CN106353852B - A kind of long-period fiber grating production method of low cost - Google Patents
A kind of long-period fiber grating production method of low cost Download PDFInfo
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- CN106353852B CN106353852B CN201611023017.4A CN201611023017A CN106353852B CN 106353852 B CN106353852 B CN 106353852B CN 201611023017 A CN201611023017 A CN 201611023017A CN 106353852 B CN106353852 B CN 106353852B
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- 239000000835 fiber Substances 0.000 title claims abstract description 54
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 31
- 239000013307 optical fiber Substances 0.000 claims abstract description 64
- 238000005530 etching Methods 0.000 claims abstract description 55
- 230000000737 periodic effect Effects 0.000 claims abstract description 15
- 238000009826 distribution Methods 0.000 claims abstract description 7
- 238000006243 chemical reaction Methods 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 16
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 238000005253 cladding Methods 0.000 claims description 5
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 4
- 239000008103 glucose Substances 0.000 claims description 4
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 239000013308 plastic optical fiber Substances 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 239000000047 product Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 239000004038 photonic crystal Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 206010054949 Metaplasia Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- WQZGKKKJIJFFOK-VFUOTHLCSA-N beta-D-glucose Chemical compound OC[C@H]1O[C@@H](O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-VFUOTHLCSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 230000015689 metaplastic ossification Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
- G02B6/02152—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating involving moving the fibre or a manufacturing element, stretching of the fibre
Abstract
The invention discloses a kind of long-period fiber grating production methods of low cost, it is characterized in that: setting closed container, closed container is divided by upper and lower two parts by cover board, under be partially loaded etching solution, optic fibre patchhole is opened up on the side wall of upper part, and micropore is set on the cover board；It will need the covering in the region of write-in grating exposed on optical fiber, be inserted into closed container, one end of optical fiber is fixed on linear moving table；Etching solution discharges gas from micropore by volatilization, covering and gas right above micropore is located on optical fiber, etching reaction occurs, form etching deep trouth；By the horizontal position of linear moving table periodicity moving fiber, the etching deep trouth of periodic distribution is formed, in optical fiber surface finally so as to form long-period fiber grating.The production method of long-period fiber grating of the present invention has the advantages that, suitable batch making, suitable for various optical fiber cheap without grating etch mask version, cost of manufacture.
Description
Technical field
The present invention relates to a kind of production method of long-period fiber grating, the long period optical fiber light of especially a kind of low cost
The production method of grid.
Background technique
It is successfully written long-period gratings (Long Period in a fiber for the first time from nineteen ninety-five A.M.Vengsarkar et al.
Fiber Grating, LPFG) since structure, LPFG technology is rapidly developed and is applied, and is especially led in Fibre Optical Sensor etc.
In domain, since LPFG has many advantages, such as to extraneous environment sensitive, structure is simple, insertion loss is small, Yi Shixian remote recording, quilt
It is widely used in the detection system of the physical quantitys such as pressure, strain, temperature and refractive index.
The production method of long-period fiber grating mainly has two major classes at present: one kind is to utilize the ultraviolet photosensitive of light-sensitive optical fibre
Characteristic forms periodic raster graphic structure using photoetching or long period mask plate in grating surface, reuses ultraviolet sharp
Photoinduction generates the optical grating construction of photon-induced refractive index mechanical periodicity, to form fiber grating；It is another kind of, using in optical fiber surface
Apply cyclic stress, or form periodic stress distribution structure in optical fiber surface using micro electro mechanical processing system, utilizes light
The elasto-optical effect that fibre has realizes the periodic index of refraction variation of optical fiber, finally realizes fiber grating.
It is that grating amplitude mask plate is passed through using ultraviolet source described by patent of invention CN1309308A and CN1206117A
One or more light-sensitive optical fibre is irradiated, the method for making long-period fiber grating.The production method can realize batch of grating
Amount production, but grating writing needs to make grating mask template, and once cover module structure determination, then the grating writing period cannot
It adjusts.
It is a kind of described in patent of invention CN1632634A and CN1316661A to make fiber grating using mechanical stress
Method uses period mechanical structure to generate cyclic stress on optical fiber and forms fiber grating, the optical fiber of this method production
Grating volume is big, and structure is complicated, and stability is poor, it is difficult to practical.
Chiang chia-chin et al. makes anti-etching grating mask plate (Perfectly notched using metallic copper
long-period fiber grating filter based on ICP dry etching technique,OPTICS
LETTERS, 2012,37 (2), 193-195), periodic stress is processed in optical fiber surface using reactive ion etching technology
Structure, to realize the production of long-period fiber grating.The advantages of this method is grating writing without light-sensitive optical fibre or load
Hydrogen processing, but the disadvantage is that due to using MEMS technology, thus processing cost height, period length, complex process, it is difficult to batch metaplasia
It produces.
Summary of the invention
The present invention is to provide a kind of long period optical fiber of low cost to avoid above-mentioned existing deficiencies in the technology
Preparing grating method.
The present invention in order to solve the technical problem, adopts the following technical scheme that
The long-period fiber grating production method of low cost of the invention, its main feature is that:
Closed container is set, the closed container is divided by upper and lower two parts by cover board, is arranged on the cover board
Upper and lower two parts of micropore, closed container pass through the microporous connectivity；It is molten that etching is partially loaded under the closed container
Liquid opens up the optic fibre patchhole for being inserted into optical fiber on the side wall of upper part；At the top of the closed container, positioned at described
Aspirating hole is opened up right above micropore；
The coat for needing the region of write-in grating on optical fiber is stripped, keeps covering exposed；Then optical fiber is inserted by optical fiber
Enter in hole insertion closed container, one end of optical fiber is fixed on linear moving table, to control moving horizontally for optical fiber；
The horizontal position that optical fiber is adjusted by linear moving table, makes the front end in the region that grating need to be written be suspended in micropore
Surface；Etching solution discharges gas from micropore by volatilization, and covering right above micropore is located on optical fiber and is discharged
Etching reaction occurs for gas, forms etching deep trouth；In the gaseous product that etches while will be generated in etching process by aspirating hole
Extraction, the speed of exhaust are related with etching liquid temperature, etching liquid composition and etching liquid volume in real time.Pass through linear moving table week
The horizontal position of phase property moving fiber carries out the etching of covering right above micropore after each movement and forms etching deep trouth, most
The etching deep trouth of periodic distribution is formed in optical fiber surface eventually；
Optical fiber due to periodic distribution etching deep trouth and form periodic stress variation, and due to optical fiber elasto-optical effect
Cause the periodic modulation of fiber core refractive index, to complete the production of long-period fiber grating.
The etching solution be 30% by mass concentration hydrofluoric acid solution and mass concentration be 10% glucose it is molten
4~6:1 is mixed liquid by volume.
The micropore is plane hole or the bellmouth for protruding from cover board.
The micropore is 30-80 μm of side length of square through hole or 30-80 μm of diameter of circular through hole；The micropore can also be with
It is rectangular through-hole, short side width is 30-80 μm, long hem width degree is 1-2mm, and the setting of rectangular through-hole can be used to be completed at the same time more
The corrosion of root optical fiber.The formation of optical fiber surface periodically etching deep trouth, can be and etch to be formed point by point using single micropore, can also
It to be formed with once being etched using micropore linear array.
The upper surface of the micropore is 10-50 μm at a distance from the covering bottommost of fibre cladding exposed region.
The optical fiber is silica fibre, plastic optical fiber or photonic crystal fiber.
The closed container and the linear moving table are arranged in closed-loop operation platform, and aspirating hole passes through closed-loop operation
Platform, the gaseous product generated in etching process are directly discharged outside closed-loop operation platform by aspirating hole.
Compared with the prior art, the beneficial effects of the present invention are embodied in:
1, the long-period fiber grating production method of low cost proposed by the invention, is mixed using hydrofluoric acid and glucose
The volatility etching gas that solution is formed performs etching optical fiber, forms periodic stress structure production long period optical fiber light
Grid can avoid the shortcomings that conventionally employed hydrofluoric acid solution carries out liquid phase etching to optical fiber, as optical fiber surface etch-resistant layer is difficult to make
Make, etching process is easy to cause the caused etching defects such as etching terminates and etch layer falls off due to etching reaction by-product
The problems such as；
2, the long-period fiber grating production method of low cost proposed by the invention, due to controlling optical fiber table using micropore
Face etches positions and dimensions, thus can realize the grating writing without mask plate, improves flexibly changing for write-in screen periods size
Become, and reduces the cost of manufacture of grating mask plate；
3, the long-period fiber grating production method of low cost proposed by the invention is etched due to using gas phase, with
Other to be compared based on reactive ion etching or sense coupling method, production process is simplified, at low cost, and makes
Process control is simpler；
4, the long-period fiber grating production method of low cost proposed by the invention, since rectangle can be used in corrosion micropore
Through-hole, thus the batch grating writing of multifiber may be implemented；
5, the long-period fiber grating production method of low cost proposed by the invention, since grating writing is to utilize optical fiber
Elasto-optical effect, thus optical grating construction can be written in various optical fiber, such as photonic crystal fiber, common silica fibre, and write
Enter process and carries hydrogen process without very long optical fiber.
Detailed description of the invention
Fig. 1 is the schematic diagram of long-period fiber grating production method proposed by the invention；
Figure label: 1 closed container, 2 cover boards, 3 etching solutions, 4 micropores, 5 aspirating holes, 6 optical fiber, 6a covering, 7 linear shiftings
Moving platform, 8 etching deep trouths, 9 closed-loop operation platforms.
Specific embodiment
Embodiment 1
As shown in Figure 1, the making step of the present embodiment long-period fiber grating is as follows:
Closed container 1 is set, closed container 1 is divided by upper and lower two parts by cover board 2, diameter is set on cover board 2
Upper and lower two parts of 30 μm of micropore 4, closed container pass through microporous connectivity；Etching solution is partially loaded under closed container
3, the optic fibre patchhole for being inserted into optical fiber is opened up on the side wall of upper part；At the top of closed container 1, positioned at micropore 4
Surface opens up aspirating hole 5；
Specifically, the glucose for being 10% with 50mL mass concentration by the hydrofluoric acid solution that 200mL mass concentration is 30%
Solution mixing is added the lower part of closed container 1, then covers cover board again as etching solution；
The coat stripping in the region 4cm of grating need to will be written in the normal single mode quartz optical fiber 6 for taking one section of long 50cm among it
It removes, and removes fibre cladding surface residual coat with alcohol, keep covering 6a exposed；Then optical fiber is inserted by optic fibre patchhole
Enter in closed container 1, one end of optical fiber is fixed on high-precision linear mobile platform 7 with quick rapid-curing cutback optical cement, with control
Optical fiber moves horizontally；And the 4cm fiber segment that its coat strips is fixed with fiber clamp；Closed container 1 and linear movement
Platform 7 is arranged in closed-loop operation platform 9, and aspirating hole 5 passes through closed-loop operation platform 9.
The horizontal position that optical fiber is adjusted by linear moving table, makes the front end in the region that grating need to be written be suspended in micropore
Surface, the upper surface of micropore at a distance from the covering bottommost of fibre cladding exposed region be 30 μm；Closed container 1 is put
It is placed on heating platform, control heating temperature is 45 DEG C.
By be evacuated hole site be adjusted to the surface of micropore and covering bottommost apart from fibre cladding exposed region away from
From for 5mm, the adjusting speed of exhaust is 100mL/min.
Etching solution discharges gas, the gas for being located at the covering right above micropore on optical fiber and being discharged from micropore by volatilization
Etching reaction occurs for body, forms etching deep trouth 8, and the etching for forming different depth in optical fiber surface by control etch period is deep
Slot, etch rate are about 40 μm/H, control etch period 70min, formation etching deep trouth depth is 50 μm, width is 200 μm.
It is etching while being extracted the gaseous product generated in etching process out in real time by aspirating hole 5, speed of exhaust 100mL/min.
The horizontal position of optical fiber is translated 300 μm by linear moving table, starts to etch next deep trouth, when controlling same etching
Between, the etching deep trouth of same depth and width is formed in optical fiber surface.Successively move, and after each movement carry out micropore just on
The etching of square covering finally forms total length 3cm, in optical fiber surface with 300 μm of periodic distribution etching deep trouths for the period, real
The production of existing long-period fiber grating.
The optical fiber both ends for completing long-period fiber grating production are connected with spectrometer, wideband light source respectively, can be obtained
The transmitted spectrum of the long-period fiber grating.
Claims (5)
1. a kind of long-period fiber grating production method of low cost, it is characterized in that:
It is arranged closed container (1), the closed container (1) is divided by upper and lower two parts by cover board (2), in the cover board
(2) micropore (4) are set on, upper and lower two parts of closed container pass through the microporous connectivity；In the lower part of the closed container
It is packed into etching solution (3), the optic fibre patchhole for being inserted into optical fiber is opened up on the side wall of upper part；In the closed container
(1) top is located at right above the micropore (4) and opens up aspirating hole (5)；
The coat for needing the region of write-in grating on optical fiber (6) is stripped, keeps covering (6a) exposed；Then optical fiber is passed through into optical fiber
It is inserted into hole insertion closed container (1), one end of optical fiber is fixed on linear moving table (7), to control the level of optical fiber
It is mobile；
The horizontal position that optical fiber is adjusted by linear moving table, makes the front end in the region that grating need to be written be suspended in micropore just
Top, the upper surface of the micropore are 10-50 μm at a distance from the covering bottommost of fibre cladding exposed region；Etching solution is logical
It crosses volatilization and discharges gas from micropore, the covering right above micropore is located on optical fiber, etching reaction, shape occurs with the gas discharged
At etching deep trouth (8), is etching while being extracted the gaseous product generated in etching process out in real time by aspirating hole (5)；Pass through
The horizontal position of linear moving table periodicity moving fiber carries out the etching and shape of covering right above micropore after each movement
At etching deep trouth, the etching deep trouth of periodic distribution is finally formed in optical fiber surface；
Optical fiber due to periodic distribution etching deep trouth and form periodic stress variation, and since optical fiber elasto-optical effect causes
The periodic modulation of fiber core refractive index, to complete the production of long-period fiber grating；
The etching solution be 30% by mass concentration hydrofluoric acid solution and mass concentration be 10% glucose solution by
4~6:1 of volume ratio is mixed.
2. manufacturing method according to claim 1, it is characterized in that: the micropore is plane hole or the taper for protruding from cover board
Hole.
3. manufacturing method according to claim 1, it is characterized in that: square through hole that the micropore is 30-80 μm of side length or
30-80 μm of diameter of circular through hole.
4. manufacturing method according to claim 1, it is characterized in that: the optical fiber is silica fibre, plastic optical fiber or photon
Crystal optical fibre.
5. manufacturing method according to claim 1, it is characterized in that: the closed container (1) and the linear moving table
(7) it is arranged in closed-loop operation platform (9), aspirating hole (5) passes through closed-loop operation platform (9), the gaseous product generated in etching process
Directly outside by aspirating hole (5) discharge closed-loop operation platform (9).
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| CN201611023017.4A CN106353852B (en) | 2016-11-18 | 2016-11-18 | A kind of long-period fiber grating production method of low cost |
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| CN106353852B true CN106353852B (en) | 2019-08-02 |
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| CN112965163A (en) * | 2021-03-16 | 2021-06-15 | 西安西光威信光电有限公司 | Dispersion optical fiber and manufacturing method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100439088B1 (en) * | 2001-09-14 | 2004-07-05 | 한국과학기술원 | Optical coupling module with self-aligned etched grooves and method for fabricating the same |
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2016
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Denomination of invention: A low-cost method for producing long-period fiber gratings Effective date of registration: 20231106 Granted publication date: 20190802 Pledgee: Industrial and Commercial Bank of China Limited Suzhou Yongqiao Branch Pledgor: ANHUI BLUE OCEAN LIGHT TECHNOLOGY CO.,LTD. Registration number: Y2023980064337 |
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