CN1063552A - The range expander of force sensor of diffused silicon - Google Patents
The range expander of force sensor of diffused silicon Download PDFInfo
- Publication number
- CN1063552A CN1063552A CN 91100238 CN91100238A CN1063552A CN 1063552 A CN1063552 A CN 1063552A CN 91100238 CN91100238 CN 91100238 CN 91100238 A CN91100238 A CN 91100238A CN 1063552 A CN1063552 A CN 1063552A
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- pressure
- corrugated tube
- pedestal
- sensor
- range
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Abstract
A kind of range expander of force sensor of diffused silicon is to make seal chamber with two different corrugated tube cylindrical shells of diameter, all is full of pressure transmitting medium silicone oil in it, and its inner chamber is connected with measuring point, and exocoel then communicates with silicone oil in the sensor.The cavity volume that causes owing to the pressure of measuring point increases makes the exocoel volume also increase thereupon, because of the different of both diameters and material make that the pressure of sensor indication are scaled, thereby makes its Range Extension.Suitably the corrugated tube of apolegamy unlike material, diameter can be done the sensor use of high-pressure scope with the standard force sensor of diffused silicon of best range ability.
Description
The present invention relates to a kind of supporting application apparatus of force-sensing sensor, belong to the support equipment of parameter sensors such as gaging pressure, stress or pressure.
In recent years, adopt the silicon-diffused force photosensitive elements to get more and more as the product of the sensitive element of the sensor of measuring various power, this is because the stable performance of silicon-diffused force photosensitive elements is firm, highly sensitive, with the sensor signal to noise ratio (S/N ratio) height that it is made, the cause that the linearity is good.The electromechanical integration pressure transducer made from the silicon-diffused force photosensitive elements has greatly and is replacing the posture of traditional pressure measuring instruments from now on.But because the processing technology and the structure manufacture view of silicon-diffused force photosensitive elements, its range ability of force sensitive device of the production of having finalized the design in batches at present is only in 0.01～0.2 MPa (MPa), between the low pressure range.For pressure survey higher or the greater amount journey, still can't use this pressure transducer to test.
The range expander that the purpose of this invention is to provide a kind of force sensor of diffused silicon, so as use at present wider above-mentioned in, the measurement range of low pressure range pressure sensor expands to and can measure high pressure (1～100 MPa MPa).
The present invention realizes like this (referring to Fig. 1): on a garden cylindrical base 1 coaxial be equipped with diameter different in, the corrugated tube cylindrical shell 3 that outer two tops are all sealed, 4, each self-forming is sealed in the outward corrugated tube cylindrical shell in making inner chamber 3A and exocoel 4A, wherein inner chamber is connected with measuring point by the through hole 5 in the middle of the pedestal 1, fill with pressure transmitting medium-silicone oil in the exocoel, and the pressure transducer 6 on being made exocoel and be contained in pedestal opposite side screw 7 by the aperture on the pedestal 1 is connected, and has isolated body-garden cylindrical shell 2 and pedestal 1 to be integral by thread connection in the outside of corrugated tube cylindrical shell.
The present invention can expand the range ability of existing mesolow force-sensing sensor effectively, just can realize it as long as suitably match the extender of the corrugated tube composition structure of the present invention of unlike material and different-diameter.And corrugated tube is habitual at present pressure instrumentation element, and raw material sources are extensive, easily processing, low cost of manufacture, long service life also can be purchased ready-made bellows element on the market, more can save the design and processes process that shapes, help cost and reduce.And, the corrugated tube mechanical characteristic is relatively good, basically be linear change, the range expander made from it can keep the good advantage of original force sensor of diffused silicon output linearity, helps the acceleration realization of widening the process of transforming with electromechanical integration technology of the range of application of this novel force-sensing sensor.
Specifically introduce the present invention below in conjunction with accompanying drawing.
Fig. 1 is a structure principle chart of the present invention.
Fig. 2 is the present invention and force-sensing sensor coupled position figure.
Among Fig. 1, coaxial on the pedestal 1 the corrugated tube cylindrical shell 3,4 that different inside and outside two tops of diameter are all sealed is housed, form each self-enclosed inner chamber 3A and exocoel 4A, wherein inner chamber 3A is connected with measuring point pipe adapter screw thread 8, measuring point by the aperture 5 in the middle of the pedestal 1, wherein be full of pressure transmitting medium silicone oil, also fill with pressure transmitting medium silicone oil in the exocoel 4A, and by the aperture in the pedestal 1 make it be contained in pedestal 1 opposite side screw 7 on pressure transducer 6 in silicone oil be connected.Silicone oil not only works the incompressible fluid effect of transmitting pressure here, but also the insulating effect of exocoel in rising.The outside of corrugated tube cylindrical shell is isolated body-garden cylindrical shell 2, and it and pedestal are integral by thread connection.
The coupling method of the present invention and pressure transducer as shown in Figure 2,10 is exactly range expander of the present invention among the figure, its below be to be screwed into the quick pressure transducer 6 of the silicon-diffused force that fuses with the present invention by screw 7.The 9th, the signal input tube joint on the pressure-measuring-point.Pressure transmitting medium-silicone oil on the measuring point-be admitted in the inner chamber of the present invention via input pipe joint 9 exactly.
Principle of work of the present invention is: the pressure of measured point reaches the inner chamber 3A of inner corrugated pipe cylindrical shell 3 of the present invention via pressure transmitting medium, inner chamber medium pressurized just forces the inner corrugated pipe elongation, thereby its volume is enlarged, and the interior diameter D with inner corrugated pipe of its volume increase △ V is interior, material H is interior and all proportional example of pressure P survey of measuring point concerns.Because interior ripple cylindrical shell is inclusive in the outward corrugated tube cylindrical shell, so the inner chamber pressurized increases in the △ V also the volume of inner corrugated pipe cylindrical shell can be by the transmission of the pressure transmitting medium that is full of between outward corrugated tube 4 and inner corrugated pipe 3, make the volume of exocoel 4A increase △ V too, just make outward corrugated tube cylindrical shell 4 extend thereupon and uprise to reach the volume increase.Its volume increase △ V is outer also to pass proportional relation with the pressure P that outward corrugated tube diameter D is outer, material H reaches sensor outward, and in the △ V=△ V outside, if inside and outside corrugated tube is all used the identical material manufacturing, then have
P passes=(in the inner corrugated pipe diameter D)/(outward corrugated tube diameter D is outer) * P survey
Relational expression exists.Because the outward corrugated tube diameter is more a lot of greatly than inner corrugated pipe diameter, just makes that the pressure that sensor measured is also more reduced according to the above ratio than the pressure of actual measuring point, thereby just enlarged the range ability of sensor.Suitably select the inner corrugated pipe and the outward corrugated tube of different-diameter and unlike material, just can determine the expansion multiple of transducer range.Except calculate the expansion multiple according to the above-mentioned relation formula, also need in actual measurement, to carry out several times benchmark test to revise the parameter of its expansion multiple.In a word, as long as carry out the proper proportion allotment and select the corrugated tube of different materials just can use the standard force sensor of diffused silicon of best range ability to measure pressure, stress or the pressure of high pressure range.
Claims (3)
1, a kind of range expander that can enlarge the quick pressure transducer range ability of silicon-diffused force, it is characterized in that on a garden cylindrical base 1 coaxial be equipped with diameter different in, the corrugated tube cylindrical shell 3 that outer two tops are all sealed, 4, each self-forming is sealed in the outward corrugated tube cylindrical shell in making inner chamber 3A and exocoel 4A, wherein inner chamber is full of pressure transmitting medium, and be connected with measuring point by the through hole 5 in the middle of the pedestal 1, also fill with pressure transmitting medium in the exocoel, and be connected with pressure transducer 6 on being contained in pedestal opposite side screw 7 by the aperture on the pedestal 1, be integral by thread connection at the garden cylindrical shell 2 in the corrugated tube cylindrical shell outside and pedestal 1.
2, range expander as claimed in claim 1 is characterized in that being connected the screw 8 that is connected with measuring point on the sidewall of pedestal 1 with inner chamber 3A by the through hole on the pedestal 15.
3, range expander as claimed in claim 1 is characterized in that the pressure transmitting medium of filling with in the inside and outside chamber of corrugated tube is a silicone oil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91100238 CN1063552A (en) | 1991-01-17 | 1991-01-17 | The range expander of force sensor of diffused silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91100238 CN1063552A (en) | 1991-01-17 | 1991-01-17 | The range expander of force sensor of diffused silicon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1063552A true CN1063552A (en) | 1992-08-12 |
Family
ID=4904514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 91100238 Pending CN1063552A (en) | 1991-01-17 | 1991-01-17 | The range expander of force sensor of diffused silicon |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1063552A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107576979A (en) * | 2017-09-01 | 2018-01-12 | 山东省计量科学研究院 | A kind of close rate range simulates expanding unit |
| CN108072482A (en) * | 2016-11-10 | 2018-05-25 | 浙江三花制冷集团有限公司 | Pressure controller and its pressure sensor, the production method of pressure sensor |
-
1991
- 1991-01-17 CN CN 91100238 patent/CN1063552A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108072482A (en) * | 2016-11-10 | 2018-05-25 | 浙江三花制冷集团有限公司 | Pressure controller and its pressure sensor, the production method of pressure sensor |
| CN107576979A (en) * | 2017-09-01 | 2018-01-12 | 山东省计量科学研究院 | A kind of close rate range simulates expanding unit |
| CN107576979B (en) * | 2017-09-01 | 2024-04-12 | 山东省计量科学研究院 | Dose rate range simulation expanding device |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
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| C01 | Deemed withdrawal of patent application (patent law 1993) | ||
| WD01 | Invention patent application deemed withdrawn after publication |