CN106153243B - The packaging method of MEMS turbulence sensors - Google Patents
The packaging method of MEMS turbulence sensors Download PDFInfo
- Publication number
- CN106153243B CN106153243B CN201610488805.4A CN201610488805A CN106153243B CN 106153243 B CN106153243 B CN 106153243B CN 201610488805 A CN201610488805 A CN 201610488805A CN 106153243 B CN106153243 B CN 106153243B
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- Prior art keywords
- hollow housing
- protective cover
- guard bar
- apopore
- mems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Micromachines (AREA)
- Prevention Of Electric Corrosion (AREA)
Abstract
The present invention relates to oceanic turbulence detection, specifically a kind of MEMS turbulence sensors packaging method.The present invention is directed to the technical bottleneck problem that MEMS turbulence sensors are encapsulated in marine application reliability; the problems such as proposing the protected mode that Parylene thin-film deposition, protective cover, guard bar and hollow housing combine, solving electrical isolation, anticorrosion, Bear high pressure, anticollision, sediment prevention blocking.The present invention is suitable for the encapsulation of MEMS turbulence sensors.
Description
Technical field
The present invention relates to oceanic turbulence field of detecting, specifically a kind of MEMS turbulence sensors packaging method.
Background technique
With the rapid development of physical oceangraphy, it has been recognized that minute yardstick oceanic turbulence is double in such as ocean interior
Diffusion, Internal wave breaking, the propagation of sound wave etc. have played important function.Explore oceanic turbulence, grasp oceanic turbulence knowledge for
Human intelligible ocean energy and transport of substances mechanism play an important role.In December, 2014, academician of the Chinese Academy of Sciences Wu Lixin religion
It awards and proposes the concept of " transparent ocean ", wherein containing the fine observation to oceanic turbulence.
Due to the unique adverse circumstances in deep-sea, sea sensor needs special encapsulation to adapt it to this environment.In recent years
Come, many individuals across the country propose many methods with regard to the encapsulation of sea sensor, and Northcentral University Li Zhen, Zhang Guojun etc. are in article
A kind of encapsulation using entrant sound cap and silicone oil is mentioned in " design and research of MEMS bionic vector hydrophone encapsulating structure ", is passed through
The entrant sound cap of polyurethane material production stops the influence of seawater and impurity to sensing head, and pours into silicone oil in entrant sound cap and guarantee electricity
Road insulation.This bionical piezoresistive transducer of MEMS can be applied to oceanic turbulence sensory field, however this encapsulating structure
The disadvantage is that turbulent space resolution limitations are in the size of entrant sound cap, and sensitivity also will receive entrant sound cap influence and
It reduces.
Of heap of stone, Liu Yuhong of University Of Tianjin paddy etc. is in article " design of ocean shear flow sensor structure and test " middle one proposed
Shear flow sensor is tieed up, measures shearing force, the sensitive effect that front end has cantilever beam and probe to increase shearing force using piezoelectric ceramics
Fruit is protected piezoelectric ceramics and cantilever beam by Steel material shell, back-end circuit is isolated with seawater using rubber.Germany
Hartmut Prandkeh, Klaus Pfeiffer etc. are in " Shear Probe for Use in Operational
This structure was also mentioned in Microstructure Measuring Systems ".However, due to conventional fine processing and group
Dress mode is highly vulnerable to breakage the miniature cross girder construction of the bionical piezoresistive transducer of MEMS, and this packaged type is not particularly suited for MEMS
Bionical piezoresistive transducer.
Due to encapsulating a series of problems for not being fully solved the bionical piezoresistive transducer of MEMS in deep-marine-environment above.
So when designing the deep-sea reliability encapsulation of sensor, need to consider emphatically its resist voltage resistance, corrosion resistance and electrical insulating property,
The problems such as anti-foreign matter impacts.
Summary of the invention
The present invention is in order to solve MEMS turbulence sensors during the work time, and marine silt and large granular impurity are to sensor
On the problems such as integrally-built influence, proposition Parylene film forms sediment for the influence of sensing unit and seawater electric conductivity and corrosivity
The protected mode that product, protective cover, guard bar and hollow housing combine.
The present invention is achieved by the following technical scheme:
Apopore, the hollow shell is arranged in a kind of MEMS turbulence sensors, including hollow housing, the hollow housing side wall
Rood beam and cilium are installed in body top；The hollow housing top end face is uniformly arranged guard bar；The hollow housing top adds
Lid protective cover, the cilium are pierced by protective cover；Conformal uniform deposition parylene film after the sensor lead.
MEMS turbulence sensors packaging method is as follows:
(1), rood beam and cilium are installed in hollow housing top；
(2), on hollow housing top, UV gluing connects protective cover, then with ultraviolet light by UV adhesive curing；
(3), it will be put into after sensor lead in parylene film deposition system, parylene particle be added and forms sediment to film
In the hopper of product system, machine is opened, after a period of time, it is thin that sensor surface just deposited one layer of densification parylene
Film.
The present invention is asked for deep-sea detecting application electrical isolation, anticorrosion, Bear high pressure, anticollision, sediment prevention blocking etc.
Topic, turbulence sensors system integration scheme are as above.The conformal deposited Parylene(Parylene outside sensor) film, the film was both
Fine and close waterproof, and cilium and rood beam adhesion strength can be reinforced.It is several by collision that protective cover greatly reduces cilium-cross girder construction
Rate plays position-limiting action to fibre swing, while realizing guide functions, reduces flow noise.Guard bar reduces foreign matter collision probability,
By rationally designing protection shank diameter and spacing, flow noise is reduced as far as possible, while protecting ciliary structures.Rood beam hollow design,
Not only water conservancy diversion but also sediment prevention blocking in this way.
The present invention is directed to the technical bottleneck problem that MEMS turbulence sensors are encapsulated in marine application reliability, proposes
The protected mode that Parylene thin-film deposition, protective cover, guard bar and hollow housing combine solves electrical isolation, anticorrosion, resistance to height
The problems such as hydrostatic pressing, anticollision, sediment prevention blocking, the encapsulation suitable for MEMS turbulence sensors.
Detailed description of the invention
Fig. 1 shows the overall structure diagrams of MEMS turbulence sensors.
The sectional schematic diagram of Fig. 2 expression protective cover.
Fig. 3 indicates that cilium passes through the schematic diagram of protective cover.
The partial cutaway schematic view of Fig. 4 expression hollow housing.
Fig. 5 indicates that the position of guard bar and apopore corresponds to schematic diagram.
Fig. 6 indicates hollow housing and guard bar schematic diagram.
Fig. 7 indicates hollow housing and guard bar head-down position schematic diagram.
In figure, 1- hollow housing, 2- guard bar, 3- protective cover, 4- rood beam, 5- cilium, 6- apopore.
Specific embodiment
Specific embodiments of the present invention are described in detail with reference to the accompanying drawing.
A kind of MEMS turbulence sensors, as shown in Figure 1, include hollow housing 1,1 side wall of the hollow housing setting water outlet
Hole 6 installs rood beam 4 and cilium 5 in 1 top of hollow housing；1 top end face of hollow housing is uniformly arranged guard bar 2；
1 top of hollow housing covers protective cover 3, and the cilium 5 is pierced by protective cover 3, as shown in Figure 3；It is protected after the sensor lead
Shape uniform deposition parylene film carries out electrical isolation and anti-corrosion protection.
When specific production, 1 material of hollow housing is 316 stainless steels, and overall structure can will be sensed at hollow barrel-shaped
The rood beam and cilium of device are suspended vacantly in hollow housing top.The effect of hollow housing is from protective cover and cilium gap
Between the silt that flows into can be flowed out by hollow housing, rood beam structure periphery will not be deposited in；Hollow housing bottom four goes out
Water hole not only can be with water conservancy diversion, but also can contribute to the silt discharge in hollow housing.Hollow housing size are as follows: shell length
For 3cm, outer diameter 1cm, internal diameter 4mm, shell wall thickness 3mm, the setting of side wall sustained height is there are four apopore, in apopore
The heart is 1cm to shell upper end, and the diameter of apopore is 2mm, shown in Fig. 4.The cross section of hollow housing is an annulus, annular width
It is 3 millimeters, as shown in the figure 6,4 protections are fixed on the position in 3.5 millimeters of the center of circle of the upper surface of hollow housing apart from annulus
Bar.The upright position of guard bar is consistent with the upright position of apopore in hollow housing, and guard bar 2 and 6 position of apopore are corresponding,
That is 2 axis of guard bar and 6 axis vertical take-off of apopore, with the relative position of hollow housing as shown in the figure 5.Guard bar has one due to it
Fixed intensity can prevent large granular impurity or marine creature from destroying to the ciliary structures being exposed.
1 top end face of hollow housing is evenly distributed with 4 guard bars 2；2 material of guard bar is 316 stainless steels, size
Are as follows: bar long 1cm, diameter 2mm；Guard bar perspective plane center and hollow housing top end face centre distance 3.5mm, as shown in Figure 7.
3 material of protective cover is nylon, is processed by 3D printing technique or precision molding technology to protective cover,
Its lower mouth outer diameter 5mm, outer diameter 1mm suitable for reading, 500 microns of wall thickness, as shown in Figure 2.It is to guarantee do not influencing sensor just that it, which is acted on,
Often under the premise of work, the destruction to rood beam such as ocean foreign matter is prevented as far as possible.
The packaging method of turbulence sensors is as follows:
(1), rood beam 4 and cilium 5 are installed in 1 top of hollow housing；
(2), on 4 top of hollow housing, UV gluing connects protective cover 3, then with ultraviolet light by UV adhesive curing；
(3), it using being put into parylene film deposition system after the sensor lead of the present embodiment size production, is added
3.2 grams of parylene particles open machine, after a period of time, sensor surface is just into the hopper of film deposition system
It deposited one layer 2 microns thick of fine and close parylene film.
The advantages of the present invention over the prior art are that: the present invention does the framework platform of sensor using hollow housing,
It can prevent accumulation of the silt around sensor rood beam；Stop large granular impurity to sensitive structure using stainless steel protection bar
Destruction；Subtle protection is carried out to cross girder construction in sensor using nylon protective cover；Pass through conformal uniform deposition
Parylene film can achieve electrical isolation and etch-proof effect.
It should be noted last that the above examples are only used to illustrate the technical scheme of the present invention and are not limiting, although ginseng
It is described in detail according to the embodiment of the present invention, those skilled in the art should understand that, to technical solution of the present invention
It is modified or replaced equivalently, without departure from the spirit and scope of technical solution of the present invention, claim should all be covered
In protection scope.
Claims (1)
1. a kind of MEMS turbulence sensors, it is characterised in that: including hollow housing (1), hollow housing (1) side wall is provided
Water hole (6) installs rood beam (4) and cilium (5) in hollow housing (1) top；Hollow housing (1) top end face is uniformly distributed
It is arranged guard bar (2)；Hollow housing (1) top covers protective cover (3), and the cilium (5) is pierced by protective cover (3)；
Conformal uniform deposition parylene film after the sensor lead, 2 microns of the parylene film thickness；
Hollow housing (1) material is 316 stainless steels, size are as follows: shell length 3cm, outer diameter 1cm, internal diameter are
4mm, shell wall thickness 3mm, the setting of side wall sustained height are 1cm to shell upper end there are four apopore, the center of apopore, are discharged
The diameter in hole is 2mm；
Hollow housing (1) top end face is evenly distributed with 4 guard bars (2)；Guard bar (2) material is 316 stainless steels, size
Are as follows: bar long 1cm, diameter 2mm；Guard bar perspective plane center and hollow housing top end face centre distance 3.5mm；
Protective cover (3) material be nylon, lower mouth outer diameter 5mm, outer diameter 1mm suitable for reading, 500 microns of wall thickness；
The guard bar (2) is corresponding with apopore (6) position, i.e. guard bar (2) axis and apopore (6) axis vertical take-off；
Packaging method is as follows: Step 1: installing rood beam (4) and cilium (5) in hollow housing (1) top；Step 2: in
Empty capsid (1) top UV gluing connects protective cover (3), then with ultraviolet light by UV adhesive curing；Step 3: by being put after sensor lead
Enter in parylene film deposition system, parylene particle is added into the hopper of film deposition system, opens machine, passes through
After a period of time, sensor surface just deposited one layer of densification parylene film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201610488805.4A CN106153243B (en) | 2016-06-29 | 2016-06-29 | The packaging method of MEMS turbulence sensors |
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| CN201610488805.4A CN106153243B (en) | 2016-06-29 | 2016-06-29 | The packaging method of MEMS turbulence sensors |
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| CN106153243A CN106153243A (en) | 2016-11-23 |
| CN106153243B true CN106153243B (en) | 2019-03-29 |
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| CN201610488805.4A Active CN106153243B (en) | 2016-06-29 | 2016-06-29 | The packaging method of MEMS turbulence sensors |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016124410A1 (en) * | 2016-12-14 | 2018-06-14 | Trafag Ag | Method for producing a pressure sensor element as well as pressure sensor measuring element available therewith |
| CN107218932B (en) * | 2017-06-03 | 2019-09-20 | 中北大学 | Common mode inhibition vibration compensation sensor structure towards MEMS turbulence detecting |
| CN110068310B (en) * | 2019-04-28 | 2021-10-08 | 中北大学 | High-reliability ocean turbulence sensing device |
| CN110132395A (en) * | 2019-06-27 | 2019-08-16 | 中国电子科技集团公司第五十四研究所 | A kind of MEMS vector hydrophone having overcurrent protection structure |
| CN113532520B (en) * | 2021-07-06 | 2022-07-12 | 吉林大学 | Vector sensor, vector sensing device, and method for manufacturing vector sensor |
| CN115096270A (en) * | 2022-05-11 | 2022-09-23 | 嘉庚创新实验室 | High-sensitivity durable turbulence detector and equipment |
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| CN105181118A (en) * | 2015-10-17 | 2015-12-23 | 中北大学 | Broadband MEMS vector hydrophone simulating seal beard |
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| KR101580922B1 (en) * | 2014-05-23 | 2015-12-30 | 국방과학연구소 | Inertial vector type hydrophone |
| WO2016068804A1 (en) * | 2014-10-28 | 2016-05-06 | Massachusetts Institute Of Technology | A biomimetic sensor structure |
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| CN102620814A (en) * | 2012-03-30 | 2012-08-01 | 中北大学 | Orange-peel encapsulating structure for bionic vector hydrophone of micro-electro-mechanical system |
| CN105181118A (en) * | 2015-10-17 | 2015-12-23 | 中北大学 | Broadband MEMS vector hydrophone simulating seal beard |
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