CN106145618A - A kind of electronic glass that can reduce harmful gas emission oozes the control method of stannum amount - Google Patents

A kind of electronic glass that can reduce harmful gas emission oozes the control method of stannum amount Download PDF

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Publication number
CN106145618A
CN106145618A CN201510192515.0A CN201510192515A CN106145618A CN 106145618 A CN106145618 A CN 106145618A CN 201510192515 A CN201510192515 A CN 201510192515A CN 106145618 A CN106145618 A CN 106145618A
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China
Prior art keywords
tin bath
molten tin
reduce
stannum amount
glass
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Pending
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CN201510192515.0A
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Chinese (zh)
Inventor
吕锁荣
郝成东
王韶明
何海平
胡崇林
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Wujiang CSG Glass Co Ltd
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Wujiang CSG Glass Co Ltd
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Priority to CN201510192515.0A priority Critical patent/CN106145618A/en
Publication of CN106145618A publication Critical patent/CN106145618A/en
Pending legal-status Critical Current

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Abstract

The invention provides a kind of electronic glass that can reduce harmful gas emission and ooze the control method of stannum amount, its component content first passing through adjustment glass body oozes stannum amount to reduce glass, then reduce and ooze stannum amount by adjusting molten tin bath temperature, reduce ooze stannum amount again by controlling tin liquor flowing at molten tin bath according to gear flag;Simultaneously installing tin liquor cooler at molten tin bath and control temperature, carry out realizing oozing the further reduction of stannum amount, reduce ooze stannum amount to carry out a step, it regulates the composition of protective gas simultaneously, reduces its dew point, and the invention provides a rational SO2Circulation, makes electronic glass ooze stannum amount and has reached beyond thought effect.The present invention, by a series of adjustment, optimizes the control method oozing stannum amount, reduces energy consumption, decrease SO2Discharge capacity, reduce the pollution to environment.

Description

A kind of electronic glass that can reduce harmful gas emission oozes the control method of stannum amount
Technical field
The invention belongs to float glass field, be specifically related to a kind of electronic glass that can reduce harmful gas emission and ooze the control method of stannum amount.
Background technology
Electronic glass, means the class high-tech product that can be applicable to electronics, microelectronics, optoelectronic areas, is mainly used in making integrated circuit and having the glass material of the Functional Unit devices such as photoelectricity, thermoelectricity, acousto-optic, magneto-optic.Electric substrate glass is one of special glass most widely used, the most with fastest developing speed in the new and high technologies such as microelectronics, photoelectron and new forms of energy.Mainly include liquid crystal and substrate used for solar batteries;Substrate used by memorizer (disk and CD);Photomask-blank (also known as substrate glass), this is the photomask blank preparing photoetching in integrated circuit fabrication process.The development of modern science and technology be unable to do without these electronic glasses.Require and the market demand to meet the technology of electronic glass, it is necessary to solve to affect the principal element of electronic glass quality--ooze stannum.
Electronic glass to ooze stannum amount upper and lower surface different, the mass fraction of lower surface tin-oxide is about 2%, and length of penetration, in 10--30 μm, has characteristic peak on depth profile curve;The mass fraction of upper surface tin-oxide is about 0.1%, and its characteristic peaks is only the 1% of lower surface.The tin-oxide of glass surface mainly exists with Tin monoxide, Sn2+Account for and all ooze the 80% of stannum amount, Sn4+Account for Sn at 20%, and lower glass surface 0 1.5 μm4+Higher and during annealing the oxidation of content is relevant.
Affect electronic glass and ooze the factor of stannum predominantly: iron content, sulfur content, temperature, the distribution of atmosphere and pressure, tin liquor stream, SO2Gas etc..
Summary of the invention
It is desirable to provide a kind of electronic glass that can reduce harmful gas emission oozes the control method of stannum amount, to ensure that electronic glass oozes stannum amount and meets relevant standard.
In order to solve the problems referred to above, a kind of electronic glass that can reduce harmful gas emission control method of oozing stannum amount that the present invention provides have employed following technical scheme:
First optimizing the main composition of electronic glass, after optimization, the main component of glass is as follows: SiO2: 72.3%;Al2O3: 71%;Fe2O3: 0.099%;CaO:8.77%;MgO:3.86%;K2O:0.15%;Na2O:13.81%;SO3: 0.28%;
B. optimize tin groove structure, to molten tin bath is outside, molten tin bath bleeding device is installed;
C. tin groove inner glass cooling parameter is optimized: molten tin bath bottom high-temperature region hands is surveyed infrared at 120 ~ 130 DEG C, middle warm area hands is surveyed infrared at 110 ~ 120 DEG C, low-temperature space hands is surveyed infrared at 100 ~ 110 DEG C, increases cooling wind, the impact on molten tin bath of the adjusting ambient temperature at molten tin bath bottom simultaneously;
D. optimizing in molten tin bath position and the quantity keeping off flag, warm area high at molten tin bath, middle installs 6 roads gear flags, stop high temperature tin liquor to back zone runner, in reduction, low district molten tin bath temperature reduce its diffusion velocity at glass surface, reduce and ooze stannum amount;
E. in molten tin bath, warm area installation 3, to tin liquor cooler, reduces tin liquor temperature, reduces and oozes stannum amount;;
Optimizing protection gas (hydrogen) dew point, the dew point temperature after optimization is-65 DEG C the most simultaneously, wherein O in protection gas2Content is 2ppm, H2O content is 2ppm;
G. tin bath outlet SO is optimized2Flow, tin bath outlet SO after optimization2Flow 250 liters per hour.
Preferably, described molten tin bath bleeding device includes diffusing interface, connector and aeration portion, and the described interface that diffuses is connected with molten tin bath, and described connector connects aeration portion and diffuses interface, and described aeration portion leads to outdoor.
Preferably, the gear flag that described high-temperature region is installed is that immersion keeps off flag, and the gear flag that described middle warm area is installed is for commonly keeping off flag.
The beneficial effects of the present invention is: the invention provides a kind of electronic glass that can reduce harmful gas emission and ooze the control method of stannum amount, its component content first passing through adjustment glass body oozes stannum amount to reduce glass, then reduce and ooze stannum amount by adjusting molten tin bath temperature, reduce ooze stannum amount again by controlling tin liquor flowing at molten tin bath according to gear flag;Simultaneously installing tin liquor cooler at molten tin bath and control temperature, carry out realizing oozing the further reduction of stannum amount, reduce ooze stannum amount to carry out a step, it regulates the composition of protective gas simultaneously, reduces its dew point, and the invention provides a rational SO2Circulation, makes electronic glass ooze stannum amount and has reached beyond thought effect, meets relevant regulation.The present invention, by a series of adjustment, optimizes the control method oozing stannum amount, reduces energy consumption, decrease SO2Discharge capacity, reduce the pollution to environment.
Accompanying drawing explanation
The molten tin bath bleeding device schematic diagram that Fig. 1 provides for the present invention.
Detailed description of the invention
In order to be easier to understand present disclosure, below in conjunction with specific embodiment, the present invention is described further.
Embodiment 1
First optimizing the main composition of electronic glass, after optimization, the main component of glass is as follows: SiO2: 72.3%;Al2O3: 71%;Fe2O3: 0.099%;CaO:8.77%;MgO:3.86%;K2O:0.15%;Na2O:13.81%;SO3: 0.28%, see table with the contrast before optimizing:
B. optimize tin groove structure, to molten tin bath high-temperature region and middle warm area, molten tin bath bleeding device is installed, strengthens and discharge molten tin bath waste gas;
C. tin groove inner glass cooling parameter is optimized: molten tin bath bottom high-temperature region hands is surveyed infrared at 120 ~ 130 DEG C, middle warm area hands is surveyed infrared at 110 ~ 120 DEG C, low-temperature space hands is surveyed infrared at 100 ~ 110 DEG C, increases cooling wind, the impact on molten tin bath of the adjusting ambient temperature at molten tin bath bottom simultaneously;
D. optimizing in molten tin bath position and the quantity keeping off flag, high at molten tin bath, middle warm area installs 6 roads gear flags, stop high temperature tin liquor to back zone runner, in reduction, low district molten tin bath temperature reduce its diffusion velocity at glass surface, reduce and ooze stannum amount;
E. in molten tin bath, warm area installation 3, to tin liquor cooler, reduces tin liquor temperature, reduces and oozes stannum amount;Variations in temperature such as following table after installation tin liquor cooler:
Optimizing protection gas (hydrogen) dew point, the dew point temperature after optimization is-65 DEG C the most simultaneously, wherein O in protection gas2Content is 2ppm, H2O content is 2ppm;
G. tin bath outlet SO is optimized2Flow, tin bath outlet SO after optimization2Flow 250 liters per hour.
After above-mentioned optimization, electronic glass is oozed stannum amount and is measured, measurement result such as following table, meet relevant regulation.
Embodiment 2
Preferably, in embodiment 1, described molten tin bath bleeding device includes diffusing interface, connector and aeration portion, and the described interface that diffuses is connected with molten tin bath, and described connector connects aeration portion and diffuses interface, and described aeration portion interconnects and leads to outdoor.
Embodiment 3
Preferably, in embodiment 1, the gear flag that described high-temperature region is installed is that immersion keeps off flag, and the gear flag that described middle warm area is installed is for commonly keeping off flag.

Claims (3)

1. the electronic glass that can reduce harmful gas emission oozes the control method of stannum amount, it is characterised in that: have employed following technical scheme:
First optimizing the main composition of electronic glass, after optimization, the main component of glass is as follows: SiO2: 72.3%;Al2O3: 71%;Fe2O3: 0.099%;CaO:8.77%;MgO:3.86%;K2O:0.15%;Na2O:13.81%;SO3: 0.28%;
Optimize tin groove structure, to molten tin bath is outside, molten tin bath bleeding device is installed;
Optimize tin groove inner glass cooling parameter: molten tin bath bottom high-temperature region hands is surveyed infrared at 120 ~ 130 DEG C, and middle warm area hands is surveyed infrared at 110 ~ 120 DEG C, and low-temperature space hands is surveyed infrared at 100 ~ 110 DEG C, increase cooling wind, the impact on molten tin bath of the adjusting ambient temperature at molten tin bath bottom simultaneously;
Optimizing in molten tin bath position and the quantity keeping off flag, high at molten tin bath, middle warm area installs 6 roads gear flags, stop high temperature tin liquor to back zone runner, in reduction, low district molten tin bath temperature reduce its diffusion velocity at glass surface, reduce and ooze stannum amount;
In molten tin bath, warm area installation 3 is to tin liquor cooler, reduces tin liquor temperature, reduces and oozes stannum amount;;
Optimizing protection gas (hydrogen) dew point, the dew point temperature after optimization is-65 DEG C simultaneously, wherein O in protection gas2Content is 2ppm, H2O content is 2ppm;
Optimize tin bath outlet SO2Flow, tin bath outlet SO after optimization2Flow 250 liters per hour.
A kind of electronic glass that can reduce harmful gas emission the most according to claim 1 oozes the control method of stannum amount, it is characterized in that: described molten tin bath bleeding device includes diffusing interface, connector and aeration portion, the described interface that diffuses is connected with molten tin bath, described connector connects aeration portion and diffuses interface, and described aeration portion leads to outdoor.
A kind of electronic glass that can reduce harmful gas emission the most according to claim 1 oozes the control method of stannum amount, it is characterised in that: the gear flag that described high-temperature region is installed is that immersion keeps off flag, and the gear flag that described middle warm area is installed is for commonly keeping off flag.
CN201510192515.0A 2015-04-22 2015-04-22 A kind of electronic glass that can reduce harmful gas emission oozes the control method of stannum amount Pending CN106145618A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109020162A (en) * 2018-08-21 2018-12-18 台玻福建光伏玻璃有限公司 A kind of production technology of ultra-thin photovoltaic glass
CN112851088A (en) * 2021-02-09 2021-05-28 河南旭阳光电科技有限公司 Diffusing device of molten tin bath
CN114477730A (en) * 2022-02-25 2022-05-13 咸宁南玻玻璃有限公司 Production method of float glass with low tin infiltration amount

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679389A (en) * 1969-07-15 1972-07-25 Asahi Glass Co Ltd Method and apparatus for the manufacture of flat glass
CN103951168A (en) * 2014-01-23 2014-07-30 重庆万盛浮法玻璃有限公司 Float glass production line melting furnace tin bath with clogging-free atmosphere flow deflector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679389A (en) * 1969-07-15 1972-07-25 Asahi Glass Co Ltd Method and apparatus for the manufacture of flat glass
CN103951168A (en) * 2014-01-23 2014-07-30 重庆万盛浮法玻璃有限公司 Float glass production line melting furnace tin bath with clogging-free atmosphere flow deflector

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
吕鑫: "《浮法玻璃成形生产操作》", 31 March 2014, 武汉理工大学出版社 *
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109020162A (en) * 2018-08-21 2018-12-18 台玻福建光伏玻璃有限公司 A kind of production technology of ultra-thin photovoltaic glass
CN109020162B (en) * 2018-08-21 2021-04-06 台玻福建光伏玻璃有限公司 Production process of ultrathin photovoltaic glass
CN112851088A (en) * 2021-02-09 2021-05-28 河南旭阳光电科技有限公司 Diffusing device of molten tin bath
CN112851088B (en) * 2021-02-09 2023-01-06 河南旭阳光电科技有限公司 Diffusing device of molten tin bath
CN114477730A (en) * 2022-02-25 2022-05-13 咸宁南玻玻璃有限公司 Production method of float glass with low tin infiltration amount

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