A kind of detection method and its detection device of filter membrane thickness
Technical field
The invention belongs to filter membrane Thickness sensitivity technical fields, especially relate to the detection dress of particulate matter acquisition filter membrane thickness
It sets and its detection method.
Background technique
The main function of filter membrane is the particulate matter retained in aerosol or solution, plays the role of substance separation.Particle
The retention of object can be directly affected with transmission by filter membrane thickness, but at present in the shadow of filter membrane material, technological level and preparative capacibility
Under sound, there are larger differences between the numerous filter membranes of type and producer, and there are no the filter membranes of complete set so far in China
Energy assessment technique specification, measuring the common method of filter membrane thickness at present has micrometer caliper, scanning electron microscope, photometry.
The advantages of micrometer caliper is directly can to measure and read and price is lower, but error is larger.It is aobvious with scanning electron
Micro mirror measurement accuracy is high, but to destroy the integrality and instrument price valuableness of filter membrane.For photometry so far without a kind of energy
Relationship between enough characterize datas.On this basis by collecting a large amount of basic data, in conjunction with previous studies achievement, design
Research and develop this device.
Summary of the invention
In view of this, the present invention proposes the detection method and its detection device of a kind of filter membrane thickness, Photoelectric Detection original is utilized
Reason, can accurately detect the thickness of filter membrane, facilitate testing staff to carry out quality management and control, further increase filter membrane product matter
Amount.
In order to achieve the above objectives, the technical scheme of the present invention is realized as follows:
A kind of detection method of filter membrane thickness, comprising:
(1) using red, green, blue three primary colours light respectively as testing light source;
(2) under the testing light source of one of three primary colours, the initial exposure image without filter membrane of the testing light source is obtained,
And the gray value of image is calculated;
(3) using standard acquisition filter membrane known to thickness, under the testing light source, the light source exposure diagram through filter membrane is obtained
Picture, and the gray value of image is calculated;
(4) according to the light transmittance of the available standard acquisition filter membrane of the ratio of two images gray value;
(5) it if the standard acquisition filter membrane for selecting dry thickness different, repeats step (3) and (4), obtains each standard acquisition filter membrane
Light transmittance, further obtain the relationship between standard acquisition filter membrane thickness described under the testing light source and light transmittance;
(6) the other dichromatism of three primary colours testing light source is respectively adopted, repeats step (2)-(5), obtains under each testing light source
Relationship between the standard acquisition filter membrane thickness and light transmittance;
(7) it selects the optimal testing light source of effect as detection light source, the filter membrane of unknown thickness is detected, is obtained
The light source exposure image of the filter membrane is crossed, and the gray value of image is calculated, so that the light transmittance of the filter membrane is obtained, according to the light
Relationship under source between standard acquisition filter membrane thickness and light transmittance obtains the filter membrane thickness.
Further, the preparation method of step (1) described testing light source are as follows: pass through adjustable stabilized voltage supply and LED controller
The color for adjusting light emitting diode shows three kinds of colors of red, green, blue respectively.
Further, the concrete methods of realizing of step (2) are as follows: testing light source and ccd image sensor are completely attached to,
Ccd image sensor is exposed processing, obtains the initial exposure image without filter membrane of the testing light source, and image information is defeated
It send to computer, gray proces is carried out by image of the computer LabVIEW software to acquisition, obtain the gray value of image.
Further, the concrete methods of realizing of gray value of image is obtained in step (3) and step (7) are as follows: make testing light source
The standard acquisition filter membrane is clamped with ccd image sensor, ccd image sensor is exposed processing to filter membrane surface, obtains
It is delivered to computer through the initial exposure image of the filter membrane, and by image information, by computer LabVIEW software to obtaining
The image obtained carries out gray proces, obtains the gray value of image.
Further, step (5) method particularly includes: a certain number of filter membranes are chosen, using micrometer caliper and scanning
Two methods of Electronic Speculum respectively measure filter membrane thickness, obtain the thickness range of filter membrane;Keep the incidence of current testing light source
Light intensity is certain, the corresponding light transmittance of difference filter membrane thickness under light source is measured, using filter membrane thickness and filter membrane light transmittance as transverse and longitudinal coordinate
Fitting obtains the relational expression between the standard acquisition filter membrane thickness and light transmittance.
Further, the selection method of the optimal testing light source of step (7) effect are as follows: according to obtained by step (5)
Each testing light source under standard acquisition filter membrane thickness and light transmittance between relationship, in the timing of filter membrane thickness range one, selection
The bigger testing light source of light transmittance span, measurement accuracy are higher;I.e. in filter membrane thickness range, filter membrane thickness and light transmittance are fitted
Slope of curve variation is bigger, and measurement accuracy is higher.
Another aspect of the present invention, a kind of detection device of filter membrane thickness, including light-source control system, filter membrane Thickness sensitivity
System and data collection system;
The light-source control system includes adjustable stabilized voltage supply and LED controller, is generated for adjusting control light supply apparatus
Red, green, blue three primary colours light is respectively as testing light source;
The filter membrane thickness detecting system setting is being protected from light interior, for obtaining the nothing of the testing light source under testing light source
The initial exposure image of filter membrane is exposed through the light source exposure image of standard acquisition filter membrane, the light source of unknown thickness filter membrane to be measured
Image;Including light supply apparatus, ccd image sensor, filter membrane fixed bracket, stepping moving device, the fixed branch of the filter membrane is set up
It sets and is being protected from light ceiling portion, between light supply apparatus and ccd image sensor;The light supply apparatus connects the light source control system
System;The light supply apparatus and ccd image sensor are all set on stepping moving device, adjust position by stepping moving device
It sets;
The data collection system includes image pick-up card and computer, and ccd image sensor and stepping moving device divide
Not Tong Guo data line be connected with image pick-up card, image pick-up card is connected with computer.
Further, the fixed bracket of the filter membrane is arranged by horizontal bracket is being protected from light ceiling portion, the fixed branch of the filter membrane
Frame can be along horizontal bracket vertical rotary.
Further, the stepping moving device includes stepper motor a, stepper motor b, stepper motor guide rail, stepping electricity
Machine driver, controllor for step-by-step motor, stepper motor guide rail both ends, which are fixed on, to be protected from light on chamber body, stepper motor a and step
It is slidably matched in stepper motor guide rail respectively into motor b and carries out level and move left and right, stepper motor a and stepper motor b difference
It is connect by conducting wire with stepper motor driver, stepper motor driver is connect with controllor for step-by-step motor;The light supply apparatus
It is arranged on stepper motor a by the fixed bracket of light source, the ccd image sensor is fixed by ccd image sensor bracket
On stepper motor b;The controllor for step-by-step motor is connect by RS232 interface with image pick-up card.
Further, it is designed with micrometric displacement regulation device on the fixed bracket of the light source and ccd image sensor bracket,
The micrometric displacement regulation device adjust light supply apparatus and ccd image sensor position in the horizontal direction and ensure light supply apparatus with
Ccd image sensor concentric co-axial on same level direction.
Compared with the existing technology, the detection method and its detection device of a kind of filter membrane thickness of the present invention, mainly has
Following advantage: the detection method and device utilize optical detection principle, can be convenient and are accurately detected filter membrane thickness, facilitate quality inspection
Personnel carry out quality management and control, further increase filter membrane product quality.
Detailed description of the invention
Fig. 1 is the structure of the detecting device schematic diagram of the embodiment of the present invention;
Fig. 2 is the filter membrane thickness and light transmittance relational graph of the embodiment of the present invention.
Wherein:
1. adjustable stabilized voltage supply;2.LED controller;3.LED controller data output interface;
4.LED signal wire;5. horizontal bracket;6. light supply apparatus;
7. hand the turn of the screw;8. filter membrane fixes bracket;9.CCD imaging sensor;
10. data line;11. Image Acquisition card interface I;12. computer;
13. image pick-up card;14. Image Acquisition card interface II;15.RS232 connecting line;
16. being protected from light room interface II;17. stepper motor b;18.RS232 interface;
19. micrometric displacement regulation device;20. light source fixes bracket;21.CCD imaging sensor bracket;
22. stepper motor driver;23. controllor for step-by-step motor;24. stepper motor a;
25. stepper motor guide rail;26. being protected from light room;27. being protected from light room interface I;
Specific embodiment
It should be noted that in the absence of conflict, the feature in embodiment and embodiment in the present invention can phase
Mutually combination.
Below in conjunction with embodiment and attached drawing, the present invention will be described in detail.
As shown in Figure 1, the invention proposes a kind of detection device of filter membrane thickness, including light-source control system, filter membrane are thick
Spend detection system and data collection system.
Light-source control system is made of adjustable stabilized voltage supply 1 and LED controller 2, and the color of light emitting diode is controlled using LED
Device 2 processed is adjusted.
Filter membrane thickness detecting system is passed by light supply apparatus 6, the fixed bracket 20 of light source, micrometric displacement regulation device 19, ccd image
The fixed bracket 8 of sensor 9, ccd image sensor bracket 21, filter membrane, horizontal bracket 5, stepper motor a24, stepper motor b17, step
It forms into motor slide rails 25, stepper motor driver 22, controllor for step-by-step motor 23, and is all set to and is protected from light in room 26.
Room 26 is protected from light equipped with being protected from light room interface I 27 and being protected from light room interface II 16, the room interface I 27 that is protected from light passes through LED letter
Number line 4 connects LED controller data output interface 3 and light supply apparatus 6, is protected from light room interface II 16 and connects RS232 connection
Line 15.
Light supply apparatus is by common cathode quadrangle 5mm Tricolor LED, reflective sleeve and forms, reflective sleeve use with a thickness of
The reflecting piece of 0.4mm is made into, diameter 6mm, length 10mm.The fixed bracket 8 of filter membrane is 20mm × 20mm × 2mm by two block sizes
Stainless steel plate composition, center is provided with the hole that diameter is 7mm, and filter membrane is fixedly clamped by two pieces of stainless steel plates.Filter membrane fixes bracket 8
On be welded with the stainless steel tube of diameter 10mm, wall thickness 0.5mm, length 15mm, aperture above stainless steel tube, bore dia 2mm.
Horizontal bracket 5 is made of the solid stainless steel round bar that diameter is 9mm, length 400mm, and intermediate place corresponding with stainless steel tube is opened
Hole, diameter 2mm, horizontal bracket both ends are horizontally fixed on by side dress flange and are protected from light on chamber body.The entire fixed bracket 8 of filter membrane
Can be along solid stainless steel round bar vertical rotary, and can be fixed by the hand the turn of the screw 7 in aperture, filter membrane in order to prevent
Fixed 8 horizontal movement of bracket, installs two set screws in the solid stainless steel round bar in stainless steel tube end.Light source fixes bracket
20, ccd image sensor bracket 21 is connect with stepper motor a24 and stepper motor b17 respectively, and 25 both ends of stepper motor guide rail are logical
It crosses side dress flange to be horizontally fixed on and be protected from light on chamber body, stepper motor a24 and stepper motor b17 are respectively in stepper motor guide rail 25
It is slidably matched and carries out level and move left and right, stepper motor a24 and stepper motor b17 pass through conducting wire and stepper motor driving respectively
Device 22 connects, and stepper motor driver 22 is connect with controllor for step-by-step motor 23, and controllor for step-by-step motor 23 passes through RS232 interface
18 connect with image pick-up card 13.Micrometric displacement regulation device 19 is separately fixed at the fixed bracket 20 of light source and ccd image sensor
On bracket 21, micrometric displacement regulation device 19 adjusts light source 6 and the position in the horizontal direction of ccd image sensor 9 and ensures light source 6
With ccd image sensor 9 on same level direction concentric co-axial.
Data collection system includes image pick-up card 13 and computer 12, the signal and filter membrane that ccd image sensor 9 exports
The RS232 interface 18 of thickness detecting system passes through the Image Acquisition card port 11 and 14 of data line 10 and data collection system respectively
It is connected, image pick-up card 13 is connected with computer 12, and computer 12 is equipped with LabVIEW and controls software, is controlled using LabVIEW soft
Part completes acquisition, processing and the storage of image information, and the control to stepper motor a24 and stepper motor b17.
Detection method of the invention, steps are as follows:
1) color that light emitting diode is adjusted by manually adjusting LED controller 2 shows three kinds of colors of red, green, blue respectively;
2) when the color of diode is red, manually adjusting micrometric displacement regulation device 19 makes light supply apparatus 6 and ccd image
The concentric co-axial on same level direction of sensor 9;
3) mobile using the accurate stepping of computer LabVIEW software-driven stepper motor, stepper motor a24 is along stepper motor
Guide rail 25 is moved to the left left end initial position in the horizontal direction, stepper motor b17 along stepper motor guide rail 25 in the horizontal direction
It moves right to right end initial position, the moving range of stepper motor a24 horizontal direction is -50~0mm, stepper motor b17 water
Square to moving range be 0~50mm, moving step length is 0.3~5 μm.
The case where fixed bracket 8 of measurement filter membrane does not clamp filter membrane first, starts stepper motor a24 along stepper motor guide rail 25
It moves right in the horizontal direction, stepper motor b17 is moved to the left in the horizontal direction along stepper motor guide rail 25, until light supply apparatus
6 completely attach to just with ccd image sensor 9, and ccd image sensor 9, which is exposed, at this time handles and pass through image information
Data line is exported to the image pick-up card 13 of acquisition system, and image pick-up card 13 is connected with computer 12, and computer 12 is equipped with
LabVIEW controls software, and acquisition, processing and the storage of image information are completed using LabVIEW control software.Stepper motor later
A24 is moved to the left in the horizontal direction along stepper motor guide rail 25, stepper motor b17 along stepper motor guide rail 25 in the horizontal direction to
It moves right, filter membrane known to thickness is clamped on the fixed bracket 8 of filter membrane, the LabVIEW software-driven of computer 12 is recycled
The accurate stepping of stepper motor is mobile, and stepper motor a24 moves right in the horizontal direction along stepper motor guide rail 25, stepper motor
B17 is moved to the left in the horizontal direction along stepper motor guide rail 25, is adopted until light supply apparatus 6 clamps just with ccd image sensor 9
Collect filter membrane, ccd image sensor 9 carries out exposure-processed again to entire filter membrane surface and image information is passed through data line at this time
It exports to the image pick-up card 13 of acquisition system, image pick-up card 13 is connected with computer 12, and computer 12 is controlled equipped with LabVIEW
Software processed completes acquisition, processing and the storage of image information using LabVIEW control software.Pass through computer LabVIEW software
Gray proces are carried out to the image of acquisition, the gray value of image is obtained, further analyzes available filter membrane thickness and light transmittance
Relationship.
4) step in the color repetition 3) of light emitting diode is readjusted.
5) acquired image information is handled using computer LabVIEW software, selects the optimal light emitting diode of effect
Color, calculate the relationship between filter membrane thickness and light transmittance, relationship can judge the thickness of other unknown filter membranes according to this later
Degree.
According to the above method, the Teflon filter membrane 80 for choosing the production of certain company first opens carry out electron-microscope scanning, scanning result
Show Teflon filter membrane thickness range be 22.19~33.00 μm, by filter membrane thickness range at 22.19~33.00 μm
The test of Teflon filter membrane light transmittance, there are preferable non-linear relations with filter membrane thickness for filter membrane light transmittance as the result is shown, such as Fig. 2 institute
Show, fitting formula are as follows: y=-0.0188x2+ 0.1426x+99.983, R2=0.9974.98% Teflon filter membrane thickness range
Between 27.5 ± 2.5 μm, range of transmittance is between 89.52 ± 2.34%, when thickness or light transmittance are lower than or more than this
A range then assert the in uneven thickness of the filter membrane.
Above screening conditions are programmed to obtain by LabVIEW, the Teflon filter membrane of a unknown thickness is utilized into filter membrane
Thickness detection apparatus is detected, and testing result is shown, entire filter membrane range of transmittance is between 88.16~91.07%.Determine
The filter membrane the thickness uniformity is within the allowable range.Corresponding light transmittance be 88.16% go out with a thickness of 29.15 μm, other each points
The thickness of position can be obtained according to light transmittance size.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.