CN106198327B - Liquid particle detection device - Google Patents

Liquid particle detection device Download PDF

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Publication number
CN106198327B
CN106198327B CN201610835801.9A CN201610835801A CN106198327B CN 106198327 B CN106198327 B CN 106198327B CN 201610835801 A CN201610835801 A CN 201610835801A CN 106198327 B CN106198327 B CN 106198327B
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China
Prior art keywords
glass window
channel
flow cell
hole
laser
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CN201610835801.9A
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Chinese (zh)
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CN106198327A (en
Inventor
孙吉勇
陈建
周大农
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Sujing Group Automation Instrument Equipment Corp
Jiangsu Sujing Group Co Ltd
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Sujing Group Automation Instrument Equipment Corp
Jiangsu Sujing Group Co Ltd
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Priority to CN201610835801.9A priority Critical patent/CN106198327B/en
Publication of CN106198327A publication Critical patent/CN106198327A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02Investigating particle size or size distribution
    • G01N15/0205Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Electro-optical investigation, e.g. flow cytometers
    • G01N15/1434Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement
    • G01N15/1436Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement the optical arrangement forming an integrated apparatus with the sample container, e.g. a flow cell

Abstract

The present application relates to a liquid particle detection apparatus. The liquid particle detection device comprises a laser, a flow cell, a first glass window, a second glass window, a photoelectric detector and a signal processing unit, wherein a detection hole and a channel are formed in the flow cell, the first glass window and the second glass window are respectively arranged on the left side and the right side of the channel, a light-transmitting slit is further formed in the first glass window, the laser is arranged on the left side of the first glass window, the photoelectric detector is arranged on the right side of the second glass window, incident light beams of the laser are sequentially transmitted to the photoelectric detector through the light-transmitting slit, the detection hole and the second glass window, and the signal processing unit can obtain the quantity and the size of particles in liquid flowing through the channel after signal processing after conversion of the photoelectric detector. The laser and the photoelectric detector are directly arranged at the left side and the right side of the detection hole of the flow cell, so that the light propagation distance is effectively reduced, the structure is simplified, the volume of the liquid particle detection device is effectively reduced, and the liquid particle detection device can be miniaturized.

Description

Liquid particle detection device
Technical Field
The application belongs to the field of detection of particulate matters in liquid, and particularly relates to a device for detecting tiny particulate matters in liquid.
Background
Currently, the primary device for detecting tiny particle contaminants in liquids is a liquid particle counter. The method has important application in the cleanliness detection of liquid media such as liquid medicine, pure water, oil liquid and the like. The smallest particle size measured was 50 nm and even smaller.
The detection technique based on the optical principle is the mainstream detection technique of liquid particle counters. Optical liquid particle counters are classified into detection techniques based on the light blocking principle and detection techniques based on the light scattering principle. The detection technology based on the light blocking principle is mainly used for measuring particles with the particle size of more than 1 micrometer, and the method is called a photoresistance method for short.
The conventional structure of the particle counter of the conventional photoresist method is shown in fig. 1. Light emitted from the laser 101 is converged by the lens group 102 to form a fine line beam in the detection area of the flow cell 103, and the line beam is transmitted to the surface of the photodetector 106 after passing through the flow cell 103. The liquid 104 to be measured flows through the liquid detection area via the liquid channel 108 of the flow cell 103. When the tiny particles 105 in the liquid 104 to be detected pass through the detection area, a part of light emitted by the light source is blocked, so that the light signal received by the photodetector 106 is weakened, a negative pulse signal 107 is formed, and the amplitude of the negative pulse signal 107 is proportional to the size of the particles. Therefore, the number and the size of the tiny particles in the measured liquid can be measured through the number and the amplitude of the pulse signals. The structure uses two lenses, and the light source, the lenses, the flow cell and the photoelectric detector are in a separated state, so that the structure is complex, the assembly process requirement is high, and the detection effect is greatly affected by the installation precision.
Disclosure of Invention
The application aims to provide a particle detection device with simple detection structure, miniaturization and microminiaturization.
In order to solve the technical problems, the application adopts a technical scheme that: a liquid particle detection device. The liquid particle detection device comprises a laser, a flow cell, a first glass window, a second glass window, a photoelectric detector and a signal processing unit, wherein a detection hole and a channel for liquid to pass through are formed in the flow cell, the detection hole is formed in the vertical direction of the channel and penetrates through the channel, the first glass window is arranged on the left side of the channel and seals one port of the detection hole, the second glass window is arranged on the right side of the channel and seals the other port of the detection hole, a light transmission slit is further formed in the first glass window, the laser is arranged on the left side of the first glass window, the photoelectric detector is arranged on the right side of the second glass window, the laser can form an incident beam, the incident beam is sequentially transmitted to the photoelectric detector through the light transmission slit, the detection hole and the second glass window, the photoelectric detector converts received light signals and then transmits the converted light signals to the signal processing unit, and the signal processing unit can obtain the quantity of the liquid flowing through the channel and large and small particles after the signal processing unit converts the received light signals.
Specifically, the flow cell is a non-transparent part, the channel penetrates from the upper end of the flow cell to the lower end of the flow cell, a liquid inlet is formed in the upper part of the flow cell, a liquid outlet is formed in the lower part of the flow cell, and the apertures of the liquid inlet and the liquid outlet are larger than the aperture of the channel in the middle of the flow cell.
Specifically, the detection Kong Kaishe is in the middle of the channel, the detection hole is a circular hole or a rectangular hole, and the central axis of the detection hole is perpendicular to the central axis of the channel.
Further, a first mounting groove for mounting a laser and a second mounting groove for mounting a first glass window are sequentially formed in the flow cell from left to right; a third mounting groove for mounting the photoelectric detector and a fourth mounting groove for mounting the second glass window are sequentially formed in the flow cell from right to left; the detection hole is communicated with the second installation groove and the third installation groove.
Further, the laser is installed in the first mounting groove through the first mounting fixing piece, a step hole matched with the appearance of the end part of the laser is formed in the first mounting fixing piece, the step hole penetrates through the first mounting fixing piece, the laser is inserted into the step hole, the end part of the laser is exposed out of the right end of the step hole, and the first mounting fixing piece is inserted into the first mounting groove to be fixed.
Further, the photoelectric detector is installed in the third installation groove through the second installation fixing piece, a through hole is formed in the second installation fixing piece, the photoelectric detector is inserted into the through hole, and the detecting head of the photoelectric detector is exposed out of the left end of the second installation fixing piece.
Specifically, the first glass window is fixedly adhered in the second mounting groove, the second glass window is fixedly adhered in the fourth mounting groove, and the two ends of the detection hole are closed by the first glass window and the second glass window.
Preferably, the first glass window comprises a transparent substrate and a film covered on one side surface of the transparent substrate, the film is a non-light-transmitting film, the light-transmitting slit is formed on the film and penetrates through the surface of the transparent substrate, and the second glass window is a transparent element.
Preferably, the film is a titanium tungsten alloy film.
Specifically, the slit is a rectangular slit, and the long side of the slit is greater than or equal to the aperture of the channel at the detection hole.
The scope of the present application is not limited to the specific combination of the above technical features, but also covers other technical features formed by any combination of the above technical features or their equivalents. Such as the technical proposal formed by mutually replacing the technical characteristics with similar functions disclosed in the application.
Due to the application of the technical scheme, compared with the prior art, the application has the following advantages:
the laser and the photoelectric detector are directly arranged at the left side and the right side of the detection hole of the flow cell, so that the light propagation distance is effectively reduced, the detection hole can obtain enough light intensity without focusing light by using a lens, the structure is simplified, the volume of the liquid particle detection device is effectively reduced, the liquid particle detection device can be miniaturized and miniaturized, the assembly difficulty of the liquid particle detection device is reduced, and the efficiency of industrial production is improved.
Drawings
FIG. 1 is a schematic diagram of a conventional liquid particle detection apparatus;
FIG. 2 is a full cross-sectional view of the liquid particle testing apparatus of the present application;
FIG. 3 is a schematic perspective view of a flow cell;
FIG. 4 is a front view of a flow cell;
FIG. 5 is a cross-sectional view of A-A of FIG. 4;
FIG. 6 is a front view of the first glazing;
FIG. 7 is a cross-sectional view of B-B in FIG. 6;
wherein: 101. a laser; 102. a lens group; 103. a flow cell; 104. a liquid; 105. fine particles; 106. a photodetector; 107. a negative pulse signal;
201. a laser; 202. a first mounting fixture; 203. a first glazing; 204. a flow cell; 205. a second glazing; 206. a second mounting fixture; 207. a photodetector;
301. a first mounting groove; 302. a second mounting groove; 303. a third mounting groove; 304. a fourth mounting groove; 305. a channel; 306. a detection hole; 307. a liquid inlet; 308. a liquid outlet;
401. a transparent substrate; 402. a film; 403. a light-transmitting slit.
Detailed Description
The application provides a liquid particle detection device based on a photoresistance method principle. As shown in fig. 1 to 7, the liquid particle detecting apparatus includes a laser 201, a flow cell 204, a first glass window 203, a second glass window 205, a photodetector 207, and a signal processing unit (not shown).
As shown in fig. 3 to 5, the flow cell 204 is a light-impermeable member. The flow cell 204 may be made of metallic aluminum or stainless steel, and may be formed into a cube shape by machining. A channel 305 through which the liquid to be detected flows is provided in the vertical direction of the flow cell 204. The channel 305 penetrates from the upper end of the flow cell 204 to the lower end of the flow cell 204, a liquid inlet 307 is formed in the upper part of the flow cell 204, a liquid outlet 308 is formed in the lower part of the flow cell 204, and the apertures of the liquid inlet 307 and the liquid outlet 308 are larger than the aperture of the channel 305 in the middle part of the flow cell 204. In this embodiment, the cross section of the channel 305 is circular, and the aperture of the channel 305 in the middle of the flow cell 204 is 1mm. The cross-section of the channel 305 may also be rectangular in nature. The liquid to be measured enters from the upper liquid inlet 307 of the channel 305, flows through the channel 305 and finally flows out through the liquid outlet 308.
A first mounting groove 301 for mounting the laser 201, a second mounting groove 302 for mounting the first glass window 203, a detection hole 306, a fourth mounting groove 304 for mounting the second glass window 205, and a third mounting groove 303 for mounting the photodetector 207 are sequentially provided on the flow cell 204 in the left-right direction perpendicular to the central axis of the channel 305 from the left end of the flow cell 204 to the right end of the flow cell 204. The detection hole 306 penetrates the passage 305 and communicates with the second mounting groove 302 and the third mounting groove 303. The first mounting groove 301, the second mounting groove 302, the detection hole 306, the fourth mounting groove 304, and the third mounting groove 303 penetrate the flow cell 204 in the left-right direction. The detection hole 306 is located in the middle of the channel 305, and the detection hole 306 is a circular hole or a rectangular hole, and the size of the detection hole is equal to the size of the middle of the channel 305. The central axis of the detection hole 306 is perpendicular to the central axis of the channel 305.
As shown in fig. 6 and 7, the first glass window 203 includes a transparent substrate 401 and a film 402 covering one side surface of the transparent substrate 401. The transparent substrate 401 is a wafer structure made of quartz glass. The dimensions of the transparent substrate 401 selected in this embodiment are: diameter 6mm and thickness 1mm. Of course, other dimensions may be substituted. The film 402 is a non-light-transmitting film, and in this embodiment, the film 402 is a titanium tungsten alloy film, and the film 402 is plated on the right surface of the transparent substrate. An elongated light transmissive slit 403 is etched in the center of the film 402. The light-transmitting slit 403 penetrates to the surface of the transparent substrate 401. The slit is a rectangular slit, and the long side of the slit is greater than or equal to the aperture of the channel 305 at the detection hole 306. In this example, the slit size was 0.1mm×1mm. The second glazing 205 is a transparent element. In this embodiment, the second glass window 205 has a wafer structure made of quartz glass, and has the same size as the transparent substrate 401.
The first and second glass windows 203 and 205 are adhered and fixed to the second and fourth mounting grooves 302 and 304, respectively, by an adhesive. The first glass window 203 closes the left end of the detection hole 306, and the second mounting groove 302 closes the right end of the detection hole 306. The detection holes 306 of the first glass window 203 and the second glass window 205 are closed into a closed detection cavity. When the liquid to be detected passes through the detection cavity area, no leakage is formed. The long axis direction of the light-transmitting slit 403 is perpendicular to the central axis of the channel 305.
The laser 201 is a semiconductor laser. The laser 201 is installed in the first installation groove 301 through the first installation fixing piece 202, a step hole matched with the appearance of the end portion of the laser 201 is formed in the first installation fixing piece 202, the step hole penetrates through the first installation fixing piece 202, the laser 201 is inserted into the step hole, the end portion of the laser 201 is exposed out of the right end of the step hole, and the first installation fixing piece 202 is inserted into the first installation groove 301 to be fixed.
The photoelectric detector 207 is installed in the third installation groove 303 through the second installation fixing piece 206, a through hole is formed in the second installation fixing piece 206, the photoelectric detector 207 is inserted into the through hole, and a detection head of the photoelectric detector 207 is exposed at the left end of the second installation fixing piece 206.
The laser 201 emits laser light, and a thin line beam is formed at the detection hole 306 through the light-transmitting slit 403 of the first glass window 203, the thin line beam being perpendicular to the detection channel. The light passes through the second glazing 205 to the surface of the photodetector 207.
Since the laser 201 is very close to the detection aperture 306, the unit intensity of light is still very high when light propagates from the laser 201 to the detection aperture 306. When the tiny particles in the liquid to be detected pass through the position of the detection hole 306, part of the light of the laser is blocked, so that the light signal received by the photodetector 207 is weakened. The photodetector 207 forms a negative pulse signal according to the attenuation of the optical signal and transmits the negative pulse signal to a signal processing unit (not shown). The larger the particles, the more light is blocked, the weaker the signal received by the photodetector 207, and the larger the negative pulse signal, and the signal processing unit can detect the size and the number of the particles in the liquid to be detected according to the size and the number of the pulse signals.
In the application, the laser 201 and the photoelectric detector 207 are directly arranged at two sides of the detection hole 306 of the flow cell 204, so that the distance between the laser 201 and the detection hole 306 is small. Depending on the characteristics of the semiconductor laser, the light emitted from the chip is divergent, and the size of the spot thereof is increasing with increasing transmission distance.
If the semiconductor laser is very close to the detection aperture 306, the laser spot size remains very small and the light intensity per unit area remains very large at the detection aperture 306. For example, for a laser with a divergence angle of 11 ° and 37 °, its spot size is approximately 0.3×1mm at 3mm from the front of its chip. The unit light intensity is equivalent to the light intensity of the detection area of the liquid particle counter by the traditional photoresistance method. The liquid particle detection device can be used for manufacturing a handheld or portable small liquid particle counter.
As described above, we have fully described the gist of the present application, but the present application is not limited to the above-described embodiments and implementation methods. A practitioner of the related art may make various changes and implementations within the scope of the technical idea of the present application.

Claims (3)

1. A liquid particle detection device, characterized in that: the liquid particle detection device comprises a laser (201), a flow cell (204), a first glass window (203), a second glass window (205), a photoelectric detector (207) and a signal processing unit, wherein a detection hole (306) and a channel (305) through which liquid flows are formed in the flow cell (204), the detection hole (306) is formed along the vertical direction of the channel (305) and penetrates through the channel (305), the first glass window (203) is arranged at the left side of the channel (305) and seals one port of the detection hole (306), the second glass window (205) is arranged at the right side of the channel (305) and seals the other port of the detection hole (306), a light transmission slit (403) is further formed in the first glass window (203), the photoelectric detector (207) is arranged at the right side of the second glass window (205), the laser (201) can form a light beam, the light beam (403), the light beam (207) is transmitted to the second glass window (306) through the detection window and the photoelectric detector (205) in turn, and the signal processing unit transmits the light beam (207) to the second glass window (306), the signal processing unit is capable of processing the signals converted by the photodetector (207) to obtain data of the number and the size of particles in the liquid flowing through the channel (305);
the laser (201) is a semiconductor laser;
the long axis direction of the light-transmitting slit (403) is perpendicular to the central axis of the channel (305);
the first glass window (203) comprises a transparent substrate (401) and a film (402) covered on one side surface of the transparent substrate (401), the film (402) is a non-light-transmitting film, the light-transmitting slit (403) is formed on the film (402) and penetrates through the surface of the transparent substrate (401), and the second glass window (205) is a transparent element;
the film (402) is a titanium tungsten alloy film;
the flow cell (204) is a non-light-transmitting piece, the channel (305) penetrates from the upper end of the flow cell (204) to the lower end of the flow cell (204), the channel (305) is provided with a liquid inlet (307) at the upper part of the flow cell (204), the lower part is provided with a liquid outlet (308), and the apertures of the liquid inlet (307) and the liquid outlet (308) are both larger than the aperture of the channel (305) in the middle part of the flow cell (204);
the detection hole (306) is formed in the middle of the channel (305), the detection hole (306) is a round hole or a rectangular hole, and the central axis of the detection hole (306) is perpendicular to the central axis of the channel (305);
a first mounting groove (301) for mounting the laser (201) and a second mounting groove (302) for mounting the first glass window (203) are sequentially formed in the flow cell (204) from left to right; a third mounting groove (303) for mounting the photoelectric detector (207) and a fourth mounting groove (304) for mounting the second glass window (205) are sequentially formed in the flow cell (204) from right to left; the detection hole (306) is communicated with the second mounting groove (302) and the third mounting groove (303);
the laser device (201) is arranged in the first mounting groove (301) through the first mounting fixing piece (202), a step hole matched with the appearance of the end part of the laser device (201) is formed in the first mounting fixing piece (202), the step hole penetrates through the first mounting fixing piece (202), the laser device (201) is inserted into the step hole, the end part of the laser device (201) is exposed out of the right end of the step hole, and the first mounting fixing piece (202) is inserted into the first mounting groove (301) for fixing;
the photoelectric detector (207) is installed in the third installation groove (303) through the second installation fixing piece (206), a through hole is formed in the second installation fixing piece (206), the photoelectric detector (207) is inserted into the through hole, and a detection head of the photoelectric detector (207) is exposed out of the left end of the second installation fixing piece (206).
2. A liquid particle testing apparatus according to claim 1, wherein: the first glass window (203) is fixedly adhered in the second mounting groove (302), the second glass window (205) is fixedly adhered in the fourth mounting groove (304), and the two ends of the detection hole (306) are closed by the first glass window (203) and the second glass window (205).
3. A liquid particle testing apparatus according to claim 1, wherein: the slit is a rectangular slit, and the long side of the slit is larger than or equal to the aperture of a channel (305) at the position of a detection hole (306).
CN201610835801.9A 2016-09-21 2016-09-21 Liquid particle detection device Active CN106198327B (en)

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106950162B (en) * 2017-04-12 2023-07-21 江苏苏净集团有限公司 Particle counting method and system
DE102017117132A1 (en) * 2017-07-28 2019-01-31 HELLA GmbH & Co. KGaA Measuring device for fine dust measurement in at least one air volume for a vehicle, in particular for a motor vehicle
CN107941664A (en) * 2017-12-20 2018-04-20 天津博宜特科技有限公司 Liquid particle detector
CN109632588B (en) * 2018-12-30 2024-03-12 江苏苏净集团有限公司 Device and method for detecting pollution of oil particulate matters
CN113418835A (en) * 2021-06-10 2021-09-21 韩焓 Flow cell for insoluble particle detector and manufacturing process thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4728190A (en) * 1985-10-15 1988-03-01 Particle Measuring Systems, Inc. Device and method for optically detecting particles in a fluid
CN202330240U (en) * 2011-10-27 2012-07-11 江苏苏净集团有限公司 Sample cell for liquid particle counter
CN104345018A (en) * 2014-06-04 2015-02-11 秦少平 Detector-array-based fluid particle measuring instrument
CN105510279A (en) * 2015-12-11 2016-04-20 天津成科传动机电技术股份有限公司 Oil product moisture detection device based on light scattering method and detection method
CN206002414U (en) * 2016-09-21 2017-03-08 江苏苏净集团有限公司 A kind of liquid particles detection means

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2411002B (en) * 2004-02-11 2006-12-20 Facility Monitoring Systems Lt Particle counter for liquids
JP2007071794A (en) * 2005-09-09 2007-03-22 Rion Co Ltd Particle detector

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4728190A (en) * 1985-10-15 1988-03-01 Particle Measuring Systems, Inc. Device and method for optically detecting particles in a fluid
CN202330240U (en) * 2011-10-27 2012-07-11 江苏苏净集团有限公司 Sample cell for liquid particle counter
CN104345018A (en) * 2014-06-04 2015-02-11 秦少平 Detector-array-based fluid particle measuring instrument
CN105510279A (en) * 2015-12-11 2016-04-20 天津成科传动机电技术股份有限公司 Oil product moisture detection device based on light scattering method and detection method
CN206002414U (en) * 2016-09-21 2017-03-08 江苏苏净集团有限公司 A kind of liquid particles detection means

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
高性能光阻式颗粒计数仪的设计与实现;曹放 等;《电子测量技术》;第37卷(第4期);第130-133页 *

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