CN106271901B - A kind of combined technique suitable for calcirm-fluoride concave cone mirror highly-efficient processing - Google Patents

A kind of combined technique suitable for calcirm-fluoride concave cone mirror highly-efficient processing Download PDF

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Publication number
CN106271901B
CN106271901B CN201610838489.9A CN201610838489A CN106271901B CN 106271901 B CN106271901 B CN 106271901B CN 201610838489 A CN201610838489 A CN 201610838489A CN 106271901 B CN106271901 B CN 106271901B
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China
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calcirm
straight line
concave cone
fluoride
grinding
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CN201610838489.9A
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Chinese (zh)
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CN106271901A (en
Inventor
钟显云
张郅昂
杨金山
陈强
李良红
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中国科学院光电技术研究所
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/005Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/01Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools

Abstract

The invention discloses a kind of combined techniques suitable for calcirm-fluoride concave cone mirror highly-efficient processing, this method has taken into full account the material property of calcium fluoride crystal and concave cone face polymorphic structure characteristic, work flow is divided into shaping, surface figure accuracy is promoted, roughness promotes three links and straight line shaping milling, diamond turning techniques and straight line magnetic bar three kinds of process integrations of grinding are respectively adopted and is processed, the technical bottlenecks such as the straightness of calcirm-fluoride concave cone, coning angle, surface figure accuracy, roughness are defeated in detail.The process integration is high in machining efficiency, cone angle precision is accurate, surface figure accuracy and roughness are controllable, stablize, and the technical bottleneck of calcirm-fluoride concave cone abnormal curved surface can not be processed by breaching domestic existing process, and the development for carrying out litho machine projection exposure optical system for China provides technical guarantee.

Description

A kind of combined technique suitable for calcirm-fluoride concave cone mirror highly-efficient processing

Technical field

The present invention relates to the precision machined technical field of nano-precision, more particularly to a kind of efficient suitable for calcirm-fluoride concave cone mirror The combined technique of processing.

Background technology

CaF2Crystalline material has water white transparency, and absorption coefficient is low, antibody Monoclonal threshold value is high, permeability is high, free of birefringence existing As etc. optical advantages, penetration range can be from infrared wavelength (12 μm) to ultraviolet wavelength (125nm), in infrared system and ultraviolet system It is had a wide range of applications in system, is one of optimal optical material of 193nm deep-UV lithography system lenses.

The optical system imaging depth of field and imaging resolution are two important indicators of Optical System Design, and ordinary optical is imaged The physical cause of system depth of field finiteness is the diffraction due to light.Such as directional light incidence ordinary optical imaging system, in focal point The hot spot of a very little is formed, but with the difference of defocus position (i.e. beam propagation position), the size of diffraction pattern drastically becomes Change.And the imaging characteristics of axial cone mirror lens be the high light of different band have different image point positions, so it can be by point on axis The light that light source is sent is continuously converged to along the point of axis different position, is had the characteristic of diffraction light-free, is optical system The important method of the system depth of field is improved in design.Advantage of the axial cone mirror in optical system mainly has:

(1) when common optical system is imaged, point spread function changes quickly with defocus, and very big be stranded is caused to image restoration It is difficult.And the center spot size and shape for the Beams that axicon lens generates remains unchanged within the specific limits;

(2) applied optics system, which is commonly used, reduces relative aperture to increase the depth of field, but can reduce the spatial resolution of system, makes Image detail obscures.For axial cone mirror due to the characteristic with line coke, system can be increased by being applied in optical imaging system Depth of focus;

(3) axial cone mirror microscope group can be with the variation of spacing between axial cone mirror unit, ring width inside and outside the ring illumination of generation Also change, the inflection point (tip of circular cone) at the center of axial cone mirror element can play the role of splitting light beam.

With the development of China's " great scale integrated circuit manufacturing equipment and set technique ", CaF2The development of axial cone mirror is made For the core element of projection mask aligner's lighting system, the performance of entire lighting system capable transport is determined.Therefore, axial cone mirror High-precision processing is to ensure that entire lighting system has high resolution, high energy transmission, the important prerequisite of the high imaging system depth of field.

In lithography illuminating system structure, salt free ligands optical device is the axial cone being made of convex cone mirror and concave cone mirror complementation Mirror.By experiment and research for many years, Chinese Academy of Sciences's photoelectricity has been completed CaF2The technology of convex cone processing is groped, and is realized CaF2The Ultra-smooth machining of convex cone.And the surface figure accuracy and roughness for concave cone are promoted, technology method has higher Challenge, be mainly reflected in:

(1)CaF2Concave cone mirror is soft crystalline material, and the structure opposite sex, roughness and finish control are difficult;

(2) concave cone mirror busbar is inconsistent in process linear velocity, and central area linear velocity is almost nil, existing process skill When art processes concave cone mirror, bus straight line degree and central area are destroyed layer and are unable to control;

(3)CaF2Axial cone mirror mirror normal is incorgruous, curvature mirror variation it is inconsistent, circular cone center be inflection point, machining locus It is limited, meanwhile, process can not ensure the uniformity of removal efficiency and the convergent validity of face shape;

(4) it is the scattered power of the reduction conical surface, CaF2The surface roughness requirements of axial cone mirror are within 0.5nm, are limited to CaF2Axis The polymorphic structure of axicon lens, traditional means can not be used directly, and the country has no ripe, reliable processing technology method.

The content of the invention

The technical problems to be solved by the invention are:Overcome existing technical matters processing CaF2The technological deficiency of concave cone, One kind is provided and can be applied to CaF2Concave cone high efficiency, the United Technologies technique of high-precision requirement, so as to be lithographic objective illumination system The high-precision of system, which is developed, provides technical guarantee.

To solve the above problems, the present invention uses following technical scheme:

A kind of combined technique suitable for calcirm-fluoride concave cone mirror highly-efficient processing, according to the shaping of calcirm-fluoride concave cone, face Shape precision improvement, roughness promote three technological processes, and straight line shaping milling, diamond turning process and straight line magnetic is respectively adopted Power rod milling is cut three kinds of process integrations and is realized;Include the following steps:

Step 1: the straight line shaping milling:It will be closest to ball half by numerical-control milling and grinding lathe using linear cylindrical emery wheel The calcirm-fluoride concave surface speed mill in footpath be calcirm-fluoride concave cone mirror, cone angle error θ≤0.1 °, conical surface straightness error≤2 micron;

Step 2: the diamond turning process:Calcirm-fluoride concave cone mirror surface-shaped precision and coning angle are promoted, using diamond Turning technology makes calcirm-fluoride concave cone mirror surface-shaped precision peak-to-valley value PV≤λ/8 after processing, cone angle error θ≤0.003 °, roughness Rq≤25nm;

Step 3: the straight line magnetic bar grinding:It promotes the surface roughness of calcirm-fluoride concave cone mirror and controls concave cone mirror Surface figure accuracy makes calcirm-fluoride concave cone mirror surface-shaped precision peak-to-valley value PV≤λ/6 after processing using straight line magnetic bar grinding process, cone Angle error θ≤0.003 °, roughness Rq≤0.5nm.

Further, the straight line is molded the cylindrical grinding wheel of milling as resin anchoring agent diamond grinding wheel, emery wheel bore ≤ 12mm, emery wheel milling rotating speed >=30000RPM.

Further, the straight line magnetic bar grinding refers to based on outer diameterEndoporusOvshinsky it is stainless The straight line magnetic bar that steel cylinder is formed with Ru-Fe-Mn bar magnet, is adsorbed in its surface using the Magnetorheologicai polishing liquid of two-phase base load and is formed Flexible polishing mould simultaneously completes the Ultra-smooth machining to calcirm-fluoride concave cone.

Further, the Magnetorheologicai polishing liquid of two-phase base load includes:Carbonyl iron dust, two-phase base load liquid, additive, Ph add Adding agent and abrasive material, the quality hundred of each component compares respectively 83%-87%, 10%-15%, 1%-1.5%, 1.2%-2%, 0.01%-0.0.05%.

Further, the carbonyl iron dust be surface area average grain diameter≤3 micron soft iron powder, two-phase base load liquid by Mass ratio about 5:1:1 deionized water, ethylene glycol and dimethylformamide combination, additive for benzoic acid receive antioxidant and Glycerine moisturizer, ph conditioning agents are sodium hydroxide, and abrasive material is the diamond grinding liquid of 50nm particles.

Further, the technological parameter of the straight line magnetic bar grinding technique is:Polishing fluid penetraction depth 0.5mm- 1mm, straight line magnetic bar grinding speed 3000RPM-4000RPM, Ru-Fe-Mn magnetic field intensity are -1.28 tesla of 1.25 tesla.

Further, the straight line magnetic bar grinding technique uses magnetic fluid flexibility removal behavior, to calcirm-fluoride concave cone Mirror surfacing is uniformly removed, and machining locus is that fixed spiral spacer is 0.1-0.5mm;The grinding removal of straight line magnetic bar Calcirm-fluoride concave cone surfacing depth is 300 nanometers -500 nanometers.

Compared with prior art, advantages of the present invention is:

(1) present invention process has taken into full account the characteristics such as calcium fluoride crystal material property and concave cone face polymorphic structure, will add Work flow is divided into shaping, surface figure accuracy is promoted, roughness promotes three links and is respectively adopted using straight line shaping milling, Buddha's warrior attendant Stone turning technology and straight line magnetic bar are ground three kinds of technical matters joint processing and realize, coning angle, face shape to calcirm-fluoride concave cone The technical bottlenecks such as precision, roughness are defeated in detail, and have high in machining efficiency, and cone angle precision is accurate, surface figure accuracy and coarse Degree is controllable, stablizes, and the technical bottleneck of calcirm-fluoride concave cone abnormal curved surface can not be processed by breaching domestic existing process, be carried out for China The development of litho machine projection exposure optical system provides technical guarantee.

(2) present invention be according to the shaping of calcirm-fluoride concave cone, surface figure accuracy is promoted, roughness promotes three work flows and Straight line shaping milling, diamond turning techniques and the straight line magnetic bar carried out respectively are ground three kinds of joint processing technologys, flow letter List, technology are compact, highly reliable, to technical bottlenecks such as cone angle, surface figure accuracy, the roughness of lithographic objective lighting system axial cone mirror There is stronger technological break-through.

(3) involved straight line shaping milling of the invention, straight line magnetic force rod milling machining tool are linear cylindrical structure, are led to It crosses to the straight line grinding of concave cone busbar and reaches minute surface and uniformly remove, it is big to the scope of application of cone angle, breach existing numerical control grinding Head can not penetrate with the technical bottleneck of concave cone mirror finish;

(4) involved magnetic fluid polishing fluid of the invention is two-phase base load polishing fluid, and shear yield stress is strong, is applicable in you The permanent-magnetic field that iron boron is formed, promotes the roughness of crystalline material and Ultra-smooth machining has larger breakthrough and stabilization Property.

Description of the drawings

Fig. 1 is linear cylindrical emery wheel milling CaF2Concave cone schematic diagram, wherein, 11 be cylinder milling emery wheel, 12 for concave cone most It is concave cone after shaping close to ball curved surface, 13,14 be workpiece rotary table;

Fig. 2 is ground CaF for diamond turning and straight line magnetic bar2Roughness converts after concave cone;

Fig. 3 is ground CaF for straight line magnetic bar2Concave cone process schematic, wherein, 21 be straight line magnetic bar, and 22 be Ru-Fe-Mn Bar magnet, 23 be magnetic fluid polishing fluid, and 24 be calcirm-fluoride concave cone, and 25 be turntable;

Fig. 4 is ground CaF for straight line magnetic bar2Pass between the magnetic fluid polishing fluid penetraction depth and roughness of concave cone process System;

Fig. 5 is ground CaF for straight line magnetic bar2Relation between the grinding speed and roughness of concave cone process;

Fig. 6 is CaF2Concave cone experimental piece passes through diamond turning, straight line magnetic bar roughness evolution after grinding.

Specific embodiment

Below in conjunction with attached drawing and specific embodiment, the present invention will be further explained.

A kind of combined technique suitable for calcirm-fluoride concave cone mirror highly-efficient processing of the invention, according to calcirm-fluoride concave cone into Type, surface figure accuracy promoted, roughness promoted three work flows, be respectively adopted straight line shaping milling, diamond turning techniques and Straight line magnetic bar is ground three kinds of technical matters joint processing and realizes.

Straight line shaping Milling techniques refer to will be closest to the radius of a ball by numerical-control milling and grinding lathe using linear cylindrical emery wheel The speed mill of calcirm-fluoride concave surface is calcirm-fluoride concave cone mirror.By the way that calcirm-fluoride concave spherical surface is coaxially installed on turntable and revolving-turret extremely Axicon lens busbar is horizontal direction, uses cylindrical type resin anchoring agent diamond grinding wheel to be not less than 30,000 rotary speed milling calcirm-fluoride Concave spherical surface is to calcirm-fluoride concave cone face, as shown in Figure 1.Use straight line shaping Milling techniques processing after concave cone straightness error for 1.2 microns, cone angle error θ≤0.1 °.

Diamond turning techniques main lift calcirm-fluoride concave cone mirror surface-shaped precision and coning angle.By by calcirm-fluoride concave cone face Turntable is coaxially installed on, preferable surface figure accuracy and coning angle can be obtained by walking axicon lens busbar track using diamond bit.Such as Fig. 2 It is shown, the concave cone straightness error after diamond turning is used as PV≤λ/8 (λ=632.8nm), roughness Rq≤ 25nm, cone angle error θ≤0.003 °.

The surface roughness of straight line magnetic bar grinding technique main lift calcirm-fluoride concave cone mirror and the face shape for controlling concave cone mirror Precision.As shown in figure 3, by the way that calcirm-fluoride concave spherical surface is coaxially installed on turntable, simultaneously revolving-turret to axicon lens busbar is level side To the flexible polishing mould formed using magnetic fluid polishing fluid on straight line magnetic bar is ground in concave cone mirror busbar track, is led to It crosses and residence time of the linear velocity adjustment straight line magnetic bar a little in concave cone busbar each point, guarantee concave cone is respectively polished according to concave cone busbar Face uniformly removes.Straight line magnetic bar grinding concave cone after concave cone surface figure accuracy error be PV≤λ/6 (λ=632.8nm), roughness Rq ≤ 0.5nm, cone angle error θ≤0.003 °.

Suitable for CaF2The magnetic fluid polishing fluid of material processing mainly includes carbonyl iron dust, two-phase base load liquid, additive, Ph Additive and abrasive material, the mass ratio of combination are respectively 83%-87%, 10%-15%, 1%-1.5%, 1.2%-2%, 0.01%-0.0.05%.

Carbonyl iron dust is the soft iron powder of surface area average grain diameter≤3 micron, and two-phase base load liquid is by mass ratio about 5:1:1 Deionized water, ethylene glycol and dimethylformamide combination, additive receive antioxidant and glycerine moisturizer for benzoic acid, ph Conditioning agent is sodium hydroxide, and abrasive material is the diamond grinding liquid of 50nm particles.

As shown in figure 4, by analyzing straight line magnetic bar grinding process magnetic fluid polishing liquid penetraction depth and CaF2Concave cone Relation between roughness, the technological parameter that can obtain preferable magnetic fluid polishing liquid penetraction depth are 0.5mm-1mm.

As shown in figure 5, by analyzing straight line magnetic bar grinding speed and CaF2Relation between concave cone roughness can be managed The straight line magnetic bar grinding speed 3000RPM-4000RPM thought.

As shown in fig. 6, using preferable magnetorheological working process parameter:Polishing fluid penetraction depth 0.5mm-1mm, straight line magnetic Power stick grinding speed 4000RPM-7000RPM, Ru-Fe-Mn magnetic field intensity are -1.28 tesla of 1.25 tesla.To diamond vehicle CaF after cutting2Concave cone carries out roughness promotion.By 20 when small, 40 it is small when, 55 it is small when, 70 it is small when processing, roughness by 13nm-19nm is promoted to respectively:7nm-13nm、4.2nm-5.7nm、1.2nm-1.9nm、0.3nm-0.5nm.

Straight line magnetic bar grinding technique uses magnetic fluid flexibility removal behavior, calcirm-fluoride concave cone mirror surfacing is carried out equal Even removal, machining locus are that fixed spiral spacer is 0.1-0.5mm;The calcirm-fluoride concave cone surface material of straight line magnetic bar grinding removal It is 300 nanometers -500 nanometers to expect depth.

Claims (1)

1. a kind of combined technique suitable for calcirm-fluoride concave cone mirror highly-efficient processing, it is characterised in that:According to calcirm-fluoride concave cone Shaping, surface figure accuracy promoted, roughness promoted three technological processes, be respectively adopted straight line shaping milling, diamond turning work Skill and straight line magnetic bar are ground three kinds of process joint processing and realize;Include the following steps:
Step 1: the straight line shaping milling:It will be closest to the radius of a ball by numerical-control milling and grinding lathe using linear cylindrical emery wheel The speed mill of calcirm-fluoride concave surface be calcirm-fluoride concave cone mirror, cone angle error θ≤0.1 °, conical surface straightness error≤2 micron;
Step 2: the diamond turning process:Calcirm-fluoride concave cone mirror surface-shaped precision and coning angle are promoted, using diamond turning Technique makes calcirm-fluoride concave cone mirror surface-shaped precision peak-to-valley value PV≤λ/8 after processing, cone angle error θ≤0.003 °, and roughness Rq≤ 25nm;
Step 3: the straight line magnetic bar grinding:It promotes the surface roughness of calcirm-fluoride concave cone mirror and controls the face shape of concave cone mirror Precision makes calcirm-fluoride concave cone mirror surface-shaped precision peak-to-valley value PV≤λ/6 after processing using straight line magnetic bar grinding process, and cone angle misses Poor θ≤0.003 °, roughness Rq≤0.5nm;
The straight line is molded the cylindrical grinding wheel of milling as resin anchoring agent diamond grinding wheel, emery wheel bore≤12mm, emery wheel milling Rotating speed >=30000RPM;
The straight line magnetic bar grinding refers to based on outer diameterEndoporusAustenitic stainless steel cylinder and Ru-Fe-Mn magnetic The straight line magnetic bar of bar construction is adsorbed in its surface formation flexible polishing mould using the Magnetorheologicai polishing liquid of two-phase base load and completes To the Ultra-smooth machining of calcirm-fluoride concave cone;
The Magnetorheologicai polishing liquid of two-phase base load includes:Carbonyl iron dust, two-phase base load liquid, additive, Ph conditioning agents and abrasive material, respectively The quality hundred of component is than being respectively 83%-87%, 10%-15%, 1%-1.5%, 1.2%-2%, 0.01%-0.0.05%;
The carbonyl iron dust is the soft iron powder of surface area average grain diameter≤3 micron, and two-phase base load liquid is by mass ratio 5:1:1 Deionized water, ethylene glycol and dimethylformamide combination, additive receive antioxidant and glycerine moisturizer for benzoic acid, ph tune Section agent is sodium hydroxide, and abrasive material is the diamond grinding liquid of 50nm particles;
The technological parameter of straight line magnetic bar grinding is:Polishing fluid penetraction depth 0.5mm-1mm, straight line magnetic bar grinding speed 3000RPM-4000RPM, Ru-Fe-Mn magnetic field intensity are -1.28 tesla of 1.25 tesla;
The straight line magnetic bar grinding technique uses magnetic fluid flexibility removal behavior, calcirm-fluoride concave cone mirror surfacing is carried out equal Even removal, machining locus are that fixed spiral spacer is 0.1-0.5mm;The calcirm-fluoride concave cone surface material of straight line magnetic bar grinding removal It is 300 nanometers -500 nanometers to expect depth.
CN201610838489.9A 2016-09-22 2016-09-22 A kind of combined technique suitable for calcirm-fluoride concave cone mirror highly-efficient processing CN106271901B (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD262668A1 (en) * 1987-06-15 1988-12-07 Zeiss Jena Veb Carl Process for the chemical-mechanical cleaner pollution of caf low 2 surfaces
EP1372010A2 (en) * 2002-06-13 2003-12-17 Canon Kabushiki Kaisha Method for manufacturing optical element
CN101419297A (en) * 2008-12-09 2009-04-29 四川欧瑞特光电科技有限公司 Method for processing inside and outside cone lens for generating hollow light beam
CN201720754U (en) * 2010-01-06 2011-01-26 豪昱电子有限公司 Magnetic three-dimensional grinding device
CN103350383A (en) * 2013-07-19 2013-10-16 中国科学院上海光学精密机械研究所 Polishing device of axicon and polishing method of axicon
CN105033751A (en) * 2015-06-24 2015-11-11 中国科学院光电技术研究所 Online detecting and processing device and method of convex cone mirror
CN105269412A (en) * 2015-09-17 2016-01-27 中国科学院光电技术研究所 Combined technology method suitable for efficient processing of calcium fluoride convex cone mirror

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD262668A1 (en) * 1987-06-15 1988-12-07 Zeiss Jena Veb Carl Process for the chemical-mechanical cleaner pollution of caf low 2 surfaces
EP1372010A2 (en) * 2002-06-13 2003-12-17 Canon Kabushiki Kaisha Method for manufacturing optical element
CN101419297A (en) * 2008-12-09 2009-04-29 四川欧瑞特光电科技有限公司 Method for processing inside and outside cone lens for generating hollow light beam
CN201720754U (en) * 2010-01-06 2011-01-26 豪昱电子有限公司 Magnetic three-dimensional grinding device
CN103350383A (en) * 2013-07-19 2013-10-16 中国科学院上海光学精密机械研究所 Polishing device of axicon and polishing method of axicon
CN105033751A (en) * 2015-06-24 2015-11-11 中国科学院光电技术研究所 Online detecting and processing device and method of convex cone mirror
CN105269412A (en) * 2015-09-17 2016-01-27 中国科学院光电技术研究所 Combined technology method suitable for efficient processing of calcium fluoride convex cone mirror

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