CN106225962A - The capacitive pressure transducer that galvanic electricity pole plate is gold-plated - Google Patents
The capacitive pressure transducer that galvanic electricity pole plate is gold-plated Download PDFInfo
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- CN106225962A CN106225962A CN201610896745.XA CN201610896745A CN106225962A CN 106225962 A CN106225962 A CN 106225962A CN 201610896745 A CN201610896745 A CN 201610896745A CN 106225962 A CN106225962 A CN 106225962A
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- Prior art keywords
- gold
- seal ring
- plated
- electrode
- graded seal
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
Abstract
The capacitive pressure transducer that a kind of galvanic electricity pole plate is gold-plated, solve the parasitic capacitance that existing capacitance pressure transducer exists, edge effect affects the output of sensor, moving electrode diffusibility seepage, use the problems such as trouble, including matching can, the fixed electrode fitted together with matching can, tubulose extraction electrode, moving electrode and impulse mouth, it is characterized in that: in moving electrode utilizes, outer graded seal ring clamping compression is welded and fixed, at moving electrode and interior, outer graded seal ring surface arranges the thermal diffusion layer of gold under Gold plated Layer and fine vacuum, together with the matching can of fixed electrode and interior graded seal ring are welded and fixed by blade shape weld bond, after the impulse mouth that the thermal diffusion layer of the Gold plated Layer on outer graded seal ring and gold and resistant material make utilizes polyfluoroprene ring 9 to seal, it is welded and fixed together by blade shape weld bond.Its reasonable in design, preparation technology is simple, significantly reduces manufacturing cost, further increases corrosion resistance, and temperature influence is little, good stability.
Description
Technical field
The present invention relates to a kind of capacitive pressure transducer, the capacitive pressure transducer that a kind of galvanic electricity pole plate is gold-plated,
It is mainly used in measuring little micro-pressure.
Background technology
In pressure measxurement, the least micro-pressure, capacitive pressure transducer is advantage.The most representational is the U.S.
6 Serial capacitance pressure transducers of MKS company.As a example by 626 type capacitive pressure transducers, range is absolute pressure 0.1Torr
To 1000Torr, all make of the corrosion resistant nickel-base alloy of invar property (Inconel X-750) with measured medium contact portion.
As shown in Figure 3, Figure 4.12 is moving electrode, and the corrosion-resistant nickel-base alloy of invar property makes；13 fixed electrode insulators, Al2O3Ceramic
Make；Electrode in 14；15 conducting films；16 insulative thick film；17 shell columns；18 wedge tail retainer ring；19 stage clips；Above-mentioned 17,18,19
It is all that Inconel X-750 makes.20 getteies；21 outer extraction electrodes；22 contain cobalt glass；23 insulator shells；24 casing covers
(Inconel x-750)；25 leads；The weld nest (Inconel X-750) of 26 band impulse mouths.
Owing to the thin film about galvanic electricity extremely 20 μm of 626 type capacitive pressure transducers makes, although the diffusion system of metal
Number is the least, but the thinnest, and year, leak rate was still more than 20%.Moreover, the coefficient of expansion of Inconel X-750 alloy is too big, looks for not
To the solid insulating material matched, it is achieved matched seal.Therefore fixed electrode uses assembled.So, following asking has been occurred as soon as
Topic: 1, absorption surface is the biggest；2, internal structure is complicated, there is air gap and air collecting chamber；3, possible uncertain edge effect；4、
There is thin wire between interior electrode and outer extraction electrode, there is the uncertain electric capacity of spatial distribution；5, there is parasitism in outer extraction electrode
Electric capacity；6, ceramics insulator not only absorption surface is much larger than geometric jacquard patterning unit surface, and internal also contains a large amount of gas.Therefore, although
When making, very condition of high vacuum degree can be extracted between moving electrode and outer extraction electrode, be also provided with getter, but, gas
Desorption, diffusibility seepage, cause vacuum and gradually degenerate, i.e. air pressure raises；Due to spatial distribution, parasitic capacitance, edge effect
The existence answered, can have influence on the output of sensor.MKS company is just provided with zero potential device with full on the circuit of sensor
Range potentiometer.Therefore, use will be 10 every time-5The fine vacuum zeroising of Pa, if desired may full scale be adjusted.Trouble is not
Saying, some users do not have such condition.
Summary of the invention
It is an object of the invention to provide the capacitive pressure transducer that a kind of galvanic electricity pole plate is gold-plated, solve existing condenser type pressure
The parasitic capacitance of force transducer existence, edge effect affect the output of sensor, moving electrode diffusibility seepage, use trouble etc. to ask
Topic, its reasonable in design, preparation technology is simple, significantly reduces manufacturing cost, further increases corrosion resistance, by temperature
Affect little, good stability.
The technical solution adopted in the present invention is: the gold-plated capacitive pressure transducer of this galvanic electricity pole plate includes matching can,
Fixed electrode, tubulose extraction electrode, moving electrode and the impulse mouth fitted together with matching can, it is characterised in that: described galvanic electricity
Pole utilizes interior graded seal ring, outer graded seal ring clamping compression to be welded and fixed, at moving electrode and inside and outside graded seal ring surface
The thermal diffusion layer of gold is set under Gold plated Layer and fine vacuum, sapphire insulator that fixed electrode is sealed by brazing layer, coupling
Shell, tubulose extraction electrode form, together with matching can and interior graded seal ring are welded and fixed by blade shape weld bond, and outer mistake
After the impulse mouth of the thermal diffusion layer and resistant material making that cross the Gold plated Layer in welding ring and gold utilizes polyfluoroprene ring 9 to seal, logical
Cross blade shape weld bond to be welded and fixed together.
It is both provided with blade shape weld bond and interior collar extension on described matching can and interior graded seal ring.
The thermal diffusion layer of the Gold plated Layer on described outer graded seal ring and gold uses with impulse mouth threadeds or directly welds
Connect fixing.
Under surface configuration Gold plated Layer and fine vacuum, described moving electrode and the inside and outside graded seal ring of the thermal diffusion layer of gold are to adopt
Make of following processing step: first select the invar property thin film of " radially rolloff ", of the most disassembled fixture swelling, card
The diameter at tool center, more than the external diameter of inside and outside graded seal ring, is welded and fixed galvanic electricity by inside and outside graded seal ring clamping compression
Pole, removes fixture turning thin film and is more than inside and outside graded seal ring outer radius portion, close the gas skirt at lathe place, pump in cover
Air, is full of noble gas in cover, moving electrode and inside and outside transition rings is welded into assembly, strictly cleans assembly, dry
After Gan, electroplating gold-plated, layer gold thickness is maintained at 0.1 μm, then in fine vacuum, less than 700 DEG C heating not less than 30 minutes, carries out gold
Thermal diffusion.
The present invention has the advantage that and good effect is: owing to the present invention uses the gold-plated and golden thermal diffusion side of moving electrode
Method, it is achieved moving electrode and inside and outside graded seal ring surface arrange the thermal diffusion layer of gold under Gold plated Layer and fine vacuum, improve further
The corrosion resistance of moving electrode and inside and outside graded seal ring (if the materials such as HCl are to Inconel X-750, year corrosion thickness exist
About 0.5 μm, and gold is not corroded), so its reasonable in design, preparation technology is simple, effectively prevent noble gas,
Nitrogen generation chemical absorption (N2, Ar on gold occur chemical absorption).The more important thing is, it is also possible to by gold-plated, allow
The moving electrode that common constant modulus alloy makes, further increases corrosion resistance.It is demonstrated experimentally that by gold-plated, with 3J1,
The moving electrode system of constant modulus alloy making of 3J53, the corrosion resistance difference unlike Inconel X-750.But, sensor
Cost is low more than 15%, significantly reduces manufacturing cost, simplifies technique.Sensor moving electrode material is complete with fixed electrode material
Full coupling, temperature influence is little, good stability.Therefore, the present invention solves the parasitism that existing capacitance pressure transducer exists
Electric capacity, edge effect affect the output of sensor, moving electrode diffusibility seepage, use the problems such as trouble.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the invention will be further described.
Fig. 1 is one structural representation of the present invention；
Fig. 2 is I structure for amplifying schematic diagram of Fig. 1；
626 type capacitive pressure transducer structural representations of MKS company of the Tu3Shi U.S.；
Fig. 4 is II structure for amplifying schematic diagram of Fig. 3；
In figure sequence number explanation: 1 moving electrode, 2 conductive membrane layers, 3 insulating thin layers, 4 sapphire insulators, 5 tubulose extraction electrodes,
6 matching cans, 7 brazing layers, graded seal ring in 8,9 outer graded seal rings, 10 polyfluoroprene sealing rings, 11 impulse mouths, 12 moving electrodes,
13 fixed electrode insulators, electrode in 14,15 conducting films, 16 insulative thick film, 17 shell columns, 18 wedge tail retainer ring, 19 stage clips,
20 getteies, 21 outer extraction electrodes, 22 containing cobalt glass, 23 insulator shells, 24 casing covers, 25 leads, 26 band impulse mouths
Weld nest.
Detailed description of the invention
The concrete structure of the present invention is described in detail according to Fig. 1～4.The gold-plated capacitive pressure transducer of this galvanic electricity pole plate includes
Matching can 6, the fixed electrode fitted together with matching can 6, the sapphire insulator 4 on fixed electrode, tubulose extraction electrode
5, the part such as graded seal ring 8, outer graded seal ring 9, moving electrode 1 and impulse mouth 11.Wherein moving electrode 1 utilizes interior graded seal ring
8, outer graded seal ring 9 clamps compression and is welded and fixed.In moving electrode 1 and the surface configuration Gold plated Layer of inside and outside graded seal ring 8,9
With under fine vacuum gold thermal diffusion layer (not shown),
On interior graded seal ring 8 and matching can 6, it is both provided with blade shape weld bond, is provided with interior collar extension near blade shape weld bond.Mesh
Be to make welding current the least, buffering welding stress and thermal expansion stress.
Impulse mouth 11 can make of resistant material, the Gold plated Layer on outer graded seal ring 9 and gold thermal diffusion layer with
After the impulse mouth 11 that resistant material makes utilizes polyfluoroprene ring 9 contact to seal, it is welded and fixed together by blade shape weld bond.Draw
Pressure mouth 11 can directly be welded by cutting edge weld bond slight fever argon arc welding with the thermal diffusion layer of the Gold plated Layer on outer graded seal ring 9 and gold
Connect.(outer, interior) spiral shell can also be used on impulse mouth 11 by the thermal diffusion layer of the Gold plated Layer on graded seal ring 9 outside and gold
The modes such as stricture of vagina connect.Fixed electrode is made up of sapphire insulator 4, matching can 6, tubulose extraction electrode 5, and matching can 6 is with interior
Graded seal ring 8 is welded and fixed together by blade shape weld bond.
Fixed electrode be sealed by brazing layer 7 sapphire insulator 4, matching can 6, tubulose extraction electrode 5 groups
Become.I.e. using the material of matched, utilize such as the brazing materials such as yellow gold, under a high vacuum, about 700 DEG C (in perseverance
Below elastic alloy yield point), allow cored solder melt, form brazing layer 7, by matching can 6, tubulose extraction electrode 5, sapphire
Insulator 4 matched seal is integrated.Due to after moving electrode 1 pressurized in parabola deformation, therefore, fixed electrode is also machined to spill
Parabola.On the concave panel of sapphire insulator 4, mask, splash-proofing sputtering metal conductive membrane layer 2 under fine vacuum, draw with tubulose
Electrode 5 is connected.Mask sputtering covers the insulating thin layer 3 of conductive membrane layer 2 the most again, is made for fixed electrode combination
Body.Sapphire insulator 4, not gassiness, do not exit.The adsorption plane of gas is basically conductive membrane layer 2 and insulating thin layer
3.This double-layer films is to sputter acquisition under a high vacuum, and density is high, adsorbs little, sapphire insulator 4 and matching can 6, tubulose
Extraction electrode 5, seals by brazing layer 7, is suitable for wide temperature region, stable, the general platinotron of tubulose extraction electrode 5 or with cored solder infiltration
Alloy material make, good airproof performance, it is often more important that, for evacuation, make electric capacity absolute pressure transducer.Conveniently, make
Valency is low, seal is simple；Can also be connected with reference to pressure isolation bellows with air with this tubulose extraction electrode 5, make electric capacity gauge pressure
Sensor；The interior collar extension that interior graded seal ring 8 is provided with, in addition to buffering stress, more than or equal to 0.5mm, less than between 0.8mm
Gap, it is simple to evacuation.
The simple in construction of the present invention, by moving electrode 1 surface gold-plating and the thermal diffusion of gold, it is achieved that: moving electrode increasing reality,
Leak stopping；Effectively reduce leak rate；Realize avoiding the chemisorbed of gas；Achieve the corrosion resistant of non-corrosion-resistant constant modulus alloy
Erosion；Achieve high efficiency, low cost.The capacitive pressure transducer with gold-plated moving electrode made, for a long time without zeroising.
Gold-plated moving electrode 1 is to make of invar property thin film, and concrete material can be 3J1,3J53, Inconel X-750 etc.
Constant modulus alloy.The moving electrode 1 of thermal diffusion layer golden under surface configuration Gold plated Layer and fine vacuum and inside and outside graded seal ring 8,9
It is to use following processing step to make: first select the invar property thin film of " radially rolloff ", swollen with the most disassembled fixture
Tightly.Sufficiently large diameter is left at fixture center (two sides), i.e. more than the external diameter of inside and outside graded seal ring.With hydraulic main shaft and
On the hydraulic lathe of hydraulic pressure footstock, compress be welded and fixed the thin of moving electrode 1 with interior graded seal ring 8, the clamping of outer graded seal ring 9
Film, removes fixture.With lathe tool turning thin film more than graded seal ring outer radius portion.Lathe now is placed in gas skirt.Close
Closed set gas hood, pumps air in cover, filling with inert gas in cover.Take out and fill 1～2 circulation, it is therefore an objective to allow in cover, particularly transition
Noble gas it is filled with inside and outside welding ring.Then, moving electrode 1 and inside and outside transition rings 8,9 are welded into assembly.Assembly is carried out
After strict cleaning, drying, electroplate gold-plated.Layer gold thickness is maintained at about 0.1 μm preferably.Again in fine vacuum, less than 700 DEG C (in perseverance
Below the yield temperature of elastic alloy), heating, not less than 30 minutes, carries out the thermal diffusion of gold.Purpose, allows gold atom at invar property
Alloy surface has the diffusion (not can exceed that 0.01 μm) of certain depth, increases real, leak stopping.Actual measurement, the Inconel X-750 of 5 μ m-thick,
After gold-plated thermal diffusion, leak rate is better than the thin film of equivalent material 50 μ m-thick.
Claims (4)
1. the capacitive pressure transducer that galvanic electricity pole plate is gold-plated, including matching can, with determining that matching can fits together
Electrode, tubulose extraction electrode, moving electrode and impulse mouth, it is characterised in that: described moving electrode utilizes interior graded seal ring, outer transition
Welding ring clamping compression is welded and fixed, and arranges gold under Gold plated Layer and fine vacuum at moving electrode and inside and outside graded seal ring surface
Thermal diffusion layer, sapphire insulator that fixed electrode is sealed by brazing layer, matching can, tubulose extraction electrode form,
Join together with shell and interior graded seal ring be welded and fixed by blade shape weld bond, the Gold plated Layer on outer graded seal ring and gold
After the impulse mouth that thermal diffusion layer and resistant material make utilizes polyfluoroprene ring to seal, it is weldingly fixed on one by blade shape weld bond
Rise.
The capacitive pressure transducer that galvanic electricity pole plate the most according to claim 1 is gold-plated, it is characterised in that: described matching can
Be both provided with blade shape weld bond and interior collar extension on interior graded seal ring.
The capacitive pressure transducer that galvanic electricity pole plate the most according to claim 1 is gold-plated, it is characterised in that: described outer transition is welded
The thermal diffusion layer of the Gold plated Layer on T-Ring and gold uses with impulse mouth threadeds or is directly welded and fixed.
The capacitive pressure transducer that galvanic electricity pole plate the most according to claim 1 is gold-plated, it is characterised in that: surface configuration is gold-plated
Under layer and fine vacuum, described moving electrode and the inside and outside graded seal ring of the thermal diffusion layer of gold are to use following processing step to make
: first selecting the invar property thin film of " radially rolloff ", with the most disassembled fixture swelling, the diameter at fixture center is more than
The external diameter of inside and outside graded seal ring, is welded and fixed moving electrode by inside and outside graded seal ring clamping compression, removes fixture turning thin
Film is more than inside and outside graded seal ring outer radius portion, closes the gas skirt at lathe place, pumps air in cover, is full of lazy in cover
Property gas, moving electrode and inside and outside transition rings are welded into assembly, after assembly is strictly cleaned, drying, electroplate gold-plated, gold
Thickness is maintained at 0.1 μm, then in fine vacuum, less than 700 DEG C heating not less than 30 minutes, carries out the thermal diffusion of gold.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610896745.XA CN106225962A (en) | 2016-10-14 | 2016-10-14 | The capacitive pressure transducer that galvanic electricity pole plate is gold-plated |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610896745.XA CN106225962A (en) | 2016-10-14 | 2016-10-14 | The capacitive pressure transducer that galvanic electricity pole plate is gold-plated |
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| CN106225962A true CN106225962A (en) | 2016-12-14 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106908190A (en) * | 2017-02-15 | 2017-06-30 | 襄阳东驰汽车部件有限公司 | A kind of electric process for sealing through walls of highly reliable pressure sensor divider wall air-tightness |
| WO2018122698A1 (en) * | 2016-12-28 | 2018-07-05 | Tubitak | High accuracy pressure transducer with improved temperature stability |
| CN109115392A (en) * | 2018-10-18 | 2019-01-01 | 沈阳市传感技术研究所 | Using the electrode floating type capacitive pressure transducer of assembled fixed electrode |
| TWI778034B (en) * | 2017-03-29 | 2022-09-21 | 日商堀場Ｓｔｅｃ股份有限公司 | Pressure sensor |
| CN116337286A (en) * | 2023-03-07 | 2023-06-27 | 上海洛丁森工业自动化设备有限公司 | Sensor bellows and metal capacitive pressure sensor |
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| CN105910751A (en) * | 2016-06-13 | 2016-08-31 | 沈阳市传感技术研究所 | Parallel-plate dry-type capacitive pressure sensor |
| CN206161205U (en) * | 2016-10-14 | 2017-05-10 | 沈阳市传感技术研究所 | Capacitive pressure sensor of dynamic electricity polar plate gilding |
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| CN1458505A (en) * | 2003-05-16 | 2003-11-26 | 胡耿 | Capacitive force sensing sensor with tiny interpolar gap and its producing method |
| US20090218643A1 (en) * | 2005-11-01 | 2009-09-03 | Hitach, Ltd. | Semiconductor Pressure Sensor |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018122698A1 (en) * | 2016-12-28 | 2018-07-05 | Tubitak | High accuracy pressure transducer with improved temperature stability |
| US10996124B2 (en) | 2016-12-28 | 2021-05-04 | Tubitak | High accuracy pressure transducer with improved temperature stability |
| CN106908190A (en) * | 2017-02-15 | 2017-06-30 | 襄阳东驰汽车部件有限公司 | A kind of electric process for sealing through walls of highly reliable pressure sensor divider wall air-tightness |
| CN106908190B (en) * | 2017-02-15 | 2019-05-03 | 襄阳东驰汽车部件有限公司 | A kind of electrical method for sealing through walls of highly reliable pressure sensor divider wall air-tightness |
| TWI778034B (en) * | 2017-03-29 | 2022-09-21 | 日商堀場Ｓｔｅｃ股份有限公司 | Pressure sensor |
| CN109115392A (en) * | 2018-10-18 | 2019-01-01 | 沈阳市传感技术研究所 | Using the electrode floating type capacitive pressure transducer of assembled fixed electrode |
| CN109115392B (en) * | 2018-10-18 | 2023-11-10 | 沈阳市传感技术研究所 | Electrode suspension type capacitance pressure sensor adopting assembled fixed electrode |
| CN116337286A (en) * | 2023-03-07 | 2023-06-27 | 上海洛丁森工业自动化设备有限公司 | Sensor bellows and metal capacitive pressure sensor |
| CN116337286B (en) * | 2023-03-07 | 2024-04-02 | 上海洛丁森工业自动化设备有限公司 | Sensor bellows and metal capacitive pressure sensor |
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