CN106091917A - Rotary transformer check and evaluation system - Google Patents

Rotary transformer check and evaluation system Download PDF

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Publication number
CN106091917A
CN106091917A CN201610458030.6A CN201610458030A CN106091917A CN 106091917 A CN106091917 A CN 106091917A CN 201610458030 A CN201610458030 A CN 201610458030A CN 106091917 A CN106091917 A CN 106091917A
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China
Prior art keywords
rotary transformer
host computer
photoelectric encoder
box
gear
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CN201610458030.6A
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Chinese (zh)
Inventor
陈机林
刘超
侯远龙
王超
陈梦
余世航
侯润民
汤巧戈
孙浩
姚松坡
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Nanjing University of Science and Technology
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Nanjing University of Science and Technology
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Priority to CN201610458030.6A priority Critical patent/CN106091917A/en
Publication of CN106091917A publication Critical patent/CN106091917A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The present invention provides a kind of rotary transformer check and evaluation system, including rotary transformer detection apparatus, photoelectric encoder, gear-box, motor, PCI 1710U type data collecting card and host computer.Described host computer is arranged for controlling the execution of rotary transformer check and evaluation, including: control motor action, thus drive gear-box action;Receive rotary transformer detection apparatus and the detection data of photoelectric encoder and compare and error analysis and assessment;Described host computer sends operation instruction to motor;Motor rotates according to operation instruction and passes through gear-box and makes photoelectric encoder and rotary transformer to be detected operating simultaneously;The positional information of photoelectric encoder, rotary transformer is compared by host computer, carries out error analysis and assessment.

Description

Rotary transformer check and evaluation system
Technical field
The present invention relates to angle detection system technical field, in particular to a kind of rotary transformer check and evaluation system System.
Background technology
Measurement for angle typically selects rotary transformer, photoelectric encoder or magnetic encoder, for building ring When border is more severe, especially strong magnetic, at a high speed, the working condition of heavy duty, above-mentioned three kinds of angular transducers often only have Rotary transformer can be competent at this environment.
Under the working environment that these are severe, the highest to the precision of rotary transformer and the requirement of error, it is right to need The measurement error of rotary transformer detects.
Summary of the invention
Present invention aim at providing a kind of rotary transformer check and evaluation system, it is achieved single, double passage rotary transformer Detection, error evaluation, data real-time storage.
The above-mentioned purpose of the present invention is realized by the technical characteristic of independent claims, and dependent claims is with alternative or has The mode of profit develops the technical characteristic of independent claims.
For reaching above-mentioned purpose, the present invention proposes a kind of rotary transformer check and evaluation system, examines including rotary transformer Survey device, photoelectric encoder, gear-box, motor, PCI-1710U type data collecting card and host computer, wherein:
Described host computer is arranged for controlling the execution of rotary transformer check and evaluation, including: control motor and move Make, thus drive gear-box action;Receive rotary transformer detection apparatus and the detection data of photoelectric encoder and compare Relatively and error analysis and assessment;
Described host computer sends operation instruction by PCI-1710U type data collecting card to motor;
Described motor rotates according to operation instruction, and the output shaft of this motor connects with the power shaft rigidity of gear-box Connect and drive the power shaft of gear-box to rotate;
One end of the output shaft of described gear-box is connected with photoelectric encoder, the other end and rotary transformer to be detected Rotary shaft is rigidly connected by shaft coupling, and makes photoelectric encoder when the output shaft of this gear-box is driven in rotation simultaneously and treat The rotary transformer operating of detection;
The positional information of described photoelectric encoder passes through Serial Port Transmission to host computer, the position of rotary transformer to be detected Information is passed to by the I/O oral instructions of PCI-1710U type data collecting card after processing via described rotary transformer detection apparatus Position machine, both of the aforesaid positional information is compared by described host computer, carries out error analysis and assessment.
In further embodiment, described host computer is additionally provided with display module and memory module, for realizing error The display of analysis result and storage.
The rotary transformer check and evaluation system of the present invention, compared with prior art, its remarkable advantage is:
1) error evaluation of the present invention have employed a kind of point-by-point comparison, and tests the whole range of rotary transformer Performance Evaluation;
2) high-precision position measurement, uses high-precision single-ring absolute type photoelectric encoder, has measured precision high, The feature that long-time stability are good;
3) utilize the present invention to see respectively single twin-channel rotary transformer to be carried out check and evaluation, positive and negative rotation direction is entered Row is measured, and after rotary transformer installation, can be automatically performed test;
4) system has a key storage function, supports the function of same sensor repetitive measurement and has inquiry simultaneously, beats The function of the print quality certification, easy to operate;
5) process from data acquisition to data, store, inquire about, print, constitute a whole set of full-order system function, operable Property is strong.
As long as should be appreciated that all combinations of aforementioned concepts and the extra design described in greater detail below are at this A part for the subject matter of the disclosure is can be viewed as in the case of the design of sample is the most conflicting.It addition, required guarantor All combinations of the theme protected are considered as a part for the subject matter of the disclosure.
Foregoing and other aspect, the reality that present invention teach that can be more fully appreciated with from the following description in conjunction with accompanying drawing Execute example and feature.The feature of other additional aspect such as illustrative embodiments of the present invention and/or beneficial effect will be below Description in obvious, or by learning according in the practice of detailed description of the invention that present invention teach that.
Accompanying drawing explanation
Accompanying drawing is not intended to drawn to scale.In the accompanying drawings, each identical or approximately uniform group illustrated in each figure One-tenth part can be indicated by the same numeral.For clarity, in each figure, the most each ingredient is the most labeled. Now, by by example embodiment that various aspects of the invention are described in reference to the drawings, wherein:
Fig. 1 is rotary transformer check and evaluation system general illustration of the present invention.
Fig. 2 is that the data of positional information of the present invention move towards flow chart.
Fig. 3 is system setting procedure figure.
Fig. 4 is for gathering position signalling flow chart.
Fig. 5 is file polling flow process.
Fig. 6 is operation general flow chart.
Detailed description of the invention
In order to know more about the technology contents of the present invention, especially exemplified by specific embodiment and coordinate institute's accompanying drawings to be described as follows.
Each side the most with reference to the accompanying drawings to describe the present invention, the embodiment illustrated shown in the drawings of many. Embodiment of the disclosure and must not be intended to include all aspects of the invention.Should be appreciated that multiple design presented hereinbefore and reality Execute example, and those designs of describing in more detail below and embodiment can in many ways in any one comes real Execute, this is because design disclosed in this invention and embodiment are not limited to any embodiment.It addition, disclosed by the invention one A little aspects can be used alone, or otherwise any appropriately combined uses with disclosed by the invention.
Shown in Fig. 1-Fig. 6, according to embodiments of the invention, a kind of rotary transformer check and evaluation system, including rotation Change depressor detection device, photoelectric encoder, gear-box, motor, PCI-1710U type data collecting card and host computer.
Described host computer is arranged for controlling the execution of rotary transformer check and evaluation, including: control motor and move Make, thus drive gear-box action;Receive rotary transformer detection apparatus and the detection data of photoelectric encoder and compare Relatively and error analysis and assessment.
Described host computer sends operation instruction by PCI-1710U type data collecting card to motor.
Described motor, such as 57 series motors, according to operation instruction rotate, the output shaft of this motor with The power shaft of gear-box is rigidly connected and drives the power shaft of gear-box to rotate.
One end of the output shaft of described gear-box is connected with photoelectric encoder, the other end and rotary transformer to be detected Rotary shaft is rigidly connected by shaft coupling, and makes photoelectric encoder when the output shaft of this gear-box is driven in rotation simultaneously and treat The rotary transformer operating of detection.
The positional information of described photoelectric encoder passes through Serial Port Transmission to host computer, the position of rotary transformer to be detected Information is passed to by the I/O oral instructions of PCI-1710U type data collecting card after processing via described rotary transformer detection apparatus Position machine, both of the aforesaid positional information is compared by described host computer, carries out error analysis and assessment.
In some preferred examples, described host computer is additionally provided with display module and memory module, for realizing by mistake The display of difference analysis result and storage.
Shown in Fig. 1, Fig. 2 and Fig. 6, when detecting and assess, host computer is by grinding China's PCI-1710U type data The I/O data-interface of capture card sends operation instruction to stepper motor driver, and stepper motor driver receives host computer Instruction rear drive motor starts to rotate.The mechanical axis of motor detects the power shaft of special gear box with rotary transformer It is rigidly connected by shaft coupling, output shaft one end of the special gear box of rotary transformer detection simultaneously and high precision photoelectric encoder Rotary shaft be rigidly connected by shaft coupling, the rotary shaft of other end and rotary transformer to be detected is by shaft coupling rigidity Connect.Motor rotates, and transformator detection special gear box operating is rotated, makes high precision photoelectric encoder simultaneously and treat Detection rotary transformer operating.The positional information serial ports of high precision photoelectric encoder is sent to host computer, rotation transformation to be detected The positional information of device is passed to host computer by the I/O oral instructions of data collecting card after being processed by rotary transformer detection apparatus, on Both positions are compared by position machine, carry out error analysis and judge that rotary transformer is the most qualified with assessment.Host computer has Data show in real time, preserve, search, print the functions such as the quality certification.
Specifically, the whole measurement process of rotary transformer is first divided and is just turned around by we, counter two processes that turn around, In test process, to rotating forward, reversion takes 4000 test points, the most uniformly then by rotary transformer to be detected and light The measurement angle of photoelectric coder resolves in host computer, seeks its absolute error, then compares with given maximum error value Go out conclusion.
Position resolving mode for rotary transformer is as follows:
Single twin-channel RDC resolves the digital output interface in module, is connected to host computer by 74LS573 latch Grind on China's data collecting card, control to be transferred to the data of host computer by the duty controlling 74LS573 latch.Complete The uplink of rotary transformer data.
Two speed resolver, through RDC module, resolves and obtains 16 bit digital quantity directly by data collecting card also Row coffret, is transferred in host computer, is respectively as follows:
a0,a1, a2, a3, a4, a5, a6, a7, a8, a9, a10, a11, a12, a13, a14, a15
For above-mentioned aiValue, the only two kinds non-zero digital quantities of i.e. 1 of value.
Corresponding position θaSolution formula is:
θ a = Σ i = 0 15 a i · 3000 2 i ( m i l )
Wherein: θaUnit be mil system (mil) made in Russia, mil made in Russia with the transformational relation of common angle is 360 °=6000mil, aiThe digital quantity settling accounts out through RDC module for two speed resolver, 3000 in above formula are just Be equivalent to 180 ° in angle system.
Resolving for Single-channel Rolling transformator is similar with twin-channel, and only calculation accuracy does not has twin-channel 16 Position is the highest, only 12.
Single-channel Rolling transformator obtains 12 bit digital quantity be respectively as follows: through RDC module, resolving
b0,b1, b2, b3, b4, b5, b6, b7, b8, b9, b10, b11
Wherein biValue, the digital quantity of the most only 0 or 1 two states.
The position θ of corresponding Single-channel Rolling transformationbSolution formula is:
θ b = Σ i = 0 11 b i · 3000 2 i
Resolving for photoelectric encoder positional information is as follows:
The position signalling of photoelectric encoder is not directly by the I/O data-interface of data collecting card, is transmitted directly to Host computer, but it is transmitted to host computer by serial communication interface RS485, serial communication interface has the communication of oneself Agreement, the communication protocol following A5 5A XX XX XX XX taked in the present invention, wherein A5 5A is the frame head of communication protocol, after The data of 8 16 systems in face, the most first 12 is data bit, is divided into the data of low middle high three fields, for least-significant byte, in 8, Most-significant byte, authentic and valid data bit is least-significant byte, in 8, high 1, just 17 data bit, these 17 data bit represent such as Under:
c0,c1, c2, c3, c4, c5, c6, c7, c8, c9, c10, c11, c12, c13, c14, c15, c16
ciValue be also non-zero i.e. 1;
Angle, θ for photoelectric encodercResolve as follows
θ c = Σ i = 0 16 c i · 3000 2 i .
After calculating positional information, according to the rule set, host computer judges whether rotary transformer to be tested closes Lattice.Specifically, the angle information of the angle information of photoelectric encoder Yu rotary transformer to be measured is done difference by host computer, and takes absolutely To value, obtain absolute error, by absolute error a little, compare with given error permissible value, draw test result.
In certain embodiments, when rotary transformer to be measured is double-channel transformer when, it is judged that rule is as follows:
When max (| θaici|)<△θaTime, rotary transformer to be measured is qualified
Wherein the value of i is 0~3999, △ θaFor the maximum allowable absolute error value of this batch of product, θai, θciFor with for the moment Carve rotary transformer to be detected and angle value that photoelectric encoder detects;
When max (| θaici|)>△θaTime, rotary transformer to be measured is defective;
In like manner, the when that rotary transformer to be detected being single channel transformator, it is judged that rule is as follows
When max (| θbici|)<△θbTime, rotary transformer to be measured is qualified.
Wherein the value of i is 0~3999, △ θbFor the maximum allowable absolute error value of this batch of product, θbi, θciFor with for the moment Carve rotary transformer to be detected and angle value that photoelectric encoder detects;
When max (| θbici|)>△θbTime, rotary transformer to be measured is defective.
According to certain embodiments of the present invention, as the photoelectric encoder of high precision position measurement apparatus, preferably measure Scope 0~6000mil, and gamut certainty of measurement < 0.045mil, and long-time stability are high, can meet and (survey rotary transformer Measuring angle scope 0~6000mil, it is desirable to precision is 0.091mil) detection of error.
Meanwhile, host computer interface program, host computer interface is to write with VC++ on MFC platform, can be to list, and the dual pathways is revolved Change depressor detect respectively, it is judged that rotary transformer is the most qualified, simultaneously host computer interface can also arrange data show in real time, Preserve, search, print the functions such as the quality certification, shown in Fig. 5, Fig. 6, exemplarily give inquiry, the process description printed.
Such as, host computer can also arrange display module and memory module, for realizing the display to error analysis result With storage.
In some instances, host computer interface shows rotary transformer in real time, the positional information of photoelectric encoder and rotation The relative error of transformator.Each rotary transformer has the production code member of oneself, the rotation transformation that before measuring, input is to be measured The production code member of device, after having measured a rotary transformer, data can preserve, and automatically generates work certificate.Native system is also Support that same rotary transformer takes multiple measurements checking, after same rotary transformer is repeated several times the data file of measurement Sew name to distinguish, such as: measure for the first time suffix entitled _ 100, second time measure suffix entitled _ 101, third time measure suffix entitled _ 102 etc.;Host computer procedure also has query function simultaneously, clicks on inquiry button, and the production code member at the query window ejected is compiled Collect the production code member inputting rotary transformer to be inquired about in frame, it is possible to inquire previously saved corresponding rotary transformer All data of production code member.
Although the present invention is disclosed above with preferred embodiment, so it is not limited to the present invention.Skill belonging to the present invention Art field has usually intellectual, without departing from the spirit and scope of the present invention, when being used for a variety of modifications and variations.Cause This, protection scope of the present invention is when being as the criterion depending on those as defined in claim.

Claims (5)

1. a rotary transformer check and evaluation system, it is characterised in that include rotary transformer detection apparatus, photoelectric coding Device, gear-box, motor, PCI-1710U type data collecting card and host computer, wherein:
Described host computer is arranged for controlling the execution of rotary transformer check and evaluation, including: control motor action, from And drive gear-box action;Receive rotary transformer detection apparatus and the detection data of photoelectric encoder and compare and miss Difference analysis and assessment;
Described host computer sends operation instruction by PCI-1710U type data collecting card to motor;
Described motor rotates according to operation instruction, and the output shaft of this motor and the power shaft of gear-box are rigidly connected also The power shaft driving gear-box rotates;
One end of the output shaft of described gear-box is connected with photoelectric encoder, the other end and the rotation of rotary transformer to be detected Axle is rigidly connected by shaft coupling, and makes photoelectric encoder and to be detected when the output shaft of this gear-box is driven in rotation simultaneously Rotary transformer operating;
The positional information of described photoelectric encoder passes through Serial Port Transmission to host computer, the positional information of rotary transformer to be detected It is passed to host computer by the I/O oral instructions of PCI-1710U type data collecting card after processing via described rotary transformer detection apparatus, Both of the aforesaid positional information is compared by described host computer, carries out error analysis and assessment.
Rotary transformer check and evaluation system the most according to claim 1, it is characterised in that described host computer is additionally provided with Display module and memory module, for realizing the display to error analysis result and storage.
Rotary transformer check and evaluation system the most according to claim 1, it is characterised in that described PC control will be treated Survey the whole measurement process of rotary transformer divide just turn around, counter two processes that turn around, in test process, to rotating forward and anti- Turn and take 4000 test points the most uniformly, then by the measurement angle of rotary transformer to be detected and photoelectric encoder upper Position machine resolves to obtain positional information, seeks its absolute error, then and given maximum error value compare to obtain rotating and become The testing result of depressor.
Rotary transformer check and evaluation system the most according to claim 3, it is characterised in that rotary transformer to be detected and The resolving of the positional information of photoelectric encoder includes:
Position resolving mode for rotary transformer to be measured is as follows:
For twin-channel rotary transformer to be measured, through RDC module, resolving obtains 16 bit digital quantity and directly passes through PCI- The parallel interface of 1710U type data collecting card, is transferred in host computer, is respectively as follows:
a0, a1, a2, a3, a4, a5, a6, a7, a8, a9, a10, a11, a12, a13, a14, a15
For above-mentioned aiValue, i=1,2 ..15, there are two kinds of values, i.e. 0,1 two digital quantities;
Corresponding position θaSolution formula is:
&theta; a = &Sigma; i = 0 15 a i &CenterDot; 3000 2 i
Wherein: θaUnit be mil mil made in Russia, the transformational relation of mil made in Russia and common angle is 360 °= 6000mil, aiThe digital quantity settling accounts out through RDC module for two speed resolver, 3000 in above formula are equivalent to In angle system 180 °;
For Single-channel Rolling transformator, through RDC module, resolving obtains 12 bit digital quantity and is respectively as follows:
b0, b1, b2, b3, b4, b5, b6, b7, b8, b9, b10, b11
Wherein biValue, the digital quantity of only 0 or 1 two states;
The position θ of corresponding Single-channel Rolling transformationbSolution formula is:
&theta; b = &Sigma; i = 0 11 b i &CenterDot; 3000 2 i
Resolving for photoelectric encoder positional information is as follows:
The position signalling of photoelectric encoder is not directly by the I/O data-interface of PCI-1710U type data collecting card, directly It is transferred to host computer, but is transmitted to host computer by serial communication interface RS485, the following A5 of communication protocol taked 5A XX XX XX XX, wherein A5 5A is the frame head of communication protocol, after the data of 8 16 systems, the most first 12 is data Position, is divided into the data of low middle high three fields, respectively least-significant byte, in 8, most-significant byte, authentic and valid data bit is least-significant byte, In 8 and high 1, be 17 data bit, these 17 data bit are expressed as follows:
c0,c1, c2, c3, c4, c5, c6, c7, c8, c9, c10, c11, c12, c13, c14, c15, c16
ciValue only have the digital quantity of 0 or 1 two states;
Angle, θ for photoelectric encodercResolve as follows
&theta; c = &Sigma; i = 0 16 c i &CenterDot; 3000 2 i .
Rotary transformer check and evaluation system the most according to claim 3, it is characterised in that host computer is according to following setting Judge the testing result of rotary transformer to be measured:
When rotary transformer to be measured is double-channel transformer when, it is judged that rule is as follows:
When max (| θaici|)<ΔθaTime, rotary transformer to be measured is qualified;
Wherein the value of i is 0~3999, Δ θaFor the maximum allowable absolute error value of this batch of product, θai, θciTreat for synchronization The angle value that detection rotary transformer and photoelectric encoder detect, the angle information that the most aforementioned clearing obtain;
When max (| θaici|)>ΔθaTime, rotary transformer to be measured is defective;
The when that rotary transformer to be detected being single channel transformator, it is judged that rule is as follows:
When max (| θbici|)<ΔθbTime, rotary transformer to be measured is qualified;
Wherein the value of i is 0~3999, Δ θbFor the maximum allowable absolute error value of this batch of product, θbi, θciTreat for synchronization The angle value that detection rotary transformer and photoelectric encoder detect, the angle information that the most aforementioned clearing obtain;
When max (| θbici|)>ΔθbTime, rotary transformer to be measured is defective.
CN201610458030.6A 2016-06-22 2016-06-22 Rotary transformer check and evaluation system Pending CN106091917A (en)

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Cited By (11)

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CN107478247A (en) * 2017-07-31 2017-12-15 浙江天拓电气有限公司 A kind of rotary transformer high accuracy resolving system
CN108469220A (en) * 2018-04-25 2018-08-31 南京理工大学 The method that direction receiver detecting system precision improves
CN109186450A (en) * 2018-10-29 2019-01-11 北京遥感设备研究所 A kind of position marker is with being co-axially mounted Split rotary transformer precision automatic testing equipment
CN109612417A (en) * 2018-12-19 2019-04-12 北京金风科创风电设备有限公司 Precision detection method and detection system for rotary transformer
CN109708567A (en) * 2018-11-16 2019-05-03 陕西航空电气有限责任公司 A kind of fault detection method of rotary transformer
CN109798927A (en) * 2019-01-23 2019-05-24 长春理工大学 Full-range precision detection device of shaft-position encoder based on mutual reverse rotation angle
CN110230977A (en) * 2018-06-29 2019-09-13 蔚来汽车有限公司 Rotation becomes dynamic Error Analysis device and method, controller and the storage medium of equipment
CN111077777A (en) * 2019-12-17 2020-04-28 天津津航技术物理研究所 Trigonometric function model error compensation method for angle measurement of double-channel rotary transformer
CN111398862A (en) * 2018-12-17 2020-07-10 北京华航无线电测量研究所 Stepping motor based automatic testing equipment and method for rotary transformer
CN113295086A (en) * 2021-05-07 2021-08-24 恒大新能源汽车投资控股集团有限公司 Precision testing system of rotary transformer
CN116481582A (en) * 2023-06-21 2023-07-25 深圳深蕾科技股份有限公司 Precision detection system of incremental photoelectric encoder

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Publication number Priority date Publication date Assignee Title
CN107478247A (en) * 2017-07-31 2017-12-15 浙江天拓电气有限公司 A kind of rotary transformer high accuracy resolving system
CN107478247B (en) * 2017-07-31 2019-07-23 浙江天拓电气有限公司 A kind of rotary transformer high-precision resolving system
CN108469220A (en) * 2018-04-25 2018-08-31 南京理工大学 The method that direction receiver detecting system precision improves
CN110230977A (en) * 2018-06-29 2019-09-13 蔚来汽车有限公司 Rotation becomes dynamic Error Analysis device and method, controller and the storage medium of equipment
CN109186450A (en) * 2018-10-29 2019-01-11 北京遥感设备研究所 A kind of position marker is with being co-axially mounted Split rotary transformer precision automatic testing equipment
CN109186450B (en) * 2018-10-29 2020-12-11 北京遥感设备研究所 Precision testing method for coaxially-mounted split type rotary transformer for position marker
CN109708567A (en) * 2018-11-16 2019-05-03 陕西航空电气有限责任公司 A kind of fault detection method of rotary transformer
CN111398862A (en) * 2018-12-17 2020-07-10 北京华航无线电测量研究所 Stepping motor based automatic testing equipment and method for rotary transformer
CN109612417A (en) * 2018-12-19 2019-04-12 北京金风科创风电设备有限公司 Precision detection method and detection system for rotary transformer
CN109798927A (en) * 2019-01-23 2019-05-24 长春理工大学 Full-range precision detection device of shaft-position encoder based on mutual reverse rotation angle
CN109798927B (en) * 2019-01-23 2022-05-13 长春理工大学 Full-range precision detection device of shaft angle encoder based on rotation angle reciprocal
CN111077777A (en) * 2019-12-17 2020-04-28 天津津航技术物理研究所 Trigonometric function model error compensation method for angle measurement of double-channel rotary transformer
CN113295086A (en) * 2021-05-07 2021-08-24 恒大新能源汽车投资控股集团有限公司 Precision testing system of rotary transformer
CN116481582A (en) * 2023-06-21 2023-07-25 深圳深蕾科技股份有限公司 Precision detection system of incremental photoelectric encoder
CN116481582B (en) * 2023-06-21 2023-09-05 深圳深蕾科技股份有限公司 Precision detection system of incremental photoelectric encoder

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Application publication date: 20161109