CN1063553A - Aneroid range expandor - Google Patents
Aneroid range expandor Download PDFInfo
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- CN1063553A CN1063553A CN 91100239 CN91100239A CN1063553A CN 1063553 A CN1063553 A CN 1063553A CN 91100239 CN91100239 CN 91100239 CN 91100239 A CN91100239 A CN 91100239A CN 1063553 A CN1063553 A CN 1063553A
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- bellows
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Abstract
A kind of range expander of force sensor of diffused silicon, be with contain inside and outside two and bellows that the corrugated diaphragm of sealing is made in all be full of pressure transmitting medium silicone oil, and make that bellows is connected with measuring point in it, outer bellows is connected with silicone oil in the sensor.Increase owing to the pressure of measuring point causes that the inner membrance box body is long-pending, make that the adventitia box body is long-pending also to increase thereupon,, thereby its range is expanded because of the different of both diameters and material make that the pressure of sensor indication are scaled.Suitably the corrugated tube of apolegamy unlike material, shape, diameter can be done the sensor use of high pressure range with the standard force sensor of diffused silicon of best range ability.
Description
The present invention relates to a kind of scale expansion device of force-sensing sensor, belong to the supporting application of force sensor of diffused silicon.
In recent years, use the silicon-diffused force photosensitive elements to get more and more as the measurement instrument product of the sensitive element of the sensor of measuring various power, this be because the stable performance of silicon-diffused force photosensitive elements, highly sensitive and test accurately, the sensor signal to noise ratio (S/N ratio) height made from it, the cause that the linearity is good.The electromechanical integration pressure transducer made from the silicon-diffused force photosensitive elements has greatly and is replacing the trend of traditional pressure measuring instruments from now on.But, owing to the processing technology of silicon-diffused force photosensitive elements and the reason of structure manufacture view, its range ability of force-sensing parts of typing production can only be in 0.01～0.2 MPa (MPa), between the low pressure range in batches at present, for pressure survey higher or the greater amount journey, still can't use this pressure transducer to test.
The range expander that the purpose of this invention is to provide a kind of force sensor of diffused silicon, so as use at present wider above-mentioned in, the measurement range of low pressure range pressure sensor expands to and can measure high pressure (1～100 MPa MPa).
The present invention is achieved in that to be placed with in the re-entrant cavity that the perisporium at a garden cylindricality matrix 1 surrounds contains inside and outside two and the bellows 3 and 4 of sealing, wherein place the bellows 3 in it to be full of pressure transmitting medium, this medium is connected with measuring point by the pore 3A of bellows 3 one sides and the pipe adapter 5 on matrix 1 sidewall, place the bellows 4 in the outside also to be full of pressure transmitting medium, and the pore 4A by this bellows be contained in matrix on the pressure transmitting medium of 6 li of sensors of opposite side be connected, there is cover plate 2 the cavity upper end of matrix as its isolated body.
The present invention can expand the range ability of existing mesolow force-sensing sensor effectively, just can realize it as long as the bellows of suitable apolegamy unlike material and different-diameter, height is formed the extender of structural shape of the present invention.And bellows is habitual at present pressure instrumentation element, uses wider especially in the space flight and aviation industrial system.Corrugated diaphragm is processed into by Special Equipment, can purchase ready-made corrugated diaphragm welding from the market and make bellows, can save the technological process that shapes, and helps reducing cost.Its mechanical characteristic is also relatively good, is linear change basically.In a word, the range expander that utilizes structure of the present invention to make can keep the good advantage of original force sensor of diffused silicon output linearity, helps the acceleration realization of widening the process of transforming with electromechanical integration technology of this novel force-sensing sensor range of application.
Below in conjunction with accompanying drawing, specifically introduce the present invention.
Fig. 1 is the coupled position synoptic diagram of structure principle chart of the present invention and itself and force-sensing sensor.
Referring to Fig. 1, the perisporium of garden cylindricality matrix 1 surrounds a re-entrant cavity, the bellows 3 and the bellows 4 that contain and seal inside and outside two are arranged in the cavity, wherein place the bellows 3 in it to be full of pressure transmitting medium silicone oil, this medium is connected with measuring point by the pore 3A of this bellows one side and the tube head 5 on matrix 1 sidewall again.Pipe adapter 5 is to be screwed into the screw on the matrix 1 shrinkage pool downside wall and to join together with matrix.Place the bellows 4 in the outside also to be full of pressure transmitting medium silicone oil, silicone oil not only works incompressible liquid effects of transmitting pressure here, but also the insulating effect of exocoel in rising.The pore 4A of the silicone oil of exocoel by this bellows be contained in matrix on the pressure transmitting medium silicone oil of 6 li of sensors of opposite side be connected, there is cover plate 2 the cavity upper end of matrix 1 as its isolated body.Bellows among the figure is to be welded with corrugated diaphragm.Fig. 1 has also shown the coupling method of the present invention and pressure transducer.Among the figure with depicted as solid lines be exactly range expander of the present invention, be exactly the sensor 6 that joins use with the present invention together and with dashed lines is drawn, it is to connect with it by the external thread on the shrinkage pool upper end lateral wall of matrix 1.
Principle of work of the present invention is: the pressure of measured point reaches in the cavity of interior bellows 3 of the present invention via pressure transmitting medium by pore 3A, medium pressurized in the chamber just forces the corrugated diaphragm elongation of bellows 3, thereby makes in its volume increase △ V in the diameter D with the convoluted diaphragm of interior bellows, in the material H and the pressure P of measuring point is surveyed all proportional example relation.Because interior bellows is inclusive within the outer bellows, can make the volume of outer bellows 4 increase △ V too owing to the transmission of the pressure transmitting medium silicone oil that is full of too in the bellows outside so interior bellows pressurized increases in the △ V also its volume, just the corrugated diaphragm of feasible outer bellows extends the increase that reaches volume thereupon.The increase △ V of its volume outer also with the diameter D of outer bellows convoluted diaphragm outside, material H pressure P outer and sensor passes proportional relation, and △ V interior=△ V outside, if inside and outside bellows is all used the convoluted diaphragm manufacturing of identical material, then have
P passes=(in the interior convoluted diaphragm diameter D)/(outer ripple diaphragm diameter D is outer) * P survey
Relational expression exists.Because the diameter of outer corrugated diaphragm is more many greatly than the diameter of interior corrugated diaphragm, it is reduced just to make that pressure that sensor measured also concerns according to the above ratio than the pressure of actual measuring point, has just expanded the range ability of sensor.As long as suitably select the corrugated diaphragm of interior bellows and the corrugated diaphragm of outer bellows of different-diameter, difformity and unlike material, just can determine the expansion multiple of transducer range.Except calculate the expansion multiple according to the above-mentioned relation formula, also need in actual measurement, to carry out the parameter that its expansion multiple is revised in several times benchmark test.In a word, as long as carry out proper proportion allotment and select, just can use the standard force sensor of diffused silicon of best range ability to measure parameters such as the pressure of high pressure range, pressure, stress.
Claims (5)
1, a kind of Aneroid range expandor that can enlarge the quick pressure transducer range ability of silicon-diffused force, it is characterized in that being placed with in the re-entrant cavity that the perisporium at a garden cylindricality matrix 1 surrounds and contain inside and outside two and the bellows 3 and 4 of sealing, wherein place the bellows 3 in it to fill pressure transmitting medium, this medium is connected with measuring point by the pore 3A of bellows one side and the pipe adapter 5 on matrix 1 sidewall, place the bellows 4 in the outside also to be full of pressure transmitting medium, and the pore 4A by this bellows be contained in matrix on the pressure transmitting medium of 6 li of sensors of opposite side be connected, there is cover plate 2 the cavity upper end of matrix 1 as its isolated body.
2, Aneroid range expandor as claimed in claim 1 is characterized in that bellows is to be welded by corrugated diaphragm type structure.
3, Aneroid range expandor as claimed in claim 1 is characterized in that having in order to twist the screw of union nipple 5 on the sidewall at the bottom of the shrinkage pool of matrix 1.
4, Aneroid range expandor as claimed in claim 1 is characterized in that on the shrinkage pool upper end lateral wall of matrix 1 external thread that connects sensor in order to twist being arranged.
5, Aneroid range expandor as claimed in claim 1 is characterized in that the pressure transmitting medium that is full of in two bellows is a silicone oil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91100239 CN1063553A (en) | 1991-01-17 | 1991-01-17 | Aneroid range expandor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91100239 CN1063553A (en) | 1991-01-17 | 1991-01-17 | Aneroid range expandor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1063553A true CN1063553A (en) | 1992-08-12 |
Family
ID=4904515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 91100239 Pending CN1063553A (en) | 1991-01-17 | 1991-01-17 | Aneroid range expandor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1063553A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113834755A (en) * | 2021-06-30 | 2021-12-24 | 北京航天控制仪器研究所 | Fluorine oil gas volume detection device and method |
-
1991
- 1991-01-17 CN CN 91100239 patent/CN1063553A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113834755A (en) * | 2021-06-30 | 2021-12-24 | 北京航天控制仪器研究所 | Fluorine oil gas volume detection device and method |
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