CN106100448A - A kind of vibration generating device and preparation method thereof - Google Patents
A kind of vibration generating device and preparation method thereof Download PDFInfo
- Publication number
- CN106100448A CN106100448A CN201610718459.4A CN201610718459A CN106100448A CN 106100448 A CN106100448 A CN 106100448A CN 201610718459 A CN201610718459 A CN 201610718459A CN 106100448 A CN106100448 A CN 106100448A
- Authority
- CN
- China
- Prior art keywords
- room
- generating device
- vibration generating
- piezoelectric element
- pedestal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 25
- 229910052710 silicon Inorganic materials 0.000 claims description 23
- 239000010703 silicon Substances 0.000 claims description 23
- 229920001971 elastomer Polymers 0.000 claims description 17
- 239000000806 elastomer Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 11
- 238000001259 photo etching Methods 0.000 claims description 8
- 229910008045 Si-Si Inorganic materials 0.000 claims description 6
- 229910006411 Si—Si Inorganic materials 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 230000010287 polarization Effects 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 6
- 230000005611 electricity Effects 0.000 abstract description 3
- 239000013589 supplement Substances 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 15
- 239000000919 ceramic Substances 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002028 Biomass Substances 0.000 description 1
- 241000693079 Maloideae Species 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000002551 biofuel Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229940056582 human hair preparation Drugs 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000005258 radioactive decay Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/186—Vibration harvesters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The present invention provides a kind of vibration generating device and preparation method thereof, for solving the problem that prior art cannot obtain the electricity needed for equipment the most easily.Vibration generating device that the present invention provides and preparation method thereof, utilizes the piezoelectric effect of piezoelectric that the vibrational energy that hand, walking, mechanical vibration etc. produce is converted to electric energy；Can effectively solve the use time of the collection of energy, extension device, can power for equipment easily, especially energy supplement and equipment for smart machines such as mobile phone, wearable device, wireless sensor nodes is powered.
Description
Technical field
The present invention relates to technical field of power generation, in particular it relates to a kind of vibration generating device and preparation method thereof.
Background technology
The intention that energy acquisition is brand-new, the most just has Crinis Carbonisatus to understand the wrist-watch being produced energy by motion.From broad sense
On say, energy acquisition includes various energy sources, such as kinetic energy (wind, ripple, gravity, vibration etc.), electromagnetic energy (optical, electrical magnetic wave
Deng), heat energy (solar thermal energy, underground heat, variations in temperature, burning etc.), atomic energy (atomic energy, radioactive decay etc.) or bioenergy
(bio-fuel, biomass energy etc.).But, when the energy expenditure of electronic circuit is down to microwatt level from milliwatt level, one is brand-new
Phenomenon arises that provides energy to be no longer necessary to electrical network or battery for circuit, but utilizes various environmental energy around, such as people
The most small vibration, light, heat and electromagnetic wave etc..Vibrating the most omnipresent, application is more compared with other collection of energy
For extensively, piezoelectric, as one preferable mechanical energy transition material, has the highest energy density, and the voltage sent is high,
Directly can power for device without transformator, there is no the advantages such as electromagnetic interference simultaneously.
Along with people's dependence to smart machine, how to improve the ability to work of equipment and application time and the most at any time
The electricity needed for the equipment of acquisition easily everywhere, increasingly will be paid attention to by people, be badly in need of a kind of vibration generating device of research and development
Can effectively solve the use time collecting extension device of energy, can power for equipment easily, will bring for people
More experience and application.
Summary of the invention
Solve the problems referred to above and be employed technical scheme comprise that a kind of vibration generating device and preparation method thereof.
A kind of vibration generating device that the present invention provides, including at least one shake room and the oscillator of the indoor that shake described in being positioned at；
The described room that shakes includes at least one piezoelectric element and a pedestal；Described piezoelectric element and described pedestal are formed
For closing the closing space of described oscillator；
The deformation contacting acquisition with described oscillator is converted into electric energy and is transferred on described pedestal by described piezoelectric element.
Preferably, described piezoelectric element includes: elastomer and the frame being positioned at described elastomeric perimeter；
Described frame includes the border electrode for connecting described elastomer；
Described elastomer includes elastica and the piezoelectric film being arranged in described elastica；Described piezoelectric film and described frame
On border electrode electrical connection.
Preferably, described pedestal includes silicon chip and the electrode layer being arranged on described silicon chip；Described electrode layer includes positive pole
And negative pole；Described positive pole and the described negative pole border electrode on the frame of described piezoelectric element connects.
Preferably, the room that shakes described in is polyhedron.
Preferably, the room that shakes described in is cube；Described cube includes a side formed by described pedestal and by institute
State remaining side of piezoelectric element composition.
Preferably, any one during described oscillator is spherical, square, cylinder；Described vibrator material selection copper,
Any one in ferrum, glass, pottery.
Further object is that the preparation method that a kind of above-mentioned vibration generating device is provided, including walking as follows
Rapid:
Silicon chip makes positive pole, negative pole and described positive pole, the connection line of negative pole by photoetching process；
Prepare the step of piezoelectric element:
Silicon chip is made by etching technics and is positioned at the frame of described silicon chips periphery and is positioned at the bullet within described frame
Property film；
Silicon chip is made the border electrode being positioned at described frame region by sputtering and photoetching process；
Forming piezoelectric film on described silicon chip, described piezoelectric film is connected with described border electrode；
Described piezoelectric film is carried out polarization process, forms side of the positive electrode and negative side；
Shake room assemble step:
Piezoelectric element is completed mutual connection by Si-Si bonding and forms semi-enclosed room that shakes；
Oscillator is placed in described semi-enclosed shake in room；
Complete to shake by Si-Si bonding the assembling of room by pedestal and described semi-enclosed room that shakes；
By metal bonding complete the positive pole of piezoelectric element, negative pole respectively with the connection of positive pole, negative pole on pedestal.
Preferably, also include shaking several room in parallel or the step that is attached of the mode of series connection.
Vibration generating device that the present invention provides and preparation method thereof, utilizes the piezoelectric effect of piezoelectric by hand, OK
The vibrational energy that walk, mechanical vibration etc. produces is converted to electric energy；When can effectively solve the use of the collection of energy, extension device
Between, can power for equipment easily, be especially the energy of the smart machines such as mobile phone, wearable device, wireless sensor node
Amount is supplemented and equipment is powered.
Accompanying drawing explanation
Fig. 1 is the structural representation of vibration generating device in embodiments of the invention 1.
Fig. 2 is the side sectional view of vibration generating device in embodiments of the invention 1.
Fig. 3 is the structural representation of room of shaking in embodiments of the invention 1.
Fig. 4 is the side sectional view of room of shaking in embodiments of the invention 1.
Fig. 5 is frame side view in embodiments of the invention 1.
Fig. 6 is the schematic diagram of embodiments of the invention 1 elastomer.
Fig. 7 is the side sectional view of pedestal in the embodiment of the present invention 1.
Wherein, 1. pedestal；2. piezoelectric element；3. frame；31. border electrode；4. positive pole；5. negative pole；6. elastomer；61.
Elastica；62. piezoelectric films；7. oscillator；8. shake room.
Detailed description of the invention
For making those skilled in the art be more fully understood that technical scheme, below in conjunction with the accompanying drawings and specific embodiment party
The present invention is described in further detail by formula.
Embodiment 1:
As shown in figs. 1-7, the present embodiment provides a kind of vibration generating device, shakes room including at least one and shakes described in being positioned at
Oscillator in room 8；
The described room 8 that shakes includes at least one piezoelectric element 2 and a pedestal 1；Described piezoelectric element 2 and described pedestal
1 forms the closing space for closing described oscillator；
The deformation contacting acquisition with described oscillator 7 is converted into electric energy and is transferred to described pedestal 1 by described piezoelectric element 2
On.
The vibration generating device facilitating the present embodiment in order to introduce is introduced as a example by having the cubical room that shakes；Should
When being understood by, the room 8 that shakes is also possible for polyhedron, and other shapes of closing space is also applicable.
Described cube includes a side formed by described pedestal 1 and remaining side being made up of described piezoelectric element 2
Face.
The vibration generating device of the present embodiment utilizes the piezoelectric effect of piezoelectric element, can be by hand, walking, mechanical vibration
Electric energy is converted to Deng the vibrational energy of oscillator of generation；Can effectively solve the use time of the collection of energy, extension device, can
To power for equipment easily, it it is especially the energy supplement of the smart machines such as mobile phone, wearable device, wireless sensor node
Power with equipment.
Preferably, as shown in Figure 6, described piezoelectric element 2 includes: elastomer 6 and the frame being positioned at described elastomer 6 periphery
3；
As it is shown in figure 5, described frame 3 includes the border electrode 31 for connecting described elastomer 6；It should be appreciated that
Above-mentioned connection typically can use gold wire bonding to connect, and is shown without in the drawings.
As seen in figs, described elastomer 6 includes elastica 61 and the piezoelectric film 62 being arranged in described elastica 61；
Described piezoelectric film 62 electrically connects with the border electrode 31 on described frame 3.It should be appreciated that above-mentioned electrical connection, the most permissible
Gold wire bonding is used to connect (being shown without on figure).
Preferably, as depicted in figs. 1 and 2, described pedestal 1 includes silicon chip (not shown in FIG.) and is arranged on described silicon chip
On electrode layer；Described electrode layer includes positive pole 4 and negative pole 5；Described positive pole 4 and described negative pole 5 are respectively at described piezoelectric element 2
Frame 3 on border electrode 31 connect (being shown without on figure).
Preferably, any one during described oscillator 7 is spherical, square, cylinder；Should be understood that other shape
Can also, the size of oscillator 7 and the described matching size shaking room 8 close.
Any one in described oscillator 7 material selection copper, ferrum, glass, pottery.It should be appreciated that above-mentioned oscillator 7
Mass to be formed, can be by multi-direction impact elasticity body 6, and elastomer 6 produces vibration, and piezoelectric membrane 62 produces piezoelectricity effect
Answer and produce electric energy.
Embodiment 2
The present embodiment provides the preparation method of a kind of above-mentioned vibration generating device, comprises the steps:
1) step of pedestal is prepared:
Silicon chip makes positive pole 4, negative pole 5 and described positive pole 4, the connection line of negative pole 5 by photoetching process；
Specifically, on silicon chip, sputtering 10nm copper is as circuit layer, and by gluing, photoetching, remove photoresist making positive pole 4, negative pole
5；Pad is made, it is simple to the connection of electrode by electroplating technology.Wherein, the size of pedestal 1 can be 4000um × 4000um
×400um。
It should be appreciated that foregoing circuit layer can also use the metals such as titanium, gold, silver, stannum to carry out sputtering, deposit or electroplating
Formed.
It should be appreciated that silicon chip can be monocrystal silicon or polysilicon.
2) step of piezoelectric element is prepared:
Silicon chip is made by etching technics and is positioned at the frame 3 of described silicon chips periphery and is positioned within described frame 3
Elastica 61；
Silicon chip is made the border electrode 31 being positioned at described frame 3 region by sputtering and photoetching process；
Forming piezoelectric film 62 on described silicon chip, described piezoelectric film 62 is connected with described border electrode 31；
Described piezoelectric film 62 is carried out polarization process, forms side of the positive electrode and negative side；
Specifically, monocrystal silicon is used to be made the frame 3 of described piezoelectric element 2 periphery by etching technics as stock
With the elastica 61 being positioned within described frame 3；The size of frame 3 can be 500um × 500um × 4000um.Elastica 61
Thickness is 150um, can be to choose in the range of 100～500um at thickness.
Continue to sputter the copper of 10nm on this silicon chip as circuit layer, and extend to the left and right edges of elastica 61, pass through
Photoetching process makes border electrode 31；It should be appreciated that border electrode 31 can be arranged on the middle part of frame 3, it is also possible to set
Put the end at frame 3, can conveniently selecting according to follow-up assembling.
It should be appreciated that the thickness of frame 3 is usually elastomer 3～5 times, the length of frame is according to TRT
Volume size determines, the volume the lowest generated energy of difficulty of more producing extensively is the biggest.
After border electrode 31 completes, elastica 61 sputters 55nm and (can select in the range of 50～150nm
Select) piezoelectric ceramics, now block the periphery of frame 3, part and elastica 61 that frame 3 is inner form piezoelectric film 62；Its
In, piezoelectric film 62 can be connected by contact hole at the prolongation of border electrode 31, and above-mentioned contact hole can be 5；Excellent
Choosing, contact hole is draw distribution along the length direction of contact area；
Piezoelectric membrane 62 is processed through high-temperature poling.Specifically, piezoelectric ceramics adds one sufficiently high DC electric field, and
Keep certain temperature and time, force its electricdomain to turn to, force its spontaneous polarization to align in other words, form side of the positive electrode
And negative side；Existing method and apparatus can be used to carry out it should be appreciated that this polarization processes.
3) shake room 8 assemble step:
Piezoelectric element 2 is completed mutual connection by Si-Si bonding and forms semi-enclosed room 8 that shakes；Wherein, polarity phase is made
The border electrode 31 of same adj acent piezoelectric assembly 2 contacts.
Oscillator 7 is placed in described semi-enclosed shake in room 8；Oscillator 7 diameter can be 500um.
Complete to shake by Si-Si bonding the assembling of room 8 by pedestal 1 and described semi-enclosed room 8 that shakes；Wherein, pedestal 1 is just
Pole 4, negative pole 5 are towards the outside of the room 8 that shakes.
By metal bonding complete the border electrode 31 of piezoelectric element 2 respectively with positive pole 4, the connection of negative pole 5 on pedestal 1.
Should be understood that metal bonding technique is that this is no longer going to repeat them for prior art category.
Preferably, can according to the situation of electricity described in equipment to be powered, also include shaking several room 8 in parallel or
The step that the mode of series connection is attached, so can be powered the equipment that subfam. Spiraeoideae is different.
The workflow of micro-vibration TRT of the present invention is as follows: when experiencing External Force Acting, oscillator 7 is to piezoelectricity
The elastomer 6 of thin film 62 produces and clashes into, and elastomer 6 and piezoelectric film 62 produce deformation and vibration, utilizes piezoelectric effect to produce electromotive force
Difference, electric current flows to the anelectrode 4 on pedestal 1 and negative electrode 5, then power supply to the device by the border electrode 31 on frame 3.Envelope
The room 8 that shakes closed ensure that oscillator 7 can be produced kinetic energy shock elastomer 6 by the effect in any one direction and produce electric energy, can
To improve efficiency increase generated energy.
It is understood that the principle that is intended to be merely illustrative of the present of embodiment of above and the exemplary enforcement that uses
Mode, but the invention is not limited in this.For those skilled in the art, in the essence without departing from the present invention
In the case of god and essence, can make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.
Claims (8)
1. a vibration generating device, it is characterised in that include at least one shake room and the oscillator of the indoor that shake described in being positioned at；
The described room that shakes includes at least one piezoelectric element and a pedestal；Described piezoelectric element and described pedestal are formed and are used for
Close the closing space of described oscillator；
The deformation contacting acquisition with described oscillator is converted into electric energy and is transferred on described pedestal by described piezoelectric element.
2. vibration generating device as claimed in claim 1, it is characterised in that
Described piezoelectric element includes: elastomer and the frame being positioned at described elastomeric perimeter；
Described frame includes the border electrode for connecting described elastomer；
Described elastomer includes elastica and the piezoelectric film being arranged in described elastica；On described piezoelectric film and described frame
Border electrode electrically connects.
3. vibration generating device as claimed in claim 2, it is characterised in that
Described pedestal includes silicon chip and the electrode layer being arranged on described silicon chip；Described electrode layer includes positive pole and negative pole；Described
Positive pole and the described negative pole border electrode on the frame of described piezoelectric element connects.
4. the vibration generating device as described in claim 1-3 is arbitrary, it is characterised in that described in the room that shakes be polyhedron.
5. vibration generating device as claimed in claim 4, it is characterised in that described in the room that shakes be cube；Described cube bag
Include a side formed by described pedestal and remaining side being made up of described piezoelectric element.
6. the vibration generating device as described in claim 1-3 is arbitrary, it is characterised in that described oscillator is spherical, square, circle
Any one in cylinder；Described vibrator material selects any one in copper, ferrum, glass, pottery.
7. the preparation method of the vibration generating device as described in claim 1-6 is arbitrary, it is characterised in that include walking as follows
Rapid:
Prepare the step of pedestal:
Silicon chip makes positive pole, negative pole and described positive pole, the connection line of negative pole by photoetching process；
Prepare the step of piezoelectric element:
Silicon chip is made by etching technics and is positioned at the frame of described silicon chips periphery and is positioned at the elastica within described frame；
Silicon chip is made the border electrode being positioned at described frame region by sputtering and photoetching process；
Forming piezoelectric film on described silicon chip, described piezoelectric film is connected with described border electrode；
Described piezoelectric film is carried out polarization process, forms side of the positive electrode and negative side；
Shake room assemble step:
Piezoelectric element is completed mutual connection by Si-Si bonding and forms semi-enclosed room that shakes；
Oscillator is placed in described semi-enclosed shake in room；
Complete to shake by Si-Si bonding the assembling of room by pedestal and described semi-enclosed room that shakes；
By metal bonding complete the positive pole of piezoelectric element, negative pole respectively with the connection of positive pole, negative pole on pedestal.
8. the preparation method of a vibration generating device as claimed in claim 7, it is characterised in that also include shaking several
Room is in parallel or the step that is attached of mode of series connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610718459.4A CN106100448B (en) | 2016-08-24 | 2016-08-24 | A kind of vibration generating device and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610718459.4A CN106100448B (en) | 2016-08-24 | 2016-08-24 | A kind of vibration generating device and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106100448A true CN106100448A (en) | 2016-11-09 |
| CN106100448B CN106100448B (en) | 2018-06-26 |
Family
ID=57224995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610718459.4A Active CN106100448B (en) | 2016-08-24 | 2016-08-24 | A kind of vibration generating device and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106100448B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106655885A (en) * | 2016-11-15 | 2017-05-10 | 重庆交通大学 | Three-dimensional broadband random vibration energy collector |
| CN106849750A (en) * | 2017-02-23 | 2017-06-13 | 浙江科技学院 | A kind of anti-wearing ornaments for turning intelligent alarm of self-power generation type infant |
| CN106849597A (en) * | 2017-04-10 | 2017-06-13 | 厦门大学 | A kind of new multi-directional energy gathering apparatus |
| CN109621778A (en) * | 2018-12-28 | 2019-04-16 | 陈溢 | A kind of anti-adherency printing packaging pigment mixing apparatus of sound wave heating resonance |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140073063A (en) * | 2012-12-06 | 2014-06-16 | 정백진 | Piezoelectric generator |
| CN105006994A (en) * | 2015-08-25 | 2015-10-28 | 东南大学 | Piezoelectric-electromagnetic hybrid MEMS vibration energy collector and preparation method thereof |
| CN105356790A (en) * | 2015-11-16 | 2016-02-24 | 中北大学 | Friction-piezoelectric-magnetoelectric compound three-dimensional space multi-degree-of-freedom micro-energy acquisition device |
| WO2016113199A1 (en) * | 2015-01-16 | 2016-07-21 | Chambre De Commerce Et D'industrie De Region Paris Ile De France (Esiee Paris) | Miniature kinetic energy harvester for generating electrical energy from mechanical vibrations |
| CN205901628U (en) * | 2016-08-24 | 2017-01-18 | 合肥乔茵特智能技术有限公司 | Vibration power -generating device |
-
2016
- 2016-08-24 CN CN201610718459.4A patent/CN106100448B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140073063A (en) * | 2012-12-06 | 2014-06-16 | 정백진 | Piezoelectric generator |
| WO2016113199A1 (en) * | 2015-01-16 | 2016-07-21 | Chambre De Commerce Et D'industrie De Region Paris Ile De France (Esiee Paris) | Miniature kinetic energy harvester for generating electrical energy from mechanical vibrations |
| CN105006994A (en) * | 2015-08-25 | 2015-10-28 | 东南大学 | Piezoelectric-electromagnetic hybrid MEMS vibration energy collector and preparation method thereof |
| CN105356790A (en) * | 2015-11-16 | 2016-02-24 | 中北大学 | Friction-piezoelectric-magnetoelectric compound three-dimensional space multi-degree-of-freedom micro-energy acquisition device |
| CN205901628U (en) * | 2016-08-24 | 2017-01-18 | 合肥乔茵特智能技术有限公司 | Vibration power -generating device |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106655885A (en) * | 2016-11-15 | 2017-05-10 | 重庆交通大学 | Three-dimensional broadband random vibration energy collector |
| CN106655885B (en) * | 2016-11-15 | 2019-05-17 | 重庆交通大学 | Three-dimensional broadband random vibration energy collecting device |
| CN106849750A (en) * | 2017-02-23 | 2017-06-13 | 浙江科技学院 | A kind of anti-wearing ornaments for turning intelligent alarm of self-power generation type infant |
| CN106849750B (en) * | 2017-02-23 | 2019-04-09 | 浙江科技学院 | A kind of anti-wearing ornaments for turning intelligent alarm of self-power generation type infant |
| CN106849597A (en) * | 2017-04-10 | 2017-06-13 | 厦门大学 | A kind of new multi-directional energy gathering apparatus |
| CN106849597B (en) * | 2017-04-10 | 2019-04-16 | 厦门大学 | A kind of multi-directional energy gathering apparatus |
| CN109621778A (en) * | 2018-12-28 | 2019-04-16 | 陈溢 | A kind of anti-adherency printing packaging pigment mixing apparatus of sound wave heating resonance |
| CN109621778B (en) * | 2018-12-28 | 2021-06-11 | 赣州惠彩印刷有限公司 | Anti-adhesion mixing equipment for pigment for printing and packaging through acoustic wave resonance heating |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106100448B (en) | 2018-06-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Ahmad et al. | Review of vibration‐based electromagnetic–piezoelectric hybrid energy harvesters | |
| Bhatnagar et al. | Energy harvesting for assistive and mobile applications | |
| US10425018B2 (en) | Triboelectric nanogenerator for harvesting broadband kinetic impact energy | |
| CN103107737B (en) | Piezoelectricity friction combined type micro-nano generator and preparation method thereof | |
| Yildiz | Potential Ambient Energy-Harvesting Sources and Techniques. | |
| Zhang et al. | Structure design and performance of hybridized nanogenerators | |
| CN103107739B (en) | Movable-magnet-type electromagnetism-piezoelectricity-combined-type broadband energy harvester based on micro-electromechanical systems (MEMS) | |
| Kuo et al. | Fabrication and performance evaluation of a metal-based bimorph piezoelectric MEMS generator for vibration energy harvesting | |
| Mahmud et al. | Advances in mems and microfluidics‐based energy harvesting technologies | |
| CN106100448A (en) | A kind of vibration generating device and preparation method thereof | |
| Bai et al. | Hybrid, multi-source, and integrated energy harvesters | |
| CN205901628U (en) | Vibration power -generating device | |
| CN101764532B (en) | Piezoelectric giant magnetostrictive combined wideband vibration energy collector | |
| CN108429428B (en) | Electromagnetic friction composite type multidirectional vibration energy collector and manufacturing method thereof | |
| CN205195598U (en) | Composite nanowire generator | |
| Rana et al. | Ultrahigh‐output triboelectric and electromagnetic hybrid generator for self‐powered smart electronics and biomedical applications | |
| CN103199738B (en) | Piezoelectricity-piezoelectricity combined type broadband energy harvester based on micro-electro-mechanical system (MEMS) technology | |
| Ilyas | Piezoelectric energy harvesting: methods, progress, and challenges | |
| Gupta et al. | Piezoelectric energy harvesting via shoe sole | |
| CN104506086A (en) | Miniature piezoelectric and capacitance composite vibration energy harvester | |
| CN105811803A (en) | Piezoelectric material based fluid vibration energy collection apparatus | |
| CN206602469U (en) | A kind of multi-direction piezoelectric vibration power generation machine | |
| Hanif et al. | Power estimation for wearable piezoelectric energy harvester | |
| Galayko et al. | Capacitive kinetic energy harvesting: System-level engineering challenges | |
| Shi et al. | Double-speed piezoelectric–electromagnetic hybrid energy harvester driven by cross-moving magnets |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: 230000 Room 401, house B-6, Hefei hi-tech construction investment group, No. 168, Hefei high new construction investment group, Hefei high tech Zone, Anhui Applicant after: Hefei Anhui Intelligent Technology Co., Ltd. Address before: 230088 B6-4 layer comprehensive office, No. 168, camphora Road, hi tech Zone, Anhui, Hefei Applicant before: Hefei hi tech Intelligent Technology Co., Ltd. |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |