga5sio14).
The present embodiment microsphere manipulation device, in substrate plane, at least provided with one direction and with target area be
Two electrode portions that the heart is oppositely arranged, by two electrode portions being oppositely arranged centered on microsphere sample in one direction, are swashed
Encourage generation surface acoustic wave to manipulate microsphere and move up in one-dimensional square.
In an advantageous embodiment, in substrate plane, at least provided with phase centered on target area in the first direction
Two electrode portions to setting, and two electrode portions being oppositely arranged centered on target area in a second direction, by two
The effect of the surface acoustic wave on individual direction, it is possible to achieve manipulate microsphere and move in two dimensional surface.
Preferably, first direction and second direction are vertically arranged, and refer to shown in Fig. 2, it can be seen that in substrate 1
In plane, it is respectively arranged with electrode portion 2 along orthogonal first direction and second direction.
In another kind of embodiment, on the basis of a upper embodiment, also include in substrate plane along third direction and
Two electrode portions being oppositely arranged centered on target area, described third direction and described first direction and described second direction
All intersect.The effect of the surface acoustic wave being upwardly propagated by three sides, can realize more smart to microsphere displacement planar
True control.Wherein, third direction can flexible with the angle of first direction, second direction.
In the present embodiment, the structure of electrode portion 2 can be arranged as follows, refers to Fig. 2 and Fig. 3, and described electrode portion 2 is wrapped
Include the both sides bus 21 being parallel to each other, and the electrode 20 of the periodic arrangement positioned at described both sides bus 21 zone line, institute
State electrode 20 vertical with described bus 21, wherein, a periodic electrode includes two groups of electricity being alternately connected respectively with both sides bus 21
Pole, that is, in a periodic electrode, one group of electrode is connected with side bus, and another group of electrode is connected with opposite side bus.
It is energized to electrode 20 by bus 21.
In the present embodiment, the middle bobbin of each described electrode portion 2 points to described target area, makes the surface acoustic wave that excitation produces
Propagate along the direction pointing to target area.
Electrode portion described in the present embodiment, major parameter includes electrode cycle, electrode logarithm and aperture.The electrode cycle refers to adjacent
The distance between electrode being connected with the same side bus in two periodic electrode, the electrode cycle determines the surface acoustic wave that excitation produces
Wavelength.
Electrode logarithm refers to the quantity of electrode comprising in each group of electrode in each periodic electrode.Wherein, in one group of electrode
In, it may include an electrode being connected with the same side bus or two electrodes.One group of electrode includes being connected with the same side bus
An electrode, this electrode structure is simple, during making, lithographic accuracy is required relatively low, the surface acoustic wave that its excitation produces can be completely
The control to microsphere movement for the foot.One group of electrode includes two electrodes being connected with the same side bus, and this electrode structure is main
It is applied to and frequency of sound wave is had in the occasion that more precise control requires.
Aperture refers to the distance between adjacent electrode in a periodic electrode.In addition, electrode portion excitation produces surface acoustic wave
Also by thickness of electrode, substrate material and crystal be tangential etc., factor is affected performance.
Exemplary, in a kind of specific embodiment, in the microsphere manipulation device shown in Fig. 3, the setting electrode cycle is
300 μm, the width of electrode is 75 μm, and highly for 150 μm, the surface acoustic wave wavelength that accordingly its excitation produces is 300 μm.
Below the present embodiment is described in detail based on the manufacture method of the microsphere manipulation device of surface acoustic wave.Refer to
A kind of flow chart of microsphere manipulation device manufacture method based on surface acoustic wave that Fig. 4 and Fig. 5, Fig. 4 provide for the present embodiment, figure
5 is the schematic diagram based on the microsphere manipulation device manufacture method of surface acoustic wave for the present embodiment, including step:
S1: substrate is made using piezoelectric, in a face deposited metal layer of described substrate.
Select piezoelectric and electrode material according to demand.Exemplary, in the present embodiment, niobic acid is adopted with piezoelectric
Lithium (linbo3) monocrystalline, make electrode to illustrate, concrete manufacturing process includes using metal cr/au: using Lithium metaniobate (linbo3)
Monocrystalline makes after forming substrate, and substrate two sides is processed by shot blasting, then in the method by evaporating coating for the one side of substrate
Deposition cr/au metal level.
S2: the mask plate with electrode pattern is formed on the metal level of described substrate.
Before carrying out this step, first design has the mask plate of electrode pattern, can pass through autocad, coreldraw12 etc.
Electrode patterning structure required for software design.
Then, the mask plate with electrode pattern is fabricated on substrate metal layer, then the side being exposed by ultraviolet photolithographic
Formula makes mask plate figure be formed, and main technique operation includes: pre-treatment-whirl coating-front baking-exposure-after bake-post-exposure-development.
S3: form electrode pattern by being dry-etched in metal level, remove photoresist, form electrode on the substrate
Portion.
By dry etching, make metal level form electrode pattern, then can be utilized acetone will to cover the photoetching on electrode
Glue removes, and makes and form electrode portion on substrate.
S4: adopt solidification silver paste that metal wire is bonding with the bus of electrode portion, and drying processes and solidifies adhesive spots.Can
In baking oven, adhesive spots are carried out with solidification firmly to put into device.
The microsphere manipulation device based on surface acoustic wave for the present embodiment, is applied in the micro imaging system of microsphere application, profit
Manipulate microsphere with the standing wave that surface acoustic wave is formed planar to move, wide visual field scanning imagery is carried out to sample, in scanning imagery
When avoid formed imaging blind area it is ensured that formed sample entire area imaging.The present embodiment microsphere manipulation device has structure
Simply, low cost and other advantages, can obtain universal and be widely applied.
Accordingly, the embodiment of the present invention also provides a kind of imaging system, comprising:
Optical microscope including eyepiece and object lens；
It is arranged on microsphere manipulation device on the object stage of described optical microscope, as above.
When in actual applications sample is carried out with micro-imaging observation, first the microsphere made manipulation device is placed on optics
On microscopical object stage, the amplification of the object lens of optical microscope and eyepiece is adjusted to adaptive value；Then, sample is put
On the target area of manipulation device substrate, sample instils and contains the suspension of medium microsphere, wherein optionally, adopted
A diameter of 2-9 μm of medium microsphere, refractive index is 1.3-1.9, for example, can adopt a diameter of 5 μm of silicon oxide pellets (n=
1.46).During scanning imagery, the applying ac signal changing electrode portion manipulates microsphere movement.Real by point by point scanning
The now two-dimensional imaging to sample.
The present embodiment micro imaging system, in microsphere application super-resolution imaging technology, is produced using acoustic surface sound wave
Standing wave manipulate liquid in microsphere move, avoid in scanning imagery formation imaging blind area, whole faces of sample can be formed
Long-pending imaging.Therefore, the present embodiment imaging system, realizes the one-tenth to nanometer hyperfine structure using the nanometer coning effect of medium microsphere
Picture.Realize super-resolution imaging, utilize surface acoustic wave to manipulate microsphere simultaneously and move, by surface acoustic wave sound tweezer and microsphere super resolution technology
In conjunction with it is achieved that micro-nano structure wide field fast scan imaging.
Above microsphere manipulation device based on surface acoustic wave provided by the present invention and preparation method thereof, imaging system are entered
Go and be discussed in detail.Specific case used herein is set forth to the principle of the present invention and embodiment, above enforcement
The explanation of example is only intended to help and understands the method for the present invention and its core concept.It should be pointed out that it is general for the art
For logical technical staff, under the premise without departing from the principles of the invention, the present invention can also be carried out with some improvement and modify, this
A little improvement and modification also fall in the protection domain of the claims in the present invention.
Claims (10)
1. a kind of microsphere manipulation device based on surface acoustic wave is it is characterised in that include substrate and multiple electrodes portion；
Described substrate is made with piezoelectric；
In described substrate plane, multiple described electrode portions are at least included in the first direction and with target multiple described electrode area
Two described electrode portions being oppositely arranged centered on region, described target area is used for placing microsphere sample.
2. device according to claim 1 it is characterised in that multiple described electrode portion at least also include in a second direction and
Two described electrode portions being oppositely arranged centered on described target area.
3. device according to claim 2 is it is characterised in that described first direction is vertically arranged with described second direction.
4. device according to claim 3 is it is characterised in that multiple described electrode portion is also included along third direction and with institute
Two described electrode portions being oppositely arranged centered on stating target area, described third direction and described first direction and described second
Direction all intersects.
5. device according to claim 1 is it is characterised in that described electrode portion includes the both sides bus being parallel to each other, with
And it is located at the electrode of the periodic arrangement of described both sides bus zone line, described electrode is vertical with described bus, and a cycle is electric
Pole includes the two arrays of electrodes being alternately connected respectively with both sides bus, and the middle bobbin of described electrode portion points to described target area.
6. device according to claim 5 is it is characterised in that in described each periodic electrode, one group of electrode include with
An electrode or two electrodes that the same side bus connects.
7. device according to claim 1 it is characterised in that described piezoelectric include quartz, Lithium metaniobate, lithium tantalate or
Person's LGS.
8. a kind of imaging system is it is characterised in that include:
Optical microscope including eyepiece and object lens；
It is arranged on the object stage of described optical microscope, as described in any one of claim 1-7 microsphere manipulation device.
9. a kind of microsphere manipulation device manufacture method based on surface acoustic wave is it is characterised in that include:
Substrate is made using piezoelectric, in a face deposited metal layer of described substrate；
The mask plate with electrode pattern is formed on the metal level of described substrate；
Form electrode pattern by being dry-etched in metal level, remove photoresist, form electrode portion on the substrate.
10. manufacture method according to claim 9 is it is characterised in that also include: using solidification silver paste by metal wire with electricity
The bus bonding in pole portion, and drying process adhesive spots are solidified.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108153109A (en) * | 2017-12-29 | 2018-06-12 | 深圳市华星光电技术有限公司 | The preparation method of photoetching agent pattern |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1303537A (en) * | 1998-05-29 | 2001-07-11 | 汤姆森-无线电报总公司 | Transducer with surface acoustic waves with low gap |
| CN1331513A (en) * | 2000-06-27 | 2002-01-16 | 株式会社村田制作所 | Surface acoustic wave device |
| CN1344064A (en) * | 2000-08-31 | 2002-04-10 | 株式会社村田制作所 | Piezoelectric ceramics compsn. for surface sonic wave element and surface sonic wave element |
| US20050215764A1 (en) * | 2004-03-24 | 2005-09-29 | Tuszynski Jack A | Biological polymer with differently charged portions |
| CN104870077A (en) * | 2012-01-31 | 2015-08-26 | 宾夕法尼亚州立大学研究基金会 | Microfluidic manipulation and sorting of particles using tunable standing surface acoustic wave |
| CN104968417A (en) * | 2012-08-01 | 2015-10-07 | 宾夕法尼亚州立大学研究基金会 | High efficiency separation and manipulation of particles and cells |
| CN105204155A (en) * | 2015-09-07 | 2015-12-30 | 华南师范大学 | Display device based on surface acoustic wave technology and method thereof |
-
2016
- 2016-09-07 CN CN201610807871.3A patent/CN106370598A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1303537A (en) * | 1998-05-29 | 2001-07-11 | 汤姆森-无线电报总公司 | Transducer with surface acoustic waves with low gap |
| CN1331513A (en) * | 2000-06-27 | 2002-01-16 | 株式会社村田制作所 | Surface acoustic wave device |
| CN1344064A (en) * | 2000-08-31 | 2002-04-10 | 株式会社村田制作所 | Piezoelectric ceramics compsn. for surface sonic wave element and surface sonic wave element |
| US20050215764A1 (en) * | 2004-03-24 | 2005-09-29 | Tuszynski Jack A | Biological polymer with differently charged portions |
| CN104870077A (en) * | 2012-01-31 | 2015-08-26 | 宾夕法尼亚州立大学研究基金会 | Microfluidic manipulation and sorting of particles using tunable standing surface acoustic wave |
| CN104968417A (en) * | 2012-08-01 | 2015-10-07 | 宾夕法尼亚州立大学研究基金会 | High efficiency separation and manipulation of particles and cells |
| CN105204155A (en) * | 2015-09-07 | 2015-12-30 | 华南师范大学 | Display device based on surface acoustic wave technology and method thereof |
Non-Patent Citations (1)
| Title |
|---|
| 王淑莹 等: "基于微球透镜的任选区高分辨光学显微成像新方法研究", 《物理学报》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108153109A (en) * | 2017-12-29 | 2018-06-12 | 深圳市华星光电技术有限公司 | The preparation method of photoetching agent pattern |
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