CN106319479B - Belt positioning device and aumospheric pressure cvd equipment - Google Patents
Belt positioning device and aumospheric pressure cvd equipment Download PDFInfo
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- CN106319479B CN106319479B CN201510390671.8A CN201510390671A CN106319479B CN 106319479 B CN106319479 B CN 106319479B CN 201510390671 A CN201510390671 A CN 201510390671A CN 106319479 B CN106319479 B CN 106319479B
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Abstract
The present invention provides a kind of belt positioning device and include the aumospheric pressure cvd equipment of the belt positioning device, which includes：Pedestal；One end of regulating part, regulating part is mounted on pedestal, and stretches out pedestal, and the other end of regulating part is provided with connector；Locating part, locating part include limit wheel shaft and position-limited wheel, and the one end for limiting wheel shaft is connect with connector, and stretches out connector, and limit wheel shaft is vertical with regulating part, and the other end for limiting wheel shaft is arranged with position-limited wheel；Wherein, regulating part is rotated, locating part can be made to be moved along the axial direction of regulating part, rotary stopper wheel shaft can be such that position-limited wheel opposite joints are moved along the axial direction of limit wheel shaft.The technical solution and engages belt using position-limited wheel, to limit the movement locus of belt, avoids the movement locus deformation of belt by the way that belt positioning device is arranged on belt, generation phenomena such as to efficiently avoid piece, lamination.
Description
Technical field
The present invention relates to semiconductor devices to generate field, more specifically, is related to a kind of belt positioning device and one kind is normal
Pressure chemical vapor deposition equipment.
Background technology
In field of semiconductor manufacture, WJ (Watkins-Johnson) 999 is a kind of hydride (SiH4, PH3, B2H6) pass through
With O2After chemical reaction and deposit technique of the thin film on silicon chip.Chemical vapor deposition (CVD) is divided into room temperature chemical gaseous phase
Deposit (LPCVD) and Films Prepared by APCVD (APCVD).Wherein, LPCVD is to place silicon chip in the cavity, passes through sealing
The reaction environment that air forms a chemical vapor deposition is walked with pumping.WJ999 belongs to APCVD, and reaction process is to put silicon chip
It sets in atmospheric environment, passes through stable high purity N2Purging ensures do not have pollutant in reaction environment.Concrete operations are to use hand
Silicon chip is put into above belt, and entire process engineering is completed by heating and cooled region by belt transport.Heating region
It is chemical reaction region, there is N2It surrounds, inlet and outlet have air draft, thus create a best reaction environment.Belt is stainless
Steel material is connected by steel wire across mesh.But since belt is in prolonged operation process, in belt edge and equipment
Wall friction causes belt to deform, and makes belt transport track at S-shaped, when silicon chip is placed on belt and is transferred to bit end,
Since the position of belt is not in normal range (NR), silicon chip cannot drop into designated position, to generate piece, lamination
Etc. abnormal phenomenon.
Invention content
The present invention is based on the above problem, it is proposed that one kind can prevent belt from deforming, and then avoid piece, lamination etc.
The belt positioning device that phenomenon generates.
For this purpose, it is an advantage of the invention to provide a kind of belt positioning devices.
It is a further object of the invention to provide a kind of aumospheric pressure cvd equipment, including above-mentioned belt to position
Device.
To achieve the above object, first aspect present invention embodiment provides a kind of belt positioning device, is used for atmospheric pressure
Vapor deposition apparatus is learned, including：Pedestal；One end of regulating part, the regulating part is mounted on the pedestal, and stretches out the base
Seat, the other end of the regulating part are provided with connector；Locating part, the locating part includes limiting wheel shaft and position-limited wheel, described
One end of limit wheel shaft is connect with the connector, and stretches out the connector, and the limit wheel shaft hangs down with the regulating part
Directly, the other end of the limit wheel shaft is arranged with the position-limited wheel；Wherein, the regulating part is rotated, the locating part edge can be made
The axial direction of the regulating part moves, and rotates the limit wheel shaft, can make the relatively described connector of the position-limited wheel described in
Limit the axial direction movement of wheel shaft.
Belt positioning device according to an embodiment of the invention, including pedestal, the regulating part on pedestal and with tune
Save part locating part connected vertically.Specifically, pedestal is fixed in aumospheric pressure cvd equipment, and one end of regulating part passes through
Pedestal is hanging, and the other end of regulating part is provided with connector, wherein locating part includes the limit for limiting wheel shaft and being set in one end
Position wheel, the other end for limiting wheel shaft pass through connector and hanging, and it is vertical with regulating part to limit wheel shaft, specifically, rotation adjusting
The free end of part can drive locating part along the axial back and forth movement of regulating part, adjusted to adjust position-limited wheel by connector
Installation site on the axial direction of part, the free end of rotary stopper axis can drive position-limited wheel past along the axial direction of limit shaft
Return movement, to adjust position-limited wheel regulating part installation site in the radial direction.When the belt positioning device is installed, make limit
Installation parallel with belt is taken turns in position, and belt is made to be fastened between position-limited wheel, so that belt can only move between position-limited wheel.
To limit the movement locus of belt, therefore, the silicon chip on belt just can move to specified after completing predetermined process
Place, generation phenomena such as so as to avoid piece, lamination is fallen.
In addition, also there is following additional technical feature according to the belt positioning device that the above embodiment of the present invention provides：
According to one embodiment of present invention, the connector includes：First connecting portion is connect with the regulating part；The
Two interconnecting pieces, one end vertical connection with the first connecting portion, the locating part are vertically mounted on by the limit wheel shaft
In the second connecting portion.
Belt positioning device according to an embodiment of the invention, connector include first connecting portion and second connecting portion,
In, first connecting portion and second connecting portion are vertical, i.e., connector is L-shaped, and specifically, regulating part and first connecting portion vertically connect
It connects, limits wheel shaft and second connecting portion vertical connection.Connector by being arranged to two orthogonal by the technical solution
One interconnecting piece and second connecting portion so that regulating part and limit wheel shaft can be mutually perpendicular to, so as to by adjust regulating part and
Limit wheel shaft can adjust the installation site of position-limited wheel.
According to one embodiment of present invention, the first mounting hole is provided on the pedestal, the regulating part is mounted on institute
It states in the first mounting hole, and stretches out first mounting hole, wherein the regulating part can axially be transported along first mounting hole
It is dynamic, the second mounting hole is provided in the second connecting portion, the limit wheel shaft is mounted in second mounting hole, and is stretched out
Second mounting hole, and the limit wheel shaft can be axially moved along the mounting hole.
According to one embodiment of present invention, in being provided in first mounting hole and/or in second mounting hole
Screw thread is provided with external screw thread on the regulating part and/or on the limit wheel shaft.
Belt positioning device according to an embodiment of the invention, regulating part are engaged by internal and external threads, and regulating part is made to install
On pedestal, limit wheel shaft is engaged by internal and external threads, and limit wheel shaft is made to be mounted in second connecting portion, rotates regulating part
Or limit wheel shaft, the movement of regulating part opposite base can be made to drive position-limited wheel to be moved along the axial direction of regulating part, or make limit
Position wheel shaft is moved relative to second connecting portion, to drive limit wheel shaft to be moved along the radial direction of regulating part.
According to one embodiment of present invention, being provided on the pedestal makes the regulating part be fixed on the pedestal
First location structure, being provided in the second connecting portion makes the limit wheel shaft be fixed on second in the second connecting portion
Location structure.
According to one embodiment of present invention, first location structure is first positioning hole, in the first positioning hole
It is provided with the first locating piece, first locating piece coordinates with the regulating part；Second location structure is second location hole,
The second locating piece is provided in the second location hole, second locating piece coordinates with the limit wheel shaft.
Belt positioning device according to an embodiment of the invention, be provided on pedestal and second connecting portion respectively with regulating part
With the first positioning hole and second location hole of limit wheel shaft cooperation, it is corresponding fixed to be provided in first positioning hole and second location hole
Position part, specifically, the first locating piece and the second locating piece are bolt, and screw thread is provided in first positioning hole and second location hole.
When regulating part or position-limited wheel axial adjustment are to predeterminated position, and after fixing position-limited wheel, tighten on pedestal and second connecting portion
Locating piece just can make pedestal and the firm fixation of regulating part, limit wheel shaft and second can also be made to connect firm fixation.
According to one embodiment of present invention, be provided with baffle ring on two end faces of the position-limited wheel, the position-limited wheel with
It is provided with bearing between the limit wheel shaft.
Belt positioning device according to an embodiment of the invention, position-limited wheel and belt contacts, and in the drive backspin of belt
Turn, wherein be provided with baffle ring on the end face of position-limited wheel, the baffle ring is parallel with belt, and belt is made to be fastened between baffle ring, prevents
Belt and position-limited wheel are detached from, so that position-limited wheel is always and belt contacts, and with belt movement.In addition, limit wheel shaft and
Bearing is provided between position-limited wheel, bearing is used to support position-limited wheel and is rotated with position-limited wheel, so as to reduce position-limited wheel with
The friction between wheel shaft is limited, to improve the service life of the belt positioning device.
According to one embodiment of present invention, mounting structure is provided on the pedestal, the position-limited wheel is metal spacing
Wheel.
Belt positioning device according to an embodiment of the invention, pedestal are fixed in aumospheric pressure cvd equipment, and
Make position-limited wheel and belt contacts, specifically, on pedestal be provided with the mounting structure for fixed pedestal, which is preferably
Mounting hole.Specifically, it is additionally provided with straight slot on pedestal, by the straight slot mounting hole, so as to which pedestal is quickly and easily solid
It is scheduled in aumospheric pressure cvd equipment.
Belt positioning device according to an embodiment of the invention, belt are metal net shaped belt, preferably stainless steel sheet| band,
To enhance the abrasion resistance of position-limited wheel, the material of position-limited wheel should be consistent with the material of belt, and position-limited wheel is metal spacing wheel, preferably
Stainless steel position-limited wheel.
The embodiment of second aspect of the present invention provides a kind of aumospheric pressure cvd equipment, including in one or more
State any one of them belt positioning device.
Aumospheric pressure cvd equipment according to an embodiment of the invention, it is preferable that belt positioning device is arranged symmetrically,
So as to be entirely limited the movement locus of belt, generation phenomena such as so as to effectively avoid piece, lamination, wherein
The aumospheric pressure cvd equipment is WJ999 equipment.
According to one embodiment of present invention, aumospheric pressure cvd equipment includes：Belt, the belt and the skin
Position-limited wheel parallel contact with positioning device, and be fastened between the baffle ring of the belt positioning device, the belt can drive
The position-limited wheel rotation, the belt is metal belt, and multiple mesh are provided on the belt.
The additional aspect and advantage of the present invention will provide in following description section, will partly become from the following description
Obviously, or practice through the invention is recognized.
Description of the drawings
The above-mentioned and/or additional aspect and advantage of the present invention will become in the description from combination following accompanying drawings to embodiment
Obviously and it is readily appreciated that, wherein：
Fig. 1 is the structural schematic diagram of the belt positioning device described according to an embodiment of the present invention；
Fig. 2 is the schematic top plan view according to Fig. 1 belt positioning devices provided；
Fig. 3 is the left view schematic diagram according to Fig. 1 belt positioning devices provided；
Fig. 4 is the structural schematic diagram of the belt positioning device described according to a further embodiment of the invention；
Fig. 5 is the schematic top plan view according to Fig. 4 belt positioning devices provided.
Wherein, the correspondence in Fig. 1 to Fig. 5 between reference numeral and component names is：
100 pedestals, 110 first mounting holes, 120 first positioning holes, 200 regulating parts, 300 connectors, 310 first connections
Portion, 320 second connecting portions, 321 second mounting holes, 322 second location holes, 400 locating parts, 410 limit wheel shafts, 420 position-limited wheels,
421 baffle rings.
Specific implementation mode
To better understand the objects, features and advantages of the present invention, below in conjunction with the accompanying drawings and specific real
Mode is applied the present invention is further described in detail.It should be noted that in the absence of conflict, the implementation of the application
Feature in example and embodiment can be combined with each other.
Many details are elaborated in the following description to facilitate a thorough understanding of the present invention, still, the present invention may be used also
By using other, different from implementing in a manner of described here, therefore, protection scope of the present invention is not by following public tool
The limitation of body embodiment.
The belt positioning device for describing to provide according to one embodiment of present invention referring to Fig. 1 to Fig. 5.
As shown in Figure 1 to Figure 3, first aspect present invention embodiment provides a kind of belt positioning device, is used for atmospheric pressure
Vapor deposition apparatus is learned, including：Pedestal 100；One end of regulating part 200, regulating part 200 is mounted on pedestal 100, and stretches out base
Seat 100, the other end of regulating part 200 is provided with connector 300；Locating part 400, locating part 400 include limit wheel shaft 410 and limit
One end of position wheel 420, limit wheel shaft 410 is connect with connector 300, and stretches out connector 300, and is limited wheel shaft 410 and adjusted
Part 200 is vertical, and the other end of limit wheel shaft 410 is arranged with position-limited wheel 420；Wherein, regulating part 200 is rotated, locating part 400 can be made
Axial direction along regulating part 200 moves, rotary stopper wheel shaft 410, and 420 opposite joints 300 of position-limited wheel can be made along position-limited wheel
The axial direction of axis 410 moves.
In this embodiment, belt positioning device, including pedestal 100, the regulating part 200 on pedestal 100 and with
200 locating part 400 connected vertically of regulating part.Specifically, pedestal 100 is fixed in aumospheric pressure cvd equipment, is adjusted
One end of part 200 passes through pedestal 100 hanging, and the other end of regulating part 200 is provided with connector 300, wherein locating part 400 wraps
It includes limit wheel shaft 410 and is set in the position-limited wheel 420 of one end, the other end of limit wheel shaft 410 passes through connector 300 and hangs
Sky, and limit wheel shaft 410 is vertical with regulating part 200, specifically, rotates the free end of regulating part 200, can pass through connector 300
Drive locating part 400 along regulating part 200 axial back and forth movement, to adjust position-limited wheel 420 regulating part 200 axial direction
On installation site, the free end of rotary stopper axis can drive axial direction back and forth movement of the position-limited wheel 420 along limit shaft, from
And adjust position-limited wheel 420 regulating part 200 installation site in the radial direction.When the belt positioning device is installed, it will limit
Take turns 420 installations parallel with belt, and belt made to be fastened between position-limited wheel 420 so that belt can only position-limited wheel 420 it
Between move.To limit the movement locus of belt, therefore, the silicon chip on belt just can move to after completing predetermined process
Specified place, generation phenomena such as so as to avoid piece, lamination is fallen.
Specifically, as depicted in figs. 1 and 2, connector 300 includes：First connecting portion 310 is connect with regulating part 200；The
Two interconnecting pieces 320, one end vertical connection with first connecting portion 310, locating part 400 are vertically mounted on by limiting wheel shaft 410
In second connecting portion 320.
In this embodiment, connector 300 includes first connecting portion 310 and second connecting portion 320, wherein the first connection
Portion 310 and second connecting portion 320 are vertical, i.e., connector 300 is L-shaped, and specifically, regulating part 200 and first connecting portion 310 are hung down
It is direct-connected to connect, limit wheel shaft 410 and 320 vertical connection of second connecting portion.Connector 300 by being arranged to two by the technical solution
Orthogonal first connecting portion 310 and second connecting portion 320 so that regulating part 200 and limit wheel shaft 410 can mutually hang down
Directly, so as to the installation site of position-limited wheel 420 can be adjusted by adjusting regulating part 200 and limiting wheel shaft 410.
Further, as depicted in figs. 1 and 2, the first mounting hole 110 is provided on pedestal 100, regulating part 200 is mounted on
In first mounting hole 110, and stretching out the first mounting hole 110, wherein regulating part 200 can be axially moved along the first mounting hole 110,
It is provided with the second mounting hole 321 in second connecting portion 320, limit wheel shaft 410 is mounted in the second mounting hole 321, and stretches out the
Two mounting holes 321, and limit wheel shaft 410 can be axially moved with respect to the second mounting hole 321.
Further, as depicted in figs. 1 and 2, in being provided in the first mounting hole 110 and/or in the second mounting hole 321
Screw thread is provided with external screw thread on regulating part 200 and/or on limit wheel shaft 410.
In this embodiment, regulating part 200 is engaged by internal and external threads, and regulating part 200 is made to be mounted on pedestal 100,
Limit wheel shaft 410 is engaged by internal and external threads, and limit wheel shaft 410 is made to be mounted in second connecting portion 320, rotates regulating part
200 or limit wheel shaft 410, can make 200 opposite base 100 of regulating part movement to drive position-limited wheel 420 along the axis of regulating part 200
It is moved to direction, or limit wheel shaft 410 is made to be moved relative to second connecting portion 320, to drive limit wheel shaft 410 along regulating part
200 radial direction movement.
Specifically, the first location structure for making regulating part 200 be fixed on pedestal 100 is provided on pedestal 100, second connects
The second location structure for making limit wheel shaft 410 be fixed in second connecting portion 320 is provided in socket part 320.
Specifically, as shown in Figures 2 and 3, the first location structure is first positioning hole 120, is arranged in first positioning hole 120
There are the first locating piece, the first locating piece to coordinate with regulating part 200；Second location structure is second location hole 322, second location hole
The second locating piece is provided in 322, the second locating piece coordinates with limit wheel shaft 410.
In this embodiment, be provided in pedestal 100 and second connecting portion 320 respectively with regulating part 200 and limit wheel shaft
The first positioning holes 120 and second location hole 322 of 410 cooperations, are provided with phase in first positioning hole 120 and second location hole 322
The locating piece answered, specifically, the first locating piece and the second locating piece are bolt, in first positioning hole 120 and second location hole 322
It is provided with screw thread.When regulating part 200 or limit wheel shaft 410 are adjusted to predeterminated position, and after fixing position-limited wheel 420, tighten
Locating piece on pedestal 100 and second connecting portion 320 just can make the 200 firm fixation of pedestal 100 and regulating part, can also make
It limits wheel shaft 410 and second and connects firm fixation.
Preferably, as shown in Fig. 2, being provided with baffle ring 421, position-limited wheel 420 and position-limited wheel on two end faces of position-limited wheel 420
It is provided with bearing between axis 410.
In this embodiment, position-limited wheel 420 and belt contacts, and rotated under the drive of belt, wherein position-limited wheel 420
End face on be provided with baffle ring 421, the baffle ring 421 is parallel with belt, and belt is made to be fastened between baffle ring 421, prevents belt
It is detached from position-limited wheel 420, so that position-limited wheel 420 is always and belt contacts, and with belt movement.In addition, limit wheel shaft
Bearing is provided between 410 and position-limited wheel 420, bearing is used to support position-limited wheel 420 and is rotated with position-limited wheel 420, to
Position-limited wheel 420 can be reduced and limit the friction between wheel shaft 410, to improve the service life of the belt positioning device.
In addition, in the specific installation process of belt positioning device, due to the limitation of installation site, the structure and shape of pedestal
With arbitrarily adjustment according to actual needs as shown in Figure 4 and Figure 5, another can be provided and set for aumospheric pressure cvd
Standby belt positioning device, the belt positioning device change the fast structure of pedestal according to the gap of actual use position, to
The needs for better meeting scene, improve the versatility of belt positioning device.
Preferably, mounting structure is provided on pedestal 100, position-limited wheel 420 is metal spacing wheel 420.
In this embodiment, pedestal 100 is fixed in aumospheric pressure cvd equipment, and makes position-limited wheel 420 and belt
Contact, specifically, is provided with the mounting structure for fixed pedestal 100 on pedestal 100, which preferably installs.Tool
Body, it is additionally provided with straight slot on pedestal 100, by straight slot and mounting hole, so as to quickly and easily fix pedestal 100
In aumospheric pressure cvd equipment.
In addition, belt is metal net shaped belt, preferably stainless steel sheet| band, to enhance the abrasion resistance of position-limited wheel 420, limit
The material of wheel 420 should be consistent with the material of belt, and position-limited wheel 420 is metal spacing wheel, preferably stainless steel position-limited wheel.
The embodiment of second aspect of the present invention provides a kind of aumospheric pressure cvd equipment (not shown), including
The belt positioning device of multiple any of the above-described.
Preferably, belt positioning device is arranged symmetrically, so as to be entirely limited the movement locus of belt, so as to have
Generation phenomena such as avoiding piece, lamination of effect, the aumospheric pressure cvd equipment are WJ999 equipment.
In this embodiment, aumospheric pressure cvd equipment includes：Belt, the position-limited wheel of belt and belt positioning device
420 parallel contacts, and be fastened between the baffle ring 421 of belt positioning device, belt can drive position-limited wheel 420 to rotate, and belt is
Metal belt, and multiple mesh are provided on belt.
In conclusion belt positioning device according to an embodiment of the invention, including pedestal, the adjusting on pedestal
Part and with regulating part locating part connected vertically.Specifically, pedestal is fixed in aumospheric pressure cvd equipment, regulating part
One end passes through pedestal hanging, and the other end of regulating part is provided with connector, wherein locating part includes limit wheel shaft and is set in it
The position-limited wheel of one end, the other end for limiting wheel shaft pass through connector and hanging, and it is vertical with regulating part to limit wheel shaft, specifically,
The free end of regulating part is rotated, can drive locating part along the axial back and forth movement of regulating part by connector, to adjust limit
The installation site on the axial direction of regulating part is taken turns, the free end of rotary stopper axis can drive position-limited wheel along the axis of limit shaft
To direction back and forth movement, to adjust position-limited wheel regulating part installation site in the radial direction.Belt positioning dress is installed
When setting, position-limited wheel is symmetrically mounted to the both sides of belt, belt is made to be fastened between the position-limited wheel of the left and right sides, so that
Belt can only move between position-limited wheel.To limit the movement locus of belt, therefore, the silicon chip on belt is completed to preset
Also specified place can be moved to after technique, generation phenomena such as so as to avoid piece, lamination is fallen.
In the description of this specification, term " connection ", " installation ", " fixation " etc. shall be understood in a broad sense, for example, " even
Connect " it may be fixed connection or may be dismantle connection, or integral connection；It can be directly connected, it can also be in
Between medium be indirectly connected.For the ordinary skill in the art, above-mentioned term can be understood at this as the case may be
Concrete meaning in invention.
In the description of this specification, the description of term " one embodiment " etc. means that the embodiment or example is combined to describe
Particular features, structures, materials, or characteristics be included at least one embodiment or example of the invention.In the present specification,
Schematic expression of the above terms are not necessarily referring to identical embodiment or example.Moreover, the specific features of description, knot
Structure, material or feature can be combined in any suitable manner in any one or more of the embodiments or examples.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, any made by repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of belt positioning device is used for aumospheric pressure cvd equipment, which is characterized in that including：
Pedestal；
One end of regulating part, the regulating part is mounted on the pedestal, and stretches out the pedestal, the other end of the regulating part
It is provided with connector；
Locating part, the locating part include limit wheel shaft and position-limited wheel, and one end of the limit wheel shaft is connect with the connector,
And the connector is stretched out, and the limit wheel shaft is vertical with the regulating part, the other end of the limit wheel shaft is arranged
State position-limited wheel；
Wherein, the regulating part is rotated, the locating part can be made to be moved along the axial direction of the regulating part, rotates the limit
Wheel shaft can be such that the relatively described connector of the position-limited wheel is moved along the axial direction of the limit wheel shaft.
2. belt positioning device according to claim 1, which is characterized in that the connector includes：
First connecting portion is connect with the regulating part；
Second connecting portion, one end vertical connection with the first connecting portion, the locating part are vertical by the limit wheel shaft
In the second connecting portion.
3. belt positioning device according to claim 2, which is characterized in that the first mounting hole is provided on the pedestal,
The regulating part is mounted in first mounting hole, and stretches out first mounting hole, wherein the regulating part can be along described
First mounting hole is axially moved, and is provided with the second mounting hole in the second connecting portion, and the limit wheel shaft is mounted on described the
In two mounting holes, and second mounting hole is stretched out, and the limit wheel shaft can be axially moved along the mounting hole.
4. belt positioning device according to claim 3, which is characterized in that in first mounting hole and/or described the
It is provided with internal thread in two mounting holes, external screw thread is provided on the regulating part and/or on the limit wheel shaft.
5. belt positioning device according to claim 4, which is characterized in that being provided on the pedestal makes the regulating part
The first location structure being fixed on the pedestal, is provided with that so that the limit wheel shaft is fixed on described in the second connecting portion
The second location structure in second connecting portion.
6. belt positioning device according to claim 5, which is characterized in that first location structure is the first positioning
Hole, the first locating piece is provided in the first positioning hole, and first locating piece coordinates with the regulating part；Described second is fixed
Bit architecture is second location hole, and the second locating piece, second locating piece and the limit are provided in the second location hole
Wheel shaft coordinates.
7. belt positioning device according to any one of claim 1 to 6, which is characterized in that two of the position-limited wheel
It is provided with baffle ring on end face, bearing is provided between the position-limited wheel and the limit wheel shaft.
8. belt positioning device according to claim 7, which is characterized in that be provided with mounting structure, institute on the pedestal
It is metal spacing wheel to state position-limited wheel.
9. a kind of aumospheric pressure cvd equipment, which is characterized in that including multiple as described in any one of claim 1 to 8
Belt positioning device.
10. aumospheric pressure cvd equipment according to claim 9, which is characterized in that including：
Belt, the position-limited wheel parallel contact of the belt and the belt positioning device, and it is fastened on the belt positioning device
Baffle ring between, the belt can drive the position-limited wheel to rotate, and the belt is metal belt, and is provided on the belt
Multiple mesh.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510390671.8A CN106319479B (en) | 2015-07-06 | 2015-07-06 | Belt positioning device and aumospheric pressure cvd equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510390671.8A CN106319479B (en) | 2015-07-06 | 2015-07-06 | Belt positioning device and aumospheric pressure cvd equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106319479A CN106319479A (en) | 2017-01-11 |
| CN106319479B true CN106319479B (en) | 2018-07-13 |
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ID=57727183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510390671.8A Active CN106319479B (en) | 2015-07-06 | 2015-07-06 | Belt positioning device and aumospheric pressure cvd equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106319479B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109927640A (en) * | 2017-12-15 | 2019-06-25 | 蔚来汽车有限公司 | Vehicle intelligent terminal and the vehicle for using it |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0869971A (en) * | 1994-08-29 | 1996-03-12 | Sony Corp | Belt driving device in belt driven atmospheric pressure cvd device |
| JP2001189306A (en) * | 1999-12-28 | 2001-07-10 | Sony Corp | Belt-driven atmospheric pressure cvd system |
| PT1799878E (en) * | 2004-08-18 | 2014-06-09 | Calyxo Gmbh | Atmospheric pressure chemical vapor deposition |
| CN103382554B (en) * | 2012-05-04 | 2015-08-19 | 无锡华润上华科技有限公司 | Aumospheric pressure cvd board abnormality monitoring method and system |
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2015
- 2015-07-06 CN CN201510390671.8A patent/CN106319479B/en active Active
Also Published As
| Publication number | Publication date |
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| CN106319479A (en) | 2017-01-11 |
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Effective date of registration: 20220726 Address after: 518116 founder Microelectronics Industrial Park, No. 5, Baolong seventh Road, Baolong Industrial City, Longgang District, Shenzhen, Guangdong Province Patentee after: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. Address before: 100871, Beijing, Haidian District Cheng Fu Road 298, founder building, 9 floor Patentee before: PEKING UNIVERSITY FOUNDER GROUP Co.,Ltd. Patentee before: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. |