CN106119789A - A kind of preparation method of carbon copper composite target material - Google Patents
A kind of preparation method of carbon copper composite target material Download PDFInfo
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- CN106119789A CN106119789A CN201610656529.8A CN201610656529A CN106119789A CN 106119789 A CN106119789 A CN 106119789A CN 201610656529 A CN201610656529 A CN 201610656529A CN 106119789 A CN106119789 A CN 106119789A
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- Prior art keywords
- target
- protective layer
- copper
- carbon
- sand blasted
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/10—Alloys containing non-metals
- C22C1/1005—Pretreatment of the non-metallic additives
- C22C1/101—Pretreatment of the non-metallic additives by coating
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/10—Alloys containing non-metals
- C22C1/1036—Alloys containing non-metals starting from a melt
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/10—Alloys containing non-metals
- C22C1/1036—Alloys containing non-metals starting from a melt
- C22C1/1047—Alloys containing non-metals starting from a melt by mixing and casting liquid metal matrix composites
- C22C1/1052—Alloys containing non-metals starting from a melt by mixing and casting liquid metal matrix composites by mixing and casting metal matrix composites with reaction
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C9/00—Alloys based on copper
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/08—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of copper or alloys based thereon
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Composite Materials (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
The invention discloses the preparation method of a kind of carbon copper composite target material, obtain carbon copper composite target material and there is good resistance to bending performance, it is in the case of repeating to bend repeatedly, the problem not havinging fracture, preferably the part surface of target is carried out blasting treatment, do not interfere with other of target simultaneously and need not the part of sandblasting.
Description
Technical field
The present invention relates to alloy material and manufacture field, be specifically related to the preparation method of a kind of carbon copper composite target material.
Background technology
In recent years, growing along with sputtering target material and sputtering technology, sputtering target material serves more in sputtering technology
Carrying out the most important effect, the quality of sputtering target material has directly influenced the quality of forming film after sputtering.
Carbon copper alloy target is a kind of more typical alloy target material of ratio, and tungsten nickel has low-resistance coefficient, good heat
Stability and non-oxidizability；Meanwhile, good processability, the feature that toughness is high, the carbon copper target material being made up of both raw materials becomes
One of pipe target for semiconductor applications large usage quantity.For now, for the carbon copper target material of semiconductor manufacturing not only to cause
Close property, hardness and can have the highest requirement by processing type, also have the highest requirement to the interior tissue uniformity of material simultaneously.
Owing to, in sputter procedure, the edge of target can leave the particulate matter that sputtering produces, these particulate matters are gradually
Accumulation becomes deposit.Deposit gathers on target and peeling phenomenon (peeling) can occur the most afterwards, sinking of peeling
Long-pending thing not only can affect sputtering environment, is also easy to drop on product surface, causes that product is defective even to be scrapped.To this end, it is existing
There is technology the part non-sputtered region of target can be carried out blasting treatment, the so part surface through sandblasting and become coarse, enter
And become easily to adsorb deposit, reduce peeling phenomenon odds.
Summary of the invention
The present invention provides the preparation method of a kind of carbon copper composite target material, obtains carbon-copper composite target material and has good bending resistance
Folding endurance energy, it is in the case of repeating to bend repeatedly, the problem not havinging fracture, preferably to enter the part surface of target
Row blasting treatment, does not interferes with other of target simultaneously and need not the part of sandblasting.
To achieve these goals, the invention provides the preparation method of a kind of carbon copper composite target material, the method include as
Lower step:
(1) target is prepared
Material with carbon element aqueous solution is carried out ultra high shear power dispersion, then in material with carbon element aqueous solution, is separately added into mantoquita, dispersant
And stabilizer, it being heated to 75 ~ 85 DEG C, hold temperature 30-60min, obtain reactant liquor, the copper ion in reactant liquor uniformly separates out at carbon material
The surface of material；Described dispersant is any in polyvinylpyrrolidone, polyvinyl alcohol, poly-ethylene methacrylic ether, polyacrylic acid
One, or any one non-ionic interfacial agent, or any one chelating agen；Described stabilizer be polymine,
Any one in sodium citrate, Fructus Vitis viniferae candy, sodium lauryl sulphate, polyvinylpyrrolidone, or any one dendroid is high
Molecule；
Reactant liquor is carried out lyophilization, removes solvent, it is thus achieved that surface adsorption has the material with carbon element powder of nano copper particle；
Select raw copper, vacuum smelting equipment is melt into high-temperature fusion liquid copper slurry；
The material with carbon element powder that surface adsorption has nano copper particle puts in copper slurry, obtains high temperature mixed slurry, with surface adsorption
Having the material with carbon element powder of nano copper particle and the quality summation of raw copper is 100% meter, and surface adsorption has the carbon material of nano copper particle
Material powder, the percentage composition of raw copper are respectively as follows: 15 ~ 35%, 65 ~ 85%；
The warm heat treatment that carries out homogenizing for 5 ~ 7 hours, afterwards, cooling is held in high temperature mixed slurry is poured into the mould of 750 ~ 900 DEG C
Obtaining ingot casting, and ingot casting carries out the cold rolling heat treatment that prolongs and anneal, the Parameter Conditions of annealing heat treatment is: temperature is 550 ~ 650
DEG C, the time is 2 ~ 3h, final machine tooling, can obtain carbon-copper composite target material；
(2) blasting treatment
Thering is provided described carbon copper alloy target, described target includes treating sand blasted area and need not the reservation region of sandblasting；
At least close part treating sand blasted area in described reservation region, and part treats that protective layer is pasted in sand blasted area；
Remove and be positioned at the protective layer treating sand blasted area, treat sand blasted area be completely exposed target；
Target is treated, and sand blasted area carries out blasting treatment；
After the step of blasting treatment, remove remaining protective layer on target.
Preferably, in described step (2), it is provided that the step of described carbon copper alloy target includes: remove to be positioned at and treat sandblasting
The step of the protective layer in region includes: use the mode of milling remove described in treat the protective layer of sand blasted area；
Wherein, remove and be positioned at the step of the protective layer treating sand blasted area and include: at lathe tool and the target material surface being pasted with protective layer
Between arrange be not more than protective layer thickness gap, make described gap in the range of 0.02mm～0.04mm；
After removal is positioned at the step of the protective layer treating sand blasted area, before carrying out the step of blasting treatment, described target is processed
Method also includes: use blade to treat that sandblasting region surface carries out process of removing photoresist for target；
After pasting the step of protective layer, before carrying out the step of blasting treatment, described target processing method also includes: use lid
The part that protective layer is not pasted in reservation region by plate is blocked.
It is an advantage of the current invention that obtaining carbon-copper composite target material has good resistance to bending performance, it bends repeatedly repeating
In the case of, the problem not havinging fracture, preferably the part surface of target is carried out blasting treatment, do not interfere with target simultaneously
Other of material need not the part of sandblasting.
Detailed description of the invention
Embodiment one
Prepare target
Material with carbon element aqueous solution is carried out ultra high shear power dispersion, then in material with carbon element aqueous solution, is separately added into mantoquita, dispersant
And stabilizer, it being heated to 75 DEG C, hold temperature 30min, obtain reactant liquor, the copper ion in reactant liquor uniformly separates out the table at material with carbon element
Face；Described dispersant is any one in polyvinylpyrrolidone, polyvinyl alcohol, poly-ethylene methacrylic ether, polyacrylic acid, or
Any one non-ionic interfacial agent, or any one chelating agen；Described stabilizer is polymine, citric acid
Any one in sodium, Fructus Vitis viniferae candy, sodium lauryl sulphate, polyvinylpyrrolidone, or any one dendrimer.
Reactant liquor is carried out lyophilization, removes solvent, it is thus achieved that surface adsorption has the material with carbon element powder of nano copper particle.Choosing
By raw copper, vacuum smelting equipment is melt into high-temperature fusion liquid copper slurry.
The material with carbon element powder that surface adsorption has nano copper particle puts in copper slurry, obtains high temperature mixed slurry, with surface
The quality summation of the material with carbon element powder and raw copper that are adsorbed with nano copper particle is 100% meter, and surface adsorption has nano copper particle
Material with carbon element powder, the percentage composition of raw copper are respectively as follows: 15%, 85%.
Holding the warm heat treatment that carries out homogenizing for 5 hours in high temperature mixed slurry is poured into the mould of 750 DEG C, afterwards, cooling obtains
Obtaining ingot casting, and ingot casting carries out the cold rolling heat treatment that prolongs and anneal, the Parameter Conditions of annealing heat treatment is: temperature is 550 DEG C, the time
For 2h, final machine tooling, carbon-copper composite target material can be obtained.
Blasting treatment
Thering is provided described carbon copper alloy target, described target includes treating sand blasted area and need not the reservation region of sandblasting；At least
The close part treating sand blasted area in described reservation region, and partly treat that protective layer is pasted in sand blasted area；Removal is positioned to be painted
The protective layer in sand region, treats sand blasted area be completely exposed target；Target is treated, and sand blasted area carries out blasting treatment；In spray
After the step that sand processes, remove remaining protective layer on target.
Preferably, it is provided that the step of described carbon copper alloy target includes: remove the step being positioned at the protective layer treating sand blasted area
Suddenly include: use the mode of milling remove described in treat the protective layer of sand blasted area.
Wherein, remove and be positioned at the step of the protective layer treating sand blasted area and include: at lathe tool and the target being pasted with protective layer
The gap being not more than protective layer thickness is set between surface, makes described gap in the range of 0.02mm～0.04mm.
After removal is positioned at the step of the protective layer treating sand blasted area, before carrying out the step of blasting treatment, described target
Processing method also includes: use blade to treat that sandblasting region surface carries out process of removing photoresist for target.
After pasting the step of protective layer, before carrying out the step of blasting treatment, described target processing method also includes: adopt
Part reservation region not being pasted protective layer with cover plate is blocked.
Embodiment two
Prepare target
Material with carbon element aqueous solution is carried out ultra high shear power dispersion, then in material with carbon element aqueous solution, is separately added into mantoquita, dispersant
And stabilizer, it being heated to 85 DEG C, hold temperature 60min, obtain reactant liquor, the copper ion in reactant liquor uniformly separates out the table at material with carbon element
Face；Described dispersant is any one in polyvinylpyrrolidone, polyvinyl alcohol, poly-ethylene methacrylic ether, polyacrylic acid, or
Any one non-ionic interfacial agent, or any one chelating agen；Described stabilizer is polymine, citric acid
Any one in sodium, Fructus Vitis viniferae candy, sodium lauryl sulphate, polyvinylpyrrolidone, or any one dendrimer.
Reactant liquor is carried out lyophilization, removes solvent, it is thus achieved that surface adsorption has the material with carbon element powder of nano copper particle.Choosing
By raw copper, vacuum smelting equipment is melt into high-temperature fusion liquid copper slurry.
The material with carbon element powder that surface adsorption has nano copper particle puts in copper slurry, obtains high temperature mixed slurry, with surface
The quality summation of the material with carbon element powder and raw copper that are adsorbed with nano copper particle is 100% meter, and surface adsorption has nano copper particle
Material with carbon element powder, the percentage composition of raw copper are respectively as follows: 35%, 65%.
Holding the warm heat treatment that carries out homogenizing for 7 hours in high temperature mixed slurry is poured into the mould of 900 DEG C, afterwards, cooling obtains
Obtaining ingot casting, and ingot casting carries out the cold rolling heat treatment that prolongs and anneal, the Parameter Conditions of annealing heat treatment is: temperature is 650 DEG C, the time
For 3h, final machine tooling, carbon-copper composite target material can be obtained.
Blasting treatment
Thering is provided described carbon copper alloy target, described target includes treating sand blasted area and need not the reservation region of sandblasting；At least
The close part treating sand blasted area in described reservation region, and partly treat that protective layer is pasted in sand blasted area；Removal is positioned to be painted
The protective layer in sand region, treats sand blasted area be completely exposed target；Target is treated, and sand blasted area carries out blasting treatment；In spray
After the step that sand processes, remove remaining protective layer on target.
Preferably, it is provided that the step of described carbon copper alloy target includes: remove the step being positioned at the protective layer treating sand blasted area
Suddenly include: use the mode of milling remove described in treat the protective layer of sand blasted area.
Wherein, remove and be positioned at the step of the protective layer treating sand blasted area and include: at lathe tool and the target being pasted with protective layer
The gap being not more than protective layer thickness is set between surface, makes described gap in the range of 0.02mm～0.04mm.
After removal is positioned at the step of the protective layer treating sand blasted area, before carrying out the step of blasting treatment, described target
Processing method also includes: use blade to treat that sandblasting region surface carries out process of removing photoresist for target.
After pasting the step of protective layer, before carrying out the step of blasting treatment, described target processing method also includes: adopt
Part reservation region not being pasted protective layer with cover plate is blocked.
Claims (2)
1. a preparation method for carbon copper composite target material, the method comprises the steps:
(1) target is prepared
Material with carbon element aqueous solution is carried out ultra high shear power dispersion, then in material with carbon element aqueous solution, is separately added into mantoquita, dispersant
And stabilizer, it being heated to 75 ~ 85 DEG C, hold temperature 30-60min, obtain reactant liquor, the copper ion in reactant liquor uniformly separates out at carbon material
The surface of material；Described dispersant is any in polyvinylpyrrolidone, polyvinyl alcohol, poly-ethylene methacrylic ether, polyacrylic acid
One, or any one non-ionic interfacial agent, or any one chelating agen；Described stabilizer be polymine,
Any one in sodium citrate, Fructus Vitis viniferae candy, sodium lauryl sulphate, polyvinylpyrrolidone, or any one dendroid is high
Molecule；
Reactant liquor is carried out lyophilization, removes solvent, it is thus achieved that surface adsorption has the material with carbon element powder of nano copper particle；
Select raw copper, vacuum smelting equipment is melt into high-temperature fusion liquid copper slurry；
The material with carbon element powder that surface adsorption has nano copper particle puts in copper slurry, obtains high temperature mixed slurry, with surface adsorption
Having the material with carbon element powder of nano copper particle and the quality summation of raw copper is 100% meter, and surface adsorption has the carbon material of nano copper particle
Material powder, the percentage composition of raw copper are respectively as follows: 15 ~ 35%, 65 ~ 85%；
The warm heat treatment that carries out homogenizing for 5 ~ 7 hours, afterwards, cooling is held in high temperature mixed slurry is poured into the mould of 750 ~ 900 DEG C
Obtaining ingot casting, and ingot casting carries out the cold rolling heat treatment that prolongs and anneal, the Parameter Conditions of annealing heat treatment is: temperature is 550 ~ 650
DEG C, the time is 2 ~ 3h, final machine tooling, can obtain carbon-copper composite target material；
(2) blasting treatment
Thering is provided described carbon copper alloy target, described target includes treating sand blasted area and need not the reservation region of sandblasting；
At least close part treating sand blasted area in described reservation region, and part treats that protective layer is pasted in sand blasted area；
Remove and be positioned at the protective layer treating sand blasted area, treat sand blasted area be completely exposed target；
Target is treated, and sand blasted area carries out blasting treatment；
After the step of blasting treatment, remove remaining protective layer on target.
2. the method for claim 1, it is characterised in that in described step (2), it is provided that described carbon copper alloy target
Step includes: removes and is positioned at the step of the protective layer treating sand blasted area and includes: use the mode of milling remove described in treat sandblasting district
The protective layer in territory；
Wherein, remove and be positioned at the step of the protective layer treating sand blasted area and include: at lathe tool and the target material surface being pasted with protective layer
Between arrange be not more than protective layer thickness gap, make described gap in the range of 0.02mm～0.04mm；
After removal is positioned at the step of the protective layer treating sand blasted area, before carrying out the step of blasting treatment, described target is processed
Method also includes: use blade to treat that sandblasting region surface carries out process of removing photoresist for target；
After pasting the step of protective layer, before carrying out the step of blasting treatment, described target processing method also includes: use lid
The part that protective layer is not pasted in reservation region by plate is blocked.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610656529.8A CN106119789A (en) | 2016-08-12 | 2016-08-12 | A kind of preparation method of carbon copper composite target material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610656529.8A CN106119789A (en) | 2016-08-12 | 2016-08-12 | A kind of preparation method of carbon copper composite target material |
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| CN106119789A true CN106119789A (en) | 2016-11-16 |
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| CN201610656529.8A Pending CN106119789A (en) | 2016-08-12 | 2016-08-12 | A kind of preparation method of carbon copper composite target material |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104651784A (en) * | 2015-03-13 | 2015-05-27 | 福建省诺希科技园发展有限公司 | Manufacturing method of carbon-silver composite target for curved touch screen |
| CN105695943A (en) * | 2014-11-28 | 2016-06-22 | 宁波江丰电子材料股份有限公司 | Target processing method |
-
2016
- 2016-08-12 CN CN201610656529.8A patent/CN106119789A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105695943A (en) * | 2014-11-28 | 2016-06-22 | 宁波江丰电子材料股份有限公司 | Target processing method |
| CN104651784A (en) * | 2015-03-13 | 2015-05-27 | 福建省诺希科技园发展有限公司 | Manufacturing method of carbon-silver composite target for curved touch screen |
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