CN106116135B - A kind of manufacturing method of pure silicon core low loss fiber - Google Patents

A kind of manufacturing method of pure silicon core low loss fiber Download PDF

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Publication number
CN106116135B
CN106116135B CN201610463104.5A CN201610463104A CN106116135B CN 106116135 B CN106116135 B CN 106116135B CN 201610463104 A CN201610463104 A CN 201610463104A CN 106116135 B CN106116135 B CN 106116135B
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silica
fluorine doped
low loss
plug
pure silicon
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CN106116135A (en
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马静
冯高锋
杨军勇
章海峰
陈坚盾
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ZHEJIANG FUTONG OPTICAL FIBER TECHNOLOGY Co Ltd
Futong Group Co Ltd
Hangzhou Futong Communication Technology Co Ltd
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ZHEJIANG FUTONG OPTICAL FIBER TECHNOLOGY Co Ltd
Futong Group Co Ltd
Hangzhou Futong Communication Technology Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01853Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/02Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
    • C03B37/025Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor from reheated softened tubes, rods, fibres or filaments, e.g. drawing fibres from preforms
    • C03B37/027Fibres composed of different sorts of glass, e.g. glass optical fibres
    • C03B37/02763Fibres having axial variations, e.g. axially varying diameter, material or optical properties
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2203/00Fibre product details, e.g. structure, shape
    • C03B2203/10Internal structure or shape details
    • C03B2203/22Radial profile of refractive index, composition or softening point

Abstract

This application discloses a kind of manufacturing methods of pure silicon core low loss fiber, comprising: is etched to the inner wall of fluorine doped deposited tube;Silica is deposited in the fluorine doped deposited tube and carries out vitrifying, forms silica sandwich layer;It is solid plug by the fluorine doped deposited tube collapsing with the silica sandwich layer, wherein the fluorine doped deposited tube forms inner cladding;In the outside deposition silica of the plug, surrounding layer is formed, Pure Silica Core Fiber prefabricated rods are made;The Pure Silica Core Fiber prefabricated rods are subjected to wire drawing, pure silicon core low loss fiber is made.The manufacturing method of above-mentioned pure silicon core low loss fiber provided by the invention, can be avoided the OH that fluorine element diffuses into sandwich layer and sandwich layerContent is exceeded, guarantees the performance of wire drawing optical fiber.

Description

A kind of manufacturing method of pure silicon core low loss fiber
Technical field
The invention belongs to optic fibre manufacturing technology fields, more particularly to a kind of manufacturing method of pure silicon core low loss fiber.
Background technique
Preform is the raw material of drawing optical fiber, the covering including sandwich layer and with more low-refraction.Wherein, SiO2It is to form body for manufacturing the major glass of preform, its refractive index can change to form waveguide by doping Structure.In the prior art, GeO is generally mixed in the core2, the refractive index of sandwich layer is made to be higher than the refraction of covering pure quartz glass Rate.Sandwich layer and the relative difference of cladding index indicate that the refractive index of sandwich layer and covering is distinguished using relative fefractive index difference Δ For n1And n2, the value of relative fefractive index difference Δ as the following formula shown in:
In order to increase the bending resistance of optical fiber, need by increasing the GeO in fiber core layer2Content increases Δ value. But with GeO2The raising of content will lead to the increase of fiber Rayleigh scattering, increase so as to cause the decaying of optical fiber, moreover, working as The GeO of incorporation2Too high levels are easy for forming GeO gas, generate bubble therewith, this is right the depositing temperature spent 1600 under more In the transmission performance and intensity of final optical fiber be all unfavorable.
For these reasons, in order to further decrease the decaying of optical fiber, current preferred plan uses pure silicon dioxide core Optical fiber, in this case, in order to obtain relative fefractive index difference (Δ) same as general single mode fiber, it is necessary to reduce optical fiber The refractive index n of covering2, and the refractive index of silica, but B can be reduced by mixing boron and fluorine2O3At 1.2 μm, there are biggish Hangover absorbs, and is unfavorable for the reduction of loss, therefore, the titanium dioxide for constituting optical fiber jacket is reduced preferably with the mode of fluorine doped The refractive index of silicon.
The method of currently manufactured preform includes method and the outer method of pipe in managing, wherein method includes that MCVD (is improved in managing Chemical vapour deposition technique) and PCVD (plasma chemical vapor deposition), manage outer method VAD (vapor phase axial deposition) and OVD (outside vapor deposition).It manages outer method not limited by liner dimensions, deposition velocity is fast, and high production efficiency is suitable for large scale The large-scale production of preform.Gaseous state fluorochemical can be added in deposition by quartz glass using flame hydrolysis In, but this method haves the shortcomings that deposition efficiency is low low with doping concentration, the reason for this is that: firstly, fluorine-containing SiO2Particle is not It is just to be generated at once in torch flame, but diffused into during being migrated with fluorine from blowtorch to prefabricated rods loose media SiO2Particle, diffusion needs the regular hour, simultaneously because the fluorine into flame reaction is readily diffused into ambient enviroment and led Cause SiO2Circumgranular fluorine partial pressure is very low;Secondly, SiO2OH in circumgranular a part of fluorine and flame-Reaction generates HF, therefore only least a portion of fluorine has been incorporated into SiO2In particle;In addition, HF to glass particle have corrosiveness, be easy with The SiO that flame hydrolysis generates2Particle reacts, and reaction equation is as follows:
SiO2(s)+2HF(g)→SiOF2(g)+H2O(g);
SiO2(s)+4HF(g)→SiF4(g)+2H2O(g);
(s) and (g) in formula respectively indicates solid-state and gaseous state.
These reactions prevent SiO2The growth of particle, while reducing SiO2The deposition of particle.Therefore, with fluorine-containing The increase of chemical combination logistics capacity, deposition velocity gradually reduce, and will not finally generate deposition;On the other hand, due to the high diffusibility of fluorine, It deposits obtained fluorine-containing loose media during the sintering process, the fluorine of 40%-50% will be lost, make refractive index profile structure by broken It is bad, seriously affect the performance of optical fiber after drawing.
A kind of existing technical solution is as follows: the mandrel loose body deposited using OVD, then by the appearance of loose media Face sintering densification then proceedes to the sedimentary inner envoloping layer loose media outside compacted zone, mandrel loose body is constituted, by mandrel loose body It is sent into progress fluorine doped in vitrifying furnace after detaching target rod, it will after so that fluorine is selectively incorporated into inner cladding, fluorine doped and vitrifying The prefabricated rods of central hollow are placed on the sealing that centre bore is carried out on longitudinal extension device, obtain the optical fiber prefabricating of covering fluorine doped Prefabricated rods progress wire drawing is finally obtained low loss fiber by stick.The shortcomings that this kind of method, is: dehydration and doping process loose media All be it is hollow, the OH- and the fluorine element of fluorine doped process that hydrolysis generates are easier to enter the central hollow of loose media, into And sandwich layer is diffused into, cause fluorine element doping failure;After vitrifying also centre bore is carried out by indulging rolling equipment Sealing, this will also result in the OH of sandwich layer-Content is exceeded, further influences optical fiber property after wire drawing.
Summary of the invention
To solve the above problems, can be avoided fluorine the present invention provides a kind of manufacturing method of pure silicon core low loss fiber Elements diffusion enters the OH of sandwich layer and sandwich layer-Content is exceeded, guarantees the performance of wire drawing optical fiber.
A kind of manufacturing method of pure silicon core low loss fiber provided by the present application, comprising:
The inner wall of fluorine doped deposited tube is etched;
Silica is deposited in the fluorine doped deposited tube and carries out vitrifying, forms silica sandwich layer;
It is solid plug by the fluorine doped deposited tube collapsing with the silica sandwich layer, wherein the fluorine doped Deposited tube forms inner cladding;
In the outside deposition silica of the plug, surrounding layer is formed, Pure Silica Core Fiber prefabricated rods are made;
The Pure Silica Core Fiber prefabricated rods are subjected to wire drawing, pure silicon core low loss fiber is made.
Preferably, in the manufacturing method of above-mentioned pure silicon core low loss fiber,
The inner wall to fluorine doped deposited tube, which is etched, includes:
Refractive index range is 1.4520 to 1.4530, thickness range is 2.5mm to 4mm and external diametrical extent be 30mm extremely The inner wall of the fluorine doped deposited tube of 35mm is etched.
Preferably, in the manufacturing method of above-mentioned pure silicon core low loss fiber,
The inner wall to fluorine doped deposited tube is etched are as follows:
It is etched using inner wall of the MCVD method to fluorine doped deposited tube.
Preferably, in the manufacturing method of above-mentioned pure silicon core low loss fiber,
It is described to deposit silica in the fluorine doped deposited tube are as follows:
10 layers to 60 layers silica are deposited in the fluorine doped deposited tube.
Preferably, in the manufacturing method of above-mentioned pure silicon core low loss fiber,
It is described by the fluorine doped deposited tube collapsing with the silica sandwich layer be solid plug are as follows:
It increases flame temperature and reduces the gas pressure in deposited tube, be solid by the multiple collapsing of fluorine doped deposited tube Plug.
Preferably, in the manufacturing method of above-mentioned pure silicon core low loss fiber,
Before the outside deposition silica of the plug further include:
Flame polish is carried out to the external of the plug.
Preferably, in the manufacturing method of above-mentioned pure silicon core low loss fiber,
The outside deposition silica in the plug includes:
Using OVD method the plug outside deposition silica.
Preferably, in the manufacturing method of above-mentioned pure silicon core low loss fiber,
The outside deposition silica in the plug are as follows:
Using silicon tetrachloride and carbon tetrafluoride/sulfur hexafluoride, at outside deposition silica 5 hours to 10 of the plug Hour.
Preferably, in the manufacturing method of above-mentioned pure silicon core low loss fiber,
It is described to be made before Pure Silica Core Fiber prefabricated rods further include:
The plug is carried out to dehydration and vitrifying in vitrifying furnace.
As can be seen from the above description, the manufacturing method of pure silicon core low loss fiber provided by the invention, due to first to fluorine doped The inner wall of deposited tube is etched, and silica is then deposited in the fluorine doped deposited tube and carries out vitrifying, forms dioxy SiClx sandwich layer, then by the fluorine doped deposited tube collapsing with the silica sandwich layer be solid plug, wherein it is described to mix Fluorine deposited tube forms inner cladding, then in the outside deposition silica of the plug, forms surrounding layer, it is pre- that Pure Silica Core Fiber is made The Pure Silica Core Fiber prefabricated rods are finally carried out wire drawing, pure silicon core low loss fiber are made, it is seen that deposit surrounding layer by stick processed When, the stick that sets out of the inside has become glassy state, when loose media so outside carries out dehydration and vitrifying, the fluorine of doping For element due to not having hole entrance, fluorine element will not diffuse into inner cladding or sandwich layer, also be avoided that the OH of sandwich layer-Content It is exceeded, guarantee the performance of wire drawing optical fiber.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis The attached drawing of offer obtains other attached drawings.
Fig. 1 is the schematic diagram of the manufacturing method of the first pure silicon core low loss fiber provided by the embodiments of the present application.
Specific embodiment
Core of the invention thought is to provide a kind of manufacturing method of pure silicon core low loss fiber, can be avoided fluorine element The OH- content for diffusing into sandwich layer and sandwich layer is exceeded, guarantees the performance of wire drawing optical fiber.
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
As shown in FIG. 1, FIG. 1 is this Shens for the manufacturing method of the first pure silicon core low loss fiber provided by the embodiments of the present application Please embodiment provide the first pure silicon core low loss fiber manufacturing method schematic diagram.This method comprises the following steps:
S1: the inner wall of fluorine doped deposited tube is etched;
The fluorine doped deposited tube referred to herein utilized is a kind of existing deposited tube, can be obtained, is passed through a certain amount of by purchase Fluorine element for being etched in the fluorine doped deposited tube of glass, specifically, fluorine and He are passed through, by He in fluorine sleeve pipe Wall etches away a part of inner wall and impurity, and main purpose is exactly the impurity and dust in order to remove inner wall.
The purpose of etching described here be by fluorine doped deposit inside pipe wall on impurity etch away, thus avoid subsequent technique by To impurity effect, the cleanliness of process environments is improved.
S2: depositing silica in the fluorine doped deposited tube and carries out vitrifying, forms silica sandwich layer;
In this step, pure silicon layer is deposited in fluorine doped deposited tube, deposition carries out simultaneously with During Vitrification in vitro, due to mixing Fluorine deposited tube has been glassy state, rather than loose media, therefore the fluorine element in fluorine doped deposited tube does not diffuse into sedimentary.
S3: being solid plug by the fluorine doped deposited tube collapsing with the silica sandwich layer, wherein described to mix Fluorine deposited tube forms inner cladding;
Since used MCVD equipment size is limited, collapsing is solid plug after depositing in MCVD equipment (target rod).
S4: in the outside deposition silica of the plug, surrounding layer is formed, Pure Silica Core Fiber prefabricated rods are made;
In this step, solid plug can be carried out to the deposition of surrounding layer, the group of outer cladding deposition on OVD lathe It is divided into silica or fluorine doped silica.Plug at this time is glassy state, and loose media outside carries out dehydration and vitrifying When, regardless of that must adulterate either with or without progress fluorine element, because entering without hole, fluorine element will not all diffuse into inner cladding or core Layer.
S5: the Pure Silica Core Fiber prefabricated rods are subjected to wire drawing, pure silicon core low loss fiber is made.
In this step, wire drawing can be carried out in fiber drawing furnace, obtain the low loss fiber of pure silicon core.
As can be seen from the above description, the manufacturing method of the first pure silicon core low loss fiber provided by the embodiments of the present application, Since the inner wall first to fluorine doped deposited tube is etched, silica is then deposited in the fluorine doped deposited tube and carries out glass Change, formed silica sandwich layer, then by the fluorine doped deposited tube collapsing with the silica sandwich layer be solid plug, Wherein, the fluorine doped deposited tube forms inner cladding, then in the outside deposition silica of the plug, forms surrounding layer, be made The Pure Silica Core Fiber prefabricated rods are finally carried out wire drawing, pure silicon core low loss fiber are made by Pure Silica Core Fiber prefabricated rods, it is seen that When depositing surrounding layer, the stick that sets out of the inside has become glassy state, and loose media so outside carries out dehydration and glass When change, due to not having hole entrance, fluorine element will not diffuse into inner cladding or sandwich layer, also be avoided that the fluorine element of doping The OH of sandwich layer-Content is exceeded, guarantees the performance of wire drawing optical fiber.
The manufacturing method of second of pure silicon core low loss fiber provided by the embodiments of the present application is in the first above-mentioned pure silicon Further include following technical characteristic on the basis of the manufacturing method of core low loss fiber:
The inner wall to fluorine doped deposited tube, which is etched, includes:
Refractive index range is 1.4520 to 1.4530, thickness range is 2.5mm to 4mm and external diametrical extent be 30mm extremely The inner wall of the fluorine doped deposited tube of 35mm is etched.Fluorine doped deposited tube with above parameter range can help optical fiber to obtain more Optical property well.
The manufacturing method of the third pure silicon core low loss fiber provided by the embodiments of the present application is in above-mentioned second of pure silicon Further include following technical characteristic on the basis of the manufacturing method of core low loss fiber:
The inner wall to fluorine doped deposited tube is etched are as follows:
It is etched using inner wall of the MCVD method to fluorine doped deposited tube.Wherein MCVD method i.e. improved chemical gas Phase sedimentation, this method is relatively common, and cost is relatively low.
The manufacturing method of 4th kind of pure silicon core low loss fiber provided by the embodiments of the present application, is in the third above-mentioned pure silicon Further include following technical characteristic on the basis of the manufacturing method of core low loss fiber:
It is described to deposit silica in the fluorine doped deposited tube are as follows:
10 layers to 60 layers silica are deposited in the fluorine doped deposited tube.
Here deposition and During Vitrification in vitro carries out simultaneously, and MCVD is the one time one time side for depositing, and depositing To the downstream position for being located at blowtorch moving direction, therefore with the movement of blowtorch, just the pure silicon layer glass first deposited is melted, It repeats in layer until reaching certain thickness.
The manufacturing method of 5th kind of pure silicon core low loss fiber provided by the embodiments of the present application is in above-mentioned 4th kind of pure silicon Further include following technical characteristic on the basis of the manufacturing method of core low loss fiber:
It is described by the fluorine doped deposited tube collapsing with the silica sandwich layer be solid plug are as follows:
It increases flame temperature and reduces the gas pressure in deposited tube, by the fluorine doped with the silica sandwich layer The multiple collapsing of deposited tube is solid plug.
Wherein it is possible to which 2000 degree of flame temperature lift-off value or so are started to carry out collapsing, obtained solid plug size For outer diameter 20.62mm, length 600mm.
The manufacturing method of 6th kind of pure silicon core low loss fiber provided by the embodiments of the present application is in above-mentioned 5th kind of pure silicon Further include following technical characteristic on the basis of the manufacturing method of core low loss fiber:
Before the outside deposition silica of the plug further include:
Technique is further increased this makes it possible to remove exterior surface impurity to the external progress flame polish of the plug Clean characteristic.
The manufacturing method of 7th kind of pure silicon core low loss fiber provided by the embodiments of the present application is in above-mentioned 6th kind of pure silicon Further include following technical characteristic on the basis of the manufacturing method of core low loss fiber:
The outside deposition silica in the plug includes:
Using OVD method the plug outside deposition silica.Specifically, the plug is placed in OVD deposition On lathe, opens formula and carry out outer cladding deposition.
The manufacturing method of 8th kind of pure silicon core low loss fiber provided by the embodiments of the present application is in above-mentioned 7th kind of pure silicon Further include following technical characteristic on the basis of the manufacturing method of core low loss fiber:
The outside deposition silica in the plug are as follows:
Using silicon tetrachloride and carbon tetrafluoride/sulfur hexafluoride, at outside deposition silica 5 hours to 10 of the plug Hour.
The manufacturing method of 9th kind of pure silicon core low loss fiber provided by the embodiments of the present application is in above-mentioned 8th kind of pure silicon Further include following technical characteristic on the basis of the manufacturing method of core low loss fiber:
It is described to be made before Pure Silica Core Fiber prefabricated rods further include:
The plug is carried out to dehydration and vitrifying in vitrifying furnace.
The concrete operations of the manufacturing method of above-mentioned pure silicon core low loss fiber are illustrated below:
The fluorine doped deposited tube having a size of Φ 32*3.5mm*600 (L) is chosen, fluorine doped rate is 60%, enterprising in MCVD lathe Row etching, etch temperature are 2100 degree, and gas component is He and CF4, then reduce temperature to 1650 degree, deposit pure silicon sandwich layer, Silicon tetrachloride gas flow is 300sccm, and 18 layers of deposition (gone by initial position to final position as deposition one by blowtorch Layer), it is then shut off silicon tetrachloride gas, gas pressure in deposited tube is reduced, increases the hydrogen and oxygen flow of flame, flame temperature Degree reaches 2000 degree, starts to carry out collapsing, and solid plug is 20.62mm, length 600mm having a size of outer diameter, closes formula, It breaks in plug tail portion (casing and tail pipe junction) and is removed from MCVD equipment manually, (handle tube and casing connect other end The place of connecing) it is cut off in the way of machine cuts, solid plug is obtained, by the solid mandrel both ends welding auxiliary rod, in lateral vehicle It is polished on bed, is fabricated to the target rod (set out stick) of OVD deposition, is deposited in OVD equipment, the unstrpped gas of deposition is Silicon tetrachloride and carbon tetrafluoride, sedimentation time are 6 hours, obtain prefabricated rods loose media, and loose media is carried out dehydration and vitrifying Preform is obtained, preform is subjected to wire drawing, obtains the low loss fiber of pure silicon core, decaying at 1550nm 0.181dB/km。
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one The widest scope of cause.

Claims (7)

1. a kind of manufacturing method of pure silicon core low loss fiber characterized by comprising
The inner wall of fluorine doped deposited tube is etched;
Silica is deposited in the fluorine doped deposited tube and carries out vitrifying, forms silica sandwich layer;
It is solid plug by the fluorine doped deposited tube collapsing with the silica sandwich layer, wherein the fluorine doped deposition Pipe forms inner cladding;
In the outside deposition silica of the plug, surrounding layer is formed, Pure Silica Core Fiber prefabricated rods are made;
The Pure Silica Core Fiber prefabricated rods are subjected to wire drawing, pure silicon core low loss fiber is made;
The inner wall to fluorine doped deposited tube, which is etched, includes:
Refractive index range is 1.4520 to 1.4530, thickness range is 2.5mm to 4mm and external diametrical extent is 30mm to 35mm's The inner wall of fluorine doped deposited tube is etched;
The inner wall to fluorine doped deposited tube is etched are as follows:
It is etched using inner wall of the MCVD method to fluorine doped deposited tube.
2. the manufacturing method of pure silicon core low loss fiber according to claim 1, which is characterized in that
It is described to deposit silica in the fluorine doped deposited tube are as follows:
10 layers to 60 layers silica are deposited in the fluorine doped deposited tube.
3. the manufacturing method of pure silicon core low loss fiber according to claim 2, which is characterized in that
It is described by the fluorine doped deposited tube collapsing with the silica sandwich layer be solid plug are as follows:
It increases flame temperature and reduces the gas pressure in deposited tube, will be deposited with the fluorine doped of the silica sandwich layer Managing multiple collapsing is solid plug.
4. the manufacturing method of pure silicon core low loss fiber according to claim 3, which is characterized in that
Before the outside deposition silica of the plug further include:
Flame polish is carried out to the external of the plug.
5. the manufacturing method of pure silicon core low loss fiber according to claim 4, which is characterized in that
The outside deposition silica in the plug includes:
Using OVD method the plug outside deposition silica.
6. the manufacturing method of pure silicon core low loss fiber according to claim 5, which is characterized in that
The outside deposition silica in the plug are as follows:
Using silicon tetrachloride and carbon tetrafluoride/sulfur hexafluoride, outside deposition silica 5 hours to 10 in the plug are small When.
7. the manufacturing method of pure silicon core low loss fiber according to claim 6, which is characterized in that
It is described to be made before Pure Silica Core Fiber prefabricated rods further include:
The plug is carried out to dehydration and vitrifying in vitrifying furnace.
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CN113264670A (en) * 2021-04-13 2021-08-17 江苏永鼎股份有限公司 Method for preparing large-size fluorine-doped quartz tube and fluorine-doped quartz tube
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