CN106248995A - The integrated measure and control device of silicon micromachine resonant accelerometer - Google Patents
The integrated measure and control device of silicon micromachine resonant accelerometer Download PDFInfo
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- CN106248995A CN106248995A CN201610837700.5A CN201610837700A CN106248995A CN 106248995 A CN106248995 A CN 106248995A CN 201610837700 A CN201610837700 A CN 201610837700A CN 106248995 A CN106248995 A CN 106248995A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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Abstract
The open a kind of integrated measure and control device of silicon micromachine resonant accelerometer of the present invention, including the first oscillating circuit (302), the second oscillating circuit (303), first frequency measuring circuit (304), second frequency measuring circuit (305) and SPI digital interface (306)；Described first oscillating circuit (302), the second oscillating circuit (303), continuous vibration is kept in its resonant frequency according to the displacement set for controlling micromechanical resonance beam by the way of electrostatic drive, capacitance detecting, described first frequency measuring circuit (304), second frequency measuring circuit (305), for measuring the frequency of the simulation oscillator signal of oscillating circuit output and exporting with digital signal；Described SPI digital interface (306), for flush bonding processor (307) transmitting two paths frequency measurement digital signal.Volume of the present invention is little, low in energy consumption, noise is little.
Description
Technical field
The invention belongs to acceleration analysis technical field, particularly one and be specifically designed to silicon micromachine resonant accelerometer
The integrated measure and control device of self-excited oscillation type.
Background technology
Resonance type accelerometer volume based on silicon micro-machining technology is little, can batch machining, certainty of measurement high, dynamically
Scope is big, and current bias instaility has been able to realize inertial navigation level, and constant multiplier stability reaches below 1ppm.
It is illustrated in figure 1 the internal sensitive structure arranged of silicon micromachine resonant accelerometer.It is that relative axis 106 is right
The structure claimed.Including: mass 101, mass elastic supporting beams 102,110,111,112, steel microtube 103,109, micromechanics
Walking beam resonator 104,107, anchor point 105,108,110,112,113,114,115.It is illustrated in figure 2 wherein micro mechanical vibration
Beam resonator 104, the internal structure of 107, including movable resonance beam 201, fixed drive electrode 202,204, fixed test electrode
203,205, comb electric capacity 206,207,208,209.When, in time illustrating y-axis direction and load acceleration, it is used that mass 101 produces
Property power is through steel microtube 103, and 109 amplify and act on micro mechanical vibration beam resonator 104, on 107.One of them is under pressure,
Resonant frequency reduces, another under tension, and resonant frequency raises.By measuring the difference on the frequency of resonator 104,107, Ke Yiji
Calculate loaded accekeration.
For completing acceleration analysis, it is necessary first to oscillation control circuit controls mechanical beams so that it is be in resonant condition, its
The secondary frequency measurement circuit that also needs to reads the frequency output as accelerometer of oscillator signal.
Chinese invention patent application " a kind of silicon micro-resonance type accelerometer circuit control system " (application number:
201410080864.9, publication date: 2014.6.18) disclose a kind of employing FPGA digital circuit and discrete device analog circuit
The silicon micro-resonance type accelerometer circuit control system of mixing.It uses square-wave signal that digital phase-locked loop generates to drive resonance
Device vibrates, and interface circuit uses the scheme of high frequency carrier and ring diode demodulation, and analog-digital converter is by detecting circuit output letter
Number it is digitized.
This system bulk is big, and power consumption is high, is more suitable for the practical circuit as research platform rather than sensor.Phase-locked
Losing lock is there is and causes the hidden danger of whole component failure in the phase control mode of ring in the case of big bandwidth.
Summary of the invention
It is an object of the invention to provide a kind of integrated measure and control device of silicon micromachine resonant accelerometer, volume is little, merit
Consume low, noise is little.
The technical solution realizing the object of the invention is:
A kind of integrated measure and control device of silicon micromachine resonant accelerometer, it includes the first oscillating circuit, the second vibration electricity
Road, first frequency measuring circuit, second frequency measuring circuit and SPI digital interface；The input of described first frequency measuring circuit
End is connected with the outfan of the first oscillating circuit, and its outfan is connected with the first input end of SPI digital interface, and described first shakes
Swing the input of circuit for electrically connecting with silicon micromachine resonant accelerometer micromechanical resonator, described second frequency
The input of rate measuring circuit and the outfan of the second oscillating circuit are connected, and its outfan inputs with the second of SPI digital interface
End is connected, and the input of described second oscillating circuit is for another micromechanical resonance with silicon micromachine resonant accelerometer
Device electrically connects, and the outfan of described SPI digital interface is for electrically connecting with flush bonding processor；
Described first oscillating circuit, the second oscillating circuit, for controlling microcomputer by the way of electrostatic drive, capacitance detecting
Tool resonance beam keeps continuous vibration in its resonant frequency according to the displacement set,
Described first frequency measuring circuit, second frequency measuring circuit, for measuring the simulation vibration of oscillating circuit output
The frequency of signal also exports with digital signal；
Described SPI digital interface, for flush bonding processor transmitting two paths frequency measurement digital signal.
Compared with prior art, its remarkable advantage is the present invention:
1, volume is little: circuit, based on 0.35 μm CMOS technology design and processing, comprises the vibration electricity that two sets are complete in circuit
Road and frequency measurement circuit, each road can work alone.Acceleration result is exported by SPI digital interface, with embedded
Processor is mutually compatible, can be directly embedded into navigation or control system, and volume is little；
2, low in energy consumption: by arranging low-power consumption frequency measurement circuit, on the premise of meeting certainty of measurement, to be greatly lowered
Power consumption；
3, noise is little: the present invention arranges difference type pre-amplification circuit, and current signal is provided bandpass shape；Profit
The mode amplified by two-stage can provide rate signal and the displacement signal of reflection mechanical beams vibration simultaneously.Compare across resistive etc.
Tradition pre-amplification circuit has lower noise；Use on-off modulated mode, low frequency amplitude signal is modulated higher
In frequency, reduce the impact of the intrinsic 1/f noise of cmos circuit.
The present invention is described in further detail with detailed description of the invention below in conjunction with the accompanying drawings.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the micromechanics sensitive structure of prior art silicon micromachine resonant accelerometer.
Fig. 2 is the structural representation of micromechanical resonator in Fig. 1.
Fig. 3 is the electric theory diagram of the integrated measure and control device of silicon micromachine resonant accelerometer of the present invention.
Fig. 4 is the electric theory diagram of oscillating circuit in Fig. 3.
Fig. 5 is the circuit diagram of automatic gain control circuit in Fig. 4.
Fig. 6 is the circuit diagram of difference type pre-amplification circuit in Fig. 4.
Fig. 7 is the circuit diagram of variable gain amplifier in Fig. 4.
Fig. 8 is subtraction circuit and the schematic diagram of proportional integral filter circuit in Fig. 4.
Fig. 9 is the circuit diagram of rectification circuit in Fig. 4.
Figure 10 is the circuit diagram of chopper in Fig. 4.
Figure 11 is the electric theory diagram of Fig. 3 medium frequency measuring circuit.
Figure 12 is the circuit diagram of comparator in Figure 11.
Figure 13 is the circuit diagram of phaselocked loop in Figure 11.
Figure 14 is the circuit diagram of voltage controlled oscillator in Figure 13.
Figure 15 is electric charge pump and the circuit diagram of wave filter in Figure 13.
Figure 16 is the circuit diagram of level translator in Figure 13.
Detailed description of the invention
As it is shown on figure 3, the integrated measure and control device of silicon micromachine resonant accelerometer of the present invention,
Measure including first oscillating circuit the 302, second oscillating circuit 303, first frequency measuring circuit 304, second frequency
Circuit 305 and SPI digital interface 306；
The input of described first frequency measuring circuit 304 and the outfan of the first oscillating circuit 302 are connected, its outfan
Being connected with the first input end of SPI digital interface 306, the input of described first oscillating circuit 302 is for humorous with silicon micro mechanical
One micromechanical resonator electrical connection of formula of shaking accelerometer 301,
The input of described second frequency measuring circuit 305 and the outfan of the second oscillating circuit 303 are connected, its outfan
Being connected with the second input of SPI digital interface 306, the input of described second oscillating circuit 303 is for humorous with silicon micro mechanical
Another micromechanical resonator electrical connection of formula of shaking accelerometer 301,
The outfan of described SPI digital interface 306 is for electrically connecting with flush bonding processor 307；
Described first oscillating circuit the 302, second oscillating circuit 303, for control by the way of electrostatic drive, capacitance detecting
Micromechanical resonance beam processed keeps continuous vibration in its resonant frequency according to the displacement set,
Described first frequency measuring circuit 304, second frequency measuring circuit 305, for measuring the mould of oscillating circuit output
Intend the frequency of oscillator signal and export with digital signal；
Described SPI digital interface 306, for flush bonding processor 307 transmitting two paths frequency measurement digital signal.
Described first oscillating circuit the 302, second oscillating circuit 303, first frequency measuring circuit 304, second frequency are measured
Circuit 305 and SPI digital interface 306 is integrated on single chip CMOS circuit.
Circuit, based on 0.35 μm CMOS technology design and processing, comprises the complete oscillating circuit of two sets and surveys with frequency in circuit
Amount circuit, each road can work alone.Acceleration result is exported by SPI digital interface, holds concurrently mutually with flush bonding processor
Hold, navigation or control system can be directly embedded into.Volume is little, low in energy consumption.
Described first oscillating circuit 302 is identical with the second oscillating circuit 303 internal structure.
Described first frequency measuring circuit 304 is identical with second frequency measuring circuit 305 internal structure.
As shown in Figure 4, described first oscillating circuit 302 includes difference type pre-amplification circuit 402, automatic growth control electricity
Road 410, variable gain amplifier 407 and difference turn single-end circuit 408；
Micro-for silicon micromachine resonant accelerometer 301 of the input of described difference type pre-amplification circuit 402
Mechanical resonator electrically connects, and its first outfan is connected with the signal input part of variable gain amplifier 407, its second outfan
Turn single-end circuit 408 to be connected with difference, the input of described automatic gain control circuit 410 also with difference type pre-amplification circuit
Second outfan of 402 is connected, and its outfan is connected with the control input of variable gain amplifier 407, described variable gain
The signal output part of amplifier 407 is for electrically connecting with the micromechanical resonator of silicon micromachine resonant accelerometer 301.
Accelerometer sensitive structure 401 is used as frequency selector in oscillating circuit.Its resonance beam 201 loads direct current
Voltage.At drive electrode 202, on 204, load alternating voltage, produce the vibration of static-electronic driving resonance beam.The preposition amplification of difference type
Circuit 402 connects the detecting electrode of accelerometer sensitive structure 401, and when resonance beam 201 is vibrated, detection electric capacity 207,209 is pressed
Rule according to same frequency and reversed-phase changes, and the electric current that capacitance variations produces is converted into reflection electric capacity by difference type pre-amplification circuit 402
Moving displacement and the voltage signal of speed.Wherein velocity voltage signal inputs in variable gain amplifier 407 with the form of difference,
Displacement voltage signal is input in automatic gain control circuit 410 with the form of difference.
In automatic gain control circuit 410, commutator 403 extracts the amplitude of displacement voltage signal, through subtractor 404 with
Set after amplitude subtracts each other and differed from, then generated amplitude control signal by proportional-integral filter 406.Low for cmos circuit
Frequently the feature that 1/f noise is bigger, has carried out copped wave process to input bit shifting signal.4 choppers, wherein choppers are set altogether
Displacement voltage signal is modulated high frequency by 411, and reference voltage and common-mode voltage are modulated high frequency, chopper 405 by chopper 412
High-frequency signal re-modulation is returned low frequency.
The velocity voltage signal of difference type preamplifier 402 output increases according to automatic through variable gain amplifier 407
The control signal regulation of benefit control circuit 401 output, generates and drives signal, be connected to drive electrode 202, on 204.
As shown in Figure 4, Figure 5, described automatic gain control circuit 410 includes rectification circuit 403, subtraction circuit 404, ratio
Integral filter circuit the 406, first chopper circuit the 405, second chopper circuit the 411, the 3rd chopper circuit 412；
The input of described rectification circuit 403 by the second chopper circuit 411 and difference type pre-amplification circuit 402 the
Two outfans are connected, and its outfan is connected with the first input end of subtraction circuit 404, the second input of described subtraction circuit 404
End connects reference voltage and common-mode voltage by the 3rd chopper circuit 412, and its outfan is amassed with ratio by the first chopper circuit 405
The input dividing filter circuit 406 is connected, the input of described proportional integral filter circuit 406 and variable gain amplifier 407
Control input be connected.
Fig. 5 is the circuit diagram of automatic gain control circuit 410.Automatic gain control circuit by rectification circuit, subtraction circuit,
Proportional integral filter circuit and chopper circuit composition.Rectification circuit extracts the oscillation amplitude of accelerometer drive displacement, subtraction electricity
The reference voltage of this range signal with setting is compared by road, and relative error produces amplitude control after proportional-integral filter
Voltage processed is used for regulating the loop gain of oscillating circuit and realizes fixed ampllitude vibration.Chopper utilizes signal modulation principle to eliminate rectified current
The sudden strain of a muscle frequency noise impact on drive amplitude control accuracy in road and subtraction circuit.
Resistance 516 and 517 is used for the common-mode voltage extracting a drive displacement signal benchmark as chopper, chopper
518,519 the modulation to input signal is realized.Rectification circuit is constituted difference knot by a pair alternative voltage follower 520 and 521
Structure is mutually compatible with input chopper.The drive displacement range signal of rectification circuit 520,521 output is by subtraction circuit and presets
Reference amplitude compare.Reference voltage is modulated high frequency, voltage/current conversion circuit 523,524 by chopper 522 equally
Subtractor input signal being converted by voltage domain and carry out subtracting each other comparing to current field, error current signal is demodulated by chopper 525
Behind tremendously low frequency territory, passing ratio integral filter circuit 526 is converted into amplitude control voltage and is adjusted oscillator loop gain.
As shown in Figure 6, described difference type pre-amplification circuit 402 includes first differential operational amplifier the 508, second difference
Operational amplifier the 516, first feedback capacity the 507, second feedback capacity the 509, first inclined value resistance 505, second is worth resistance partially
506, first feedback resistance the 513, second feedback resistance 514, first compensates electric capacity 512 and second and compensates electric capacity 515；
It is connected to the first differential operational amplifier 508 after described first feedback capacity 507 is in parallel with the first inclined value resistance 505
Positive input terminal and negative output terminal between, be connected to first after described second feedback capacity 509 is in parallel with the second inclined value resistance 506
Between negative input end and the positive output end of differential operational amplifier 508,
It is connected to the second differential operational amplifier 516 after described first feedback resistance 513 is in parallel with the first compensation electric capacity 512
Positive input terminal and negative output terminal between, described second feedback resistance 514 with second compensate electric capacity 515 in parallel after be connected to second
Between negative input end and the positive output end of differential operational amplifier 516,
The positive input terminal of described second differential operational amplifier 516 and the negative output terminal of the first differential operational amplifier 508
Between be provided with the first preposition electric capacity 510, the negative input end of the second differential operational amplifier 516 and the first differential operational amplifier
The second preposition electric capacity 511 it is provided with between the positive output end of 508,
Positive input termination silicon micromachine resonant accelerometer 301 micromechanics of described first differential operational amplifier 508
One detection comb electric capacity 501 of resonator, its negative input terminates another detection comb electric capacity 502,
The positive input terminal of described first differential operational amplifier 508 is also by the first parasitic capacitance 503 ground connection, its negative input
End is by the second parasitic capacitance 504 ground connection.
In difference type pre-amplification circuit 402 as shown in Figure 6, voltage Vp is connected to resonance beam 201, variable capacitance
501 and 502 represent the detection comb electric capacity 203,205 in accelerometer sensitive structure.When resonance beam is vibrated, electric capacity 501,
502 with sinusoidal rule change, and change amplitude is equal, opposite in phase.The amplitude frequency curve of first order amplifying circuit is low-pass characteristic, interior
Portion includes differential operational amplifier 508, and feedback capacity 507,509, partially value resistance 505,506, parasitic capacitance 503,504, it is defeated
Going out signal is and electric capacity 501, the signal of 502 vibration displacement homophases.The amplitude frequency curve of second level amplifying circuit is high pass characteristic, interior
Portion includes differential operational amplifier 516, preposition electric capacity 510,5111, feedback resistance 513,514, compensates electric capacity 512 and 515, its
Output signal and electric capacity 501,502 vibration velocity homophase.Difference type pre-amplification circuit general performance goes out bandpass characteristics, to shake
In bigger frequency range, there is smooth amplitude response curve and phase place response curve centered by beam resonant frequency.
As it is shown in fig. 7, described variable gain amplifier 407 include 553,554,8 NMOS tube of 2 PMOS 555,556,
557,558,559,560,561,562,
The source electrode interconnection of described 2 PMOS 553,554 is followed by power vd D, its gate interconnection,
The drain interconnection of described first NMOS tube 555 and the 3rd NMOS tube 557 is followed by the drain electrode of the first PMOS 553, institute
The drain interconnection stating the 5th NMOS tube 559 and the 7th NMOS tube 561 is followed by the drain electrode of the second PMOS 554, the 3rd NMOS tube 557
With the gate interconnection of the 5th NMOS tube 559,
The drain electrode of described second NMOS tube 556 is connected with the source electrode of the first NMOS tube 555, described 4th NMOS tube 558
Drain electrode is connected with the source electrode of the 3rd NMOS tube 557, and described second NMOS tube 556 is followed by with the source electrode interconnection of the 4th NMOS tube 558
Ground,
The drain electrode of described 6th NMOS tube 560 is connected with the source of the 5th NMOS tube 559, the leakage of described 8th NMOS tube 562
It is connected with the source of the 7th NMOS tube 561, ground connection after the source interconnection of described 6th NMOS tube 560 and the 8th NMOS tube 562,
The drain electrode of described first PMOS 553 is as outputting drive voltage anode, and the leakage of the second PMOS 554 is as output
Driving voltage negative terminal, for electrically connecting with the micromechanical resonator of silicon micromachine resonant accelerometer 301；
The grid of described first NMOS tube 555 and the 7th NMOS tube 561 is as the anode of actuating speed signal, the 3rd NMOS
The negative terminal of the raster data model rate signal of pipe 557 and the 5th NMOS tube 559, is connected with difference type pre-amplification circuit 402,
The grid of described second NMOS tube 556 and the 6th NMOS tube 560 is as the anode of amplitude control signal, the 4th NMOS
The grid of pipe 558 and the 8th NMOS tube 562, as the negative terminal of amplitude control signal, is connected with automatic gain control circuit 410.
Fig. 8 is subtraction circuit and the schematic diagram of proportional integral filter circuit.The input stage 537,538 of subtraction circuit is by amplitude
And reference input voltage is converted into electric current input.Resistance 534,535 is utilized to instead of tail current in voltage/current conversion circuit
Source transistor, eliminates this partial circuit and dodges the interference of frequency noise, add amplifier simultaneously before input transistors 532,533
531 and feedback resistive network 527-530, reduce the impact that voltage/current conversion circuit gain changes with 532,533 mutual conductances,
Therefore this voltage/current conversion circuit eliminates the interference of Self-bias Current sudden strain of a muscle frequency noise from root.Common mode feedback circuit
539 provide the common mode electrical level of necessity for subtraction circuit, and error current signal is demodulated to low frequency and amasss through ratio by chopper 540
Filter-divider 541 produces amplitude control voltage.
Fig. 9 is the schematic diagram of rectification circuit.Resistance 542,543 extract actuating speed common mode electrical level as chopper 544,
The reference input of 545.546,547 is alternative voltage follower, and the input signal of the bigger input of signal is only followed in its output,
Therefore rectification function can be realized.Transistor in 546,547 is all biased in sub-threshold region simultaneously, and therefore this rectification circuit has low
The advantage of power consumption.Owing to have employed differential configuration, this rectification circuit also can preferably suppress temperature to its amplitude extraction accuracy
Impact.
Figure 10 is the schematic diagram of chopper.Complementary type MOS switch is constituted by chopper two, and chopping control signal is by controlling
The turn-on sequence of switch arrays realizes the frequency modulation(PFM) to input signal.The every pair of MOS switch by NMOS549,551 and PMOS550,
552 compositions, complementary type structure advantageously reduces the conducting resistance of MOS switch, improves its dynamic characteristic.
As shown in figure 11, described first frequency measuring circuit 304 includes comparator 599, phaselocked loop 600,10 digit counter
601, edge triggered flip flop 602, d type flip flop the 603, first depositor the 604, second depositor 605 and subtractor 606,
The outfan of the input termination comparator 599 of described phaselocked loop 600, its outfan connects the number of edge triggered flip flop 602
According to input, the control number termination elapsed time clock of described edge triggered flip flop 602, its outfan connects d type flip flop 603, first respectively
Depositor 604 and the control end of the second depositor 605,
The data input pin of described d type flip flop 603 is connected with elapsed time clock by enumerator 601, and it exports termination first
The data input pin of depositor 604, the data input pin of described second depositor 605 connects the data output of the first depositor 604
End, its data output end connects the first data input pin of subtractor 606, and the second data input pin of described subtractor 606 connects the
The data output end of one depositor 604,
The input termination oscillating circuit 302 of described comparator 599, the output termination SPI digital interface 306 of subtractor 606.
Enumerator 601 is continual to be counted counting clock, and input signal is through comparator 599 shaping and phaselocked loop
Controlled the Enable Pin of d type flip flop 603 after 600 frequencys multiplication by edge triggered flip flop 602, determine that the renewal rate of depositor 1,2 is every
Individual input signal cycle updates once.Subtractor 606 calculates the count value in the current input signal cycle and previous signal week
The difference of phase count value, utilizes the frequency information of this difference reflected input signal can realize the single order to enumerator quantizing noise whole
Shape, is conducive to improving the precision of frequency measurement circuit.
It is the circuit diagram of comparator as shown in figure 12.Input voltage is believed by the input transistors 593,594 of comparator circuit
Number it is converted into electric current, after cross-coupled pair pipe 595,596, realizes the shaping to input signal, after two-stage not gate 592
Realize square wave output.597, the ysteresis effect size of 598 decision comparators, 591 is that comparator provides necessary biased electrical simultaneously
Stream.
It is the circuit diagram of phaselocked loop as shown in figure 13.This circuit by phase discriminator, electric charge pump, wave filter, buffer, voltage-controlled shake
Swing device and frequency divider composition.Phase discriminator is made up of d type flip flop 563,564 and reset circuit 565, and phaselocked loop is inputted by this circuit
Signal is converted into, with the phase contrast of feedback signal, the pulse signal that pulse width is the most proportional, and this pulse signal controls electric charge pump
Charging interval of 566,567 pairs of wave filter 568 of current source, and then phase contrast is converted into voltage signal.Wave filter output
Voltage signal controls the frequency of oscillation of voltage controlled oscillator 571 after buffer 569, and level shifting circuit 570 is by VCO
The output of device adjusts to supply voltage and feeds back to phase discriminator through frequency divider 572 and form the PGC demodulation to input signal and frequency multiplication
Function.
As shown in figure 14, voltage-controlled oscillator circuit is made up of, by the electricity of controlled-not gate the not gate 573-577 of five series connection
Source voltage swing realizes the regulation to its frequency of oscillation.
As shown in figure 15, the principle of charge pump circuit is similar with MOS switch, transistor 578-580 be nmos switch 581 and
PMOS switch 582 provides bias current, and the output of phase discriminator controls the make-and-break time of 581 and 582, and will by wave filter 583
The output phase error of phase discriminator is converted into voltage signal.
Figure 16 is the circuit diagram of level translator in Figure 13.The output of voltage controlled oscillator is adjusted by level shifting circuit (570)
Whole form the PGC demodulation to input signal and double frequency function to feeding back to phase discriminator through frequency divider (572) after supply voltage.Pressure
The output of controlled oscillator controls input transistors by being operated in the not gate (584,590) of low supply voltage in level shifting circuit
585, the break-make of 589, by the positive feedback effect of cross-coupled pair 586,587 and the not gate (588) that is operated in high power supply voltage
The input signal of low supply voltage is converted to high power supply voltage, meets the logic level requirement of frequency divider (572).
Claims (7)
1. the integrated measure and control device of silicon micromachine resonant accelerometer, it is characterised in that:
Survey including the first oscillating circuit (302), the second oscillating circuit (303), first frequency measuring circuit (304), second frequency
Amount circuit (305) and SPI digital interface (306)；
The input of described first frequency measuring circuit (304) and the outfan of the first oscillating circuit (302) are connected, its outfan
Being connected with the first input end of SPI digital interface (306), the input of described first oscillating circuit (302) is used for and silicon microcomputer
One micromechanical resonator electrical connection of tool resonance type accelerometer (301),
The input of described second frequency measuring circuit (305) and the outfan of the second oscillating circuit (303) are connected, its outfan
Being connected with the second input of SPI digital interface (306), the input of described second oscillating circuit (303) is used for and silicon microcomputer
Another micromechanical resonator electrical connection of tool resonance type accelerometer (301),
The outfan of described SPI digital interface (306) is for electrically connecting with flush bonding processor (307)；
Described first oscillating circuit (302), the second oscillating circuit (303), for control by the way of electrostatic drive, capacitance detecting
Micromechanical resonance beam processed keeps continuous vibration in its resonant frequency according to the displacement set,
Described first frequency measuring circuit (304), second frequency measuring circuit (305), for measuring the mould of oscillating circuit output
Intend the frequency of oscillator signal and export with digital signal；
Described SPI digital interface (306), for flush bonding processor (307) transmitting two paths frequency measurement digital signal.
Measure and control device the most according to claim 1, it is characterised in that: described first oscillating circuit (302), the second vibration electricity
Road (303), first frequency measuring circuit (304), second frequency measuring circuit (305) and SPI digital interface (306) are integrated in list
On sheet cmos circuit.
Measure and control device the most according to claim 1, it is characterised in that:
Described first oscillating circuit (302) include difference type pre-amplification circuit (402), automatic gain control circuit (410), can
Variable-gain amplifier (407) and difference turn single-end circuit (408)；
Micro-for silicon micromachine resonant accelerometer (301) of the input of described difference type pre-amplification circuit (402)
Mechanical resonator electrically connects, and its first outfan is connected with the signal input part of variable gain amplifier (407), its second output
End turns single-end circuit (408) with difference and is connected, and the input of described automatic gain control circuit (410) is also put with before difference type
Second outfan of big circuit (402) is connected, and its outfan is connected with the control input of variable gain amplifier (407), institute
State the signal output part of variable gain amplifier (407) for humorous with the micromechanics of silicon micromachine resonant accelerometer (301)
The device that shakes electrically connects.
Measure and control device the most according to claim 3, it is characterised in that:
Described automatic gain control circuit (410) includes rectification circuit (403), subtraction circuit (404), proportional integral filter circuit
(406), the first chopper circuit (405), the second chopper circuit (411), the 3rd chopper circuit (412)；
The input of described rectification circuit (403) is by the second chopper circuit (411) and difference type pre-amplification circuit (402)
Second outfan is connected, and its outfan is connected with the first input end of subtraction circuit (404), the of described subtraction circuit (404)
Two inputs connect reference voltage and common-mode voltage by the 3rd chopper circuit (412), and its outfan passes through the first chopper circuit
(405) input with proportional integral filter circuit (406) is connected, the input of described proportional integral filter circuit (406) with
The control input of variable gain amplifier (407) is connected.
Measure and control device the most according to claim 3, it is characterised in that:
Described difference type pre-amplification circuit (402) includes the first differential operational amplifier (508), the second differential operational amplifier
(516), the first feedback capacity (507), the second feedback capacity (509), first be partially worth resistance (505), second be partially worth resistance
(506), the first feedback resistance (513), the second feedback resistance (514), the first compensation electric capacity (512) compensate electric capacity with second
(515)；
Described first feedback capacity (507) be partially worth with first resistance (505) in parallel after be connected to the first differential operational amplifier
(508) between positive input terminal and negative output terminal, described second feedback capacity (509) be partially worth with second resistance (506) in parallel after
It is connected between negative input end and the positive output end of the first differential operational amplifier (508),
It is connected to the second differential operational amplifier after described first feedback resistance (513) is in parallel with the first compensation electric capacity (512)
(516) between positive input terminal and negative output terminal, after described second feedback resistance (514) is in parallel with the second compensation electric capacity (515)
It is connected between negative input end and the positive output end of the second differential operational amplifier (516),
The positive input terminal of described second differential operational amplifier (516) and the negative output terminal of the first differential operational amplifier (508)
Between be provided with the first preposition electric capacity (510), the negative input end of the second differential operational amplifier (516) and the first calculus of differences amplify
The second preposition electric capacity (511) it is provided with between the positive output end of device (508),
Positive input termination silicon micromachine resonant accelerometer (301) micromechanics of described first differential operational amplifier (508)
One detection comb electric capacity (501) of resonator, its negative input terminates another detection comb electric capacity (502), described first poor
Dividing the positive input terminal of operational amplifier (508) also by the first parasitic capacitance (503) ground connection, its negative input end is parasitic by second
Electric capacity (504) ground connection.
Measure and control device the most according to claim 3, it is characterised in that:
Described variable gain amplifier (407) include 2 PMOS (553,554), 8 NMOS tube (555,556,557,558,
559,560,561,562),
The source electrode of described 2 PMOS (553,554) interconnects and is followed by power supply (VDD), its gate interconnection,
The drain interconnection of described first NMOS tube (555) and the 3rd NMOS tube (557) is followed by the drain electrode of the first PMOS (553),
The drain interconnection of described 5th NMOS tube (559) and the 7th NMOS tube (561) is followed by the drain electrode of the second PMOS (554), and the 3rd
NMOS tube (557) and the gate interconnection of the 5th NMOS tube (559),
The drain electrode of described second NMOS tube (556) is connected with the source electrode of the first NMOS tube (555), described 4th NMOS tube (558)
Drain electrode be connected with the source electrode of the 3rd NMOS tube (557), the source electrode of described second NMOS tube (556) and the 4th NMOS tube (558)
Ground connection after interconnection,
The described drain electrode of the 6th NMOS tube (560) is connected with the source electrode of the 5th NMOS tube (559), described 8th NMOS tube (562)
Drain electrode be connected with the source electrode of the 7th NMOS tube (561), the source electrode of described 6th NMOS tube (560) and the 8th NMOS tube (562)
Ground connection after interconnection,
The drain electrode of described first PMOS (553) is as outputting drive voltage anode, and the drain electrode of the second PMOS (554) is as defeated
Go out driving voltage negative terminal, for electrically connecting with the micromechanical resonator of silicon micromachine resonant accelerometer (301)；
The grid of described first NMOS tube (555) and the 7th NMOS tube (561) is as the anode of actuating speed signal, the 3rd NMOS
The negative terminal of the raster data model rate signal of pipe (557) and the 5th NMOS tube (559), with difference type pre-amplification circuit (402) phase
Even,
The grid of described second NMOS tube (556) and the 6th NMOS tube (560) is as the anode of amplitude control signal, the 4th NMOS
The grid of pipe (558) and the 8th NMOS tube (562) is as the negative terminal of amplitude control signal, with automatic gain control circuit (410)
It is connected.
Measure and control device the most according to claim 1, it is characterised in that:
Described first frequency measuring circuit (304) includes comparator (599), phaselocked loop (600), 10 digit counters (601), edge
Trigger (602), d type flip flop (603), the first depositor (604), the second depositor (605) and subtractor (606),
The outfan of input termination comparator (599) of described phaselocked loop (600), its outfan connects edge triggered flip flop (602)
Data input pin, the control number termination elapsed time clock of described edge triggered flip flop (602), its outfan connects d type flip flop respectively
(603), the first depositor (604) and the control end of the second depositor (605),
The data input pin of described d type flip flop (603) is connected with elapsed time clock by enumerator (601), and it exports termination first
The data input pin of depositor (604), the data input pin of described second depositor (605) connects the number of the first depositor (604)
According to outfan, its data output end connects the first data input pin of subtractor (606), the second data of described subtractor (606)
The data output end of input termination the first depositor (604),
Input termination oscillating circuit (302) of described comparator (599), the output termination SPI digital interface of subtractor (606)
(306)。
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| CN201610837700.5A CN106248995A (en) | 2016-09-21 | 2016-09-21 | The integrated measure and control device of silicon micromachine resonant accelerometer |
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| CN113054910A (en) * | 2021-03-11 | 2021-06-29 | 四川中微芯成科技有限公司 | Capacitance oscillation circuit, capacitance detection circuit and detection method |
| CN113054910B (en) * | 2021-03-11 | 2023-03-21 | 四川中微芯成科技有限公司 | Capacitance oscillation circuit, capacitance detection circuit and detection method |
| CN113624993A (en) * | 2021-08-04 | 2021-11-09 | 西安微电子技术研究所 | Acceleration signal conversion method, servo circuit and quartz flexible accelerometer |
| CN113777349A (en) * | 2021-08-20 | 2021-12-10 | 中国航空工业集团公司西安飞行自动控制研究所 | Pendulum accelerometer closed-loop control system and method based on speed feedback principle |
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