CN106295811B - Equipment time-based maintenance effect analysis method - Google Patents
Equipment time-based maintenance effect analysis method Download PDFInfo
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- CN106295811B CN106295811B CN201610613017.3A CN201610613017A CN106295811B CN 106295811 B CN106295811 B CN 106295811B CN 201610613017 A CN201610613017 A CN 201610613017A CN 106295811 B CN106295811 B CN 106295811B
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- G06Q10/20—Administration of product repair or maintenance
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
The present invention provides a kind of equipment time-based maintenance effect analysis methods, comprising: obtains the equipment time-based maintenance information of board within a predetermined period of time；Obtain each product white pixel value in predetermined amount of time；White pixel value is grouped before and after carrying out equipment time-based maintenance based on dichotomy；MR value is compared before and after the equipment time-based maintenance of each processing step by HC formula calculator platform；Board equipment time-based maintenance front and back comparative analysis is carried out based on HC formula；The comprehensive condition of the multiple equipment time-based maintenance of board in the predetermined amount of time is judged based on Apriori algorithm.
Description
Technical field
The present invention relates to field of semiconductor manufacture and information technology fields, it is more particularly related to which one kind is set
Standby time-based maintenance effect analysis method.
Background technique
For at present, generally requires and time-based maintenance is carried out to technique board.Analysis for time-based maintenance effect, existing machine
Platform time-based maintenance analysis only carries out the analysis of equipment time-based maintenance effect quality, such analysis side according to simple equipment index
Formula can only be conceived to single board maintenance whether Analysis to reach standard, the quality for product processing procedure is without reference to meaning.Together
When, the analytical model of this single is unable to satisfy the control that engineer analyzes board long-time stability.
It is set accordingly, it is desirable to be capable of providing a kind of can be realized to what the long-time stability of board were effectively analyzed
Standby time-based maintenance effect analysis method.
Summary of the invention
The technical problem to be solved by the present invention is to for drawbacks described above exists in the prior art, providing one kind be can be realized
The equipment time-based maintenance effect analysis method that the long-time stability of board are effectively analyzed.
In order to achieve the above technical purposes, according to the present invention, a kind of equipment time-based maintenance effect analysis method is provided, is wrapped
It includes:
First step: the equipment time-based maintenance information of board within a predetermined period of time is obtained；
Second step: each product white pixel value in predetermined amount of time is obtained；
Third step: white pixel value is grouped before and after carrying out equipment time-based maintenance based on dichotomy；
Four steps: MR is compared before and after the equipment time-based maintenance of each processing step by HC formula calculator platform
Value；
5th step: the synthesis of the multiple equipment time-based maintenance of board in the predetermined amount of time is judged based on Apriori algorithm
Situation.
Preferably, the equipment of board within a predetermined period of time is obtained from equipment time-based maintenance information database in first step
Time-based maintenance information.
Preferably, each product white pixel value in predetermined amount of time is obtained from white pixel Value Data library in second step.
Preferably, it is grouped into four steps according to white pixel characteristic with the equipment time-based maintenance that white pixel mean value is minimum
Benchmark, remaining is with reference to group；
It calculates:
MR1=ABS (Avg (Y)-Avg (X))/Std (X)
MR2=Std (Y)/Std (X)
Wherein, X, Y are respectively grouping before and after equipment time-based maintenance, and Avg (X) < Avg (Y).
Preferably, in four steps, determine that board is periodically protected in the step equipment in MR1 > 100% or MR2 > 1.5
It is unstable after supporting, otherwise determine that board is stablized after the step equipment time-based maintenance.
Preferably, in the 5th step, support supp (X)=occur (X)/count (D)=P (X) is calculated；Wherein supp
(X)∈[-1,1]；As unit of board, Occur (X)=Bad PM Cnt-Good PM Cnt；Bad PM Cnt indicates equipment
The time-based maintenance frequency of failure, Good PM Cnt indicate equipment time-based maintenance number of success；Count (D)=Total PM Cnt；
Total PM Cnt indicates equipment time-based maintenance total degree.
Preferably, in the 6th step, if supp (X) > 0, determine that board integral device in the predetermined amount of time is fixed
Phase maintenance effect is deteriorated, otherwise to determine that board integral device time-based maintenance effect in the predetermined amount of time improves.
Preferably, in the 6th step, the report of board long-time stability is generated.
The present invention solves the problems, such as that existing equipment time-based maintenance can not carry out long-term board stability monitoring.The present invention is logical
The association analysis between the processing procedure index of each product and equipment is crossed, influence of the board equipment time-based maintenance to product, side are obtained
Help control product quality and the judgement of board long-time stability.Effective solution of the present invention existing equipment maintenance analysis method can not
The shortcomings that meeting the monitoring of board long-time stability, be grouped before and after equipment time-based maintenance based on dichotomy, artificial without carrying out
Division operation；And carry out changing before and after the time-based maintenance of board equipment automatically based on HC formula, improve system reliability.It is based on
Apriori algorithm judges board long-time stability, compensates for the defect of existing analysis gimmick.
Detailed description of the invention
In conjunction with attached drawing, and by reference to following detailed description, it will more easily have more complete understanding to the present invention
And its adjoint advantage and feature is more easily to understand, in which:
Fig. 1 schematically shows the process of equipment time-based maintenance effect analysis method according to the preferred embodiment of the invention
Figure.
It should be noted that attached drawing is not intended to limit the present invention for illustrating the present invention.Note that indicating that the attached drawing of structure can
It can be not necessarily drawn to scale.Also, in attached drawing, same or similar element indicates same or similar label.
Specific embodiment
In order to keep the contents of the present invention more clear and understandable, combined with specific embodiments below with attached drawing in of the invention
Appearance is described in detail.
The present invention carries out the association of equipment time-based maintenance with WP (white Pixel, white pixel) parameter as reference index
Analysis.By obtaining board equipment time-based maintenance situation interior for a period of time, white pixel value is grouped to correspondence by dichotomy
Board equipment time-based maintenance before and after；The time-based maintenance fore-and-aft stability comparative analysis of single board equipment is carried out by HC formula,
Judge that influence of the board equipment time-based maintenance to product, help control product quality.Finally, the board based on Apriori algorithm
Long-time stability discriminatory analysis.
Fig. 1 schematically shows the process of equipment time-based maintenance effect analysis method according to the preferred embodiment of the invention
Figure.
Specifically, as shown in Figure 1, equipment time-based maintenance effect analysis method according to the preferred embodiment of the invention includes:
First step S1: equipment time-based maintenance information of the board within predetermined amount of time (concern period) is obtained；For example,
The equipment time-based maintenance information of board within a predetermined period of time is obtained from equipment time-based maintenance information database in first step S1.
Second step S2: each product white pixel value in predetermined amount of time is obtained；For example, in second step S2 from white pixel value
Database obtains each product white pixel value in predetermined amount of time.
Third step S3: white pixel value is grouped before and after carrying out equipment time-based maintenance based on dichotomy；
Four steps S4: MR is compared before and after the equipment time-based maintenance of each processing step by HC formula calculator platform
Value；
Preferably, can there was only the board equipment time-based maintenance information of single data before and after first sweep equipment time-based maintenance.
In four steps S4, board equipment time-based maintenance front and back comparative analysis is carried out based on HC formula；
According to white pixel characteristic, on the basis of the equipment time-based maintenance grouping minimum by white pixel mean value, remaining is with reference to group；
HC formula is one more commonly used formula of semicon industry, is defined as foloows calculation formula:
MR1=ABS (Avg (Y)-Avg (X))/Std (X)
MR2=Std (Y)/Std (X)
Wherein, X, Y are respectively grouping before and after equipment time-based maintenance, and Avg (X) < Avg (Y).Wherein function ABS is for asking
It takes absolute value, function Avg is used for averaged, and function Std is for seeking standard deviation (identical as the function in Excel).
For example, equipment time-based maintenance validity is judgement basis by professional standard: in MR1 > 100% in four steps S4
Or determine that board is unstable after the step equipment time-based maintenance when MR2 > 1.5, otherwise determine that board is fixed in the step equipment
Stablize after phase maintenance.
The report of board single plant time-based maintenance stability is produced as a result,；
5th step S5: the comprehensive of the multiple equipment time-based maintenance of board in the predetermined amount of time is judged based on Apriori algorithm
Close situation.
In the 5th step S5, support supp (X)=occur (X)/count (D)=P (X) is calculated；Wherein supp (X) ∈
[-1,1]；As unit of board, Occur (X)=Bad PM Cnt-Good PM Cnt；Bad PM Cnt indicates that equipment is periodically protected
The frequency of failure is supported, Good PM Cnt indicates equipment time-based maintenance number of success；Count (D)=Total PM Cnt；Total
PM Cnt indicates equipment time-based maintenance total degree.
Specifically, in the 6th step S6, if supp (X) > 0, determine board integral device in the predetermined amount of time
Time-based maintenance effect is deteriorated, otherwise to determine that board integral device time-based maintenance effect in the predetermined amount of time improves.
The report of board long-time stability is produced as a result,.
The present invention solves the problems, such as that existing equipment time-based maintenance can not carry out long-term board stability monitoring.The present invention is logical
The association analysis between the processing procedure index of each product and equipment is crossed, influence of the board equipment time-based maintenance to product, side are obtained
Help control product quality and the judgement of board long-time stability.Effective solution of the present invention existing equipment maintenance analysis method can not
The shortcomings that meeting the monitoring of board long-time stability, be grouped before and after equipment time-based maintenance based on dichotomy, artificial without carrying out
Division operation；And carry out changing before and after the time-based maintenance of board equipment automatically based on HC formula, improve system reliability.It is based on
Apriori algorithm judges board long-time stability, compensates for the defect of existing analysis gimmick.
In addition, it should be noted that, unless stated otherwise or point out, the otherwise term " first " in specification, "
Two ", the descriptions such as " third " are used only for distinguishing various components, element, the step etc. in specification, each without being intended to indicate that
Component, element, the logical relation between step or ordinal relation etc..
It is understood that although the present invention has been disclosed in the preferred embodiments as above, above-described embodiment not to
Limit the present invention.For any person skilled in the art, without departing from the scope of the technical proposal of the invention,
Many possible changes and modifications all are made to technical solution of the present invention using the technology contents of the disclosure above, or are revised as
With the equivalent embodiment of variation.Therefore, anything that does not depart from the technical scheme of the invention are right according to the technical essence of the invention
Any simple modifications, equivalents, and modifications made for any of the above embodiments still fall within the range of technical solution of the present invention protection
It is interior.
Claims (6)
1. a kind of equipment time-based maintenance effect analysis method, characterized by comprising:
First step: the equipment time-based maintenance information of board within a predetermined period of time is obtained；
Second step: each product white pixel value in predetermined amount of time is obtained；
Third step: white pixel value is grouped before and after carrying out equipment time-based maintenance based on dichotomy；
Four steps: MR value is compared before and after the equipment time-based maintenance of each processing step by HC formula calculator platform；HC
Formula is the comparison of two group objects, comprehensive judgement is carried out with two values of MR1 and MR2, according to white pixel characteristic, with white pixel mean value
On the basis of minimum equipment time-based maintenance grouping, remaining is with reference to group；
HC formula is defined as foloows calculation formula:
MR1=ABS (Avg (Y)-Avg (X))/Std (X)
MR2=Std (Y)/Std (X)
Wherein, X, Y are respectively grouping before and after equipment time-based maintenance, and Avg (X) < Avg (Y), MR1 refer to the deviation of mean parameter,
MR2 refers to the deviation of parameter standard value, and function ABS is absolute value formula, and function Avg is Mean Value Formulas, and function Std is standard
Poor formula；
5th step: judging the comprehensive condition of the multiple equipment time-based maintenance of board in the predetermined amount of time based on Apriori algorithm,
In the 5th step, support supp (X)=occur (X)/count (D)=P (X) is calculated；Wherein supp (X) ∈ [- 1,1]；With
Board is unit, and P (X) is support, and X is board, and D is whole boards, Occur (X)=Bad PM Cnt-Good PM Cnt；
Bad PM Cnt indicates the equipment time-based maintenance frequency of failure, and Good PM Cnt indicates equipment time-based maintenance number of success；Count
(D)=Total PM Cnt；Total PM Cnt indicates equipment time-based maintenance total degree.
2. equipment time-based maintenance effect analysis method according to claim 1, which is characterized in that in first step from equipment
Time-based maintenance information database obtains the equipment time-based maintenance information of board within a predetermined period of time.
3. equipment time-based maintenance effect analysis method according to claim 1 or 2, which is characterized in that second step from
White pixel Value Data library obtains each product white pixel value in predetermined amount of time.
4. equipment time-based maintenance effect analysis method according to claim 1 or 2, which is characterized in that in four steps,
MR1 > 100% determines that board is unstable after the step equipment time-based maintenance when MR2 > 1.5, otherwise determines board in the step
Stablize after rapid equipment time-based maintenance.
5. equipment time-based maintenance effect analysis method according to claim 1 or 2, which is characterized in that in the 6th step, if
Supp (X) > 0 then determines that board integral device time-based maintenance effect in the predetermined amount of time is deteriorated, otherwise to determine the machine
Platform integral device time-based maintenance effect in the predetermined amount of time improves.
6. equipment time-based maintenance effect analysis method according to claim 1 or 2, which is characterized in that raw in the 6th step
It is reported at board long-time stability.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610613017.3A CN106295811B (en) | 2016-07-29 | 2016-07-29 | Equipment time-based maintenance effect analysis method |
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| CN201610613017.3A CN106295811B (en) | 2016-07-29 | 2016-07-29 | Equipment time-based maintenance effect analysis method |
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| CN111125166A (en) * | 2018-10-31 | 2020-05-08 | 长鑫存储技术有限公司 | Online product information acquisition method and device |
| CN114397125B (en) * | 2022-01-11 | 2024-01-05 | 长鑫存储技术有限公司 | Method and device for checking running state of machine, electronic equipment and storage medium |
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|---|---|---|---|---|
| CN101901230A (en) * | 2009-05-31 | 2010-12-01 | 国际商业机器公司 | Information retrieval method, user comment processing method and system thereof |
| CN103325072A (en) * | 2013-06-18 | 2013-09-25 | 国家电网公司 | Equipment condition maintenance fuzzy decision-making method of servers in power distribution system and power system |
| CN105580352A (en) * | 2014-09-01 | 2016-05-11 | 索尼公司 | Solid-state imaging element, signal processing method therefor, and electronic device |
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