CN106086586B - A kind of high-performance nickel titante series marmem and its preparation method and application - Google Patents
A kind of high-performance nickel titante series marmem and its preparation method and application Download PDFInfo
- Publication number
- CN106086586B CN106086586B CN201610536412.6A CN201610536412A CN106086586B CN 106086586 B CN106086586 B CN 106086586B CN 201610536412 A CN201610536412 A CN 201610536412A CN 106086586 B CN106086586 B CN 106086586B
- Authority
- CN
- China
- Prior art keywords
- marmem
- nickel
- performance
- titante series
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C30/00—Alloys containing less than 50% by weight of each constituent
- C22C30/06—Alloys containing less than 50% by weight of each constituent containing zinc
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C14/00—Alloys based on titanium
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C30/00—Alloys containing less than 50% by weight of each constituent
- C22C30/02—Alloys containing less than 50% by weight of each constituent containing copper
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Abstract
The invention discloses a kind of high-performance nickel titante series marmem, which is made of titanium, nickel, copper, niobium, Zn-ef ficiency；Include following component by atomic percent: atomic percent titanium content is 45-50%, the atom percentage content of nickel is 30-34%, the atom percentage content of copper is 10-14%, the atom percentage content of niobium is 1-8%, surplus is zinc.It include nanometer Ti in thin film alloys prepared by the present invention2Cu and Ti2Ni phase, in carrying out deformation process, the nanometer mutually noresidue in conversion, shape memory response rate is high, has excellent performance.
Description
Technical field
The present invention relates to shape memory alloy material fields, and in particular to a kind of high-performance nickel titante series marmem and
Preparation method and application.
Background technique
Marmem is used widely in production and living because of its restorability deformation with higher.In
State patent of invention CN102864339A proposes a kind of elastic alloy material, and each composition of the alloy material is contained by atomic percent
Amount is nickel 45-55at%, iron 0-10at%, titanium 10-15at%, cobalt 10-15at%, 15-20at%.The alloy of the technical program
The alloy material that not only there is material narrow lag elastic performance to be able to maintain shape memory effect again.Preparation method includes following
Step: 1), choose purity >=99.9% nickel, purity >=99.99% cobalt, the iron of purity >=99.9%, purity >=99.9%
Titanium, the gallium of purity >=99.99%；By above-mentioned material according to atomic percentage content ingredient, it is then placed in smelting furnace and vacuumizes
To 2.0 × 10-4Pa is re-filled with argon gas, obtains alloy blank with the cooling suction casting of mold after melt back；It 2), will be obtained in 1)
Alloy blank sealing, is evacuated to 5.0 × 10-5Pa keeps the temperature 72 hours at 1000 DEG C, then cools to room temperature to obtain super-elasticity
Alloy material.
Chinese invention patent CN102851548A proposes a kind of superelastic alloy, and each composition of the alloy material is pressed
Atomic percentage content is nickel 45-55at%, iron 0-10at%, titanium 25-35at%, cobalt 10-15at%.2. described in claim 1
Superelastic alloy, each composition of the alloy material are nickel 50at%, iron 5at%, titanium 35at%, cobalt by atomic percentage content
10at%.
Chinese invention patent CN101876016A proposes a kind of rare earth Ni-Mg-Co-Ga-based high-temperature shape memory alloy, provides
A kind of rare earth Ni-Mg-Co-Ga-based high-temperature shape memory conjunction with high martensitic transformation temperature, preferable plasticity and shape-memory properties
Gold and preparation method thereof.Chemical formula is (Ni53Mn22Co6Ga19) 100-xAx, wherein A=Dy, Y, Gd, the atomic percent of x
It is 0~1.Nickel, manganese, cobalt, gallium and rare earths material are put into furnace, vacuumized, argon gas is filled with, melting obtains rare earth Ni-Mg-Co-Ga-based
High-temperature shape memory alloy ingot；Rare earth Ni-Mg-Co-Ga-based high-temperature shape memory alloy ingot is heat-treated, furnace cooling；It will be through
The rare earth Ni-Mg-Co-Ga-based high-temperature shape memory alloy ingot of Overheating Treatment is rolled into sheet alloy material；Obtained sheet is closed
Golden material is cut into sample, after heat treatment, ice water quenching to get arrive rare earth Ni-Mg-Co-Ga-based high-temperature shape memory alloy.
Summary of the invention
Goal of the invention: the cycle life in order to improve marmem, the technical problem to be solved by the present invention is to mention
A kind of high-performance nickel titante series marmem is supplied.
Also there is provided a kind of preparation sides of high-performance nickel titante series marmem for technical problems to be solved by the present invention
Method.
Also there is provided a kind of applications of high-performance nickel titante series marmem for technical problems to be solved by the present invention.
Conventional alloy material deformation thousands of times will be broken, and the method that the present invention uses magnetron sputtering, preparation contain
Unique component and microstructural alloy film material, can be increased to several thousands of times or more for the cycle-index of the alloy.It should
Alloy firm with a thickness of 2-50 microns, in microstructure include Ti2Cu and Ti2Ni phase, to be nanocrystalline, size is less than for they
500 nanometers.
To achieve the above object, the technical solution adopted by the present invention are as follows: a kind of high-performance nickel titante series marmem, it should
Alloy is made of titanium, nickel, copper, niobium, Zn-ef ficiency.
Preferably, including following component by atomic percent: atomic percent titanium content is the atom hundred of 45-50%, nickel
Dividing than content is 30-34%, the atom percentage content of copper is 10-14%, the atom percentage content of niobium is 1-8%, surplus is
Zinc.
Preferably, above-mentioned high-performance nickel titante series marmem with a thickness of 2-50 microns.
Preferably, including Ti in the microstructure of above-mentioned high-performance nickel titante series marmem2Cu and Ti2Ni phase.
Preferably, the Ti in above-mentioned high-performance nickel titante series marmem2Cu and Ti2The size of Ni phase is received less than 500
Rice.
The preparation method of above-mentioned high-performance nickel titante series marmem, comprising the following steps:
1) target is prepared according to above-mentioned alloy material；
2) marmem that film-form is prepared using magnetron sputtering, is evacuated to 10-3Pa or more is filled with argon gas, so
It is evacuated to 10 again afterwards-3Pa, adjustment operating voltage are 500V, sputter duty ratio 60-70%, start to carry out sputtering sedimentation, control is thick
Degree obtains the marmem of film-form for 2-50 microns；
3) marmem of the film-form obtained to step 2 carries out annealing heat-treatment and obtains high-performance nickel titante series shape
Shape memory alloys.
Preferably, above-mentioned annealing heat-treatment temperature is 650-720 degrees Celsius.
Above-mentioned high-performance nickel titante series marmem Industry Control, in terms of application.
The utility model has the advantages that the invention has the following advantages that a kind of high-performance nickel titante series can be prepared using method of the invention
Marmem, cycle-index are up to several thousands of times or more, much higher than thousands of times of current alloy.This is because at present mostly
When number form shape memory alloys change under two kinds of crystal lattice states, the conversion between two-phase is incomplete, in metallic high temperature phase (Ovshinsky
Body) in will appear more and more low-temperature phases (martensite) crystal structure, thousands of times will be cracked, eventually results in alloy
Fracture.In the present invention, the nanometer phase Ti that will form2Cu phase and Ti2Ni phase, size is at 500 nanometers or less.Work as Ti2Cu phase exists
When converting in B2 and two kinds of structures of B19, the conversion between them is that completely, there is no residuals, therefore can greatly improve and follow
The ring service life.
Specific embodiment
Further illustrate is made to the present invention With reference to embodiment.
Embodiment 1: the preparation of high-performance nickel titante series marmem
1, according to titanium: nickel: copper: niobium: the atomic ratio of zinc is that the ratio of 50:34:14::1:1 prepares target；
2, the marmem that film-form is prepared using magnetron sputtering, is evacuated to 10-3Pa or more is filled with argon gas, so
It is evacuated to 10 again afterwards-3Pa, adjustment operating voltage are 500V, sputter duty ratio 60%, start to carry out sputtering sedimentation, control thickness
It is 12 microns；
3, annealing heat-treatment is carried out to the above alloy, temperature is 650 degrees Celsius and obtains the conjunction of high-performance nickel titante series shape memory
Gold.
Cycle life test is carried out to high-performance nickel titante series marmem, after sample carries out 2 thousands of times tests, not yet
Fracture.
It include nanometer Ti in the alloy2Cu and Ti2Ni phase, 80 ~ 200 nanometers of size.
Embodiment 2: the preparation of high-performance nickel titante series marmem
1. according to titanium: nickel: copper: niobium: the atomic ratio of zinc is that 48:30:10:8:4 ratio prepares target；
2. preparing the marmem of film-form using magnetron sputtering, it is evacuated to 10-3Pa or more is filled with argon gas, so
It is evacuated to 10 again afterwards-3Pa, adjustment operating voltage are 500V, sputter duty ratio 60%, start to carry out sputtering sedimentation, control thickness
It is 32 microns；
3. pair or more alloy carry out annealing heat-treatment, temperature be 680 degrees Celsius obtain high-performance nickel titante series shape memory conjunction
Gold.
Cycle life test is carried out to high-performance nickel titante series marmem, after sample carries out 2 thousands of times tests, not yet
Fracture.
It include nanometer Ti in the alloy2Cu and Ti2Ni phase, 100 ~ 250 nanometers of size.
Embodiment 3: the preparation of high-performance nickel titante series marmem
1. according to titanium: nickel: copper: niobium: the atomic ratio of zinc is that the ratio of 45:32:13:6:4 prepares target；
2. preparing the marmem of film-form using magnetron sputtering, it is evacuated to 10-3Pa or more is filled with argon gas, so
It is evacuated to 10 again afterwards-3Pa, adjustment operating voltage are 500V, sputter duty ratio 70%, start to carry out sputtering sedimentation, control thickness
It is 47 microns；
3. pair or more alloy carry out annealing heat-treatment, temperature be 720 degrees Celsius obtain high-performance nickel titante series shape memory conjunction
Gold.
Cycle life test is carried out to high-performance nickel titante series marmem, after sample carries out 2 thousands of times tests, not yet
Fracture.
It include nanometer Ti in the alloy2Cu and Ti2Ni phase, 80 ~ 160 nanometers of size.
The preparation of 4 high-performance nickel titante series marmem of embodiment
1. according to titanium: nickel: copper: niobium: the atomic ratio of zinc is that the ratio of 46:31:12:8:3 prepares target；
2. preparing the marmem of film-form using magnetron sputtering, it is evacuated to 10-3Pa or more is filled with argon gas, so
It is evacuated to 10 again afterwards-3Pa, adjustment operating voltage are 500V, sputter duty ratio 65%, start to carry out sputtering sedimentation, control thickness
It is 2 microns；
3. pair or more alloy carry out annealing heat-treatment, temperature be 685 degrees Celsius obtain high-performance nickel titante series shape memory conjunction
Gold.
Cycle life test is carried out to high-performance nickel titante series marmem, after sample carries out 2 thousands of times tests, not yet
Fracture.
It include nanometer Ti in the alloy2Cu and Ti2Ni phase, 150 ~ 300 nanometers of size.
The preparation of 5 high-performance nickel titante series marmem of embodiment
1. according to titanium: nickel: copper: niobium: the atomic ratio of zinc is that the ratio of 47:33:11:5:4 prepares target；
2. preparing the marmem of film-form using magnetron sputtering, it is evacuated to 10-3Pa or more is filled with argon gas, so
It is evacuated to 10 again afterwards-3Pa, adjustment operating voltage are 500V, sputter duty ratio 67%, start to carry out sputtering sedimentation, control thickness
It is 50 microns；
3. pair or more alloy carry out annealing heat-treatment, temperature be 690 degrees Celsius obtain high-performance nickel titante series shape memory conjunction
Gold.
Cycle life test is carried out to high-performance nickel titante series marmem, after sample carries out 2 thousands of times tests, not yet
Fracture.
It include nanometer Ti in the alloy2Cu and Ti2Ni phase, 50 ~ 200 nanometers of size.
Comparative example 1
Experimental example:
1. according to 1at% manganese, 0.4at% neodymium, 51at% titanium, 44at% nickel, 3.6at% iron proportional arrangement raw material；
2. raw material is uniformly mixed, it is put into non-consumable arc furnace, is evacuated down to 5*10-4Pa, is filled with high-purity argon
Gas, then melting 5 times；
3. being heat-treated in vacuum heat treatment furnace: 500 degree progress timeliness 2 hours, it is then small in 450 degree of timeliness 5
When；
4. it is cooling, thus obtain marmem.
Testing result: carrying out cycle life test, and sample carries out 8636 tests fracture.
The alloy of marmem containing niobium that the embodiment of the present invention 1 ~ 5 is prepared and the common alloy of comparative example 1 carry out
Memory response rate after 1000 deformation:
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (6)
1. a kind of high-performance nickel titante series marmem, which is characterized in that the alloy is made of titanium, nickel, copper, niobium, Zn-ef ficiency,
The atomic percent ratio of each element are as follows: atomic percent titanium content is 45-50%, the atom percentage content of nickel is 30-34%, copper
Atom percentage content be 10-14%, the atom percentage content of niobium is 1-8%, surplus is zinc；And the nickel titante series shape memory
It include Ti in the microstructure of alloy2Cu and Ti2Ni phase.
2. a kind of high-performance nickel titante series marmem according to claim 1, which is characterized in that the high-performance
Nickel titante series marmem with a thickness of 2-50 microns.
3. a kind of high-performance nickel titante series marmem according to claim 2, which is characterized in that the high-performance
Ti in nickel titante series marmem2Cu and Ti2The size of Ni phase is less than 500 nanometers.
4. the preparation method of the described in any item high-performance nickel titante series marmems of claim 1 ~ 3, which is characterized in that packet
Include following steps:
1) target is prepared according to above-mentioned alloy material；
2) marmem that film-form is prepared using magnetron sputtering, is evacuated to 10-3Pa or more is filled with argon gas, then again
It is evacuated to 10-3Pa, adjustment operating voltage be 500V, sputter duty ratio 60-70%, start carry out sputtering sedimentation, control with a thickness of
2-50 microns obtain the marmem of film-form；
3) marmem of the film-form obtained to step 2 carries out annealing heat-treatment and obtains high-performance nickel titante series shape note
Recall alloy.
5. the preparation method of high-performance nickel titante series marmem according to claim 4, which is characterized in that described to move back
Heat treat temperatures are 650-720 degrees Celsius.
6. the described in any item high-performance nickel titante series marmems of claim 1 ~ 3 are in terms of Industry Control, medical instrument
Application.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610536412.6A CN106086586B (en) | 2016-07-08 | 2016-07-08 | A kind of high-performance nickel titante series marmem and its preparation method and application |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610536412.6A CN106086586B (en) | 2016-07-08 | 2016-07-08 | A kind of high-performance nickel titante series marmem and its preparation method and application |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106086586A CN106086586A (en) | 2016-11-09 |
| CN106086586B true CN106086586B (en) | 2019-01-04 |
Family
ID=57212583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610536412.6A Active CN106086586B (en) | 2016-07-08 | 2016-07-08 | A kind of high-performance nickel titante series marmem and its preparation method and application |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106086586B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114875294B (en) * | 2022-06-07 | 2023-05-12 | 上海工程技术大学 | Titanium nickel base alloy material and preparation method and application thereof |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4950340A (en) * | 1987-08-10 | 1990-08-21 | Mitsubishi Kinzoku Kabushiki Kaisha | Intermetallic compound type alloy having improved toughness machinability and wear resistance |
| EP1629134B1 (en) * | 2003-03-25 | 2012-07-18 | Questek Innovations LLC | Coherent nanodispersion-strengthened shape-memory alloys |
| CN102690976B (en) * | 2012-05-22 | 2013-09-18 | 北京航空航天大学 | Titanium-zirconium-niobium-iron shape memory alloy and preparation method thereof |
| CN104164648A (en) * | 2014-08-31 | 2014-11-26 | 海安南京大学高新技术研究院 | Narrow-hysteresis submicron-scale shape memory alloy film and preparation method thereof |
| CN104946956A (en) * | 2015-06-09 | 2015-09-30 | 哈尔滨工程大学 | TiNiCuNb shape memory alloy and preparation method thereof |
-
2016
- 2016-07-08 CN CN201610536412.6A patent/CN106086586B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN106086586A (en) | 2016-11-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Bönisch et al. | Thermal stability and phase transformations of martensitic Ti–Nb alloys | |
| Pogrebnjak et al. | The structure and properties of high-entropy alloys and nitride coatings based on them | |
| US10279391B2 (en) | Magnetic phase-transformation material | |
| CN102808105B (en) | Method for preparing shape memory copper alloy | |
| Tong et al. | Microstructure and martensitic transformation of Ti49Ni51− xHfx high temperature shape memory alloys | |
| CN106591627A (en) | High-strength shape memory alloy and preparing method and application thereof | |
| Han et al. | Microstructure, phase stability and mechanical properties of Nb–Ni–Ti–Co–Zr and Nb–Ni–Ti–Co–Zr–Hf high entropy alloys | |
| CN107779683B (en) | A kind of Al base noncrystal alloy and preparation method thereof | |
| CN106119794A (en) | A kind of containing niobium NiTi system marmem and its preparation method and application | |
| Kabiri et al. | Comparative study on microstructure and homogeneity of NiTi shape memory alloy produced by copper boat induction melting and conventional vacuum arc melting | |
| CN104630569B (en) | A kind of Co V based high-temperature alloys of the orderly γ ` hardening constituents containing high temperature and preparation method thereof | |
| CN110373595A (en) | A kind of high entropy high temperature alloy of high-performance and preparation method thereof | |
| CN107620016B (en) | A kind of Ti base noncrystal alloy of the element containing Si and preparation method thereof | |
| CN111850375B (en) | Nano precipitation strengthening type high-strength high-plasticity multi-element alloy and preparation method thereof | |
| CN107923000A (en) | Copper alloy and its manufacture method | |
| CN108300881B (en) | Method for realizing wide-temperature-zone giant negative thermal expansion in MnCoGe-based alloy | |
| CN103243227B (en) | Preparation method of equal-atomic-ratio titanium-nickel alloy ingots | |
| CN106086586B (en) | A kind of high-performance nickel titante series marmem and its preparation method and application | |
| CN104018055A (en) | Rare-earth magnetic material with high magnetocrystalline anisotropy and large magnetoelastic strain and preparation method thereof | |
| CN104018054B (en) | There is rareearth magnetic material of field controllable distortion and preparation method thereof | |
| JP2004238720A (en) | Shape memory alloy | |
| CN106834810B (en) | A kind of cobalt vanadium aluminium high-temperature shape memory alloy and preparation method thereof | |
| CN106244946B (en) | A kind of high-strength plasticity zirconium-base amorphous alloy and preparation method containing molybdenum | |
| CN109482880B (en) | Preparation method that is a kind of while promoting Ni-Mn-In alloy mechanical property and magnetic heating performance | |
| CN106048304B (en) | A kind of marmem of high circulation number and its preparation method and application |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20181114 Address after: 225321 Science and Technology Incubation Industry Park, Gaogang District, Taizhou City, Jiangsu Province, No. 4 Building, Lu Yongcheng Standard Factory Building Applicant after: Taizhou Runqi Defense Technology Co., Ltd. Address before: 215011 Bamboo Garden Road, Suzhou high tech Zone, Jiangsu Province, No. 209 Applicant before: Suzhou Jiao in nano science and Technology Co Ltd |
|
| TA01 | Transfer of patent application right | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |