CN106116135A - A kind of manufacture method of pure silicon core low loss fiber - Google Patents
A kind of manufacture method of pure silicon core low loss fiber Download PDFInfo
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- CN106116135A CN106116135A CN201610463104.5A CN201610463104A CN106116135A CN 106116135 A CN106116135 A CN 106116135A CN 201610463104 A CN201610463104 A CN 201610463104A CN 106116135 A CN106116135 A CN 106116135A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01853—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/02—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
- C03B37/025—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor from reheated softened tubes, rods, fibres or filaments, e.g. drawing fibres from preforms
- C03B37/027—Fibres composed of different sorts of glass, e.g. glass optical fibres
- C03B37/02763—Fibres having axial variations, e.g. axially varying diameter, material or optical properties
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2203/00—Fibre product details, e.g. structure, shape
- C03B2203/10—Internal structure or shape details
- C03B2203/22—Radial profile of refractive index, composition or softening point
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- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
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Abstract
This application discloses the manufacture method of a kind of pure silicon core low loss fiber, including: the inwall of fluorine doped deposited tube is etched；In described fluorine doped deposited tube, deposit silicon dioxide go forward side by side oozy glass, form silicon dioxide sandwich layer；Being solid plug by having the described fluorine doped deposited tube collapsing of described silicon dioxide sandwich layer, wherein, described fluorine doped deposited tube forms inner cladding；At the outside deposition silicon dioxide of described plug, form surrounding layer, make Pure Silica Core Fiber prefabricated rods；Described Pure Silica Core Fiber prefabricated rods is carried out wire drawing, makes pure silicon core low loss fiber.The manufacture method of the above-mentioned pure silicon core low loss fiber that the present invention provides, it is possible to avoid fluorine element to diffuse into the OH of sandwich layer and sandwich layer‑Content overproof, it is ensured that the performance of wire drawing optical fiber.
Description
Technical field
The invention belongs to optic fibre manufacturing technology field, particularly relate to the manufacture method of a kind of pure silicon core low loss fiber.
Background technology
Preform is the raw material of drawing optical fiber, including sandwich layer and the covering with more low-refraction.Wherein,
SiO2The major glass being used to manufacture preform forms body, can change its refractive index by doping thus form waveguide
Structure.In prior art, mix GeO the most in the core2, make the refractive index refraction higher than the pure quartz glass of covering of sandwich layer
Rate.The relative difference of sandwich layer and cladding index uses refractive index contrast Δ to represent, the refractive index of sandwich layer and covering is respectively
For n1And n2, the value of refractive index contrast Δ is shown as the following formula:
In order to increase the bending resistance of optical fiber, need by increasing the GeO in fiber core layer2Content increases Δ value.
But along with GeO2The raising of content, can cause the increase of fiber Rayleigh scattering, thus cause the decay of optical fiber to increase, and, when
The GeO mixed2Too high levels, under the depositing temperature of degree more than 1600, is easy for forming GeO gas, produces bubble therewith, and this is right
Transmission performance and intensity in final optical fiber are all disadvantageous.
For these reasons, in order to reduce the decay of optical fiber further, current preferred plan uses pure silicon dioxide core
Optical fiber, in this case, in order to obtain the refractive index contrast (Δ) as general single mode fiber, it is necessary to reduces optical fiber
Refractive index n of covering2, and mix boron and fluorine can reduce the refractive index of silicon dioxide, but B2O3Exist bigger in 1.2 μm
Hangover absorbs, and is unfavorable for the reduction of loss, therefore, reduces the titanium dioxide constituting optical fiber jacket preferably with the mode of fluorine doped
The refractive index of silicon.
The method of currently manufactured preform includes managing interior method and managing outer method, and wherein in pipe, method includes that MCVD (improves
Chemical vapour deposition technique) and PCVD (plasma chemical vapor deposition), manage outer method VAD (VAD) and
OVD (outside vapor deposition).Managing outer method not limited by liner dimensions, deposition velocity is fast, and production efficiency is high, is suitable for large scale
The large-scale production of preform.Use flame hydrolysis when deposition, gaseous state fluorochemical can be added quartz glass
In, but there is the shortcoming that deposition efficiency is low and doping content is low in the method, and its reason is: first, fluorine-containing SiO2Granule is not
Torch flame is generated as at once, and is as fluorine and diffuses into during blowtorch to prefabricated rods loose media migrates
SiO2Granule, diffusion needs the regular hour, simultaneously because the fluorine entering flame reaction readily diffuses in surrounding and leads
Cause SiO2Circumgranular fluorine dividing potential drop is the lowest；Secondly, SiO2Circumgranular a part of fluorine and the OH in flame-Reaction generates
HF, the most least a portion of fluorine has been incorporated into SiO2In granule；Additionally, HF has corrosiveness to glass particle, easily with
The SiO that flame hydrolysis generates2Granule reacts, and reaction equation is as follows:
SiO2(s)+2HF(g)→SiOF2(g)+H2O(g)；
SiO2(s)+4HF(g)→SiF4(g)+2H2O(g)；
(s) and (g) in formula represents solid-state and gaseous state respectively.
These reactions prevent SiO2The growth of granule, reduces SiO simultaneously2The deposition of granule.Therefore, along with fluorine-containing
The increase of compound flow, deposition velocity gradually reduces, and does not the most produce deposition；On the other hand, due to the high diffusibility of fluorine,
The fluorine-containing loose media that deposition obtains, in sintering process, by the fluorine of loss 40%-50%, makes refractive index profile structure be broken
Bad, have a strong impact on the performance of optical fiber after drawing.
Existing a kind of technical scheme is as follows: use OVD to deposit the mandrel loose body obtained, then by the appearance of loose media
Face sintering densification, then proceedes to sedimentary inner envoloping layer loose media outside compacted zone, constitutes mandrel loose body, by mandrel loose body
Carrying out fluorine doped in sending into vitrification stove after detaching target rod, making fluorine be selectively incorporated into after inner cladding, fluorine doped and vitrification terminate will
The prefabricated rods of central hollow is placed on the sealing carrying out centre bore on longitudinal extension equipment, obtains the optical fiber prefabricating of covering fluorine doped
Rod, finally carries out wire drawing by this prefabricated rods and obtains low loss fiber.The shortcoming of this kind of method is: be dehydrated and adulterate process loose media
Being all hollow, OH-and the fluorine element of fluorine doped process that hydrolysis produces are easier to enter the central hollow of loose media, enter
And diffuse into sandwich layer, cause fluorine element to adulterate unsuccessfully；Also centre bore is carried out by vertical rolling equipment after vitrification terminates
Sealing, this will also result in the OH of sandwich layer-Content overproof, affects optical fiber property after wire drawing further.
Summary of the invention
For solving the problems referred to above, the invention provides the manufacture method of a kind of pure silicon core low loss fiber, it is possible to avoid fluorine
Elements Diffusion enters sandwich layer and the OH of sandwich layer-Content overproof, it is ensured that the performance of wire drawing optical fiber.
The manufacture method of a kind of pure silicon core low loss fiber that the application provides, including:
The inwall of fluorine doped deposited tube is etched；
In described fluorine doped deposited tube, deposit silicon dioxide go forward side by side oozy glass, form silicon dioxide sandwich layer；
It is solid plug by having the described fluorine doped deposited tube collapsing of described silicon dioxide sandwich layer, wherein, described fluorine doped
Deposited tube forms inner cladding；
At the outside deposition silicon dioxide of described plug, form surrounding layer, make Pure Silica Core Fiber prefabricated rods；
Described Pure Silica Core Fiber prefabricated rods is carried out wire drawing, makes pure silicon core low loss fiber.
Preferably, in the manufacture method of above-mentioned pure silicon core low loss fiber,
The described inwall to fluorine doped deposited tube is etched including:
Refractive index scope is 1.4520 to 1.4530, thickness range is 2.5mm to 4mm and external diametrical extent be 30mm extremely
The inwall of the fluorine doped deposited tube of 35mm is etched.
Preferably, in the manufacture method of above-mentioned pure silicon core low loss fiber,
The described inwall to fluorine doped deposited tube be etched into:
Utilize MCVD method that the inwall of fluorine doped deposited tube is etched.
Preferably, in the manufacture method of above-mentioned pure silicon core low loss fiber,
The described silicon dioxide that deposits in described fluorine doped deposited tube is:
10 layers to 60 layers silicon dioxide are deposited in described fluorine doped deposited tube.
Preferably, in the manufacture method of above-mentioned pure silicon core low loss fiber,
Described is that solid plug is by having the described fluorine doped deposited tube collapsing of described silicon dioxide sandwich layer:
Raise flame temperature and reduce the gas pressure in deposited tube, being solid by described fluorine doped deposited tube repeatedly collapsing
Plug.
Preferably, in the manufacture method of above-mentioned pure silicon core low loss fiber,
Also included before the outside deposition silicon dioxide of described plug:
The outside of described plug is carried out flame polish.
Preferably, in the manufacture method of above-mentioned pure silicon core low loss fiber,
The described outside deposition silicon dioxide at described plug includes:
Utilize OVD method at the outside deposition silicon dioxide of described plug.
Preferably, in the manufacture method of above-mentioned pure silicon core low loss fiber,
The described outside deposition silicon dioxide at described plug is:
Utilize Silicon chloride. and carbon tetrafluoride/sulfur hexafluoride, at the outside deposition silicon dioxide 5 hours of described plug to 10
Hour.
Preferably, in the manufacture method of above-mentioned pure silicon core low loss fiber,
Described make Pure Silica Core Fiber prefabricated rods before also include:
Carry out described plug in vitrification stove being dehydrated and vitrification.
By foregoing description, the manufacture method of the pure silicon core low loss fiber that the present invention provides, due to first to fluorine doped
The inwall of deposited tube is etched, and then deposits silicon dioxide in described fluorine doped deposited tube and goes forward side by side oozy glass, forms dioxy
SiClx sandwich layer, then be solid plug by having the described fluorine doped deposited tube collapsing of described silicon dioxide sandwich layer, wherein, described in mix
Fluorine deposited tube forms inner cladding, then the outside deposition silicon dioxide at described plug, forms surrounding layer, makes Pure Silica Core Fiber pre-
System rod, finally carries out wire drawing by described Pure Silica Core Fiber prefabricated rods, makes pure silicon core low loss fiber, it is seen that deposition surrounding layer
Time, the rod that sets out of the inside has become as glassy state, when loose media the most outside carries out dehydration and vitrification, and the fluorine of doping
Element is not owing to having hole to enter, and therefore fluorine element will not diffuse into inner cladding or sandwich layer, is also avoided that the OH of sandwich layer-Content
Exceed standard, it is ensured that the performance of wire drawing optical fiber.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
In having technology to describe, the required accompanying drawing used is briefly described, it should be apparent that, the accompanying drawing in describing below is only this
Inventive embodiment, for those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to according to
The accompanying drawing provided obtains other accompanying drawing.
The schematic diagram of the manufacture method of the first pure silicon core low loss fiber that Fig. 1 provides for the embodiment of the present application.
Detailed description of the invention
The core concept of the present invention is to provide the manufacture method of a kind of pure silicon core low loss fiber, it is possible to avoid fluorine element
Diffuse into the OH-content overproof of sandwich layer and sandwich layer, it is ensured that the performance of wire drawing optical fiber.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Describe, it is clear that described embodiment is only a part of embodiment of the present invention rather than whole embodiments wholely.Based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under not making creative work premise
Embodiment, broadly falls into the scope of protection of the invention.
The manufacture method of the first pure silicon core low loss fiber that the embodiment of the present application provides is as it is shown in figure 1, Fig. 1 is this Shen
Please the schematic diagram of manufacture method of the first pure silicon core low loss fiber that provides of embodiment.The method comprises the steps:
S1: the inwall of fluorine doped deposited tube is etched；
The fluorine doped deposited tube of utilization referred to herein is a kind of existing deposited tube, can be obtained by purchase, is passed through a certain amount of
Fluorine element for being etched in the fluorine doped deposited tube of glass, concrete, be passed through fluorine and He, He enter in sleeve pipe with fluorine
Wall etches away a part of inwall and impurity, and main purpose is contemplated to remove impurity and the dust of inwall.
The purpose of etching described here is to be etched away by the impurity on fluorine doped deposited tube inwall, thus avoids subsequent technique to be subject to
To impurity effect, improve the cleanliness factor of process environments.
S2: deposit silicon dioxide in described fluorine doped deposited tube and go forward side by side oozy glass, form silicon dioxide sandwich layer；
In this step, deposition pure silicon layer in fluorine doped deposited tube, deposition and During Vitrification in vitro are carried out, owing to mixing simultaneously
Fluorine deposited tube has been glassy state, rather than loose media, therefore the fluorine element in fluorine doped deposited tube is not diffuse in sedimentary.
S3: be solid plug by having the described fluorine doped deposited tube collapsing of described silicon dioxide sandwich layer, wherein, described in mix
Fluorine deposited tube forms inner cladding；
Owing to used MCVD equipment size is limited, therefore on MCVD equipment, after deposition, collapsing is solid plug
(target rod).
S4: at the outside deposition silicon dioxide of described plug, forms surrounding layer, makes Pure Silica Core Fiber prefabricated rods；
In this step, solid plug can be carried out on OVD lathe the deposition of surrounding layer, the group of outer cladding deposition
It is divided into silicon dioxide or fluorine doped silicon dioxide.Plug now is glassy state, and loose media outside carries out being dehydrated and vitrification
Time, no matter must adulterate either with or without carrying out fluorine element, because not having hole to enter, fluorine element is all without diffusing into inner cladding or core
Layer.
S5: described Pure Silica Core Fiber prefabricated rods is carried out wire drawing, makes pure silicon core low loss fiber.
In this step, wire drawing can be carried out in fiber drawing furnace, obtain the low loss fiber of pure silicon core.
By foregoing description, the manufacture method of the first pure silicon core low loss fiber that the embodiment of the present application provides,
Owing to first the inwall of fluorine doped deposited tube being etched, in described fluorine doped deposited tube, then deposit silicon dioxide go forward side by side oozy glass
Change, form silicon dioxide sandwich layer, then be solid plug by having the described fluorine doped deposited tube collapsing of described silicon dioxide sandwich layer,
Wherein, described fluorine doped deposited tube forms inner cladding, then the outside deposition silicon dioxide at described plug, forms surrounding layer, makes
Pure Silica Core Fiber prefabricated rods, finally carries out wire drawing by described Pure Silica Core Fiber prefabricated rods, makes pure silicon core low loss fiber, it is seen that
The when of deposition surrounding layer, the rod that sets out of the inside has become as glassy state, and loose media the most outside carries out being dehydrated and glass
During change, the fluorine element of doping is not owing to having hole to enter, and therefore fluorine element will not diffuse into inner cladding or sandwich layer, is also avoided that
The OH of sandwich layer-Content overproof, it is ensured that the performance of wire drawing optical fiber.
The manufacture method of the second pure silicon core low loss fiber that the embodiment of the present application provides, is at the first pure silicon above-mentioned
On the basis of the manufacture method of core low loss fiber, also include following technical characteristic:
The described inwall to fluorine doped deposited tube is etched including:
Refractive index scope is 1.4520 to 1.4530, thickness range is 2.5mm to 4mm and external diametrical extent be 30mm extremely
The inwall of the fluorine doped deposited tube of 35mm is etched.The fluorine doped deposited tube with above-mentioned parameter scope can help optical fiber to obtain more
Optical property well.
The manufacture method of the third pure silicon core low loss fiber that the embodiment of the present application provides, is at above-mentioned the second pure silicon
On the basis of the manufacture method of core low loss fiber, also include following technical characteristic:
The described inwall to fluorine doped deposited tube be etched into:
Utilize MCVD method that the inwall of fluorine doped deposited tube is etched.The chemical gas that wherein MCVD method is namely improved
Phase sedimentation, this method is relatively common, and cost is relatively low.
The manufacture method of the 4th kind of pure silicon core low loss fiber that the embodiment of the present application provides, is at the third pure silicon above-mentioned
On the basis of the manufacture method of core low loss fiber, also include following technical characteristic:
The described silicon dioxide that deposits in described fluorine doped deposited tube is:
10 layers to 60 layers silicon dioxide are deposited in described fluorine doped deposited tube.
Here deposition and During Vitrification in vitro are carried out simultaneously, and MCVD is one time one time deposition, and the side deposited
To being positioned at the downstream position of blowtorch moving direction, therefore along with the movement of blowtorch, just the pure silicon layer glass first deposited is melted,
In layer repeat until reaching certain thickness.
The manufacture method of the 5th kind of pure silicon core low loss fiber that the embodiment of the present application provides, is at above-mentioned 4th kind of pure silicon
On the basis of the manufacture method of core low loss fiber, also include following technical characteristic:
Described is that solid plug is by having the described fluorine doped deposited tube collapsing of described silicon dioxide sandwich layer:
Raise flame temperature and reduce the gas pressure in deposited tube, there is the described fluorine doped of described silicon dioxide sandwich layer
Deposited tube repeatedly collapsing is solid plug.
Wherein it is possible to by flame temperature lift-off value about 2000 degree, proceed by collapsing, the solid plug size obtained
For external diameter 20.62mm, a length of 600mm.
The manufacture method of the 6th kind of pure silicon core low loss fiber that the embodiment of the present application provides, is at above-mentioned 5th kind of pure silicon
On the basis of the manufacture method of core low loss fiber, also include following technical characteristic:
Also included before the outside deposition silicon dioxide of described plug:
The outside of described plug is carried out flame polish, this makes it possible to exterior surface impurity, improve technique further
Clean characteristic.
The manufacture method of the 7th kind of pure silicon core low loss fiber that the embodiment of the present application provides, is at above-mentioned 6th kind of pure silicon
On the basis of the manufacture method of core low loss fiber, also include following technical characteristic:
The described outside deposition silicon dioxide at described plug includes:
Utilize OVD method at the outside deposition silicon dioxide of described plug.Concrete, this plug is placed in OVD deposition
On lathe, open formula and carry out outer cladding deposition.
The manufacture method of the 8th kind of pure silicon core low loss fiber that the embodiment of the present application provides, is at above-mentioned 7th kind of pure silicon
On the basis of the manufacture method of core low loss fiber, also include following technical characteristic:
The described outside deposition silicon dioxide at described plug is:
Utilize Silicon chloride. and carbon tetrafluoride/sulfur hexafluoride, at the outside deposition silicon dioxide 5 hours of described plug to 10
Hour.
The manufacture method of the 9th kind of pure silicon core low loss fiber that the embodiment of the present application provides, is at above-mentioned 8th kind of pure silicon
On the basis of the manufacture method of core low loss fiber, also include following technical characteristic:
Described make Pure Silica Core Fiber prefabricated rods before also include:
Carry out described plug in vitrification stove being dehydrated and vitrification.
Concrete operations to the manufacture method of above-mentioned pure silicon core low loss fiber below illustrate:
Choosing the fluorine doped deposited tube of a size of Φ 32*3.5mm*600 (L), its fluorine doped rate is 60%, enterprising at MCVD lathe
Row etching, etch temperature is 2100 degree, and gas component is He and CF4, and then reduction temperature is to 1650 degree, deposits pure silicon sandwich layer,
Silicon chloride. gas flow is 300sccm, and (blowtorch is gone by original position to final position and is deposition one to deposit 18 layers
Layer), it is then shut off Silicon chloride. gas, reduces gas pressure in deposited tube, raise hydrogen and oxygen flow, the flame temperature of flame
Degree reaches 2000 degree, proceeds by collapsing, and solid plug a size of external diameter is 20.62mm, a length of 600mm, closes formula,
Manually breaking take off from MCVD equipment at plug afterbody (sleeve pipe and tail pipe junction), (handle tube is with sleeve pipe even for other end
The place of connecing) utilize machine cuts mode to cut off, obtain solid plug, by this solid mandrel two ends welding auxiliary rod, at horizontal car
Being polished on Chuan, be fabricated to the target rod (set out rod) of OVD deposition, deposit on OVD equipment, the unstrpped gas of deposition is
Silicon chloride. and carbon tetrafluoride, sedimentation time is 6 hours, obtains prefabricated rods loose media, carries out being dehydrated and vitrification by loose media
Obtain preform, preform is carried out wire drawing, obtain the low loss fiber of pure silicon core, decaying at 1550nm
0.181dB/km。
Described above to the disclosed embodiments, makes professional and technical personnel in the field be capable of or uses the present invention.
Multiple amendment to these embodiments will be apparent from for those skilled in the art, as defined herein
General Principle can realize without departing from the spirit or scope of the present invention in other embodiments.Therefore, the present invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein and features of novelty phase one
The widest scope caused.
Claims (9)
1. the manufacture method of a pure silicon core low loss fiber, it is characterised in that including:
The inwall of fluorine doped deposited tube is etched；
In described fluorine doped deposited tube, deposit silicon dioxide go forward side by side oozy glass, form silicon dioxide sandwich layer；
Being solid plug by having the described fluorine doped deposited tube collapsing of described silicon dioxide sandwich layer, wherein, described fluorine doped deposits
Pipe forms inner cladding；
At the outside deposition silicon dioxide of described plug, form surrounding layer, make Pure Silica Core Fiber prefabricated rods；
Described Pure Silica Core Fiber prefabricated rods is carried out wire drawing, makes pure silicon core low loss fiber.
The manufacture method of pure silicon core low loss fiber the most according to claim 1, it is characterised in that
The described inwall to fluorine doped deposited tube is etched including:
Refractive index scope is 1.4520 to 1.4530, thickness range is 2.5mm to 4mm and external diametrical extent is 30mm's to 35mm
The inwall of fluorine doped deposited tube is etched.
The manufacture method of pure silicon core low loss fiber the most according to claim 2, it is characterised in that
The described inwall to fluorine doped deposited tube be etched into:
Utilize MCVD method that the inwall of fluorine doped deposited tube is etched.
The manufacture method of pure silicon core low loss fiber the most according to claim 3, it is characterised in that
The described silicon dioxide that deposits in described fluorine doped deposited tube is:
10 layers to 60 layers silicon dioxide are deposited in described fluorine doped deposited tube.
The manufacture method of pure silicon core low loss fiber the most according to claim 4, it is characterised in that
Described is that solid plug is by having the described fluorine doped deposited tube collapsing of described silicon dioxide sandwich layer:
Raise flame temperature and reduce the gas pressure in deposited tube, the described fluorine doped with described silicon dioxide sandwich layer is deposited
Managing repeatedly collapsing is solid plug.
The manufacture method of pure silicon core low loss fiber the most according to claim 5, it is characterised in that
Also included before the outside deposition silicon dioxide of described plug:
The outside of described plug is carried out flame polish.
The manufacture method of pure silicon core low loss fiber the most according to claim 6, it is characterised in that
The described outside deposition silicon dioxide at described plug includes:
Utilize OVD method at the outside deposition silicon dioxide of described plug.
The manufacture method of pure silicon core low loss fiber the most according to claim 7, it is characterised in that
The described outside deposition silicon dioxide at described plug is:
Utilize Silicon chloride. and carbon tetrafluoride/sulfur hexafluoride, little to 10 at the outside deposition silicon dioxide 5 hours of described plug
Time.
The manufacture method of pure silicon core low loss fiber the most according to claim 8, it is characterised in that
Described make Pure Silica Core Fiber prefabricated rods before also include:
Carry out described plug in vitrification stove being dehydrated and vitrification.
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Cited By (8)
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| CN107179579A (en) * | 2017-06-08 | 2017-09-19 | 烽火通信科技股份有限公司 | A kind of low loss fiber and its manufacture method |
| CN108863042A (en) * | 2018-08-15 | 2018-11-23 | 上海至纯洁净系统科技股份有限公司 | A kind of method of PCVD technique production optical fiber prefabricated rod mandrel |
| CN110204190A (en) * | 2019-07-12 | 2019-09-06 | 杭州金星通光纤科技有限公司 | A kind of manufacturing method and device of ultra-low loss single mode optical fiber |
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| CN112266162A (en) * | 2020-11-03 | 2021-01-26 | 江苏亨通光导新材料有限公司 | Fluorine-doped quartz tube suitable for large-size optical fiber preform and preparation method thereof |
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| CN113264670A (en) * | 2021-04-13 | 2021-08-17 | 江苏永鼎股份有限公司 | Method for preparing large-size fluorine-doped quartz tube and fluorine-doped quartz tube |
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| CN111320376A (en) * | 2018-12-15 | 2020-06-23 | 中天科技精密材料有限公司 | Optical fiber preform and method for manufacturing the same |
| CN111320376B (en) * | 2018-12-15 | 2023-09-12 | 中天科技精密材料有限公司 | Optical fiber preform and method for manufacturing the same |
| CN110204190A (en) * | 2019-07-12 | 2019-09-06 | 杭州金星通光纤科技有限公司 | A kind of manufacturing method and device of ultra-low loss single mode optical fiber |
| CN110204190B (en) * | 2019-07-12 | 2023-11-24 | 杭州金星通光纤科技有限公司 | Manufacturing method and device of ultra-low loss single mode fiber |
| CN112266162A (en) * | 2020-11-03 | 2021-01-26 | 江苏亨通光导新材料有限公司 | Fluorine-doped quartz tube suitable for large-size optical fiber preform and preparation method thereof |
| CN112266162B (en) * | 2020-11-03 | 2023-09-26 | 江苏亨通光导新材料有限公司 | Fluorine-doped quartz tube suitable for large-size optical fiber preform and preparation method thereof |
| CN113213752A (en) * | 2021-03-18 | 2021-08-06 | 山东富通光导科技有限公司 | Method for preparing ultralow-loss optical fiber preform and optical fiber by external gas phase deposition method |
| CN113264670A (en) * | 2021-04-13 | 2021-08-17 | 江苏永鼎股份有限公司 | Method for preparing large-size fluorine-doped quartz tube and fluorine-doped quartz tube |
| CN114436521A (en) * | 2022-04-08 | 2022-05-06 | 武汉友美科自动化有限公司 | Device and method for preparing optical fiber preform rod by plasma chemical vapor deposition outside tube |
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