CN106153243A - The method for packing of MEMS turbulence sensors - Google Patents
The method for packing of MEMS turbulence sensors Download PDFInfo
- Publication number
- CN106153243A CN106153243A CN201610488805.4A CN201610488805A CN106153243A CN 106153243 A CN106153243 A CN 106153243A CN 201610488805 A CN201610488805 A CN 201610488805A CN 106153243 A CN106153243 A CN 106153243A
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- Prior art keywords
- hollow housing
- mems
- guard bar
- turbulence sensors
- protective cover
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Micromachines (AREA)
- Prevention Of Electric Corrosion (AREA)
Abstract
The present invention relates to oceanic turbulence detection, specifically a kind of MEMS turbulence sensors method for packing.The present invention is directed to the technical bottleneck problem that MEMS turbulence sensors encapsulates at marine application reliability; propose the protected mode that Parylene thin-film deposition, protective cover, guard bar and hollow housing combine, solve the problems such as electric insulation, anticorrosion, Bear high pressure, anticollision, sediment prevention blocking.The present invention is applicable to the encapsulation of MEMS turbulence sensors.
Description
Technical field
The present invention relates to oceanic turbulence field of detecting, specifically a kind of MEMS turbulence sensors method for packing.
Background technology
Along with developing rapidly of physical oceangraphy, it has been recognized that minute yardstick oceanic turbulence is double in such as ocean interior
Diffusion, Internal wave breaking, the aspect such as propagation of sound wave have played important function.Explore oceanic turbulence, grasp oceanic turbulence knowledge for
Human intelligible ocean energy and transport of substances mechanism play an important role.In December, 2014, academician of the Chinese Academy of Sciences's Wu Lixin is taught
Award the concept proposing " transparent ocean ", wherein contain the fine observation to oceanic turbulence.
Due to the adverse circumstances that deep-sea is unique, sea sensor needs particularly encapsulation to adapt it to this environment.In recent years
Coming, many individuals across the country proposes many methods with regard to the encapsulation of sea sensor, and Northcentral University Li Zhen, Zhang Guojun etc. are at article
" design and research of MEMS bionic vector hydrophone encapsulating structure " mentions a kind of encapsulation utilizing entrant sound cap and silicone oil, passes through
The entrant sound cap that polyurethane material makes stops sea water and the impurity impact on sensing head, and pours into silicone oil guarantee electricity in entrant sound cap
Insulate in road.The bionical piezoresistive transducer of this MEMS may apply to oceanic turbulence sensory field, but this encapsulating structure
Shortcoming be turbulent space resolution limitations in the size of entrant sound cap, and sensitivity also can be affected by entrant sound cap and
Reduce.
University Of Tianjin paddy is of heap of stone, Liu Yuhong etc. propose in article " design of ocean shear flow sensor structure and test " one
Tieing up shear flow sensor, it utilizes piezoelectric ceramics to measure shearing force, and front end has cantilever beam and probe to increase the sensitivity effect of shearing force
Really, by Steel material housing protection piezoelectric ceramics and cantilever beam, rubber is utilized back-end circuit to be isolated with sea water.Germany
Hartmut Prandkeh, Klaus Pfeiffer etc. are at " Shear Probe for Use in Operational
Microstructure Measuring Systems " in also mentioned this structure.But, due to conventional fine processing and group
Dress mode is highly vulnerable to breakage the miniature rood beam structure of the bionical piezoresistive transducer of MEMS, and this packaged type is not particularly suited for MEMS
Bionical piezoresistive transducer.
Owing to above encapsulation is not fully solved MEMS bionical piezoresistive transducer series of problems in abyssal environment.
So, during the deep-sea reliability encapsulation of design sensor, need to consider emphatically its resist voltage resistance, corrosion resistance and electrical insulating property,
The problems such as anti-foreign body impact.
Summary of the invention
The present invention is to solve MEMS turbulence sensors in the course of the work, marine silt and large granular impurity are to sensor
The impact of sensing unit and sea water electric conductivity and corrosivity, on problems such as integrally-built impacts, propose Parylene thin film and form sediment
The protected mode that long-pending, protective cover, guard bar and hollow housing combine.
The present invention adopts the following technical scheme that realization:
A kind of MEMS turbulence sensors, including hollow housing, described hollow housing sidewall arranges apopore, described hollow housing top
Rood beam and cilium are installed in end；Described hollow housing top end face is uniform arranges guard bar；Guarantor is added a cover on described hollow housing top
Guard shield, described cilium passes protective cover；Conformal uniform deposition parylene thin film after this sensor lead.
MEMS turbulence sensors method for packing is as follows:
(1), rood beam and cilium are installed in hollow housing top；
(2), at the gluing even protective cover of hollow housing top UV, then with ultraviolet by UV adhesive curing；
(3), will put in parylene film deposition system after sensor lead, add parylene granule to thin-film deposition system
In the hopper of system, opening machine, through after a period of time, sensor surface just deposited one layer of fine and close parylene thin film.
The present invention is directed to deep-sea detecting application electric insulation, anticorrosion, Bear high pressure, anticollision, sediment prevention blocking etc. ask
Topic, turbulence sensors system integration scheme is as above.At the outer conformal deposited Parylene(Parylene of sensor) thin film, this thin film was both
Fine and close waterproof, cilium and rood beam adhesion strength can be reinforced again.Protective cover is greatly reduced cilium-rood beam structure and is collided several
Rate, plays position-limiting action to fibre swing, realizes guide functions simultaneously, reduces flow noise.Guard bar reduces foreign body collision probability,
By appropriate design guard bar diameter and spacing, reduce flow noise as far as possible, protect ciliary structures simultaneously.Rood beam hollow design,
The most not only water conservancy diversion but also sediment prevention blocking.
The present invention is directed to the technical bottleneck problem that MEMS turbulence sensors encapsulates at marine application reliability, propose
The protected mode that Parylene thin-film deposition, protective cover, guard bar and hollow housing combine, solves electric insulation, anticorrosion, resistance to height
The problems such as hydrostatic pressing, anticollision, sediment prevention blocking, it is adaptable to the encapsulation of MEMS turbulence sensors.
Accompanying drawing explanation
Fig. 1 represents the overall structure schematic diagram of MEMS turbulence sensors.
Fig. 2 represents the sectional schematic diagram of protective cover.
Fig. 3 represents that cilium passes the schematic diagram of protective cover.
Fig. 4 represents the partial cutaway schematic view of hollow housing.
Fig. 5 represents guard bar schematic diagram corresponding with the position of apopore.
Fig. 6 represents hollow housing and guard bar schematic diagram.
Fig. 7 represents hollow housing and guard bar head-down position schematic diagram.
In figure, 1-hollow housing, 2-guard bar, 3-protective cover, 4-rood beam, 5-cilium, 6-apopore.
Detailed description of the invention
Below in conjunction with the accompanying drawings the specific embodiment of the present invention is described in detail.
A kind of MEMS turbulence sensors, as it is shown in figure 1, include hollow housing 1, described hollow housing 1 sidewall arranges water outlet
Hole 6, installs rood beam 4 and cilium 5 in described hollow housing 1 top；Described hollow housing 1 top end face is uniform arranges guard bar 2；
Protective cover 3 is added a cover on described hollow housing 1 top, and described cilium 5 passes protective cover 3, as shown in Figure 3；Protect after this sensor lead
Shape uniform deposition parylene thin film, carries out electric insulation and anti-corrosion protection.
When specifically making, described hollow housing 1 material is 316 rustless steels, and overall structure becomes hollow barrel-shaped, can will sense
The rood beam of device and cilium is unsettled is fixed in hollow housing top.The effect of hollow housing is from protective cover and cilium space
Between flow into silt can flow out through hollow housing, rood beam structure periphery will not be deposited in；Bottom hollow housing, four go out
Water hole is possible not only to water conservancy diversion, and can aid in and discharged by the silt in hollow housing.Hollow housing is a size of: shell length
For 3cm, external diameter is 1cm, and internal diameter is 4mm, housing wall thickness 3mm, and sidewall sustained height is provided with four apopores, in apopore
The heart is 1cm to housing upper end, and a diameter of 2mm of apopore, shown in Fig. 4.The cross section of hollow housing is an annulus, annular width
It is 3 millimeters, as shown in the figure 6,4 protections are fixed in the position in 3.5 millimeters of the center of circle of the upper surface distance annulus of hollow housing
Bar.The upright position of guard bar is consistent with the upright position of apopore in hollow housing, and guard bar 2 is corresponding with apopore 6 position,
I.e. guard bar 2 axis and apopore 6 orthogonal axe, with the relative position of hollow housing as shown in the figure 5.Guard bar has one due to it
Fixed intensity, is possible to prevent large granular impurity or marine creature to destroy the ciliary structures come out.
Uniform 4 guard bars 2 of described hollow housing 1 top end face；Described guard bar 2 material is 316 rustless steels, its size
For: the long 1cm of bar, a diameter of 2mm；Center, guard bar perspective plane and hollow housing top end face centre distance 3.5mm, as shown in Figure 7.
Described protective cover 3 material is nylon, is processed protective cover by 3D printing technique or precision molding technology,
Its end opening external diameter 5mm, external diameter 1mm suitable for reading, wall thickness 500 microns, as shown in Figure 2.Its effect is just not affect sensor in guarantee
Often on the premise of work, prevent the destruction to rood beam such as ocean foreign body as far as possible.
The method for packing of turbulence sensors is as follows:
(1), rood beam 4 and cilium 5 are installed in hollow housing 1 top；
(2), at the gluing even protective cover 3 of hollow housing 4 top UV, then with ultraviolet by UV adhesive curing；
(3), use the present embodiment size make sensor lead after put in parylene film deposition system, add 3.2
Gram parylene granule, in the hopper of film deposition system, opens machine, through after a period of time, and sensor surface just deposit
One layer 2 microns thick fine and close parylene thin film.
Present invention advantage compared with prior art is: the present invention uses hollow housing to do the framework platform of sensor,
It is possible to prevent silt accumulation around sensor rood beam；Large granular impurity is to sensitive structure to utilize stainless steel protection bar to stop
Destruction；Utilize nylon protective cover that rood beam structure in sensor is carried out trickle protection；By conformal uniform deposition
Parylene thin film can reach electric insulation and etch-proof effect.
It should be noted last that, above example is only in order to illustrate technical scheme and unrestricted, although ginseng
It is described in detail according to the embodiment of the present invention, it will be understood by those within the art that, to technical scheme
Modifying or equivalent, without departure from the spirit and scope of technical scheme, it all should contain claim
In protection domain.
Claims (7)
1. the method for packing of a MEMS turbulence sensors, it is characterised in that: comprise the steps:
(1), rood beam (4) and cilium (5) are installed in hollow housing (1) top；
(2), at the gluing even protective cover (3) of hollow housing (4) top UV, then with ultraviolet by UV adhesive curing；
(3), will put in parylene film deposition system after sensor lead, add parylene granule to thin-film deposition system
In the hopper of system, opening machine, through after a period of time, sensor surface just deposited one layer of fine and close parylene thin film.
2. a MEMS turbulence sensors, it is characterised in that: include that hollow housing (1), described hollow housing (1) sidewall are arranged out
Water hole (6), installs rood beam (4) and cilium (5) in described hollow housing (1) top；Described hollow housing (1) top end face is uniform
Guard bar (2) is set；Protective cover (3) is added a cover on described hollow housing (1) top, and described cilium (5) passes protective cover (3)；
Conformal uniform deposition parylene thin film after this sensor lead.
MEMS turbulence sensors the most according to claim 2, it is characterised in that: described parylene film thickness 2 microns.
4. according to the MEMS turbulence sensors described in Claims 2 or 3, it is characterised in that: described hollow housing (1) material is
316 rustless steels, its a size of: shell length is 3cm, and external diameter is 1cm, and internal diameter is 4mm, housing wall thickness 3mm, sidewall sustained height
Being provided with four apopores, the center of apopore to housing upper end is 1cm, a diameter of 2mm of apopore.
MEMS turbulence sensors the most according to claim 4, it is characterised in that: described hollow housing (1) top end face uniform 4
Individual guard bar (2)；Described guard bar (2) material is 316 rustless steels, its a size of: the long 1cm of bar, a diameter of 2mm；Guard bar is thrown
Ying Mian center and hollow housing top end face centre distance 3.5mm.
MEMS turbulence sensors the most according to claim 5, it is characterised in that: described protective cover (3) material is nylon, its
End opening external diameter 5mm, external diameter 1mm suitable for reading, wall thickness 500 microns.
MEMS turbulence sensors the most according to claim 5, it is characterised in that: described guard bar (2) and apopore (6) position
Put correspondence, i.e. guard bar (2) axis and apopore (6) orthogonal axe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610488805.4A CN106153243B (en) | 2016-06-29 | 2016-06-29 | The packaging method of MEMS turbulence sensors |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610488805.4A CN106153243B (en) | 2016-06-29 | 2016-06-29 | The packaging method of MEMS turbulence sensors |
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| CN106153243A true CN106153243A (en) | 2016-11-23 |
| CN106153243B CN106153243B (en) | 2019-03-29 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107218932A (en) * | 2017-06-03 | 2017-09-29 | 中北大学 | Towards the common mode inhibition vibration compensation sensor construction of MEMS turbulence detectings |
| CN110068310A (en) * | 2019-04-28 | 2019-07-30 | 中北大学 | High reliability oceanic turbulence sensing device |
| CN110132395A (en) * | 2019-06-27 | 2019-08-16 | 中国电子科技集团公司第五十四研究所 | A kind of MEMS vector hydrophone having overcurrent protection structure |
| CN110476046A (en) * | 2016-12-14 | 2019-11-19 | 特拉法格股份公司 | The method of manufacture pressure sensor measuring cell and thus obtained pressure sensor measuring cell |
| CN113532520A (en) * | 2021-07-06 | 2021-10-22 | 吉林大学 | Vector sensor, vector sensing device, and method for manufacturing vector sensor |
| CN115096270A (en) * | 2022-05-11 | 2022-09-23 | 嘉庚创新实验室 | High-sensitivity durable turbulence detector and equipment |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110476046A (en) * | 2016-12-14 | 2019-11-19 | 特拉法格股份公司 | The method of manufacture pressure sensor measuring cell and thus obtained pressure sensor measuring cell |
| CN107218932A (en) * | 2017-06-03 | 2017-09-29 | 中北大学 | Towards the common mode inhibition vibration compensation sensor construction of MEMS turbulence detectings |
| CN107218932B (en) * | 2017-06-03 | 2019-09-20 | 中北大学 | Common mode inhibition vibration compensation sensor structure towards MEMS turbulence detecting |
| CN110068310A (en) * | 2019-04-28 | 2019-07-30 | 中北大学 | High reliability oceanic turbulence sensing device |
| CN110132395A (en) * | 2019-06-27 | 2019-08-16 | 中国电子科技集团公司第五十四研究所 | A kind of MEMS vector hydrophone having overcurrent protection structure |
| CN113532520A (en) * | 2021-07-06 | 2021-10-22 | 吉林大学 | Vector sensor, vector sensing device, and method for manufacturing vector sensor |
| CN113532520B (en) * | 2021-07-06 | 2022-07-12 | 吉林大学 | Vector sensor, vector sensing device, and method for manufacturing vector sensor |
| CN115096270A (en) * | 2022-05-11 | 2022-09-23 | 嘉庚创新实验室 | High-sensitivity durable turbulence detector and equipment |
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| CN106153243B (en) | 2019-03-29 |
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