CN106167893B - A kind of improved vacuum coating equipment - Google Patents
A kind of improved vacuum coating equipment Download PDFInfo
- Publication number
- CN106167893B CN106167893B CN201610732823.2A CN201610732823A CN106167893B CN 106167893 B CN106167893 B CN 106167893B CN 201610732823 A CN201610732823 A CN 201610732823A CN 106167893 B CN106167893 B CN 106167893B
- Authority
- CN
- China
- Prior art keywords
- roll
- home roll
- vacuum coating
- friction wheel
- dynamic friction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Laminated Bodies (AREA)
Abstract
The present invention relates to a kind of improved vacuum coating equipments, including shell, shell is internally provided with coiling chamber and coating chamber, let off roll is equipped in coiling chamber, put film transition roller, first dance roller, first nip rolls, home roll, pressure roller, second dance roller, deflector roll, second nip rolls, carry-over pinch rolls and receipts certificate roller, the end of home roll is equipped with bearing block, the outside of shell is equipped with a layer insulating, the lower section of bearing block is equipped with insulating base, it is additionally provided in coiling chamber and the matched arcuate friction plate of home roll and the first hydraulic telescopic rod, friction plate includes arc insulation mainboard, the inside of insulation mainboard is equipped with the first frictional layer of arc.The improved vacuum coating equipment using friction plate and home roll and determine friction pulley and dynamic friction wheel generation electrostatic raw material film is bonded with home roll completely, ensure that raw material film coat of metal in vapor deposition is uniformly dispersed, it avoids generating fault, the quality of manufactured metallized film significantly improves.
Description
Technical field
The present invention relates to a kind of improved vacuum coating equipments, belong to capacitor technology field.
Background technology
Energy shortage and environmental degradation have become the globalization problem for threatening human survival, and development new energy is to realize people
The only way which must be passed of class sustainable development, China should Speeding up development utilize the paces of new energy, greatly develop new energy, it is gradually real
Now change from conventional energy resource to clean energy resource.
Gradually replaced with new energy traditional energy generate electricity by be electric power industry development from now on trend, generation of electricity by new energy
Include mainly solar power generation, wind-power electricity generation, biomass power generation, geothermal power generation, tidal power generation etc..
Urban track traffic refer to fast, speed big with freight volume, safety, on schedule, environmental protection, energy saving and land used etc.
Mode of transportation of feature, including subway, light rail, magnetic suspension, fast rail, tramcar, new traffic system etc..Therefore, in city rail
New energy is comprehensively utilized in road technical field of transportation also becomes the growth requirement of future city rail traffic.
New-energy automobile refers to using unconventional vehicle fuel as a source of power, and new-energy automobile includes hybrid power
Automobile, pure electric automobile, fuel cell electric vehicle, hydrogen engine automobile, other new energy（Such as high-efficiency energy storage vehicle, dimethyl ether）
The product of all categories such as automobile.
The either fields such as generation of electricity by new energy, new-energy automobile or urban track traffic are all finally to want power equipment
It drives, convert or realize, in power equipment, capacitor is important component therein as energy-storage travelling wave tube, especially new
The energy is as unconventional energy resource, during its comprehensive utilization, to traditional power equipment especially capacitor in volume, resistance to
Pressure, resistance to rush of current, reliability, has very high requirement in usage time at heatproof, at present in the world with metallic film capacitor
Its requirement is best suited, the material of this respect most critical is exactly metallized film.
Domestic metallized film is by development in recent years at present, and production technology has become ripe, the product produced
Gradually start to obtain the approval of capacitor producer, but also have a certain distance in the international advanced level of technology and equipment distance,
And as capacitor metallized film in new energy field, technology, performance, equipment have more harsh compared to other films
It is required that such as its vapor deposition when metal layer thickness control it is especially harsh；And existing vacuum coating equipment is when being deposited operation, with
Constantly unreeling for raw material film roll, the tension moment of raw material film changes, although adjusting the tension of raw material film using tension adjustment,
But there are still the defects that can not be bonded completely between raw material film and home roll, this is easy to cause raw material film and gold occurs in vapor deposition
Belong to thickness of coating unevenness and generate fault, influences the quality of the high temperature metallization film.
Invention content
The present invention is in view of the deficienciess of the prior art, provide a kind of improved vacuum coating equipment, particular technique side
Case is as follows：
A kind of improved vacuum coating equipment, including shell, shell are internally provided with coiling chamber and coating chamber, the volume
It is provided with let off roll in room, puts film transition roller, the first dance roller, the first nip rolls, home roll, pressure roller, the second tension tune
It saves roller, deflector roll, the second nip rolls, carry-over pinch rolls and receives certificate roller, the end set of the home roll has bearing block, the shaft in home roll center
It is flexibly connected with bearing block；Be provided with wire feeder and evaporator crucible in the coating chamber, evaporator crucible be arranged home roll just
The outside of lower section, the shell is provided with a layer insulating, is provided with insulating base below the bearing block, insulating base with
The lower part of bearing block is fixedly connected；It is additionally provided in the coiling chamber and is stretched with the matched arcuate friction plate of home roll and the first hydraulic pressure
Contracting bar, the friction plate include arc insulation mainboard, and the top of the telescopic end and insulation mainboard of first hydraulic telescopic rod is solid
It is fixed to connect, the first frictional layer of arc is provided on the inside of the mainboard that insulate, the first frictional layer is fixedly connected with insulation mainboard.
As an improvement of the above technical solution, first frictional layer is made of multilayer electronic grade glass-fiber-fabric overlapping bonding.
As an improvement of the above technical solution, it is respectively arranged at left and right sides of the friction plate and determines friction pulley and dynamic friction
Wheel, described to determine to be provided with interval between friction pulley and home roll, the dynamic friction wheel setting is being determined between friction pulley and home roll, dynamic to rub
It includes the insulation body of roll to wipe wheel, and the outside for the body of roll that insulate is provided with the second frictional layer, and the second frictional layer is fixedly connected with the insulation body of roll；
The end set of the dynamic friction wheel has the second hydraulic telescopic rod, the end of the telescopic end and dynamic friction wheel of the second hydraulic telescopic rod
It is fixedly connected.
As an improvement of the above technical solution, be provided with the convex ribs of screw thread shape on the body of roll for determining friction pulley, convex ribs and
Determine friction pulley to be an integral structure.
As an improvement of the above technical solution, it is provided with pressure sensor immediately below the dynamic friction wheel.
As an improvement of the above technical solution, second frictional layer is made of multilayer electronic grade glass-fiber-fabric overlapping bonding.
As an improvement of the above technical solution, the body of roll for determining friction pulley and convex ribs are made of hard rubber.
As an improvement of the above technical solution, the steering of the dynamic friction wheel is opposite and dynamic friction wheel with the steering of home roll
Linear velocity and equal with the linear velocity of home roll, the steering for determining friction pulley is identical as the steering of dynamic friction wheel.
Improved vacuum coating equipment of the present invention optimizes existing structure, using friction plate and home roll with
And determine friction pulley and dynamic friction wheel and generate electrostatic raw material film be bonded with home roll completely, ensure that raw material film is golden in vapor deposition
Belong to coating to be uniformly dispersed, avoids generating fault, the quality of manufactured metallized film significantly improves；Friction plate determines friction pulley, is dynamic
Friction pulley is simple in structure for other electrostatic generators, at low cost, and small, application is influenced on vacuum coating equipment
Value is high, and implementation result is good.
Description of the drawings
Fig. 1 is improved vacuum coating equipment structural schematic diagram of the present invention；
Fig. 2 is home roll structural schematic diagram of the present invention；
Fig. 3 is friction plate structure schematic diagram of the present invention；
Fig. 4 is dynamic friction wheel construction schematic diagram of the present invention；
Fig. 5 determines structure of friction wheel schematic diagram to be of the present invention.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
As shown in Fig. 1 ~ 5, the improved vacuum coating equipment, including shell 1, shell 1 are internally provided with coiling chamber 2
With coating chamber 3, it is provided with let off roll 21 in the coiling chamber 2, puts film transition roller 22, the flattening of the first dance roller 23, first
Roller 24, home roll 25, pressure roller 26, the second dance roller 27, deflector roll 28, the second nip rolls 29, carry-over pinch rolls 210 and receipts certificate roller 211,
The end set of the home roll 25 has bearing block 251, the shaft in 25 center of home roll to be flexibly connected with bearing block 251；The plated film
Wire feeder 31 and evaporator crucible 32 are provided in room 3, evaporator crucible 32 is arranged in the underface of home roll 25, the shell 1
Outside is provided with a layer insulating 11, and the lower section of the bearing block 251 is provided with insulating base 252, insulating base 252 and bearing
The lower part of seat 251 is fixedly connected；It is additionally provided in the coiling chamber 2 and 25 matched arcuate friction plate of home roll, 4 and first liquid
It includes arc insulation mainboard 41, telescopic end and the insulation mainboard of first hydraulic telescopic rod 5 to press telescopic rod 5, the friction plate 4
41 top is fixedly connected, and the inside of insulation mainboard 41 is provided with the first frictional layer of arc 42, and the first frictional layer 42 is led with insulation
Plate 41 is fixedly connected.
Raw material film is released in let off roll 21, raw material film is polypropylene film, and polypropylene film is successively by putting film transition roller
22, vapor deposition is cooled to high temperature polypropylene metallized film on home roll 25 after the first dance roller 23, the first nip rolls 24, high
Warm polypropylene metallized film passes through pressure roller 26, the second dance roller 27, deflector roll 28, the second nip rolls 29, carry-over pinch rolls successively
Winding at certificate roller 211 is being received after 210；Wire is endlessly sent into the metal generated in evaporator crucible 13 by wire feeder 31
Steam is plated on polypropylene film, and home roll 25 can distribute the heat just on the polypropylene film of plated film rapidly, avoid holding
Continuous high temperature makes polypropylene film deform.It is existing since polypropylene film is also easy to produce the electrostatic of positive charge in friction process
There is the body of roll of home roll 25 to be made using metal material, the first frictional layer 42 can be selected the weak material of bound electron ability and be made,
Such as fur, glass, mica, wool and nylon material are made, when the first frictional layer 42 in home roll 25 and friction plate 4 rubs
When, the positively charged electrostatic of the first frictional layer 42, the negatively charged electrostatic of home roll 25, due to insulating layer 11 and insulating base 252
Double insulation isolation under so that the electrostatic of negative electrical charge easily concentrates on the surface of home roll 25, when polypropylene film is positively charged
When electrostatic, since the charges of different polarity are attracted each other, it is firmly adsorbed on the surface of home roll 25, polypropylene film can completely and home roll
25 fittings ensure that polypropylene film coat of metal in vapor deposition is uniformly dispersed, avoid generation fault, the high temperature metallization film
Quality significantly improves；Even if not static electrification on polypropylene film, since the home roll 25 of negatively charged electrostatic is thin with polypropylene always
Film contacts, due to electrostatic induction phenomenon（Induced close to one end of static electrification object it is opposite with static electrification object electrical, and by
Attract the phenomenon being attached on static electrification object）So that polypropylene film can be also bonded with home roll 25 completely.Wherein, it insulate
Mainboard 41 can prevent the first frictional layer 42 from leading to static elimination or transfer with extraneous electrical contact.First hydraulic telescopic rod 5 with it is true
Hydraulic system in empty filming equipment is connected, and the compression between friction plate 4 and home roll 25 is can control by the first hydraulic telescopic rod 5
Degree.
First frictional layer 42 may be selected to be made of adhesive bonding after being overlapped with multilayer electronic grade glass-fiber-fabric, due to electricity
Sub- grade glass-fiber-fabric is alkali-free cloth, is insulator, and the more low anti-folding stretching resistance of alkalinity of glass-fiber-fabric is better, and wearability is high, alkali-free cloth
Anti- folding stretching resistance it is optimal, glass-fiber-fabric is not only able to be covered in the surface of home roll 25 well so that the first frictional layer 42 with it is main
There are enough contacts area, glass-fiber-fabric to be formed by glass fiber textile between roller 25, glass-fiber-fabric produces rapidly with 25 friction energy of home roll
Raw electrostatic so that the first frictional layer 42 is positively charged, and home roll 25 is negatively charged, and glass-fiber-fabric does not influence the rotation of home roll 25, multilayer also
Electronic grade glass cloth is overlapped, and wearability is optimal, while the first frictional layer 42 made of glass-fiber-fabric rubs with home roll 25, no
It is also easy to produce dust, clast etc..
When raw material film is polyethylene, polystyrene or polycarbonate film, raw material film itself is also easy to produce the quiet of negative electrical charge
Electricity, to expand the comprehensive utilization ratio of the vacuum coating equipment；The left and right sides of the friction plate 4, which is respectively arranged with, determines friction pulley 6
Described to determine to be provided with interval between friction pulley 6 and home roll 25 with dynamic friction wheel 7, friction pulley 6 is being determined in the setting of dynamic friction wheel 7
Between home roll 25, dynamic friction wheel 7 includes the insulation body of roll 71, and the outside of the insulation body of roll 71 is provided with the second frictional layer 72, and second
Frictional layer 72 is fixedly connected with the insulation body of roll 71；The end set of the dynamic friction wheel 7 has the second hydraulic telescopic rod 8, the second liquid
The telescopic end of pressure telescopic rod 8 is fixedly connected with the end of dynamic friction wheel 7.First with the first hydraulic telescopic rod 5 so that friction plate 4 with
Home roll 25 disengages, and the second hydraulic telescopic rod 8 is also connected with the hydraulic system in vacuum coating equipment, is stretched using the second hydraulic pressure
Contracting bar 8 so that dynamic friction wheel 7 with determine friction pulley 6 and home roll 25 contacts, determine friction pulley 6 and the strong material of bound electron ability can be selected
Material is made, such as hard rubber, metal material are made, and dynamic friction wheel 7 can be selected the weak material of bound electron ability and be made, such as hair
The materials such as skin, glass, mica, wool and nylon are made, when in dynamic friction wheel 7 the second frictional layer 72 with determine friction pulley 6 in play
It may make the second frictional layer 72 positively charged under strong friction, determine that friction pulley 6 is negatively charged, and the second frictional layer 72 connects with home roll 25
It touches so that the positive charge on the second frictional layer 72 is transferred to the surface of home roll 25, and a large amount of positive electricity has been gathered on the surface of home roll 25
Lotus ensures that negatively charged raw material film can be bonded with home roll 25 completely when home roll 25 is contacted with negatively charged raw material film；I.e.
Make raw material film not static electrification, due to electrostatic induction phenomenon, can also make raw material film that can be also bonded completely with home roll 25.By
The setting of home roll 25 ensure that the symmetry of the both sides of home roll 25 so that home roll 25 there are two friction pulley 6 and dynamic friction wheel 7 is determined
Surface can accumulate positive charge electrostatic rapidly and charge density is evenly distributed.Wherein, the insulation body of roll 71 can prevent second to rub
Wiping layer 72 and extraneous electrical contact leads to static elimination or transfer.
It can determine to shorten electrostatic generation time between friction pulley 6 and dynamic friction wheel 7 by way of contact area increasing；Institute
It states the convex ribs 61 for being provided with screw thread shape on the body of roll for determining friction pulley 6, convex ribs 61 and determines friction pulley 6 and be an integral structure.In convex ribs
Under the action of 61, the friction area determined between friction pulley 6 and dynamic friction wheel 7 increases, and electrostatic generation time further shortens.When fixed
When friction pulley 6 rotates clockwise, convex ribs 61 can be set to left hand thread, i.e. the rotation direction counter clockwise direction precession of convex ribs 61, with
The steering of friction pulley 6 is determined on the contrary, can further improve the friction level determined between friction pulley 6 and dynamic friction wheel 7.
To avoid the pressure between dynamic friction wheel 7 and home roll 25 exceeded, the underface of the dynamic friction wheel 7 is provided with pressure
Sensor 9.It can be by rationally adjusting the position of pressure sensor 9, can pass through pressure sensor 9 can real time reaction dynamic friction wheel 7
Compression degree between home roll 25 avoids the pressure between dynamic friction wheel 7 and home roll 25 is exceeded from causing home roll 25 that locking occurs
Phenomenon.
Second frictional layer 72 is made of multilayer electronic grade glass-fiber-fabric overlapping bonding；The body of roll for determining friction pulley 6 and
Convex ribs 61 are made of hard rubber.It is insulator, the more low anti-folding of alkalinity of glass-fiber-fabric since electronic grade glass cloth is alkali-free cloth
Stretching resistance is better, and wearability is high, and the anti-folding stretching resistance of alkali-free cloth is optimal, and multilayer electronic grade glass-fiber-fabric overlapping, wearability reaches most
Excellent, glass-fiber-fabric is formed by glass fiber textile, and determining 6 friction energy of friction pulley made of glass-fiber-fabric and hard rubber generates rapidly electrostatic,
So that the second frictional layer 72 is positively charged, it is negatively charged to determine friction pulley 6；The insulation body of roll 71 can be made of flexible insulating materials,
So that the contact area determined between friction pulley 6, convex ribs 61 and the second frictional layer 72 reaches maximum, more it is easier that the second frictional layer 72
Generate electrostatic；The body of roll for determining friction pulley 6 is made with hard rubber for second frictional layer 72 made of glass-fiber-fabric and convex ribs 61 rub, and is not easy
Generate dust, clast etc..Wherein, it is not only at low cost that friction pulley 6 is determined made of hard rubber, but also there is insulation performance.
The electrostatic of xenogenesis charge is caused to generate to avoid generating distance friction between dynamic friction wheel 7 and home roll 25, it is described dynamic
The steering of friction pulley 7 linear velocity opposite and dynamic friction wheel 7 with the steering of home roll 25 and equal with the linear velocity of home roll 25 so that
Relative displacement between dynamic friction wheel 7 and home roll 25 reaches minimum, and the frictional force between dynamic friction wheel 7 and home roll 25 reaches most
It is low so that the frictional force between dynamic friction wheel 7 and home roll 25 is not enough to generate the electrostatic of xenogenesis charge；Determine friction pulley 6 when described
Steering it is identical as the steering of dynamic friction wheel 7 when, determine to occur between friction pulley 6 and dynamic friction wheel 7 time of relative motion into one
Step shortens, and determines friction pulley 6 and the rate of the generation electrostatic of dynamic friction wheel 7 further increases, implementation result is good.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
All any modification, equivalent and improvement etc., should all be included in the protection scope of the present invention made by within refreshing and principle.
Claims (8)
1. a kind of improved vacuum coating equipment, including shell（1）, shell（1）Be internally provided with coiling chamber（2）And coating chamber
（3）, the coiling chamber（2）In be provided with let off roll（21）, put film transition roller（22）, the first dance roller（23）, first exhibition
Plain-barreled roll（24）, home roll（25）, pressure roller（26）, the second dance roller（27）, deflector roll（28）, the second nip rolls（29）, carry-over pinch rolls
（210）With receipts certificate roller（211）, the home roll（25）End set have bearing block（251）, home roll（25）The shaft and axis in center
Bearing（251）Flexible connection；The coating chamber（3）In be provided with wire feeder（31）And evaporator crucible（32）, evaporator crucible
（32）It is arranged in home roll（25）Underface, it is characterised in that：The shell（1）Outside be provided with a layer insulating（11）,
The bearing block（251）Lower section be provided with insulating base（252）, insulating base（252）With bearing block（251）Lower part fix
Connection；The coiling chamber（2）In be additionally provided with and home roll（25）Matched arcuate friction plate（4）With the first hydraulic telescopic rod
（5）, the friction plate（4）Including arc insulation mainboard（41）, first hydraulic telescopic rod（5）Telescopic end with insulation mainboard
（41）Top be fixedly connected, insulate mainboard（41）Inside be provided with the first frictional layer of arc（42）, the first frictional layer（42）
With insulation mainboard（41）It is fixedly connected.
2. a kind of improved vacuum coating equipment according to claim 1, it is characterised in that：First frictional layer（42）
It is made of multilayer electronic grade glass-fiber-fabric overlapping bonding.
3. a kind of improved vacuum coating equipment according to claim 1, it is characterised in that：The friction plate（4）A left side
Right both sides, which are respectively arranged with, determines friction pulley（6）With dynamic friction wheel（7）, described to determine friction pulley（6）And home roll（25）Between be provided with
Interval, the dynamic friction wheel（7）Friction pulley is being determined in setting（6）And home roll（25）Between, dynamic friction wheel（7）Including the body of roll that insulate
（71）, insulate the body of roll（71）Outside be provided with the second frictional layer（72）, the second frictional layer（72）With the insulation body of roll（71）It is fixed
Connection；The dynamic friction wheel（7）End set have the second hydraulic telescopic rod（8）, the second hydraulic telescopic rod（8）Telescopic end with
Dynamic friction wheel（7）End be fixedly connected.
4. a kind of improved vacuum coating equipment according to claim 3, it is characterised in that：It is described to determine friction pulley（6）'s
The convex ribs of screw thread shape are provided on the body of roll（61）, convex ribs（61）With determine friction pulley（6）It is an integral structure.
5. a kind of improved vacuum coating equipment according to claim 4, it is characterised in that：The dynamic friction wheel（7）'s
Underface is provided with pressure sensor（9）.
6. a kind of improved vacuum coating equipment according to claim 4, it is characterised in that：Second frictional layer（72）
It is made of multilayer electronic grade glass-fiber-fabric overlapping bonding.
7. a kind of improved vacuum coating equipment according to claim 4, it is characterised in that：It is described to determine friction pulley（6）'s
The body of roll and convex ribs（61）It is made of hard rubber.
8. a kind of improved vacuum coating equipment according to claim 4, it is characterised in that：The dynamic friction wheel（7）'s
Steering and home roll（25）Steering is opposite and dynamic friction wheel（7）Linear velocity and and home roll（25）Linear velocity it is equal, it is described fixed
Friction pulley（6）Steering and dynamic friction wheel（7）Steering it is identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610732823.2A CN106167893B (en) | 2016-08-27 | 2016-08-27 | A kind of improved vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610732823.2A CN106167893B (en) | 2016-08-27 | 2016-08-27 | A kind of improved vacuum coating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106167893A CN106167893A (en) | 2016-11-30 |
| CN106167893B true CN106167893B (en) | 2018-07-31 |
Family
ID=57376795
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610732823.2A Expired - Fee Related CN106167893B (en) | 2016-08-27 | 2016-08-27 | A kind of improved vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106167893B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019101092A (en) * | 2017-11-29 | 2019-06-24 | シャープ株式会社 | Display device and method for manufacturing display device |
| CN108998765A (en) * | 2018-09-28 | 2018-12-14 | 南京联科镀膜包装材料有限公司 | Devices of coiled vacuum coating machine and its winding method |
| CN110271893A (en) * | 2019-07-19 | 2019-09-24 | 佛山市取胜真空科技有限公司 | Film coiling device and operating method for jockey pulley anti-slip |
| CN110699887A (en) * | 2019-10-14 | 2020-01-17 | 任晓倩 | Quick oiled cloth immersion oil device for textile production |
| CN111020522B (en) * | 2019-12-09 | 2022-05-27 | 王殿儒 | Composite type substrate continuous coating system based on gas discharge type high-power electron gun |
| CN113235053B (en) * | 2021-05-21 | 2023-03-28 | 辽宁分子流科技有限公司 | Evaporation coating method with intelligently adjustable evaporation rate |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3294480B2 (en) * | 1995-09-05 | 2002-06-24 | シャープ株式会社 | refrigerator |
| CN1619009A (en) * | 2003-11-20 | 2005-05-25 | 爱发科股份有限公司 | Take-up vacuum deposition method and take-up vacuum deposition apparatus |
| CN104131254A (en) * | 2013-05-02 | 2014-11-05 | 上海伟阳纸业有限公司 | Vacuum film-coating device |
| CN206033872U (en) * | 2016-08-27 | 2017-03-22 | 安徽省宁国市海伟电子有限公司 | Improved vacuum coating equipment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03294480A (en) * | 1990-04-10 | 1991-12-25 | Matsushita Electric Ind Co Ltd | Vapor deposition apparatus |
-
2016
- 2016-08-27 CN CN201610732823.2A patent/CN106167893B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3294480B2 (en) * | 1995-09-05 | 2002-06-24 | シャープ株式会社 | refrigerator |
| CN1619009A (en) * | 2003-11-20 | 2005-05-25 | 爱发科股份有限公司 | Take-up vacuum deposition method and take-up vacuum deposition apparatus |
| CN104131254A (en) * | 2013-05-02 | 2014-11-05 | 上海伟阳纸业有限公司 | Vacuum film-coating device |
| CN206033872U (en) * | 2016-08-27 | 2017-03-22 | 安徽省宁国市海伟电子有限公司 | Improved vacuum coating equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106167893A (en) | 2016-11-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106167893B (en) | A kind of improved vacuum coating equipment | |
| Song et al. | Direct current triboelectric nanogenerators | |
| Xin et al. | Investigating the output performance of triboelectric nanogenerators with single/double-sided interlayer | |
| Nie et al. | Superhydrophobic cellulose paper‐based triboelectric nanogenerator for water drop energy harvesting | |
| Shan et al. | An inverting TENG to realize the AC mode based on the coupling of triboelectrification and air-breakdown | |
| JP6510429B2 (en) | Slide friction type nano generator and power generation method | |
| CN105958858B (en) | A kind of double-layer wave shape hybridized nanometer generator | |
| CN106026768A (en) | Vibration energy collector | |
| KR20150134363A (en) | Sliding frictional nano generator and power generation method | |
| Zhang et al. | Comprehensive dependence of triboelectric nanogenerator on dielectric thickness and external impact for high electric outputs | |
| Zhao et al. | Calliopsis structure-based triboelectric nanogenerator for harvesting wind energy and self-powerd wind speed/direction sensor | |
| CN104836472B (en) | Utilize the generator and sound transducer of acoustic energy | |
| CN104953785B (en) | A kind of energy collecting device | |
| Deka et al. | Triboelectric nanogenerator-integrated structural supercapacitor with in situ MXene-dispersed N-doped Zn–Cu selenide nanostructured woven carbon fiber for energy harvesting and storage | |
| CN206033872U (en) | Improved vacuum coating equipment | |
| Huang et al. | Novel electrode material using electroless nickel plating for triboelectric nanogenerator: Study of the relationship between electrostatic-charge density and strain in dielectric material | |
| CN109510505A (en) | A kind of friction nanometer power generator | |
| CN106026758A (en) | Generator, preparation method thereof and generator set | |
| Firdous et al. | Performance enhancement of triboelectric nanogenerator through hole and electron blocking layers-based interfacial design | |
| Sun et al. | Interfacial structure design for triboelectric nanogenerators | |
| Kim et al. | Interfacial molecular engineering for enhanced polarization of negative tribo-materials | |
| CN105515437A (en) | Friction generator and method for applying the same to generate power | |
| CN205811876U (en) | A kind of double-layer wave shape hybridized nanometer electromotor | |
| CN106206015B (en) | A kind of high temperature polypropylene metallized film | |
| Gokhool et al. | Reflections on boosting wearable triboelectric nanogenerator performance via interface optimisation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200813 Address after: Yang Ning Dun San TA Cun 242300 Anhui city in Xuancheng Province, Ningguo City, No. 001 group Patentee after: Song Renxiang Address before: 242300 Wang Xi industrial zone, Xuancheng, Anhui, Ningguo Patentee before: ANHUI NINGGUO HAIWEI ELECTRONICS Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201022 Address after: 242300 Wang Xi industrial zone, Xuancheng, Anhui, Ningguo Patentee after: ANHUI NINGGUO HAIWEI ELECTRONICS Co.,Ltd. Address before: Yang Ning Dun San TA Cun 242300 Anhui city in Xuancheng Province, Ningguo City, No. 001 group Patentee before: Song Renxiang |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180731 Termination date: 20200827 |