CN106338617A - Mining MEMS anemometer electric insulation self-cleaning packaging method - Google Patents
Mining MEMS anemometer electric insulation self-cleaning packaging method Download PDFInfo
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- CN106338617A CN106338617A CN201610785127.8A CN201610785127A CN106338617A CN 106338617 A CN106338617 A CN 106338617A CN 201610785127 A CN201610785127 A CN 201610785127A CN 106338617 A CN106338617 A CN 106338617A
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- China
- Prior art keywords
- parylene
- parylene film
- airspeedometer
- film
- mems
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/08—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring variation of an electric variable directly affected by the flow, e.g. by using dynamo-electric effect
Abstract
The invention relates to a mining MEMS anemometer and particularly relates to a mining MEMS anemometer electric insulation self-cleaning packaging method. The method comprises steps that (a), Parylene film deposition is carried out: a CVD method is employed on an outer surface of a vector anemometer to deposit a 2-micrometer thickness Parylene film; (b), an ICP etching machine is employed to process the Parylene film, SF6 is employed to carry out plasma treatment, and a high hydrophobic surface is formed on the surface of the Parylene film. According to the method, insulation property of the Parylene film is utilized, on the basis of a lotus-leaf-like self-cleaning effect hydrophobic treatment mode, the SF6 is employed to carry out plasma treatment to form the high hydrophobic surface on the surface of the Parylene film, micro-structure electric insulation self cleaning is realized, and good consistency and batch processing can be realized.
Description
Technical field
The present invention relates to mining mems airspeedometer, specifically a kind of mining mems airspeedometer electric insulation automatically cleaning encapsulation side
Method.
Background technology
Coal enterprise is high risk industries, and safety in production is the most important thing of coal production, and wherein mine ventilation system is ore deposit
The important component part of well production system, the situation of mine ventilation system decides the safe coefficient of whole mine；Meanwhile, mine
Ventilating system is also the basis of " one through three prevention " (ventilation, gas prevention, coal dust control, fire prevention).Mine laneway is crisscross, pass through mutually
Logical, for ensureing the distinguished and admirable direction along needs and path flows, some tunnels arrange the ventilation equipment to distinguished and admirable control.As
If these facilities break down, do not have should role, arise that distinguished and admirable disorderly and pernicious gas such as is gushed out the phenomenon
And lead to the breaking-up of ventilating system, or even induction serious disasters and accidents.So, in the face of the air turbulence being likely to occur, in tide
Under wet, many dirt, the Minepit environment easily firing ventilation carry out two-dimensional vector wind speed real-time monitoring propose challenge and demand.
The hydrophobic treatment mode of imitative lotus leaf self-cleaning effect is biomimetic features area research focus.Lotus leaf overmolded mode is multiple
Research group adopts, and prepares high hydrophobic pdms surface, contact angle reaches 156；Based on poly-dopamine coating and Passivation Treatment
High hydrophobic surface can be realized on multiple substrates such as silicon, metal and fabric, and contact angle reaches 167 °；Y. liu is in its article " a
New method for producing ' lotus effect ' on a biomimetic shark skin. " middle proposition profit
Form micro-nano structure with heating mode on pdms surface, surface contact angle reaches 160；S. nagappan is in its article
《bio-inspired, multi-purpose and instant superhydrophobic–superoleophilic
lotus leaf powder hybrid micro–nanocomposites for selective oil spill
Capture " in propose to know clearly Lotus Leaf and phenyl for Silica hydrogel mixture, obtain the hydrophobic table of height of up to 175 ° of contact angle
Face.However, these imitative lotus leaf hydrophobic coating such as pdms, poly-dopamine, Silica hydrogel, polystyrene and silicon nanofiber etc. are using painting
Cover mode, be not suitable for the movable sensor surface encapsulation with big step.
Meanwhile, parylene(Parylene) research of film and application developed rapidly.Parylene is
A kind of chemical inertness and the excellent thin-film material of electrical insulation capability, have fabulous obstruct protective capacities, to water in 0.2 μ m-thick just
There is no pin hole, when 5 μm, be resistant to more than l000v dc breakdown voltage.There is the electrical insulating property for parylene film for many researchs
Launch with permeability resistance, these characteristics cause the great interest of sensor field, multiple sensors adopt so far
Parylene carries out insulating protection, capacitance pressure transducer, fibre optic compression sensor, intraocular pressure sensor, glucose monitor
Part, rf mems device, biosensor arrays, ph sensor, organic transistor etc..Above encapsulation research is primarily directed to
The permeability resistance of parylene film and electrical insulating property, are not concerned with parylene thin-film hydrophobic sex chromosome mosaicism.For parylene
The hydrophobically modified method of film, a. lakhtakia research group of Pennsylvania State University of the U.S. utilizes fiber type to grow parylene
Film carries out hydrophobically modified research, and potential application is biomedical devices；W. li research group of Michigan, United States state university carries
Go out and hydrophobic treatment is carried out to surface successively using oxygen and fluorine-based plasma, be directed to medical device and medicinal application aspect
Encapsulation, above research be not directed to micro-structural self-cleaning film encapsulation problem.
Because above encapsulation is not fully solved the problem of mining mems airspeedometer electric insulation automatically cleaning encapsulation.So, if
During the mining reliability encapsulation of flowmeter sensor, need to consider emphatically the problems such as its insulating properties, automatically cleaning.
Content of the invention
The invention aims to solving the problems, such as insulating properties and the technical bottlenecks such as automatically cleaning of mining mems airspeedometer, carry
Go out a kind of mining mems airspeedometer electric insulation automatically cleaning method for packing.
The present invention employs the following technical solutions a kind of realization: mining mems airspeedometer electric insulation automatically cleaning encapsulation side
Method, comprises the following steps: (a) parylene thin-film deposition: in pressure welding lead and on the vector airspeedometer outer surface of integrated cilium
2 microns of thick parylene films are deposited using cvd method (chemical vapor deposition)；B () utilizes icp etching machine to parylene
Film is processed, using sf6Carry out corona treatment, icp etching machine be provided that chamber pressure is set to 30mt, on
Bottom electrode radio-frequency power is respectively 700w and 45w, sf6Flow be 90sccm, can be complete through 420s at a temperature of 20 DEG C
Become etching, be now formed for high hydrophobic surface in parylene film surface.
For mine is moist, many dirt, the environment easily firing, it is hydrophobic absolutely that the present invention proposes a kind of height of imitative lotus leaf self-cleaning effect
Edge thin-film package, using the high conformality of the deposit of parylene film, hypotonicity and high-insulativity, realizes electric insulation, utilizes
Fluorine-based plasma treatment technology carries out surface modification, enhanced film hydrophobicity to parylene film, realizes automatically cleaning.This
The bright two-dimensional vector airspeedometer that can be applicable to complicated Minepit environment ventilation real-time monitoring for development of studying provides strong technology
Support.
Present invention cvd deposit parylene film in pressure welding lead and on the vector airspeedometer of integrated cilium, due to deposit
Height conformality, can on device surface conformal one layer of parylene insulation film of uniform deposition, including cilium surface, pressure welding
Wire surface, cantilever beam front and back etc. so that while lead and steam and conductive dust insulation, be also beneficial to cilium with
The protection of lead with firm.Here, need to consider film-insulated property, sensitivity and resonant frequency, optimize parylene thin
Film thickness.
Using stress distribution under acoustic pressure effect for the ansys software analysis airspeedometer of the present invention, as shown in Fig. 2 can
Extrapolate sensitivity.
By the emulation data of airspeedometer stress distribution before and after 2 μm of parylene thin-film depositions, analysis obtains mutually in unison
Under pressure effect, the sensitivity difference before and after parylene thin-film deposition is less than 1%, affects very little.
One layer of parylene film of conformal deposited, defines the cantilever beam of multilayer materials, to cantilever beam in structure
The equivalent thickness of structure and equivalent elastic coefficient have affected, and also just have impact on the resonant frequency of structure.
In the case of undamped, 2 μm of parylene of ansys simulation analysis deposit the resonant frequency of front-end geometry, such as Fig. 3
Shown.
From simulation result, in the case of undamped, the resonant frequency of parylene deposit front-end geometry is respectively 2150hz
With 2285hz.Parylene thin-film deposition is improved to some extent to airspeedometer undamped resonant frequency.
Technical scheme of the present invention adopts sf6Plasma treatment forms high hydrophobic surface in parylene film surface,
High hydrophobic surface is formed mainly due to both sides reason: surface roughness is significantly increased；Fluorine-based plasma with
The chemical bond that parylene surface is formed has hydrophobic property.During use, can be using regular automatic sprayer to device
Surface clean device surface, the dust of device surface flows away with water droplet.
It is known that the water being sprayed on lotus leaf surface will not drawout, but define the water droplet of spheroidal one by one.
Water droplet freely can roll on lotus leaf surface, and takes away the debris on lotus leaf surface or dust, it is achieved thereby that lotus leaf
The purpose of self-cleaning surface.Based on this phenomenon, it is possible to use water droplet or other drop rinse by debris or grey dustiness
The automatical cleaning ability to detect this surface of solids for the method for the surface of solids of dye.
Insulation automatically cleaning method for packing of the present invention, the technological parameter being adopted is able to ensure that film has high dredging
Water surface, has excellent insulating properties simultaneously.Parylene film itself just has good hydrophobic performance, and contact angle also reaches
To 85 °.Experiment shows, processes parylene film by fluorine-based plasma, can be formed in parylene film surface-
The high hydrophobic grouping such as cf- ,-f-c-cl- ,-cf2- ,-cf3-, can effectively reduce parylene surface energy, and contact angle brings up to
136 °, effectively increase the hydrophobicity of parylene film.By groping to adjust the technological parameter (work(that fluorine-based plasma is processed
Rate, gas mixing ratio, gas flow rate, process time) so that hydrophobic effect is optimal, it is suitable for high hydrophobic parylene thin-film package
Airspeedometer.
Previous work of the present invention has been proven that the film of 2 μ m-thick can be with conformal deposited in integrated cilium, pressure welding lead
On vector airspeedometer, and the airspeedometer insulating properties after deposit are good, after soaking 24 hours in salt solution, pressure drag two terminal impedance
It is not changed in.
Present invention advantage compared with prior art is: existing research is not directed to the encapsulation of micro-structural self-cleaning film and asks
Topic.Mining mems airspeedometer electric insulation automatically cleaning method for packing proposed by the present invention, using the insulating properties of parylene film, base
In the hydrophobic treatment mode of imitative lotus leaf self-cleaning effect, using sf6Plasma treatment forms high hydrophobic in parylene film surface
Surface is it is achieved that the electric insulation automatically cleaning of micro-structural.Have the advantages that uniformity good, can batch machining.
Brief description
The structural representation of Fig. 1 vector of the present invention airspeedometer.
1- silicon cilium；2- rood beam；3- metal lead wire, 4- automatic sprayer.
Stress distribution emulation under acoustic pressure effect for Fig. 2 airspeedometer of the present invention.
The resonant frequency emulation of airspeedometer before and after Fig. 3 parylene deposit, before left side is deposit, after right side is deposit.
Specific embodiment
A kind of mining mems airspeedometer electric insulation automatically cleaning method for packing, comprises the following steps: (a) parylene film forms sediment
Long-pending: vector airspeedometer is put into film deposition system, adds 3.2 grams of parylene particles in the hopper of film deposition system,
Open parylene film deposition system, at a temperature of -100 DEG C after 2 hours, vector airspeedometer surface just deposited one layer
2 microns of fine and close parylene film (instrument needed for this step is that scs company produces, model pds2010)；(b) profit
With icp etching machine, parylene film is processed, using sf6Carry out corona treatment, the setting of icp etching machine is such as
Under: it is 0.133pa that chamber pressure is set to 30mt(1mt, and 30mt is 3.99pa, about 0.00004 atmospheric pressure), upper/lower electrode is penetrated
Frequency power is respectively 700w and 45w, sf6Flow be 90sccm, at a temperature of 20 DEG C through 420s can complete etch, this
When be formed for high hydrophobic surface in parylene film surface.Icp etching machine is that northern Microtronic A/S produces, model
gse200plus.
It is to put in parylene film deposition system by after vector airspeedometer lead, only in above-mentioned work in step (a)
Under the conditions of skill, one layer 2 microns of fine and close parylene film can be formed on the surface of vector airspeedometer, and be follow-up etc.
Plasma etching technique provides the necessary technical basis；Icp etching machine can be final using technological parameter of the present invention
Obtain the surface with high hydrophobic property.
As shown in figure 1, described vector airspeedometer includes silicon cilium (1)；Rood beam (2)；Metal lead wire (3), the application institute
The vector airspeedometer structure stated is consistent with the trivector hydrophone structure in Chinese patent zl2010105815443.
Airspeedometer of the present invention adopts silicon cilium-cross girder construction, realizes the detection of two dimension wind speed, detects mechanism
For: when distinguished and admirable act on cilium when, the swing of cilium leads to rood beam ess-strain to occur, thus leading to pressure-sensitive electricity on rood beam
Resistance resistance changes, and extracts the distinguished and admirable size and Orientation of this mutation analysis by Wheatstone bridge, thus obtaining two-D wind speed
Information.
By conformal deposited parylene film in silicon cilium-cross girder construction, processed using fluorine base gas
Parylene film surface, strengthens its surface hydrophobic, obtains the hydrophobic uniform parylene film of a floor height.
Because parylene film has excellent electric insulation and the characteristic of water vapor infiltration, can achieve good electric insulation
Effect；During use, device surface can be cleaned to device surface using regular automatic sprayer, hydrophobic using surface height
Property, imitative lotus leaf self_cleaning effect, the dust of device surface flows away with water droplet, as shown in Figure 1.
Mining mems airspeedometer proposed by the present invention is electrically insulated automatically cleaning method for packing, has that uniformity is good, can add in batches
The advantage of work.
Claims (2)
1. a kind of mining mems airspeedometer electric insulation automatically cleaning method for packing is it is characterised in that comprise the following steps: (a)
Parylene thin-film deposition: adopt cvd method to deposit 2 microns in pressure welding lead and on the vector airspeedometer outer surface of integrated cilium
Thick parylene film；B () is processed to parylene film using icp etching machine, concretely comprise the following steps: adopts sf6Enter
Row corona treatment, icp etching machine be provided that chamber pressure is set to 30mt, upper/lower electrode radio-frequency power is respectively
700w and 45w, sf6Flow be 90sccm, at a temperature of 20 DEG C through 420s can complete etch, now in parylene
Film surface is formed for high hydrophobic surface.
2. as claimed in claim 1 a kind of mining mems airspeedometer electric insulation automatically cleaning method for packing it is characterised in that step
It is to put into after vector airspeedometer lead in parylene film deposition system in (a), add 3.2 grams of parylene particles to thin
In the hopper of film deposition system, open parylene film deposition system, at a temperature of -100 DEG C after 2 hours, vector wind
Speed meter surface just deposited one layer 2 microns of fine and close parylene film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610785127.8A CN106338617A (en) | 2016-08-31 | 2016-08-31 | Mining MEMS anemometer electric insulation self-cleaning packaging method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610785127.8A CN106338617A (en) | 2016-08-31 | 2016-08-31 | Mining MEMS anemometer electric insulation self-cleaning packaging method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106338617A true CN106338617A (en) | 2017-01-18 |
Family
ID=57822332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610785127.8A Pending CN106338617A (en) | 2016-08-31 | 2016-08-31 | Mining MEMS anemometer electric insulation self-cleaning packaging method |
Country Status (1)
| Country | Link |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201031768Y (en) * | 2007-04-24 | 2008-03-05 | 刘景斌 | Bionics type wind motor |
| CN104459181A (en) * | 2014-12-31 | 2015-03-25 | 东南大学 | Bionic hair sensor for flow velocity, acceleration and angular velocity sensitivity |
| CN105181118A (en) * | 2015-10-17 | 2015-12-23 | 中北大学 | Broadband MEMS vector hydrophone simulating seal beard |
-
2016
- 2016-08-31 CN CN201610785127.8A patent/CN106338617A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201031768Y (en) * | 2007-04-24 | 2008-03-05 | 刘景斌 | Bionics type wind motor |
| CN104459181A (en) * | 2014-12-31 | 2015-03-25 | 东南大学 | Bionic hair sensor for flow velocity, acceleration and angular velocity sensitivity |
| CN105181118A (en) * | 2015-10-17 | 2015-12-23 | 中北大学 | Broadband MEMS vector hydrophone simulating seal beard |
Non-Patent Citations (1)
| Title |
|---|
| 刘源: "基于Parylene封装的"棒棒糖式"MEMS矢量水听器", 《中国优秀硕士学位论文全文数据库工程科技Ⅱ辑》 * |
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Application publication date: 20170118 |