CN106271901A - A kind of combined technique being applicable to calcium fluoride concave cone mirror highly-efficient processing - Google Patents
A kind of combined technique being applicable to calcium fluoride concave cone mirror highly-efficient processing Download PDFInfo
- Publication number
- CN106271901A CN106271901A CN201610838489.9A CN201610838489A CN106271901A CN 106271901 A CN106271901 A CN 106271901A CN 201610838489 A CN201610838489 A CN 201610838489A CN 106271901 A CN106271901 A CN 106271901A
- Authority
- CN
- China
- Prior art keywords
- calcium fluoride
- concave cone
- straight line
- cone mirror
- fluoride concave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
Abstract
The invention discloses a kind of combined technique being applicable to calcium fluoride concave cone mirror highly-efficient processing, the method has taken into full account material behavior and the concave cone face polymorphic structure characteristic of calcium fluoride crystal, work flow is divided into molding, surface figure accuracy promote, roughness promotes three links and is respectively adopted straight line molding milling, diamond turning techniques and three kinds of process integrations of straight line magnetic bar grinding and is processed, and defeats in detail the technical bottlenecks such as the linearity of calcium fluoride concave cone, coning angle, surface figure accuracy, roughness.This process integration working (machining) efficiency is high, cone angle precision is accurate, surface figure accuracy and roughness is controlled, stable, breach domestic existing technique and cannot process the technical bottleneck of calcium fluoride concave cone abnormal curved surface, the development carrying out litho machine projection exposure optical system for China provides technical guarantee.
Description
Technical field
The present invention relates to the precision machined technical field of nano-precision, is applicable to calcium fluoride concave cone mirror particularly to one efficient
The combined technique of processing.
Background technology
CaF2Crystalline material has water white transparency, and absorptance is low, antibody Monoclonal threshold value high, permeability is high, free of birefringence existing
As etc. optical advantage, penetration range can be from infrared wavelength (12 μm) to ultraviolet wavelength (125nm), in infrared system and ultraviolet system
System has a wide range of applications, is one of 193nm optimal optical material of deep-UV lithography system lenses.
The optical system imaging depth of field and imaging resolution are two important indicators of design of Optical System, ordinary optical imaging
The physical cause of system depth of field finiteness is due to diffraction of light.Such as directional light incidence ordinary optical imaging system, at focal point
Form a hot spot the least, but along with the difference of out of focus position (i.e. beam propagation position), the size of diffraction pattern drastically becomes
Change.And the imaging characteristics of axial cone mirror lens is the light that different band is high has different image point positions, so it can be by point on axle
The light that light source sends is continuously converged to along the point of axis diverse location, has the characteristic of diffraction light-free, is optical system
Design improves the important method of the system depth of field.Axial cone mirror advantage in optical system mainly has:
(1) during common optical system imaging, point spread function changes quickly with out of focus, causes the biggest being stranded to image restoration
Difficult.And the center spot size and shape of the Beams that axicon lens produces keeps constant within the specific limits；
(2) the conventional relative aperture that reduces of applied optics system is to increase the depth of field, but can reduce the spatial resolution of system, makes
Image detail obscures.The characteristic that axial cone mirror is burnt owing to having line, is applied in optical imaging system to increase system
Depth of focus；
(3) axial cone mirror mirror group can be along with the change of spacing between axial cone mirror unit, the ring illumination inner and outer ring width of generation
Also changing, the flex point (tip of circular cone) at the center of axial cone mirror element can serve the effect of segmentation light beam.
Along with carrying out of China " great scale integrated circuit manufacture equipment and set technique ", CaF2The development of axial cone mirror is made
For the core parts of projection mask aligner's illuminator, determine the performance of whole illuminator capable transport.Therefore, axial cone mirror
High accuracy processing is to ensure that whole illuminator has high resolution, high energy transmission, the important prerequisite of the high imaging system depth of field.
In lithography illuminating system structure, salt free ligands optics is the axial cone being made up of convex cone mirror and concave cone mirror complementation
Mirror.Through experiment for many years and research, the had been completed CaF of Chinese Academy of Sciences's photoelectricity2The Technology of convex cone processing is groped, it is achieved
CaF2The Ultra-smooth machining of convex cone.And the surface figure accuracy and roughness for concave cone promotes, technology method has higher
Challenge, be mainly reflected in:
(1)CaF2Concave cone mirror is soft crystalline material, the structure opposite sex, and roughness and fineness control difficulty；
(2) concave cone mirror bus is inconsistent in course of processing linear velocity, and central area linear velocity is almost nil, existing technique skill
During art processing concave cone mirror, it is uncontrollable that layer is destroyed in bus linearity and central area；
(3)CaF2Axial cone mirror minute surface normal is incorgruous, and curvature mirror change is inconsistent, and circular cone center is flex point, machining locus
Limited, meanwhile, the course of processing cannot ensure concordance and the effectiveness of face shape convergence of removal efficiency；
(4) for reducing the scattered power of the conical surface, CaF2Within the surface roughness requirements of axial cone mirror is 0.5nm, it is limited to CaF2Axle
The polymorphic structure of axicon lens, traditional means cannot directly use, and domestic there is no maturation, reliable process technology method.
Summary of the invention
The technical problem to be solved is: overcome existing technical matters to process CaF2The technological deficiency of concave cone,
One is provided to can be applicable to CaF2Concave cone high efficiency, the United Technologies technique of high-precision requirement, thus for lithographic objective illumination be
The high accuracy of system is developed provides technical guarantee.
For solve the problems referred to above, the present invention by the following technical solutions:
A kind of combined technique being applicable to calcium fluoride concave cone mirror highly-efficient processing, according to molding, the face of calcium fluoride concave cone
Shape precision improvement, roughness promote three road technological processes, are respectively adopted straight line molding milling, diamond turning process and straight line magnetic
Power rod milling is cut three kinds of process integrations and is realized；Comprise the steps:
Step one, described straight line molding milling: use linear cylindrical emery wheel to will be closest to ball half by numerical-control milling and grinding lathe
The calcium fluoride concave surface speed mill in footpath is calcium fluoride concave cone mirror, cone angle error θ≤0.1 °, conical surface straightness error≤2 micron；
Step 2, described diamond turning process: promote calcium fluoride concave cone mirror surface-shaped precision and coning angle, use diamond
Turning technology makes calcium fluoride concave cone mirror surface-shaped precision peak-to-valley value PV≤λ/8 after processing, cone angle error θ≤0.003 °, roughness
Rq≤25nm；
Step 3, described straight line magnetic bar grinding: promote the surface roughness of calcium fluoride concave cone mirror and control concave cone mirror
Surface figure accuracy, calcium fluoride concave cone mirror surface-shaped precision peak-to-valley value PV≤λ/6 after using straight line magnetic bar grinding process to make processing, cone
Angle error θ≤0.003 °, roughness Rq≤0.5nm.
Further, the cylindrical grinding wheel of described straight line molding milling is resin anchoring agent diamond grinding wheel, emery wheel bore
≤ 12mm, emery wheel milling rotating speed >=30000RPM.
Further, described straight line magnetic bar grinding refers to based on external diameterEndoporusOvshinsky stainless
The straight line magnetic bar that steel cylinder is constituted with Ru-Fe-Mn bar magnet, uses the Magnetorheologicai polishing liquid of two-phase base load to be adsorbed in its surface and is formed
Flexible polishing mould also completes the Ultra-smooth machining to calcium fluoride concave cone.
Further, the Magnetorheologicai polishing liquid of two-phase base load includes: carbonyl iron dust, two-phase base load liquid, additive, Ph add
Add agent and abrasive material, quality hundred ratio respectively 83%-87%, 10%-15%, 1%-1.5%, the 1.2%-2% of each component,
0.01%-0.0.05%.
Further, described carbonyl iron dust is the soft iron powder of surface area mean diameter≤3 micron, two-phase base load liquid by
The deionized water of mass ratio about 5:1:1, ethylene glycol and dimethylformamide combination, additive be benzoic acid receive antioxidant and
Glycerol wetting agent, ph regulator is sodium hydroxide, and abrasive material is the diamond grinding liquid of 50nm granule.
Further, the technological parameter of described straight line magnetic bar grinding technique is: polishing fluid penetraction depth 0.5mm-
1mm, straight line magnetic bar grinding speed 3000RPM-4000RPM, Ru-Fe-Mn magnetic field intensity is 1.25 teslas of tesla-1.28.
Further, described straight line magnetic bar grinding technique uses magnetic fluid flexibility removal behavior, to calcium fluoride concave cone
Mirror surfacing is uniformly removed, and machining locus is 0.1-0.5mm for fixing spiral spacer；Straight line magnetic bar grinding is removed
The calcium fluoride concave cone surfacing degree of depth is 300 nanometer-500 nanometers.
Compared with prior art, advantages of the present invention is:
(1) present invention process has taken into full account the characteristic such as calcium fluoride crystal material behavior and concave cone face polymorphic structure, will add
Work flow process is divided into molding, surface figure accuracy to promote, roughness promotes three links and is respectively adopted employing straight line molding milling, Buddha's warrior attendant
Stone turning technology and three kinds of technical matters of straight line magnetic bar grinding are combined processing and are realized, coning angle, the face shape to calcium fluoride concave cone
The technical bottleneck such as precision, roughness is defeated in detail, and has working (machining) efficiency high, and cone angle precision is accurate, surface figure accuracy and coarse
Spend controlled, stable, breach domestic existing technique and cannot process the technical bottleneck of calcium fluoride concave cone abnormal curved surface, carry out for China
The development of litho machine projection exposure optical system provides technical guarantee.
(2) present invention is based on the molding of calcium fluoride concave cone, surface figure accuracy promotes, roughness promotes three road work flows and
Straight line molding milling, diamond turning techniques and straight line magnetic bar grinding three kinds associating processing technique, the flow process letter carried out respectively
Single, technology is compact, highly reliable, to technical bottlenecks such as the cone angle of lithographic objective illuminator axial cone mirror, surface figure accuracy, roughness
There is stronger technological break-through.
(3) the involved straight line molding milling of the present invention, straight line magnetic force rod milling machining tool are linear cylindrical structure, logical
Cross and the straight line grinding of concave cone bus is reached minute surface and uniformly removes, big to the scope of application of cone angle, breach existing numerical control grinding
Head cannot penetrate with the technical bottleneck of concave cone mirror finish；
(4) the involved magnetic fluid polishing fluid of the present invention is two-phase base load polishing fluid, and shear yield stress is strong, is suitable for you
The permanent-magnetic field that ferrum boron is constituted, promotes the roughness of crystalline material and Ultra-smooth machining has bigger breakthrough and stable
Property.
Accompanying drawing explanation
Fig. 1 is linear cylindrical emery wheel milling CaF2Concave cone schematic diagram, wherein, 11 is cylinder milling emery wheel, 12 be concave cone
Close to ball curved surface, 13 is concave cone after molding, and 14 is workpiece rotary table；
Fig. 2 is diamond turning and straight line magnetic bar grinding CaF2Roughness conversion after concave cone；
Fig. 3 is straight line magnetic bar grinding CaF2Concave cone process schematic, wherein, 21 is straight line magnetic bar, and 22 is Ru-Fe-Mn
Bar magnet, 23 is magnetic fluid polishing fluid, and 24 is calcium fluoride concave cone, and 25 is turntable；
Fig. 4 is straight line magnetic bar grinding CaF2Pass between the magnetic fluid polishing fluid penetraction depth of concave cone process and roughness
System；
Fig. 5 is straight line magnetic bar grinding CaF2Relation between the grinding speed of concave cone process and roughness；
Fig. 6 is CaF2Concave cone experimental piece is by the roughness evolution after diamond turning, straight line magnetic bar grinding.
Detailed description of the invention
Below in conjunction with accompanying drawing and detailed description of the invention, the present invention will be further explained.
A kind of combined technique being applicable to calcium fluoride concave cone mirror highly-efficient processing of the present invention, according to the one-tenth of calcium fluoride concave cone
Type, surface figure accuracy promote, roughness promote three road work flows, be respectively adopted straight line molding milling, diamond turning techniques and
Three kinds of technical matters of straight line magnetic bar grinding are combined processing and are realized.
Straight line molding Milling techniques refers to use linear cylindrical emery wheel to will be closest to the radius of a ball by numerical-control milling and grinding lathe
Calcium fluoride concave surface speed mill is calcium fluoride concave cone mirror.By calcium fluoride concave spherical surface being coaxially installed on turntable revolving-turret extremely
Axicon lens bus is horizontal direction, uses column type resin anchoring agent diamond grinding wheel to be not less than 30,000 rotary speed milling calcium fluoride
Concave spherical surface is to calcium fluoride concave cone face, as shown in Figure 1.Concave cone straightness error after using straight line molding Milling techniques to process is
1.2 microns, cone angle error θ≤0.1 °.
Diamond turning techniques main lift calcium fluoride concave cone mirror surface-shaped precision and coning angle.By by calcium fluoride concave cone face
It is coaxially installed on turntable, uses diamond bit to walk axicon lens bus track and can obtain preferable surface figure accuracy and coning angle.Such as Fig. 2
Shown in, using the concave cone straightness error after diamond turning is PV≤λ/8 (λ=632.8nm), roughness Rq≤
25nm, cone angle error θ≤0.003 °.
The surface roughness of straight line magnetic bar grinding technique main lift calcium fluoride concave cone mirror and the face shape of control concave cone mirror
Precision.As it is shown on figure 3, be level side by calcium fluoride concave spherical surface being coaxially installed on turntable revolving-turret to axicon lens bus
To, the flexible polishing mould using magnetic fluid polishing fluid to be formed on straight line magnetic bar carries out grinding at concave cone mirror bus track, logical
Cross and respectively polish the residence time at concave cone bus each point of the linear velocity adjustment straight line magnetic bar a little according to concave cone bus, it is ensured that concave cone
Face is uniformly removed.After straight line magnetic bar grinding concave cone, concave cone surface figure accuracy error is PV≤λ/6 (λ=632.8nm), roughness Rq
≤ 0.5nm, cone angle error θ≤0.003 °.
It is applicable to CaF2The magnetic fluid polishing fluid of materials processing mainly includes carbonyl iron dust, two-phase base load liquid, additive, Ph
Additive and abrasive material, the mass ratio of combination is respectively 83%-87%, 10%-15%, 1%-1.5%, 1.2%-2%,
0.01%-0.0.05%.
Carbonyl iron dust is the soft iron powder of surface area mean diameter≤3 micron, and two-phase base load liquid is by mass ratio about 5:1:1
Deionized water, ethylene glycol and dimethylformamide combination, additive is that benzoic acid receives antioxidant and glycerol wetting agent, ph
Regulator is sodium hydroxide, and abrasive material is the diamond grinding liquid of 50nm granule.
As shown in Figure 4, by analyzing straight line magnetic bar grinding process magnetic fluid polishing liquid penetraction depth and CaF2Concave cone
Relation between roughness, the technological parameter that can obtain preferable magnetic fluid polishing liquid penetraction depth is 0.5mm-1mm.
As it is shown in figure 5, by analyzing straight line magnetic bar grinding speed and CaF2Relation between concave cone roughness, can obtain reason
The straight line magnetic bar grinding speed 3000RPM-4000RPM thought.
As shown in Figure 6, preferable magnetorheological working process parameter is used: polishing fluid penetraction depth 0.5mm-1mm, straight line magnetic
Power rod grinding speed 4000RPM-7000RPM, Ru-Fe-Mn magnetic field intensity is 1.25 teslas of tesla-1.28.To diamond car
CaF after cutting2Concave cone carries out roughness lifting.By 20 hours, 40 hours, 55 hours, the processing of 70 hours, roughness by
13nm-19nm is promoted to respectively: 7nm-13nm, 4.2nm-5.7nm, 1.2nm-1.9nm, 0.3nm-0.5nm.
Straight line magnetic bar grinding technique uses magnetic fluid flexibility removal behavior, carries out calcium fluoride concave cone mirror surfacing all
Even removal, machining locus is 0.1-0.5mm for fixing spiral spacer；The calcium fluoride concave cone surface material that straight line magnetic bar grinding is removed
The material degree of depth is 300 nanometer-500 nanometers.
Claims (7)
1. the combined technique being applicable to calcium fluoride concave cone mirror highly-efficient processing, it is characterised in that: according to calcium fluoride concave cone
Molding, surface figure accuracy promote, roughness promote three road technological processes, be respectively adopted straight line molding milling, diamond turning work
Skill and three kinds of processes of straight line magnetic bar grinding are combined processing and are realized；Comprise the steps:
Step one, described straight line molding milling: use linear cylindrical emery wheel to will be closest to the radius of a ball by numerical-control milling and grinding lathe
Calcium fluoride concave surface speed mill is calcium fluoride concave cone mirror, cone angle error θ≤0.1 °, conical surface straightness error≤2 micron；
Step 2, described diamond turning process: promote calcium fluoride concave cone mirror surface-shaped precision and coning angle, use diamond turning
Technology makes calcium fluoride concave cone mirror surface-shaped precision peak-to-valley value PV≤λ/8 after processing, cone angle error θ≤0.003 °, and roughness Rq≤
25nm；
Step 3, described straight line magnetic bar grinding: promote the surface roughness of calcium fluoride concave cone mirror and control the face shape of concave cone mirror
Precision, calcium fluoride concave cone mirror surface-shaped precision peak-to-valley value PV≤λ/6 after using straight line magnetic bar grinding process to make processing, cone angle is by mistake
Difference θ≤0.003 °, roughness Rq≤0.5nm.
A kind of combined technique being applicable to calcium fluoride concave cone mirror highly-efficient processing the most according to claim 1, its feature
It is: the cylindrical grinding wheel of described straight line molding milling is resin anchoring agent diamond grinding wheel, emery wheel bore≤12mm, emery wheel milling
Rotating speed >=30000RPM.
A kind of combined technique being applicable to calcium fluoride concave cone mirror highly-efficient processing the most according to claim 1, its feature
It is: described straight line magnetic bar grinding refers to based on external diameterEndoporusAustenitic stainless steel cylinder and Ru-Fe-Mn
The straight line magnetic bar that bar magnet is constituted, uses the Magnetorheologicai polishing liquid of two-phase base load to be adsorbed in its surface and forms flexible polishing mould complete
The Ultra-smooth machining of calcium fluoride concave cone in pairs.
A kind of combined technique being applicable to calcium fluoride concave cone mirror highly-efficient processing the most according to claim 3, its feature
It is: the Magnetorheologicai polishing liquid of two-phase base load includes: carbonyl iron dust, two-phase base load liquid, additive, Ph additive and abrasive material,
The quality hundred ratio respectively 83%-87% of each component, 10%-15%, 1%-1.5%, 1.2%-2%, 0.01%-
0.0.05%.
A kind of combined technique being applicable to calcium fluoride concave cone mirror highly-efficient processing the most according to claim 4, its feature
It is: described carbonyl iron dust is the soft iron powder of surface area mean diameter≤3 micron, and two-phase base load liquid is by mass ratio about 5:1:
The deionized water of 1, ethylene glycol and dimethylformamide combination, additive is that benzoic acid receives antioxidant and glycerol wetting agent,
Ph regulator is sodium hydroxide, and abrasive material is the diamond grinding liquid of 50nm granule.
A kind of combined technique being applicable to calcium fluoride concave cone mirror highly-efficient processing the most according to claim 1, its feature
It is: the technological parameter of described straight line magnetic bar grinding technique is: polishing fluid penetraction depth 0.5mm-1mm, straight line magnetic force rod milling
Cutting speed 3000RPM-4000RPM, Ru-Fe-Mn magnetic field intensity is 1.25 teslas of tesla-1.28.
A kind of combined technique being applicable to calcium fluoride concave cone mirror highly-efficient processing the most according to claim 1, its feature
It is: described straight line magnetic bar grinding technique uses magnetic fluid flexibility removal behavior, carries out calcium fluoride concave cone mirror surfacing
Uniformly removing, machining locus is 0.1-0.5mm for fixing spiral spacer；The calcium fluoride concave cone surface that straight line magnetic bar grinding is removed
Depth of material is 300 nanometer-500 nanometers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610838489.9A CN106271901B (en) | 2016-09-22 | 2016-09-22 | A kind of combined technique suitable for calcirm-fluoride concave cone mirror highly-efficient processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610838489.9A CN106271901B (en) | 2016-09-22 | 2016-09-22 | A kind of combined technique suitable for calcirm-fluoride concave cone mirror highly-efficient processing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106271901A true CN106271901A (en) | 2017-01-04 |
| CN106271901B CN106271901B (en) | 2018-06-01 |
Family
ID=57711785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610838489.9A Active CN106271901B (en) | 2016-09-22 | 2016-09-22 | A kind of combined technique suitable for calcirm-fluoride concave cone mirror highly-efficient processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106271901B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD262668A1 (en) * | 1987-06-15 | 1988-12-07 | Zeiss Jena Veb Carl | PROCESS FOR THE CHEMICAL-MECHANICAL CLEANER POLLUTION OF CAF LOW 2 SURFACES |
| EP1372010A2 (en) * | 2002-06-13 | 2003-12-17 | Canon Kabushiki Kaisha | Method for manufacturing optical element |
| CN101419297A (en) * | 2008-12-09 | 2009-04-29 | 四川欧瑞特光电科技有限公司 | Method for processing inside and outside cone lens for generating hollow light beam |
| CN201720754U (en) * | 2010-01-06 | 2011-01-26 | 豪昱电子有限公司 | Magnetic three-dimensional grinding device |
| CN103350383A (en) * | 2013-07-19 | 2013-10-16 | 中国科学院上海光学精密机械研究所 | Polishing device of axicon and polishing method of axicon |
| CN105033751A (en) * | 2015-06-24 | 2015-11-11 | 中国科学院光电技术研究所 | Online detecting and processing device and method of convex cone mirror |
| CN105269412A (en) * | 2015-09-17 | 2016-01-27 | 中国科学院光电技术研究所 | Combined technology method suitable for efficient processing of calcium fluoride convex cone mirror |
-
2016
- 2016-09-22 CN CN201610838489.9A patent/CN106271901B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD262668A1 (en) * | 1987-06-15 | 1988-12-07 | Zeiss Jena Veb Carl | PROCESS FOR THE CHEMICAL-MECHANICAL CLEANER POLLUTION OF CAF LOW 2 SURFACES |
| EP1372010A2 (en) * | 2002-06-13 | 2003-12-17 | Canon Kabushiki Kaisha | Method for manufacturing optical element |
| CN101419297A (en) * | 2008-12-09 | 2009-04-29 | 四川欧瑞特光电科技有限公司 | Method for processing inside and outside cone lens for generating hollow light beam |
| CN201720754U (en) * | 2010-01-06 | 2011-01-26 | 豪昱电子有限公司 | Magnetic three-dimensional grinding device |
| CN103350383A (en) * | 2013-07-19 | 2013-10-16 | 中国科学院上海光学精密机械研究所 | Polishing device of axicon and polishing method of axicon |
| CN105033751A (en) * | 2015-06-24 | 2015-11-11 | 中国科学院光电技术研究所 | Online detecting and processing device and method of convex cone mirror |
| CN105269412A (en) * | 2015-09-17 | 2016-01-27 | 中国科学院光电技术研究所 | Combined technology method suitable for efficient processing of calcium fluoride convex cone mirror |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106271901B (en) | 2018-06-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105269412B (en) | A kind of combined technique suitable for calcirm-fluoride convex cone mirror highly-efficient processing | |
| Zhang et al. | Manufacturing technologies toward extreme precision | |
| CN101384967B (en) | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | |
| CN105690187B (en) | The processing method of off-axis aspheric mirror | |
| Tan et al. | A review of recent advances in fabrication of optical Fresnel lenses | |
| CN102896558A (en) | Calcium fluoride single crystal ultra-precision machining method based on chemico-mechanical polishing and ion beam polishing combined process | |
| Peng et al. | Review on polishing technology of small-scale aspheric optics | |
| CN102314096A (en) | Method for manufacturing a long micro lens array | |
| Gläbe et al. | Diamond machining of micro-optical components and structures | |
| CN107415060A (en) | A kind of small-bore axisymmetry optical surface element precision machining method | |
| Walker et al. | New results extending the precessions process to smoothing ground aspheres and producing freeform parts | |
| Sidpara | Magnetorheological finishing: a perfect solution to nanofinishing requirements | |
| CN103692294B (en) | The superhigh precision processing method of rice magnitude optical element | |
| CN106271901B (en) | A kind of combined technique suitable for calcirm-fluoride concave cone mirror highly-efficient processing | |
| CN108873805A (en) | A kind of slow knife servo turnery processing microlens array tool paths optimization method | |
| Wang et al. | Review of magnetorheological finishing on components with complex surfaces | |
| CN106181675B (en) | A kind of magnetic fluid machining tool and processing method for being applied to lifting calcirm-fluoride concave cone mirror roughness | |
| Li et al. | Wheel setting error modeling and compensation for arc envelope grinding of large-aperture aspherical optics | |
| CN105738980B (en) | Continuous-surface shape quartz micro optical element Mechanical lithography combined machining method | |
| CN106433478B (en) | One kind being suitable for CaF2The magnetic fluid polishing fluid and preparation method of material Ultra-smooth machining | |
| Walker et al. | New developments in the Precessions process for manufacturing free-form, large-optical, and precision-mechanical surfaces | |
| Takino et al. | 5-axis control ultra-precision machining of complex-shaped mirrors for extreme ultraviolet lithography system | |
| CN108356608B (en) | A kind of method of deterministic theory Wolter-I type optics mandrel | |
| JP5164176B2 (en) | Light projection exposure apparatus and light projection exposure method using stereoscopic projection | |
| Walker et al. | Recent advances in the control of form and texture on free-form surfaces |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |