CN106283059A - A kind of metal surface alumina polishing solution and preparation method thereof - Google Patents
A kind of metal surface alumina polishing solution and preparation method thereof Download PDFInfo
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- CN106283059A CN106283059A CN201610654123.6A CN201610654123A CN106283059A CN 106283059 A CN106283059 A CN 106283059A CN 201610654123 A CN201610654123 A CN 201610654123A CN 106283059 A CN106283059 A CN 106283059A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a kind of metal surface alumina polishing solution, include following component by weight: grinding agent 100 parts, deionized water 100～10000 parts, dispersant 0.1～4 parts, suspending agent 0.1～10 parts, corrosion inhibiter 0.1～4 parts；Described dispersant is the mixture of one or more in sodium silicate, sodium tripolyphosphate, sodium hexameta phosphate, sodium pyrophosphate, triethyl group hexyl phosphoric acid, sodium lauryl sulphate, methyl anyl alcohol, cellulose derivative, polyacrylamide, guar gum, fatty acid polyethylene glycol ester；Described suspending agent is the one in methylcellulose, hydroxypropyl methyl cellulose, sodium carboxymethyl cellulose, hydroxyethyl cellulose, uses with xanthan gum 1:0.1 in mass ratio～1 collocation.The invention also discloses the preparation method of above-mentioned polishing fluid.The polishing fluid of the present invention has high dispersive, high stable, does not settles, the feature that yield rate is high, and the method is to the particle size distribution of the raw material for grinding agent and homogeneity no requirement (NR) simultaneously, has widened the range of choice of grinding agent raw material.
Description
Technical field
The present invention relates to metallized metal structural member surface polishing technology field, a kind of ultra-fine high dispersive multicomponent is thrown
Light liquid and preparation method thereof, the high accuracy polishing for hardware surface.
Background technology
Along with improving constantly of electronic product surface quality requirements, surface planarisation process technology is also evolving, will
Material is polished the important means being to obtain high quality polished surface in molecular level, and chemically mechanical polishing (CMP) is by material
A kind of suitably technology that material is polished in molecular level.It is different from the finishing method of traditional purely mechanic or pure chemistry,
CMP is by chemistry and mechanical comprehensive function, thus avoids the surface damage caused by simple mechanical polishing and by merely
The shortcomings such as the polishing velocity that chemical polishing easily causes is slow, surface smoothness and polishing concordance difference.
Polishing fluid is one of key element of CMP, and the performance of polishing fluid directly affects the quality of surface of polished.Polishing fluid
Typically by ultrafine solids particle grinding agent (such as SiO2, α-Al2O3, the CeO2 etc. of micro/nano level), surfactant, stabilizer,
Oxidants etc. form.The kind of polishing fluid abrasive material, physicochemical properties, size, particle dispersion and stability etc. all with
Polishing effect is closely related.
Recent years, the electronic product such as mobile phone, flat board, intelligent watch uses the situation of metallized metal shell and frame more to come
The most universal.The metallized metal that these products are used, its blank typically all first passes through the tool sharpening of Digit Control Machine Tool to blank
Semi-finished product, then surface reaches mirror effect after the processing technique such as a few step grinding and polishings.Metal through tool sharpening
, there is a large amount of macroscopic cut, the global planarizartion on metallized metal surface to be realized and mirror effect, chemistry in metal surface
Mechanical polishing is the currently the only method that can be mass-produced.
Summary of the invention
It is an object of the invention to provide and be to provide a kind of high accuracy cake aluminum for hardware surface to polish
Liquid and preparation method thereof.
In order to solve the problem of above-mentioned technology, the technical solution used in the present invention is: a kind of metal surface aluminium oxide is thrown
Light liquid, includes following component by weight:
Described dispersant is sodium silicate, sodium tripolyphosphate, sodium hexameta phosphate, sodium pyrophosphate, triethyl group hexyl
Phosphoric acid, sodium lauryl sulphate, methyl anyl alcohol, cellulose derivative, polyacrylamide, guar gum,
The mixture of one or more in fatty acid polyethylene glycol ester；
Described suspending agent is methylcellulose, hydroxypropyl methyl cellulose, sodium carboxymethyl cellulose, ethoxy
One in cellulose, uses with xanthan gum 1:0.1～1:1 in mass ratio collocation.
Preferably, described polishing fluid includes following component by weight:
Described dispersant is the mixture of sodium hexameta phosphate and sodium lauryl sulphate, and described suspending agent is methyl
Cellulose and xanthan gum 1:0.5 in mass ratio is made into.
Preferably, described corrosion inhibiter is the mixture of borate and coloured glaze base benzothiazole.
Preferably, described corrosion inhibiter be chromate, molybdate, tungstates, vanadate, borate, Quadrafos, zinc salt,
The mixture of one or more in phosphonic acids (salt), phosphine carboxylic acid, coloured glaze base benzothiazole, benzotriazole, lignosulfonate.
Preferably, described grinding agent is the Alpha-alumina of mean diameter 0.1～5um.
Preferably, the pH value of described polishing fluid is 6～8, partial neutral, and workpiece and equipment surface will not be caused by life-time service
Corrosion damage.
A kind of method preparing above-mentioned metal surface alumina polishing solution of offer, tool are provided
Body comprises the following steps:
(1) by a certain percentage grinding agent and deionized water are joined in sand mill, be 5000～8000r/min at rotating speed
Lower dispersion 0.5～3h, when in polishing fluid, the particle size distribution of abrasive particles is 2D10≥D50≤0.5D90, add dispersant；
(2) slurry good for grinding distribution is added in homogenizer, add suspending agent, inhibition the most by a certain percentage
Agent, and stir certain time, place after having stirred 24h be without precipitation qualified.
Preferably, sand mill described in step (1) be basket type, turbine type or rod pin-type sand mill in any one.
Preferably, the abrasive media of described sand mill is the zirconia ball of diameter 0.1～0.5mm.
Preferably, in step (2), the stirring slurry of described homogenizer is the tooth-like dispersion impeller of periphery, and mixing speed is 500
～1000r/min, mixing time is 0.5-3h.
The invention provides a kind of composite polishing liquid for the polishing of hardware high-precision surface and preparation method thereof,
The advantage of the method is to introduce sand mill and the grinding agent in polishing fluid is ground dispersion processes, sand mill and ball mill,
The milling apparatus such as roller mill, colloid mill compares, and has production efficiency height, strong, low cost, the product fineness height of seriality etc. excellent
Point, utilizes shear action and the shear action of thin abrasive media of the rotary speed that sand mill is high, can be when shorter
In, the larger particles in grinding agent is crushed, the aggregate of relatively fine particle is opened, and reduces the particle size distribution model of abrasive particles
Enclosing, be simultaneously introduced new dispersant and suspending agent, so can guarantee that this polishing fluid has high dispersive, high stable, not sinking
Fall, the feature that yield rate is high, the method is to the particle size distribution of the raw material for grinding agent and homogeneity no requirement (NR) simultaneously, widens
The range of choice of grinding agent raw material, as long as the powder body material meeting particle mean size requirement is the most applicable.
Detailed description of the invention
Embodiment 1
Commercial alumina (D10=1.8um, D50=3um, D90=7um) grinding agent and deionized water in mass ratio 0.5: 1 add
Enter in sand mill, after stirring, with abrasive media for 0.2mm zirconia ball, 7000r/min rotating speed grinding distribution 2h, it is thus achieved that
Polishing fluid slurry particle size distribution is D10=1.5um, D50=2.6um, D90=3.5um, adds by sodium hexameta phosphate and dodecyl
The dispersant that sodium sulfate is made into, dispersant addition is the 1% of grinding agent quality；Slurry good for grinding distribution is added high-speed stirring
Mixing in machine, rotating speed is 800r/min, first adds by methylcellulose and xanthan gum in mass ratio 1 by grinding agent quality 2%:
0.5 suspending agent being made into, is then added the corrosion inhibiter being made into coloured glaze base benzothiazole by borate, stirs by grinding agent quality 2%
After mixing 1h, placing 24h and do not precipitate January without precipitation, product the longest placement, pH value is 7.5, and in alkalescence, life-time service will not
Workpiece and equipment surface are caused corrosion damage.
Embodiment 2
Commercial alumina (D10=0.6um, D50=1um, D90=3um) grinding agent adds with deionized water 0.2:1 in mass ratio
Enter in sand mill, after stirring, with abrasive media for 0.2mm zirconia ball, 7500r/min rotating speed grinding distribution 3h, it is thus achieved that
Polishing fluid slurry particle size distribution is D10=0.5um, D50=0.8um, D90=1.2um, adds by sodium tripolyphosphate, hexa metaphosphoric acid
The dispersant that sodium and triethyl group hexyl phosphoric acid are made into, dispersant addition is the 2% of grinding agent quality；The slurry good by grinding distribution
Material adds in homogenizer, and rotating speed is 1000r/min, first by grinding agent quality 3% add by sodium carboxymethyl cellulose with
The suspending agent that xanthan gum in mass ratio 1: 0.8 is made into, is then added by Quadrafos, zinc salt and sulfonation by grinding agent quality 3%
The corrosion inhibiter that lignin is made into, after stirring 2h, places 24h and does not precipitates January without precipitation, product the longest placement, and pH value is 6, in
Faintly acid, workpiece and equipment surface will not be caused corrosion damage by life-time service.
Embodiment 3
Commercial alumina (D10=0.2um, D50=0.5um, D90=1.8um) grinding agent and deionized water in mass ratio 0.6
: 1 adds in sand mill, after stirring, with abrasive media for 0.2mm zirconia ball, and 8000r/min rotating speed grinding distribution
2.5h, it is thus achieved that polishing fluid slurry particle size distribution is D10=0.16um, D50=0.3um, D90=0.5um, add by sodium pyrophosphate,
The dispersant that methyl anyl alcohol and fatty acid polyethylene glycol ester are made into, dispersant addition is the 0.5% of grinding agent quality；To grind
Scattered slurry adds in homogenizer, and rotating speed is 1000r/min, first adds by ethoxy by grinding agent quality 6%
The suspending agent that cellulose and xanthan gum 1:1 in mass ratio is made into, is then added by phosphine carboxylic acid and coloured glaze base benzene by grinding agent quality 4%
And the corrosion inhibiter that thiazole is made into, after stirring 3h, to place 24h and do not precipitate January without precipitation, product the longest placement, pH value is 6, in
Faintly acid, workpiece and equipment surface will not be caused corrosion damage by life-time service.
The invention provides a kind of composite polishing liquid for the polishing of hardware high-precision surface and preparation method thereof,
The advantage of the method is to introduce sand mill and the grinding agent in polishing fluid is ground dispersion processes, sand mill and ball mill,
The milling apparatus such as roller mill, colloid mill compares, and has production efficiency height, strong, low cost, the product fineness height of seriality etc. excellent
Point, utilizes shear action and the shear action of thin abrasive media of the rotary speed that sand mill is high, can be when shorter
In, the larger particles in grinding agent is crushed, the aggregate of relatively fine particle is opened, and reduces the particle size distribution model of abrasive particles
Enclosing, be simultaneously introduced new dispersant and suspending agent, so can guarantee that this polishing fluid has high dispersive, high stable, not sinking
Fall, the feature that yield rate is high, the method is to the particle size distribution of the raw material for grinding agent and homogeneity no requirement (NR) simultaneously, widens
The range of choice of grinding agent raw material, as long as the powder body material meeting particle mean size requirement is the most applicable.
The technical scheme provided the embodiment of the present invention above is described in detail, specific case used herein
Principle and embodiment to the embodiment of the present invention are set forth, and the explanation of above example is only applicable to help to understand this
The principle of inventive embodiments；Simultaneously for one of ordinary skill in the art, according to the embodiment of the present invention, in specific embodiment party
All will change in formula and range of application, in sum, this specification content should not be construed as limitation of the present invention.
Claims (10)
1. a metal surface alumina polishing solution, it is characterised in that include following component by weight:
Grinding agent 100 parts
Deionized water 100～10000 parts
Dispersant 0.1～4 parts
Suspending agent 0.1～10 parts
Corrosion inhibiter 0.1～4 parts；
Described dispersant is sodium silicate, sodium tripolyphosphate, sodium hexameta phosphate, sodium pyrophosphate, triethyl group hexyl phosphoric acid, dodecyl
One or more in sodium sulfate, methyl anyl alcohol, cellulose derivative, polyacrylamide, guar gum, fatty acid polyethylene glycol ester
Mixture；
Described suspending agent be methylcellulose, hydroxypropyl methyl cellulose, sodium carboxymethyl cellulose, the one of hydroxyethyl cellulose
Kind, use with xanthan gum in mass ratio 1: 0.1～1:1 collocation.
A kind of metal surface the most according to claim 1 alumina polishing solution, it is characterised in that include by weight with
Lower component:
Grinding agent 100 parts
Deionized water 200 parts
Dispersant 1 part
Suspending agent 2 parts
Corrosion inhibiter 2 parts；
Described dispersant is the mixture of sodium hexameta phosphate and sodium lauryl sulphate, and described suspending agent is that methylcellulose is with yellow
Virgin rubber in mass ratio 1: 0.5 is made into.
A kind of metal surface the most according to claim 2 alumina polishing solution, it is characterised in that described corrosion inhibiter is boron
Hydrochlorate and the mixture of coloured glaze base benzothiazole.
A kind of metal surface the most according to claim 1 and 2 alumina polishing solution, it is characterised in that
Described corrosion inhibiter is chromate, molybdate, tungstates, vanadate, borate, Quadrafos, zinc salt, phosphonic acids (salt), phosphine
The mixture of one or more in carboxylic acid, coloured glaze base benzothiazole, benzotriazole, lignosulfonate.
A kind of metal surface the most according to claim 3 alumina polishing solution, it is characterised in that described grinding agent is flat
All Alpha-aluminas of particle diameter 0.1～5um.
A kind of metal surface the most according to claim 3 alumina polishing solution, it is characterised in that the pH of described polishing fluid
Value is 6～8.
7. the method preparing metal surface alumina polishing solution as described in claim 1～6 any one, its feature
It is, comprises the following steps:
(1) by a certain percentage grinding agent and deionized water are joined in sand mill, divide under rotating speed is 5000～8000r/min
Dissipate 0.5～3h, when in polishing fluid, the particle size distribution of abrasive particles is 2D10≥D50≤0.5D90, add dispersant；
(2) slurry good for grinding distribution is added in homogenizer, add suspending agent, corrosion inhibiter the most by a certain percentage, and
Stirring certain time, after stir place 24h without precipitate be qualified.
The preparation method of a kind of metal surface the most according to claim 7 alumina polishing solution, it is characterised in that: step
(1) sand mill described in is any one in basket type, turbine type or rod pin-type sand mill.
The preparation method of a kind of metal surface the most according to claim 8 alumina polishing solution, it is characterised in that: described
The abrasive media of sand mill is the zirconia ball of diameter 0.1～0.5mm.
The preparation method of a kind of metal surface the most according to claim 7 alumina polishing solution, it is characterised in that: step
Suddenly, in (2), the stirring slurry of described homogenizer is the tooth-like dispersion impeller of periphery, and mixing speed is 500～1000r/min, stirring
Time is 0.5-3h.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610654123.6A CN106283059A (en) | 2016-08-10 | 2016-08-10 | A kind of metal surface alumina polishing solution and preparation method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107717636A (en) * | 2017-09-12 | 2018-02-23 | 潘汉祥 | A kind of novel metal high speed polishing method |
| CN109401630A (en) * | 2017-08-18 | 2019-03-01 | 昌宏精密刀具（东莞）有限公司 | A kind of aluminium alloy anode oxide film mirror finish liquid and preparation method thereof |
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2016
- 2016-08-10 CN CN201610654123.6A patent/CN106283059A/en active Pending
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109401630A (en) * | 2017-08-18 | 2019-03-01 | 昌宏精密刀具（东莞）有限公司 | A kind of aluminium alloy anode oxide film mirror finish liquid and preparation method thereof |
| CN107717636A (en) * | 2017-09-12 | 2018-02-23 | 潘汉祥 | A kind of novel metal high speed polishing method |
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Application publication date: 20170104 |