CN106349946A - Method for preparing green non-toxic chemical-mechanical polishing liquid - Google Patents
Method for preparing green non-toxic chemical-mechanical polishing liquid Download PDFInfo
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- CN106349946A CN106349946A CN201610650839.9A CN201610650839A CN106349946A CN 106349946 A CN106349946 A CN 106349946A CN 201610650839 A CN201610650839 A CN 201610650839A CN 106349946 A CN106349946 A CN 106349946A
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- rice husk
- fermentation
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
Abstract
The invention discloses a method for preparing green non-toxic chemical-mechanical polishing liquid, and belongs to the field of technologies for preparing polishing liquid. The method includes soaking and boiling rice husk in hydrochloric acid; mixing the rice husk and diatomaceous earth with each other to obtain mixtures and carbonizing the mixtures to obtain carbonized mixtures used as abrasive particles; smashing rice husk, then pretreating and activating the rice husk by the aid of ammonia water, mixing the rice husk, urea, magnesium sulfate and the like with one another to obtain mixtures and hydrolyzing the mixtures by the aid of cellulase to obtain fermentation substrates; inoculating rhizopus oryzae in the fermentation substrates and fermenting the fermentation substrates to obtain mixed fermentation liquid used as a corrosive medium; carrying out ball-milling mixing on the mixed fermentation liquid and the carbonized mixtures in a ball mill to obtain the green non-toxic chemical-mechanical polishing liquid. The method has the advantages that the green non-toxic chemical-mechanical polishing liquid is made of natural substances and is non-toxic and environmentally friendly; the abrasive particles and the corrosive medium are good in compatibility, the green non-toxic chemical-mechanical polishing liquid is good in dispersion stability and can be stored for a long term, and accordingly the method has a broad market application prospect.
Description
Technical field
The invention discloses a kind of preparation method of green non-poisonous chemical mechanical polishing liquid, belong to the technology of preparing of polishing fluid
Field.
Background technology
Polishing refer to using machinery, chemistry or electrochemistry effect, make workpiece surface roughness reduce, with obtain light,
The processing method of flat surface.Polishing species is roughly divided into: mechanical polishing, chemical polishing, electrobrightening, ultrasonic polishing, stream
Body polishing and magnetic grinding and polishing.Mechanical polishing, based on craft, using aids such as turntables, wastes substantial amounts of manpower and materials；
Electrobrightening relies on the small projection in selective dissolved material surface, so that surface is smoothed, for the selectivity of dissolved material
Higher, cost is larger；The oscillation action of ultrasound wave since ultrasonic polishing, makes abrasive material in surface of the work grinding-polishing, processing macro
Sight power is little, will not cause the deformation of workpiece, but frock making and installation are more difficult；Fluid polishing is to be hydraulically operated, to mill
The requirement of material is higher；Magnetic grinding and polishing works under magnetic field state, and magnetic field intensity is wayward.Chemical polishing is to allow material changing
Learn the part that in medium, surface microscopic protrudes and divide preferential dissolving compared with recess, thus obtaining even surface.Do not need complex device, efficiency
High.Chemical Mechanical Polishing Technique is the Surface Finishing technology that uniquely can provide overall planarization so far, is widely used for
The planarization on the surfaces such as IC chip, computer hard disc, micromachine.With the size processing workpiece increasingly
Greatly, and machining accuracy gradually steps up, chemically mechanical polishing, as the technology of this demand suitable, had both had evolved into polishing process
Inevitable choice.
The core of chemical polishing is the selection of polishing fluid.Polishing fluid is one of key of chemical Mechanical Polishing Technique, its property
The surface quality of polished workpiece can be directly affected.The main component of polishing fluid has abrasive particle, corrosive medium and interpolation
Agent.Chemical polishing and the overall merit of mechanical polishing have been concentrated in chemically mechanical polishing.Single chemical polishing constance force figure slows down injustice
The dissolution velocity of whole metal surface recess, and accelerate the dissolution velocity of high spot, its corrosivity is big, and polishing speed is fast, damages
Low, surface smoothness is high.Domestic at present conventional polishing fluid has silica colloidal polishing liquid, ceria polishing fluid, oxidation
Aluminum polishing fluid, nano diamond polishing liquid etc..General, add abrasive material in traditional polishing fluid, abrasive particle granularity is larger, be situated between
In matter, dispersion stabilization is poor, be susceptible to reunite, and contain in polishing fluid ammonia, the wound to environment and human body for the toxic component such as acid
Evil is also very big, and application process is largely restricted.
Content of the invention
Present invention mainly solves technical problem: for current tradition polishing fluid in contain the toxic component such as ammonia, acid, make
With during the defect larger to the injury of environment and human body, the present invention takes rice husk to boil through soak with hydrochloric acid, then mixes with kieselguhr
Conjunction carries out carbonization and obtains carbonization mixture as abrasive particle, then take rice husk pulverize after with pretreatment with agueous Ammonia activation, with carbamide, sulfur
Sour magnesium etc. mixes, then obtains fermentation substrate with cellulase hydrolysiss, and inoculation Rhizopus oryzae fermentation obtains mixed fermentation liquid as corrosion
Medium, itself and carbonization mixture ball milling mixing in ball mill are obtained green non-poisonous chemical mechanical polishing liquid.The present invention adopts
Natural materials are raw material, products obtained therefrom asepsis environment-protecting, and abrasive particle is good with the corrosive medium compatibility, and product dispersion stabilization is relatively
Good, can long-term storage, there is wide market application foreground.
In order to solve above-mentioned technical problem, the technical solution adopted in the present invention is:
(1) weigh 30～50g rice husk, pour into and fill in the beaker that 100～200ml mass concentration is 8～10% hydrochloric acid, heating is boiled
Boiling 20～30min, filters, the rice husk after boiling is proceeded in 105～110 DEG C of baking ovens, is dried to constant weight, then weighs 50～60g
Kieselguhr, is poured in crucible after being mixed with above-mentioned dried rice husk, then crucible is proceeded in Muffle furnace, with 4～6ml/min speed
Rate is passed through argon into stove, under argon guard mode, is heated to 500～550 DEG C with 4～6 DEG C/min speed, is incubated charcoal
Change 15～20min, continue with 6～8 DEG C/min ramp to 800～880 DEG C, be incubated carbonization 20～30min, cool to the furnace
Room temperature, obtains carbonization mixture, standby；
(2) weigh rice husk 300～500g, pour in solid sample pulverizer, after pulverizing 15～20min, cross 80～120 mesh sieves,
Powdered rice hulls, subsequently gained powdered rice hulls are poured into and fill in the beaker that 2～3l mass concentration is 10～12% ammonia, then by beaker
Proceed in water-bath magnetic stirring apparatuss, be 35～40 DEG C in temperature, under the conditions of rotating speed is 200～280r/min, soak 24～36h,
Sucking filtration, is washed with deionized filter cake until cleaning mixture is in neutrality, then filter cake is placed in baking oven, under the conditions of 105～110 DEG C
It is dried to constant weight, obtain dry cake；
(3) in the fermentation tank filling 1000～1200ml deionized water, sequentially add the above-mentioned gained of 120～150g and filter is dried
Cake, 200～300mlph is 4.8 concentration is 0.08mol/l citric acid-sodium citrate buffer, 10～12g carbamide, 0.2～
0.4g magnesium sulfate, 0.6～0.8g potassium dihydrogen phosphate, 0.3～0.5g diammonium phosphate, start fermenter stirrer, setting speed
To 500～600r/min, open fermenting heater, be warming up to 50～55 DEG C, constant temperature stirs mixing 15～20min；
(4) end to be mixed, adds 3～5g cellulase, is 45～50 DEG C in temperature, and rotating speed is 180～200r/min bar
Under part, constant temperature stirring reaction 36～48h, treat that fermentation tank interior temperature degree naturally cools to 35～38 DEG C, by inoculum concentration 8～10% to
Rhizopus oryzae is accessed, constant temperature stirs fermentation 48～60h, treats fermentation ends, be heated to 80～85 DEG C, sterilization enzyme inactivation in fermentation tank
Process 8～10min, treat that in fermentation tank, material naturally cools to room temperature, discharging, obtain mixed fermentation liquid；
(5) count by weight, ball mill sequentially adds the standby carbonization mixture of 80～100 parts of steps (1), 280～320
The above-mentioned gained mixed fermentation liquid of part, is that 20:1～30:1 adds zirconium oxide ball milling pearl by ratio of grinding media to material, with 480～600r/min rotating speed
Ball-milling treatment 40～60min, discharging, filling and sealing, obtain final product green non-poisonous chemical mechanical polishing liquid.
The application process of the present invention is: the metal material of required polishing is placed in polisher lapper, in pressure be 17～
18kpa, under the conditions of polishing disk is 70～80r/min with polishing pad rotating speed, grinding and polishing 5～6min, uses clean water 3 after grinding
～5 times, and dried up with compressed air, then gained chemical mechanical polishing liquid of the present invention is evenly applied to the position of required polishing,
It is 27～28kpa in polish pressure, under the conditions of polishing disk and polishing pad rotating speed are 60～70r/min, chemically mechanical polishing 30～
45min, deionized water is cleaned 3～5 times, then is dried up with compressed air, and after testing, metal surface material removal rate is 0.3
～0.4 μm/min, surface roughness is 0.05～0.15 μm.
The invention has the beneficial effects as follows:
(1) the green non-poisonous chemical mechanical polishing liquid that the present invention is obtained, raw material is easily obtained, harmless, environmental protection；
(2) surface roughness after the more traditional polishing fluid of metal material surface roughness after polishing fluid polishing uses declines 3～4
Times, and the more traditional polishing fluid of polishing speed improves 50～60%.
Specific embodiment
Weigh 30～50g rice husk first, pour into and fill in the beaker that 100～200ml mass concentration is 8～10% hydrochloric acid, plus
Heat boils 20～30min, filters, the rice husk after boiling is proceeded in 105～110 DEG C of baking ovens, is dried to constant weight, then weigh 50～
60g kieselguhr, is poured in crucible after being mixed with above-mentioned dried rice husk, then crucible is proceeded in Muffle furnace, with 4～6ml/
Min speed is passed through argon into stove, under argon guard mode, is heated to 500～550 DEG C with 4～6 DEG C/min speed,
Insulation carbonization 15～20min, continues with 6～8 DEG C/min ramp to 800～880 DEG C, is incubated carbonization 20～30min, with stove
It is cooled to room temperature, obtain carbonization mixture, standby；Weigh rice husk 300～500g, pour in solid sample pulverizer, pulverize 15～
After 20min, cross 80～120 mesh sieves, obtain powdered rice hulls, subsequently pouring gained powdered rice hulls into and filling 2～3l mass concentration is 10～12%
In the beaker of ammonia, then beaker is proceeded in water-bath magnetic stirring apparatuss, be 35～40 DEG C in temperature, rotating speed is 200～280r/
Under the conditions of min, soak 24～36h, sucking filtration, be washed with deionized filter cake until cleaning mixture is in neutrality, then filter cake is placed in baking
In case, it is dried to constant weight under the conditions of 105～110 DEG C, obtains dry cake；In the fermentation filling 1000～1200ml deionized water
In tank, sequentially add 120～150g above-mentioned gained dry cake, 200～300mlph is 4.8 concentration is 0.08mol/l Fructus Citri Limoniae
Acid-sodium citrate buffer, 10～12g carbamide, 0.2～0.4g magnesium sulfate, 0.6～0.8g potassium dihydrogen phosphate, 0.3～0.5g
Diammonium phosphate, starts fermenter stirrer, setting speed to 500～600r/min, opens fermenting heater, be warming up to 50
～55 DEG C, constant temperature stirs mixing 15～20min；End to be mixed, adds 3～5g cellulase, is 45～50 DEG C in temperature,
Under the conditions of rotating speed is 180～200r/min, constant temperature stirring reaction 36～48h, treats that fermentation tank interior temperature degree naturally cools to 35～38
DEG C, access Rhizopus oryzae into fermentation tank by the 8～10% of inoculum concentration, constant temperature stirs fermentation 48～60h, treat fermentation ends, heating rises
To 80～85 DEG C, sterilization enzyme inactivation processes 8～10min to temperature, treats that in fermentation tank, material naturally cools to room temperature, discharging, must mix and send out
Zymotic fluid；Count by weight, ball mill sequentially adds 80～100 parts of standby carbonization mixture, 280～320 parts of above-mentioned institutes
Obtain mixed fermentation liquid, be that 20:1～30:1 adds zirconium oxide ball milling pearl by ratio of grinding media to material, with 480～600r/min rotating speed ball-milling treatment
40～60min, discharging, filling and sealing, obtain final product green non-poisonous chemical mechanical polishing liquid.
Example 1
Weigh 30g rice husk first, pour into and fill in the beaker that 100ml mass concentration is 8% hydrochloric acid, heated and boiled 20min, filter,
Rice husk after boiling is proceeded in 105 DEG C of baking ovens, is dried to constant weight, then weighs 50g kieselguhr, mix with above-mentioned dried rice husk
Pour in crucible after conjunction, then crucible is proceeded in Muffle furnace, argon is passed through into stove with 4ml/min speed, protect shape in argon
Under state, it is heated to 500 DEG C with 4 DEG C/min speed, is incubated carbonization 15min, continue with 6 DEG C/min ramp to 800 DEG C,
Insulation carbonization 20min, cools to room temperature with the furnace, obtains carbonization mixture, standby；Weigh rice husk 300g, pour solid sample into and pulverize
In machine, after pulverizing 15min, cross 80 mesh sieves, obtain powdered rice hulls, subsequently pouring gained powdered rice hulls into and filling 2l mass concentration is 10% ammonia
In the beaker of water, then beaker is proceeded in water-bath magnetic stirring apparatuss, be 35 DEG C in temperature, under the conditions of rotating speed is 200r/min, leaching
Bubble 24h, sucking filtration, it is washed with deionized filter cake until cleaning mixture is in neutrality, then filter cake is placed in baking oven, in 105 DEG C of conditions
Lower drying, to constant weight, obtains dry cake；In the fermentation tank filling 1000ml deionized water, sequentially add the above-mentioned gained of 120g and do
Dry filter cake, 200mlph is 4.8 concentration is 0.08mol/l citric acid-sodium citrate buffer, 10g carbamide, 0.2g magnesium sulfate,
0.6g potassium dihydrogen phosphate, 0.3g diammonium phosphate, start fermenter stirrer, setting speed to 500r/min, open fermentation tank
Heater, is warming up to 50 DEG C, constant temperature stirring mixing 15min；End to be mixed, adds 3g cellulase, is 45 DEG C in temperature,
Under the conditions of rotating speed is 180/min, constant temperature stirring reaction 36h, treat that fermentation tank interior temperature degree naturally cools to 35 DEG C, by the 8% of inoculum concentration
Access Rhizopus oryzae, constant temperature stirring fermentation 48h into fermentation tank, treat fermentation ends, be heated to 80 DEG C, sterilization enzyme inactivation is processed
8min, treats that in fermentation tank, material naturally cools to room temperature, discharging, obtains mixed fermentation liquid；Count by weight, in ball mill according to
80 parts of standby carbonization mixture of secondary addition, 280 parts of above-mentioned gained mixed fermentation liquids, add zirconium oxide ball milling by ratio of grinding media to material for 20:1
Pearl, with 480r/min rotating speed ball-milling treatment 40min, discharging, filling and sealing, obtains final product green non-poisonous chemical mechanical polishing liquid.
The metal material of required polishing is placed in polisher lapper, is 17kpa in pressure, polishing disk and polishing pad rotating speed
Under the conditions of 70r/min, grinding and polishing 5min, use clean water 3 times after grinding, and dried up with compressed air, then by the present invention
Gained chemical mechanical polishing liquid is evenly applied to the position of required polishing, is 27kpa in polish pressure, polishing disk is turned with polishing pad
, for, under the conditions of 60r/min, chemically-mechanicapolish polishing 30min, clean 3 times, then is dried up with compressed air, through inspection by deionized water for speed
Survey, metal surface material removal rate is 0.3 μm/min, surface roughness is 0.05 μm.
Example 2
Weigh 40g rice husk first, pour into and fill in the beaker that 150ml mass concentration is 9% hydrochloric acid, heated and boiled 25min, filter,
Rice husk after boiling is proceeded in 107 DEG C of baking ovens, is dried to constant weight, then weighs 55g kieselguhr, mix with above-mentioned dried rice husk
Pour in crucible after conjunction, then crucible is proceeded in Muffle furnace, argon is passed through into stove with 5ml/min speed, protect shape in argon
Under state, it is heated to 530 DEG C with 5 DEG C/min speed, is incubated carbonization 17min, continue with 7 DEG C/min ramp to 840 DEG C,
Insulation carbonization 25min, cools to room temperature with the furnace, obtains carbonization mixture, standby；Weigh rice husk 400g, pour solid sample into and pulverize
In machine, after pulverizing 17min, cross 100 mesh sieves, obtain powdered rice hulls, subsequently pouring gained powdered rice hulls into and filling 2.5l mass concentration is 11%
In the beaker of ammonia, then beaker is proceeded in water-bath magnetic stirring apparatuss, be 37 DEG C in temperature, under the conditions of rotating speed is 240r/min,
Soak 30h, sucking filtration, be washed with deionized filter cake until cleaning mixture is in neutrality, then filter cake be placed in baking oven, in 107 DEG C of bars
It is dried to constant weight under part, obtain dry cake；In the fermentation tank filling 1500ml deionized water, sequentially add the above-mentioned gained of 140g
Dry cake, 250mlph is 4.8 concentration is 0.08mol/l citric acid-sodium citrate buffer, 11g carbamide, 0.3g sulphuric acid
Magnesium, 0.7g potassium dihydrogen phosphate, 0.4g diammonium phosphate, start fermenter stirrer, setting speed to 550r/min, open fermentation
Tank heater, is warming up to 53 DEG C, constant temperature stirring mixing 17min；End to be mixed, adds 4g cellulase, is 47 in temperature
DEG C, under the conditions of rotating speed is 190r/min, constant temperature stirring reaction 42h, treat that fermentation tank interior temperature degree naturally cools to 37 DEG C, by inoculum concentration
9% into fermentation tank access Rhizopus oryzae, constant temperature stirring fermentation 54h, treat fermentation ends, be heated to 83 DEG C, at sterilization enzyme inactivation
Reason 9min, treats that in fermentation tank, material naturally cools to room temperature, discharging, obtains mixed fermentation liquid；Count by weight, in ball mill
Sequentially add 90 parts of standby carbonization mixture, 300 parts of above-mentioned gained mixed fermentation liquids, add zirconia ball by ratio of grinding media to material for 25:1
Mill pearl, with 540r/min rotating speed ball-milling treatment 50min, discharging, filling and sealing, obtains final product green non-poisonous chemical mechanical polishing liquid.
The metal material of required polishing is placed in polisher lapper, is 17.5kpa in pressure, polishing disk is turned with polishing pad
Speed under the conditions of 75r/min, grinding and polishing 5min, use clean water 4 times after grinding, and dried up with compressed air, then by this
Bright gained chemical mechanical polishing liquid is evenly applied to the position of required polishing, is 27kpa, polishing disk and polishing pad in polish pressure
Under the conditions of rotating speed is 65r/min, chemically-mechanicapolish polish 38min, deionized water is cleaned 4 times, then is dried up with compressed air, through inspection
Survey, metal surface material removal rate is 0.3 μm/min, surface roughness is 0.1 μm.
Example 3
Weigh 50g rice husk first, pour into and fill in the beaker that 200ml mass concentration is 10% hydrochloric acid, heated and boiled 30min, mistake
Filter, the rice husk after boiling is proceeded in 110 DEG C of baking ovens, is dried to constant weight, then weighs 60g kieselguhr, with above-mentioned dried rice
Pour in crucible after shell mixing, then crucible is proceeded in Muffle furnace, argon is passed through into stove with 6ml/min speed, protect in argon
Under shield state, it is heated to 550 DEG C with 6 DEG C/min speed, is incubated carbonization 20min, continue with 8 DEG C/min ramp extremely
880 DEG C, it is incubated carbonization 30min, cools to room temperature with the furnace, obtain carbonization mixture, standby；Weigh rice husk 500g, pour solid-like into
In product pulverizer, after pulverizing 20min, cross 120 mesh sieves, obtain powdered rice hulls, subsequently gained powdered rice hulls are poured into and fill 3l mass concentration
In beaker for 12% ammonia, then beaker is proceeded in water-bath magnetic stirring apparatuss, be 40 DEG C in temperature, rotating speed is 280r/min bar
Under part, soak 36h, sucking filtration, be washed with deionized filter cake until cleaning mixture is in neutrality, then filter cake be placed in baking oven, in 110
It is dried to constant weight under the conditions of DEG C, obtain dry cake；In the fermentation tank filling 1200ml deionized water, sequentially add 150g above-mentioned
Gained dry cake, 300mlph is 4.8 concentration is 0.08mol/l citric acid-sodium citrate buffer, 12g carbamide, 0.4g
Magnesium sulfate, 0.8g potassium dihydrogen phosphate, 0.5g diammonium phosphate, start fermenter stirrer, setting speed to 600r/min, open
Fermenting heater, is warming up to 55 DEG C, constant temperature stirring mixing 20min；End to be mixed, adds 5g cellulase, in temperature
For 50 DEG C, under the conditions of rotating speed is 200r/min, constant temperature stirring reaction 48h, treat that fermentation tank interior temperature degree naturally cools to 38 DEG C, by connecing
Plant the 10% of amount and access Rhizopus oryzae, constant temperature stirring fermentation 60h into fermentation tank, treat fermentation ends, be heated to 85 DEG C, sterilize
Destroy the enzyme treatment 10min, treats that in fermentation tank, material naturally cools to room temperature, discharging, obtains mixed fermentation liquid；Count by weight,
Sequentially add 100 parts of standby carbonization mixture, 320 parts of above-mentioned gained mixed fermentation liquids in ball mill, add for 30:1 by ratio of grinding media to material
Enter zirconium oxide ball milling pearl, with 600r/min rotating speed ball-milling treatment 60min, discharging, filling and sealing, obtain final product green non-poisonous chemical machinery
Polishing fluid.
The metal material of required polishing is placed in polisher lapper, is 18kpa in pressure, polishing disk and polishing pad rotating speed
Under the conditions of 80r/min, grinding and polishing 6min, use clean water 5 times after grinding, and dried up with compressed air, then by the present invention
Gained chemical mechanical polishing liquid is evenly applied to the position of required polishing, is 28kpa in polish pressure, polishing disk is turned with polishing pad
, for, under the conditions of 70r/min, chemically-mechanicapolish polishing 45min, clean 5 times, then is dried up with compressed air, through inspection by deionized water for speed
Survey, metal surface material removal rate is 0.4 μm/min, surface roughness is 0.15 μm.
Claims (1)
1. a kind of preparation method of green non-poisonous chemical mechanical polishing liquid is it is characterised in that concrete preparation process is:
(1) weigh 30～50g rice husk, pour into and fill in the beaker that 100～200ml mass concentration is 8～10% hydrochloric acid, heating is boiled
Boiling 20～30min, filters, the rice husk after boiling is proceeded in 105～110 DEG C of baking ovens, is dried to constant weight, then weighs 50～60g
Kieselguhr, is poured in crucible after being mixed with above-mentioned dried rice husk, then crucible is proceeded in Muffle furnace, with 4～6ml/min speed
Rate is passed through argon into stove, under argon guard mode, is heated to 500～550 DEG C with 4～6 DEG C/min speed, is incubated charcoal
Change 15～20min, continue with 6～8 DEG C/min ramp to 800～880 DEG C, be incubated carbonization 20～30min, cool to the furnace
Room temperature, obtains carbonization mixture, standby；
(2) weigh rice husk 300～500g, pour in solid sample pulverizer, after pulverizing 15～20min, cross 80～120 mesh sieves,
Powdered rice hulls, subsequently gained powdered rice hulls are poured into and fill in the beaker that 2～3l mass concentration is 10～12% ammonia, then by beaker
Proceed in water-bath magnetic stirring apparatuss, be 35～40 DEG C in temperature, under the conditions of rotating speed is 200～280r/min, soak 24～36h,
Sucking filtration, is washed with deionized filter cake until cleaning mixture is in neutrality, then filter cake is placed in baking oven, under the conditions of 105～110 DEG C
It is dried to constant weight, obtain dry cake；
(3) in the fermentation tank filling 1000～1200ml deionized water, sequentially add the above-mentioned gained of 120～150g and filter is dried
Cake, 200～300mlph is 4.8 concentration is 0.08mol/l citric acid-sodium citrate buffer, 10～12g carbamide, 0.2～
0.4g magnesium sulfate, 0.6～0.8g potassium dihydrogen phosphate, 0.3～0.5g diammonium phosphate, start fermenter stirrer, setting speed
To 500～600r/min, open fermenting heater, be warming up to 50～55 DEG C, constant temperature stirs mixing 15～20min；
(4) end to be mixed, adds 3～5g cellulase, is 45～50 DEG C in temperature, and rotating speed is 180～200r/min bar
Under part, constant temperature stirring reaction 36～48h, treat that fermentation tank interior temperature degree naturally cools to 35～38 DEG C, by inoculum concentration be 8～10% to
Rhizopus oryzae is accessed, constant temperature stirs fermentation 48～60h, treats fermentation ends, be heated to 80～85 DEG C, sterilization enzyme inactivation in fermentation tank
Process 8～10min, treat that in fermentation tank, material naturally cools to room temperature, discharging, obtain mixed fermentation liquid；
(5) count by weight, ball mill sequentially adds the standby carbonization mixture of 80～100 parts of steps (1), 280～320
The above-mentioned gained mixed fermentation liquid of part, is that 20:1～30:1 adds zirconium oxide ball milling pearl by ratio of grinding media to material, with 480～600r/min rotating speed
Ball-milling treatment 40～60min, discharging, filling and sealing, obtain final product green non-poisonous chemical mechanical polishing liquid.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109536041A (en) * | 2018-12-28 | 2019-03-29 | 天津洙诺科技有限公司 | A kind of sapphire ball cover processing polished liquid and preparation method thereof |
| CN111020594A (en) * | 2019-12-04 | 2020-04-17 | 上海富彭展览展示服务有限公司 | Polishing solution for stainless steel surface processing and polishing method using polishing solution |
| CN111118505A (en) * | 2020-01-14 | 2020-05-08 | 深圳市益联塑胶有限公司 | Metal surface treatment method |
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| CN109536041A (en) * | 2018-12-28 | 2019-03-29 | 天津洙诺科技有限公司 | A kind of sapphire ball cover processing polished liquid and preparation method thereof |
| CN111020594A (en) * | 2019-12-04 | 2020-04-17 | 上海富彭展览展示服务有限公司 | Polishing solution for stainless steel surface processing and polishing method using polishing solution |
| CN111118505A (en) * | 2020-01-14 | 2020-05-08 | 深圳市益联塑胶有限公司 | Metal surface treatment method |
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