CN106353259A - Measuring method and device for transient deuterium molecule pressure of vacuum arc ion source of deuterium-containing electrode - Google Patents

Measuring method and device for transient deuterium molecule pressure of vacuum arc ion source of deuterium-containing electrode Download PDF

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Publication number
CN106353259A
CN106353259A CN201610984993.XA CN201610984993A CN106353259A CN 106353259 A CN106353259 A CN 106353259A CN 201610984993 A CN201610984993 A CN 201610984993A CN 106353259 A CN106353259 A CN 106353259A
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deuterium
vacuum
ion source
air pressure
vacuum chamber
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CN106353259B (en
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董攀
龙继东
李�杰
蓝朝晖
郑乐
杨振
王韬
李喜
陈德彪
刘飞翔
李晨
陈伟
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Institute of Fluid Physics of CAEP
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Institute of Fluid Physics of CAEP
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76Devices for measuring mass flow of a fluid or a fluent solid material
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/10Nuclear fusion reactors

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  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention discloses a measuring method for transient deuterium molecule pressure of a vacuum arc ion source of a deuterium-containing electrode. The method comprises the following steps: 1) adding tracing gas into a vacuum chamber of the vacuum arc ion source; 2) measuring the pressure of the tracing gas introduced into the vacuum chamber before discharge; 3) measuring the spectral intensity of the tracer element and deuterium atom at a moment after discharge, and calculating the ratio of the spectral intensity of the tracer element and deuterium atom at the moment; and 4) dividing the ratio of the spectral intensity acquired in the step 3) by the measured pressure of the tracing gas before discharge, thereby acquiring the transient deuterium molecule pressure at the moment measured in the step 3). The invention also discloses a device for applying the measuring method. When the device is used, the local transient deuterium molecule pressure can be quickly acquired under the condition of no interference to the discharge.

Description

The measuring method of the arc ion source transient state deuterium molecule air pressure of electrode vacuum containing deuterium and device
Technical field
The present invention relates to the measurement of vacuum arc ion source, specifically electrode vacuum containing deuterium arc ion source transient state deuterium molecule air pressure Method and device.
Background technology
Vacuum arc ion source utilizes vacuum arc discharge to produce ion, can get the ion stream that species is many, stream is powerful, is a class Important ion source, is widely used in the fields such as accelerator, material surface modifying.The arc ion source of electrode vacuum containing deuterium is a kind of Produce and provide the device of deuterium ion, be one of vitals of neutron generator.Such ion source maximum feature it One is that electrode is stored in inside metal material in the form of compound using inhaling deuterium metal, deuterium.During electric discharge, ion bom bardment and Jiao Have burning ears so that cathode surface temperature raises, deuterium is discharged into vacuum environment from metal inside, is then produced deuterium by electron ionization Ion.During electric discharge, deuterium molecule air pressure is the important parameter understanding discharge process and improving the required reference by force of deuterium ion stream, therefore, right It measures particularly necessary.However, electric discharge when deuterium molecule air pressure change quickly, the measurement apparatus such as conventional vacuum gauge respond Time is inadequate.Further, since region of discharge is little, on the premise of not affecting electric discharge, gas detector is difficult to place.
Content of the invention
It is an object of the invention to overcoming the deficiencies in the prior art, there is provided a kind of arc ion source transient state of electrode vacuum containing deuterium The measuring method of deuterium molecule air pressure, can quickly obtain local transient state deuterium molecule gas during its application on the premise of not disturbing electric discharge Pressure.The invention also discloses implementing the device of the measuring method of the above-mentioned arc ion source transient state deuterium molecule air pressure of electrode vacuum containing deuterium.
The present invention solves the above problems and is achieved through the following technical solutions: the arc ion source transient state deuterium of electrode vacuum containing deuterium The measuring method of molecule air pressure, comprises the following steps:
Step one, the vacuum chamber interpolation search gass to vacuum arc ion source;
It is passed through the search gass air pressure of vacuum chamber before step 2, measurement electric discharge;
The spectral intensity of certain tracer element and D-atom in a flash after step 3, measurement electric discharge, and calculate now tracer element with The ratio of both D-atoms spectral intensity;
Step 4, the spectral intensity ratio being obtained divided by step 3 using the search gass air pressure recording before electric discharge, are walked The instantaneous deuterium molecule air pressure in rapid three measurement moment.
Further, described search gass are hydrogen.Because hydrogen atom and D-atom are isotopes, their chemical property and light Spectral property is all closely it is believed that the decomposition coefficient of hydrogen molecule and deuterium molecule, excite all sames such as coefficient, so it is believed that hydrogen The ratio of the spectral intensity of atom and D-atom is equal to the ratio of their molecular number.
Further, before described vacuum chamber is passed through hydrogen, air pressure is 10-5Pa magnitude, described vacuum chamber is passed through gas after hydrogen Force down in 10-3Pa magnitude.Larger by vacuum chamber air pressure and hydrogen molecule effects of air pressure during present invention application, the present invention is by true Air pressure before and after cavity is passed through hydrogen makes concrete restriction, is avoided that hydrogen molecule air pressure too high guiding discharge form is changed into gas and puts Electricity, is not vacuum arc discharge, in ion source, plasma properties change;Also being avoided that hydrogen molecule air pressure is too low leads to hydrogen former Sub-light spectrum signal is weak, and signal to noise ratio is too low so that resultant error is big.
Further, collect light time spectrum in described step 3 and adopt hαSpectral line and dαSpectral line.
The measurement apparatus of the arc ion source transient state deuterium molecule air pressure of electrode vacuum containing deuterium, including the Vacuum Arc ion containing deuterium electrode Source, described vacuum arc ion source is provided with vacuum chamber and the ion source cathode being located at vacuum intracavity and ion source anode;Also include true Empty rule, hydrogen cylinder, quartz window, convex lenss, optical fiber, spectrogrph and spectral detector, described vacuum gauge and hydrogen cylinder all with Vacuum chamber is connected, and the cavity wall of described vacuum chamber is provided with opening, and described quartz window is connected and containing vacuum with vacuum chamber cavity wall Opening in the cavity wall of chamber, described convex lenss are just arranged to quartz window, and described optical fiber and spectral detector are all with spectrogrph even Connect, and optical fiber connects the focal point located at convex lenss for the termination of the other end at spectrogrph end relatively.The measurement apparatus of the present invention should Used time, before electric discharge, first lead to a certain amount of hydrogen to vacuum chamber, and adopt vacuum gauge record hydrogen molecule air pressure, then electric discharge release deuterium Gas and generation plasma, electronics and hydrogen molecule, deuterium molecule dissociative collisions in plasma, produce hydrogen atom and D-atom, so Afterwards hydrogen atom, D-atom again with electronics occur exciting collision, the hydrogen atom of excited state, D-atom can spontaneous de excitation, generation photon, With spectrogrph, this photon is separated with other atom photons, obtain hydrogen atom, D-atom spectrum, and recorded with spectral detector Come.The present invention is strong divided by the hydrogen of spectral detector record, D-atom spectrum according to the hydrogen molecule air pressure being obtained with vacuum gauge before Degree ratio, you can obtain deuterium molecule air pressure.During present invention application, spectral detector can only record certain flashy light in impulse discharge Spectrum, in order to obtain the spectrum of whole discharge process, moveable measurement moment position, scans whole discharge process.
Further, the pipeline that described hydrogen cylinder is connected with vacuum chamber is provided with mass flowmenter.So, the present invention should Used time can control, by mass flowmenter, the amounts of hydrogen being passed through vacuum intracavity, and further according to vacuum gauge reading, adjustment is passed through hydrogen stream Measure to suitable size.
Further, the pipeline that described hydrogen cylinder is connected with vacuum chamber is provided with air relief valve.
In sum, the method have the advantages that (1) present invention application when by being passed through spike to vacuum intracavity Gas, the then spectral intensity ratio of contrast tracer element atom and D-atom, using showing that the combination of spectral intensity ratio is passed through Track gas atmosphere obtains deuterium molecule air pressure.The present invention is measured using optical meanss, has response speed and is exceedingly fast, does not disturb and put Electric the advantages of, is so that the present invention is easy to utilize when applying.
(2) present invention adopts hydrogen as search gass, because hydrogen atom and D-atom spectrum only differ 0.18 nm, no matter Negative electrode speckle position is mobile or electric discharge is fluctuated, and the affected degree of hydrogen, D-atom is all the same, so, spectral line during present invention application Strength ratio is held essentially constant, and can lift the accuracy of measurement further.
Brief description
Accompanying drawing described herein is used for providing the embodiment of the present invention is further understood, and constitutes of the application Point, do not constitute the restriction to the embodiment of the present invention.In the accompanying drawings:
Fig. 1 is the structural representation of measurement apparatus in one specific embodiment of the present invention.
Parts title corresponding to labelling in accompanying drawing: 1, vacuum chamber, 2, vacuum gauge, 3, ion source cathode, 4, ion source Anode, 5, hydrogen cylinder, 6, air relief valve, 7, mass flowmenter, 8, quartz window, 9, convex lenss, 10, optical fiber, 11, spectrogrph, 12nd, spectral detector.
Specific embodiment
For making the object, technical solutions and advantages of the present invention become more apparent, with reference to embodiment and accompanying drawing, to this Invention is described in further detail, and the exemplary embodiment of the present invention and its explanation are only used for explaining the present invention, do not make For limitation of the invention.
Embodiment:
The measuring method of the arc ion source transient state deuterium molecule air pressure of electrode vacuum containing deuterium, comprises the following steps: step one, to Vacuum Arc Ionogenic vacuum chamber adds search gass;It is passed through the search gass air pressure of vacuum chamber before step 2, measurement electric discharge;Step 3, The spectral intensity of certain tracer element and D-atom in a flash after measurement electric discharge, and calculate now tracer element and D-atom light The ratio of spectral intensity;Step 4, the spectral intensity ratio being obtained divided by step 3 using the search gass air pressure recording before electric discharge Value, obtains the instantaneous deuterium molecule air pressure that step 3 measures the moment.In the specific implementation, search gass adopt hydrogen to the present embodiment. In order that can effectively implement and reduce error during the present embodiment application, before the vacuum chamber of the present embodiment is passed through hydrogen, air pressure is 10-5 Pa magnitude, after vacuum chamber is passed through hydrogen, air pressure is less than 10-3Pa magnitude, in order to reduce measurement error further, the present embodiment is being surveyed Measure and averaged using multiple measurement during the air pressure before and after vacuum chamber is passed through hydrogen.Because of h in hydrogen atom, D-atom spectrumαAnd dαSpectrum Line is the strongest, and both wavelength differ only by 0.18 nm, therefore, collects light time spectrum and adopt h in the present embodiment step 3αSpectral line and dαSpectrum Line, to lift measurement accuracy during the present embodiment application further.
As shown in figure 1, implementing the device of the above-mentioned arc ion source transient state deuterium molecule barometric surveying method of electrode vacuum containing deuterium, bag Include vacuum gauge 2, hydrogen cylinder 5, quartz window 8, convex lenss 9, optical fiber 10, spectrogrph 11, spectral detector 12 and electrode containing deuterium Vacuum arc ion source, wherein, vacuum arc ion source be provided with vacuum chamber 1 and be located at vacuum chamber 1 in ion source cathode 3 and ion Source anode 4.The vacuum gauge 2 of the present embodiment is all connected with vacuum chamber 1 with hydrogen cylinder 5, and the cavity wall of vacuum chamber 1 is provided with opening, quartz Windowpane 8 be connected with vacuum chamber 1 cavity wall and closed vacuum cavity 1 cavity wall on opening, that is, quartz window 8 is as vacuum chamber 1 chamber A part for wall.The convex lenss 9 of the present embodiment, optical fiber 10, spectrogrph 11 and spectral detector 12 are all outside vacuum chamber 1, convex Lens 9 are just arranged to quartz window 8, and optical fiber 10 and spectral detector 12 are all connected with spectrogrph 11, and optical fiber 10 connects relatively Connect spectrogrph 11 end the other end termination located at convex lenss 9 focal point.The spectral detector 12 of the present embodiment is using enhancing Feldspar mineral (iccd) is realized, and it can obtain the spectrum that temporal resolution is less than 5 ns, so, can guarantee that the present embodiment During application, deuterium molecule air pressure is transient state.It is provided with air relief valve 6 on the pipeline that the hydrogen cylinder 5 of the present embodiment is connected with vacuum chamber 1 With mass flowmenter 7, air relief valve 6 is particularly located on the pipeline between hydrogen cylinder 5 and mass flowmenter 7, and it is used for reducing and uses Front gas pressure intensity.
During the measurement apparatus application of the present embodiment, electric discharge front opening hydrogen cylinder 5 enters hydrogen, quality stream into vacuum chamber 1 Gauge 7 controls the amounts of hydrogen being passed through in vacuum chamber 1, can adjust and be passed through hydrogen flowing quantity to suitable size according to vacuum gauge 2 reading, It is being passed through after hydrogen terminates, hydrogen molecule air pressure is being obtained using vacuum gauge 2.After electric discharge, in ion source, plasma is by negative electrode 3 and sun Pole 4 electric discharge produces, and the light that plasma sends passes through quartz window 8, is then collected by convex lenss 9 and focuses on, and convex lenss gather Defocused signal is optical signal, can be directly entered optical fiber, and transmits to spectrogrph 11 light splitting afterwards generation hydrogen, D-atom through optical fiber 10 Spectrum, last spectrum is recorded by spectral detector 12.According to the hydrogen molecule air pressure being obtained with vacuum gauge 2 before divided by spectrum The hydrogen of detector 12 record, D-atom spectral intensity ratio, you can obtain deuterium molecule air pressure.When changing measurement during the present embodiment application Carve, you can obtain deuterium molecule relation over time.
Above-described specific embodiment, has been carried out to the purpose of the present invention, technical scheme and beneficial effect further Describe in detail, be should be understood that the specific embodiment that the foregoing is only the present invention, be not intended to limit the present invention Protection domain, all any modification, equivalent substitution and improvement within the spirit and principles in the present invention, done etc., all should comprise Within protection scope of the present invention.

Claims (7)

1. the measuring method of the arc of electrode vacuum containing deuterium ion source transient state deuterium molecule air pressure is it is characterised in that comprise the following steps:
Step one, the vacuum chamber interpolation search gass to vacuum arc ion source;
It is passed through the search gass air pressure of vacuum chamber before step 2, measurement electric discharge;
The spectral intensity of certain tracer element and D-atom in a flash after step 3, measurement electric discharge, and calculate now tracer element with The ratio of both D-atoms spectral intensity;
Step 4, the spectral intensity ratio being obtained divided by step 3 using the search gass air pressure recording before electric discharge, are walked The instantaneous deuterium molecule air pressure in rapid three measurement moment.
2. the measuring method of the arc ion source transient state deuterium molecule air pressure of electrode vacuum containing deuterium according to claim 1, its feature It is, described search gass are hydrogen.
3. the measuring method of the arc ion source transient state deuterium molecule air pressure of electrode vacuum containing deuterium according to claim 2, its feature It is, before described vacuum chamber is passed through hydrogen, air pressure is 10-5Pa magnitude, after described vacuum chamber is passed through hydrogen, air pressure is less than 10-3pa Magnitude.
4. the measuring method of the arc ion source transient state deuterium molecule air pressure of electrode vacuum containing deuterium according to claim 2, its feature It is, collect light time spectrum in described step 3 and adopt hαSpectral line and dαSpectral line.
5. the measurement apparatus of the arc of electrode vacuum containing deuterium ion source transient state deuterium molecule air pressure, including the Vacuum Arc ion containing deuterium electrode Source, described vacuum arc ion source is provided with vacuum chamber (1) and the ion source cathode (3) being located in vacuum chamber (1) and ion source anode (4) it is characterised in that also including vacuum gauge (2), hydrogen cylinder (5), quartz window (8), convex lenss (9), optical fiber (10), light Spectrometer (11) and spectral detector (12), described vacuum gauge (2) is all connected with vacuum chamber (1) with hydrogen cylinder (5), described vacuum chamber (1) cavity wall is provided with opening, described quartz window (8) be connected with vacuum chamber (1) cavity wall and closed vacuum cavity (1) cavity wall on Opening, described convex lenss (9) are just arranged to quartz window (8), and described optical fiber (10) and spectral detector (12) be equal and spectrum Instrument (11) connects, and the focal point located at convex lenss (9) for the termination of optical fiber (10) other end that connection spectrogrph (11) is held relatively.
6. the measurement apparatus of the arc ion source transient state deuterium molecule air pressure of electrode vacuum containing deuterium according to claim 5, its feature It is, the pipeline that described hydrogen cylinder (5) and vacuum chamber (1) are connected is provided with mass flowmenter (7).
7. the measurement apparatus of the arc ion source transient state deuterium molecule air pressure of electrode vacuum containing deuterium according to claim 5, its feature It is, the pipeline that described hydrogen cylinder (5) and vacuum chamber (1) are connected is provided with air relief valve (6).
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