CN106206364A - Water-proof plate - Google Patents
Water-proof plate Download PDFInfo
- Publication number
- CN106206364A CN106206364A CN201610312332.2A CN201610312332A CN106206364A CN 106206364 A CN106206364 A CN 106206364A CN 201610312332 A CN201610312332 A CN 201610312332A CN 106206364 A CN106206364 A CN 106206364A
- Authority
- CN
- China
- Prior art keywords
- water
- proof plate
- flashing
- framework
- outer peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M1/00—Frames or casings of engines, machines or apparatus; Frames serving as machinery beds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
Abstract
The present invention provides a kind of water-proof plate, and it can simplify the structure of water-proof plate, both guarantee the performance as water-proof plate, and be easily achieved again the carrying of this water-proof plate, setting.The water-proof plate of the present patent application is disposed in the lower surface of the device arranged on the ground, accepts spilling liquid from this device, consists of and at least include: flashing, and it is laid on ground, and has flexibility；Multiple frameworks, they possess respectively to the rigidity outer peripheral sidewall that the periphery bending of this flashing erects supported；And fixed component, the upper edge of this framework is fixed by it with the top of this outer peripheral sidewall erected.
Description
Technical field
The present invention relates to the water-proof plate using the bottom of the device of processing water to arrange when machined object is processed.
Background technology
In semiconductor device manufacturing process, arrange by according to clathrate on the surface of the semiconductor wafer in substantially circular plate shape
The segmentation preset lines of row and mark off multiple region, and in the region that this marks off, form the device of IC, LSI etc..
Further, the back side of the semiconductor wafer that will be formed with this device utilizes grinding attachment grinding for the thickness of regulation and sharp
With cutter sweep, semiconductor wafer is cut off along segmentation preset lines, thus segmentation is formed with the region of device to produce
Each semiconductor device.
Above-mentioned grinding attachment, cutter sweep the most all can add the processing using man-hour such as grinding water, cutting water etc.
Water, and by the supply of this processing water, recovery path management for will not leak to outside.
But, the most above-mentioned management, for supplying, reclaim the processing pipe arrangement of water, pipeline along with deteriorating year in year out
And it may happen that leak, and it is difficult to get rid of completely leaking to the outside of this processing unit (plant) when safeguarding, thus at this
The underface of processing unit (plant) arranges water-proof plate so that leak the most not in the case of the bottom of this processing unit (plant) leaks
Ground (for example, referring to patent documentation 1) can be arrived.
Prior art literature
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 11-277048
The water-proof plate used in above-mentioned processing unit (plant) is arranged between the device of heavier-weight and ground, and its needs are setting
Will not deform or produce the sufficient rigidity of slight crack when putting this device due to this weight and be difficult to generation and leak and cause
The character of scale etc., thus generally formed by the metal of rustless steel etc., its weight and size are for the carrying of operator
For be inconvenient.
Additionally, in the case of using existing water-proof plate, in order to it to be arranged at configured processing unit (plant) from rear
Underface, it is necessary to make this device rise overally by crane etc. so that water-proof plate slips into the work of lower space
Industry, thus become heavy duty work and the most loaded down with trivial details.And then, the size of various processing unit (plant)s is different from each other, if therefore
Make water-proof plate according to each shape, the size of each device, then cause having to make the end meeting processing unit (plant) one by one
The water-proof plate of face shape, thus for the viewpoint of manufacturing cost, efficiency is not fine.
Summary of the invention
The present invention is contemplated to solve the problems referred to above and complete, and its main technical task is, it is provided that a kind of waterproof
Dish, it can simplify the structure of water-proof plate, both guarantee the performance as water-proof plate, and be easily achieved again removing of this water-proof plate
Fortune, setting.
In order to solve above-mentioned main technical task, the present invention provides a kind of water-proof plate, and it is disposed in and arranges on the ground
The lower surface of device, accept spilling liquid from this device, this water-proof plate is configured at least include: flashing,
It is laid on ground, and has flexibility；Multiple frameworks, they possess respectively to by the periphery bending of this flashing
The outer peripheral sidewall erected carries out the rigidity supported；And fixed component, it is to the upper edge of this framework and erects
The top of this outer peripheral sidewall is fixed.
Additionally, the plurality of framework the most directly links, and by least appointing in described flashing and fixed component
The side that anticipates links.
And then, described framework is configured to include: be disposed in the floor portion of the upper surface of described flashing；And side of sidewall portion,
It extends along described outer peripheral sidewall, supports this outer peripheral sidewall.
The effect of invention
The water-proof plate of the present invention is configured as described above, and it is disposed in the lower surface of the device arranged on the ground, accepts
Spilling liquid from this device, this water-proof plate is configured at least include: flashing, and it is laid on ground, and has
Flexibility；Multiple frameworks, they possess respectively and carry out by the outer peripheral sidewall that the periphery bending of this flashing erects
The rigidity of supporting；And fixed component, the upper edge of this framework is carried out solid with the top of this outer peripheral sidewall erected by it
Fixed, therefore, it is possible to flashing, framework, fixed component are carried to arrange position respectively, and it is prone to carry out water-proof plate
Setting.
Especially, when the bottom being arranged at ground processing unit (plant) arranges the water-proof plate of the present invention, this dress of jack-up
The side put is to form space at device lower surface, and makes it spread at this space insertion flashing, and being positioned jack-up should
Device is also first put down in the side of the device on one side of flashing, hereafter surplus with by this flashing of the opposite side of jacking system
Remaining part divides the opposite side being flatly extended in this device, is located device another of another side in this flashing of jack-up
Side also makes device decline such that it is able at the region inner position processing unit (plant) surrounded by flashing.Further, prevent at this
Each limit positioning frame body of water sheet, and make flashing erect along framework, utilize fixed component to the top of framework and to erect
The top of outer peripheral sidewall of flashing be fixed, from overall without utilizing crane lifting device, it becomes possible to hold
Change places and water-proof plate is set.
Accompanying drawing explanation
Fig. 1 be the lower surface that represents and the water-proof plate constituted according to the present patent application is arranged at processing unit (plant) and ground it
Between the axonometric chart of state.
Fig. 2 is the shape before the assembling of each parts representing the 1st embodiment constituting water-proof plate based on the present patent application
The axonometric chart of state.
Fig. 3 is the flashing of the water-proof plate by pie graph 2 and framework is configured at the accompanying drawing arranging position.
Fig. 4 is to represent from the state shown in Fig. 3, erects the axonometric chart of the state in the outer peripheral sidewall portion of flashing.
Fig. 5 is to represent in the state shown in fig. 4, utilizes the shape that framework and flashing are integrally constituted by fixed component
The axonometric chart of state.
Fig. 6 is the shape before the assembling of each parts representing the 2nd embodiment constituting water-proof plate based on the present patent application
The axonometric chart of state.
Fig. 7 is to represent from the state shown in Fig. 6, utilizes the shape that framework and flashing are integrally constituted by fixed component
The axonometric chart of state.
Label declaration
1: topping machanism, 11: magazine, 12: carrying-in/carrying-out unit, 13: the 1 transport unit, 14: cleaning area
Territory, 15: turntable, 16: chuck table, 17: rotary cutter, 18: the 2 transport unit, 30,40: water-proof plate,
31: flashing, 32: framework, 33: fixed component, 41: corner parts (framework), 42: linear parts (frame
Body).
Detailed description of the invention
Hereinafter, 1st embodiment of the water-proof plate that according to the present invention constitute is explained in detail with reference to the accompanying drawings.
Fig. 1 illustrates topping machanism (cutter sweep) and is equipped in the bottom of this topping machanism according to present invention composition
The axonometric chart of one embodiment of water-proof plate.
It is supported on the semiconductor wafer W on framework F in the way of multiple-layer overlapped, is accommodated in magazine across keeping band T
In 11, and taken out of from magazine 11 by carrying-in/carrying-out unit 12, and adsorbed by the 1st transport unit 13, pass through
1st transport unit 13 carries out circumnutation and is positioned in chuck table 16.
When semiconductor wafer W attracting holding is in chuck table 16, move to rotary cutter 17, midway through school
Quasi-unit and after determining region to be cut, carry out and the position alignment of rotary cutter 17, and then in mobile chuck table
While 16, accept the effect of rotary cutter 17 and carry out cutting process.Repeat while staggered positions and direction
Perform this cutting process, until the cutting of all lines of cut of predetermined cutting terminates, with on semiconductor wafer
All devices are split.Now, on semiconductor wafer, cutting water is supplied to cool down this semiconductor wafer.
After the cutting process of semiconductor wafer W being terminated by above-mentioned cutting process, utilize the 2nd transport unit
Its semiconductor wafer W is transported to cleaning area 14 by 18, after being placed on turntable 15, makes this turntable
15 rotate, and are supplied rinse water in semiconductor wafer W to wash cutting swarf by rinse water feed unit.This
After, through the dried making semiconductor wafer W be dried and this semiconductor wafer W is accommodated in magazine 11 again
In, cutting process terminates.
As it has been described above, this topping machanism is supplied at matting, the cutting process etc. of segmentation device of semiconductor wafer
Substantial amounts of water, and then be recovered.Substantially this confession feedwater is supplied in topping machanism and reclaims, and is generally transporting
Outside will not be escaped in the case of Zhuaning.But, the fragment damage when feed pipe in topping machanism deteriorates or cuts
, there is the probability of this water leakage in pipe arrangement and when carrying out the maintenance of decomposition etc. of companion devices etc..
It is provided with water-proof plate 30, to utilize this topping machanism 1 between the lower surface and face, ground of this topping machanism 1
Lower surface accept and above-mentioned leak.Hereinafter, water-proof plate 30 based on the present patent application is described in detail.
As in figure 2 it is shown, water-proof plate 30 based on the present patent application is at least by flashing 31, framework 32 and fixed part
Part 33 is constituted, and this framework 32 is made up of floor portion 32a and side of sidewall portion 32b.This flashing can use such as EPDM
The commonly known sheets possessing flexibility such as (ethylene propylene diene rubber) sheet, polrvinyl chloride (polyvinyl chloride resin).It addition,
It is so-called " possessing flexibility " in the present patent application that refer to possess will not be to the outer peripheral sidewall erecting flashing described later
Part, or the bending etc. in corner brings the flexibility of degree of obstruction.
Described framework 32 is formed by aluminium, and by floor portion 32a extended on face, ground and side of sidewall portion 32b
And it being configured to cross section L-shaped, the end of floor portion 32a being positioned at corner becomes the shape having cut corner.Additionally,
Fixed component 33 be configured to the side of sidewall portion 32b to clamp framework 32 and flashing 31 as described later in the way of down
U-shaped, open lower side portion is configured to open to a certain degree, such as by fibre when clamping framework 32 and flashing 31
Dimension reinforced plastics is formed.
First, flashing 31 is laid on the ground at position that this processing unit (plant) is set.This flashing 31 is to consider
To the bottom shape X of processing unit (plant) of predetermined set be arranged at the width of framework 32 of each edge of this flashing 31
The each limit making the bottom shape X of this processing unit (plant) in the case of degree increases the size that given size obtains.
After the ground being provided with described processing unit (plant) has been laid described flashing 31, each from this flashing 31
The inner side of the height that the side of sidewall portion 32b being equivalent to framework 32 is acted in end, limit arranges this framework 32.Now, each framework 32
The most directly link, and be provided spaced apart (with reference to Fig. 3) in corner.
Below, as shown in Figure 4, the outer peripheral sidewall portion 31a of the outer peripheral sidewall of flashing 31 will be constituted along each framework
Each side of sidewall portion 32b of 32 erects.Now, the corner of flashing 31 is formed from the end interval in each framework
The corner formed is to the bending part 31b of inner side bending.Now, if in advance this bending part 31b being fixed as by clip
It is not switched on, is then prone to carry out the fixed operation of fixed component 33 below.
After the outer peripheral sidewall portion 31a of described flashing 31 is overlapping with the side of sidewall portion 32b of described framework 32, slightly
Expand the open side constituting the fixed component 33 cutting ventricumbent U-shaped, from top to clamp this outer peripheral sidewall portion
The mode of the top of the top of 31a and this side of sidewall portion 32b embeds, thus this flashing 31 is fixed on framework 32,
Water-proof plate 30 based on the present patent application completes (with reference to Fig. 5).
It addition, in above-mentioned 1st embodiment, as shown in Figure 4,5, each fixed component 33 is set as and described frame
The size that body 32 is close, bending part 31b is formed as prominent from the inside side, gap in the corner being positioned at this water-proof plate 30,
But it is not limited to this embodiment, and for example, it is possible to fixed component 33 is set as ormal weight shorter than framework 32, will be from
Bending part 31b bending on the inner face direction of the side of sidewall portion 32b of adjacent frame 32 that inside side, described corner is prominent,
And be threadably secured and be fixed on the screwed hole 32c that arranges in the end of this side of sidewall portion 32b, or by separately setting
Clip clamps together with this side of sidewall portion 32b, outer peripheral sidewall 31a, thus can promote stable further as water-proof plate
Property.
Below, according to Fig. 6,7, the 2nd embodiment of water-proof plate 40 based on the present invention is illustrated.Fig. 6,
Water-proof plate 40 described in 7 has flashing 31 in a same manner as in the first embodiment, fixed component 33 ', and with the 1st
The difference of embodiment is, framework is made up of corner parts 41, linear parts 42.It addition, in Fig. 6,
For convenience of description, the fixed component 33 ' corresponding with the limit of the left before accompanying drawing body and right is eliminated.
In 2nd embodiment, also water-proof plate 40 is set with the step substantially same with the 1st embodiment.First,
Flashing 31 is laid on the predetermined face, ground that processing unit (plant) is set, and in view of predetermined set add frock
The bottom shape put, will constitute the corner parts 41 of framework, each floor portion 41a of linear parts 42,42a configuration
Periphery on flashing.
By the outer peripheral sidewall portion 31a of the composition outer peripheral sidewall of described flashing 31 along side of sidewall portion 41b, 42b of framework
Erect, utilize fixed component 33 ' clamp this outer peripheral sidewall portion 31b and side of sidewall portion 41b, 42b of framework and fix.
Here, in the 1st embodiment, by the inwardly side's bending from framework gap each other of the corner of flashing 31,
In contrast, in the 2nd embodiment, corner does not have a gap, thus formed by the corner of flashing 31 to
The bending part 31c of foreign side's bending, and it is folded in the side of sidewall portion 41b side of these corner parts 41, and then screw thread is solid
Due in the screwed hole 41c that the corner of side of sidewall portion 41b is provided above.
In the 2nd embodiment, the corner of water-proof plate 40 is made up of corner parts 41, thus compared to the 1st
For embodiment, although the portability in unit status can somewhat reduce, but the stability as water-proof plate can be entered
One step improves.
It addition, in above-mentioned 1st, the 2nd embodiment, the periphery of flashing arranges framework, by flashing
Outer peripheral sidewall portion erects, and makes the inner side in this outer peripheral sidewall portion be overlapped in the outside of side of sidewall portion of framework and forms as one.
But, the water-proof plate of the present patent application is not limited to this, it is also possible to arrange framework in the outside in the outer peripheral sidewall portion of flashing,
And be overlapped in the inner side of the side of sidewall portion of framework and form as one.Additionally, the 1st, in the 2nd embodiment,
Water-proof plate as the bottom being arranged at topping machanism is illustrated, and the water-proof plate of the present patent application is not limited to application
Situation in this topping machanism, it is also possible to be arranged at grinding attachment and other existence is leaked possible all devices
Bottom.
Above, according to water-proof plate based on the present patent application, may be constructed and possess the following sufficient water-proof plate constituted,
There is the bottom of possible device of leaking time water-proof plate is set, it is possible to be easily carried to by the parts constituting this water-proof plate
Predetermined set position, and easily can assemble arranging position, even if also will not in the case of leaking
Make to leak and diffuse on face, ground.
Claims (3)
1. a water-proof plate, it is disposed in the lower surface of the device arranged on the ground, accepts the leakage from this device
Go out liquid,
This water-proof plate is configured at least include:
Flashing, it is laid on ground, and has flexibility；
Multiple frameworks, they possess respectively and support by the outer peripheral sidewall that the periphery bending of this flashing erects
Rigidity；And
Fixed component, the upper edge of this framework is fixed by it with the top of this outer peripheral sidewall erected.
Water-proof plate the most according to claim 1, wherein,
The plurality of framework the most directly links, and the most any by described flashing and described fixed component
One side links.
Water-proof plate the most according to claim 1 and 2, wherein,
Described framework is made up of such as lower part:
It is disposed in the floor portion of the upper surface of described flashing；And
Side of sidewall portion, it extends along described outer peripheral sidewall, supports this outer peripheral sidewall.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-109801 | 2015-05-29 | ||
| JP2015109801A JP6566729B2 (en) | 2015-05-29 | 2015-05-29 | Waterproof pan |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106206364A true CN106206364A (en) | 2016-12-07 |
| CN106206364B CN106206364B (en) | 2021-06-18 |
Family
ID=57453325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610312332.2A Active CN106206364B (en) | 2015-05-29 | 2016-05-12 | Waterproof plate |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6566729B2 (en) |
| KR (1) | KR102449023B1 (en) |
| CN (1) | CN106206364B (en) |
| TW (1) | TWI670144B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111497042A (en) * | 2019-01-30 | 2020-08-07 | 株式会社迪思科 | Processing device |
Citations (3)
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|---|---|---|---|---|
| JPS59199457A (en) * | 1983-04-11 | 1984-11-12 | 株式会社日立製作所 | Waterproof sheet for electronic apparatus |
| JPH08309089A (en) * | 1995-05-17 | 1996-11-26 | Mayumi Morimoto | Washing machine tray |
| CN202963011U (en) * | 2012-12-07 | 2013-06-05 | 李永诗 | Protective cover special for washing of air conditioner |
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| JPS4948214U (en) * | 1972-07-31 | 1974-04-26 | ||
| JPS517714U (en) * | 1974-07-03 | 1976-01-20 | ||
| JPS5431689Y2 (en) * | 1976-03-02 | 1979-10-03 | ||
| JPS54177136U (en) * | 1978-06-05 | 1979-12-14 | ||
| JPH0824790B2 (en) * | 1988-02-17 | 1996-03-13 | 松下電器産業株式会社 | Waterproof pan for washing machine |
| JP3051144B2 (en) | 1990-08-09 | 2000-06-12 | 松下電送システム株式会社 | Halftone image processing device |
| JP3165231B2 (en) * | 1992-05-19 | 2001-05-14 | 三井化学株式会社 | Floor sheet manufacturing method and floor construction method |
| JP3489924B2 (en) * | 1995-11-09 | 2004-01-26 | 三井化学株式会社 | Urethane mat and construction method using the same |
| JPH10289345A (en) * | 1997-04-11 | 1998-10-27 | Oki Electric Ind Co Ltd | Flooding preventing mechanism for automatic teller machine |
| JP3283453B2 (en) * | 1997-10-31 | 2002-05-20 | 筒中シート防水株式会社 | Partition structure for rooftop greening |
| JP3051144U (en) * | 1998-02-03 | 1998-08-11 | 羽立化工株式会社 | Folding nursing bathtub |
| JPH11277048A (en) * | 1998-03-31 | 1999-10-12 | Japan Organo Co Ltd | Water scattering preventing case and apparatus for water treatment apparatus and cabinet shaped water treatment apparatus |
| JP2000199265A (en) * | 1999-01-05 | 2000-07-18 | Daiwa Danchi Kk | Partition waterproof structure for garden and garden structure |
| JP2003129616A (en) * | 2001-07-31 | 2003-05-08 | Asahi Glass Polyurethane Material Co Ltd | Waterproofing construction method and polyurethane resin-made mat used in the same |
| JP2003180538A (en) * | 2001-12-13 | 2003-07-02 | Ginraku Kogyo Kk | Multipurpose simple water tank combining folding waterproof sheets and divided side walls made of such chemical resin as frp, polypropylene, or the like |
| JP3993219B1 (en) * | 2006-03-30 | 2007-10-17 | 株式会社 ナンワ | Simple bathtub sheet and simple bathtub using the sheet |
| JP2009185481A (en) * | 2008-02-05 | 2009-08-20 | Noritz Corp | Bathroom unit |
| JP2013162039A (en) * | 2012-02-07 | 2013-08-19 | Disco Abrasive Syst Ltd | Flood prevention method and flood prevention tool |
| CN203266427U (en) * | 2013-06-22 | 2013-11-06 | 宇骏(潍坊)新能源科技有限公司 | Condensed water containing tray of silicon wafer polishing machine |
| KR200485083Y1 (en) * | 2016-08-23 | 2017-11-27 | 신은호 | Structure of Floor for Preventing Noise through Floor |
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2015
- 2015-05-29 JP JP2015109801A patent/JP6566729B2/en active Active
-
2016
- 2016-04-14 TW TW105111682A patent/TWI670144B/en active
- 2016-05-12 CN CN201610312332.2A patent/CN106206364B/en active Active
- 2016-05-18 KR KR1020160060702A patent/KR102449023B1/en active IP Right Grant
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59199457A (en) * | 1983-04-11 | 1984-11-12 | 株式会社日立製作所 | Waterproof sheet for electronic apparatus |
| JPH08309089A (en) * | 1995-05-17 | 1996-11-26 | Mayumi Morimoto | Washing machine tray |
| CN202963011U (en) * | 2012-12-07 | 2013-06-05 | 李永诗 | Protective cover special for washing of air conditioner |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111497042A (en) * | 2019-01-30 | 2020-08-07 | 株式会社迪思科 | Processing device |
| CN111497042B (en) * | 2019-01-30 | 2024-02-06 | 株式会社迪思科 | Processing device |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI670144B (en) | 2019-09-01 |
| KR102449023B1 (en) | 2022-09-28 |
| JP6566729B2 (en) | 2019-08-28 |
| JP2016221620A (en) | 2016-12-28 |
| KR20160140392A (en) | 2016-12-07 |
| CN106206364B (en) | 2021-06-18 |
| TW201707859A (en) | 2017-03-01 |
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