CN106082632A - A kind of interior chemical vapor deposition method of pipe that automatically eliminates prepares glass tubing bow degree method during preform - Google Patents
A kind of interior chemical vapor deposition method of pipe that automatically eliminates prepares glass tubing bow degree method during preform Download PDFInfo
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- CN106082632A CN106082632A CN201610427480.9A CN201610427480A CN106082632A CN 106082632 A CN106082632 A CN 106082632A CN 201610427480 A CN201610427480 A CN 201610427480A CN 106082632 A CN106082632 A CN 106082632A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01861—Means for changing or stabilising the diameter or form of tubes or rods
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- Manufacture, Treatment Of Glass Fibers (AREA)
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Abstract
A kind of interior chemical vapor deposition method of pipe that automatically eliminates prepares glass tubing bow degree method during preform, it is adaptable to produce chemical vapor deposited MCVD technique in the pipe of preform.The present invention combines closely with automatic control technology, in MCVD method prepares preform running, external diameter tester is utilized to measure the position of glass tube external diameter both sides of the edge continuously, and calculate center of rotation and the deviation Zhi Ji center jitter values at the instantaneous position at glass tubing center and Liang Ge center according to marginal position, according to the current angle position at glass tubing center, centre deviation is corrected by the rotary speed adjusting clamping glass chuck.Gravity is utilized to stop centre deviation to continue the deviation between increase successive elimination Liang Ge center.Make the maximum bow degree≤0.2mm/m on final glass tubing axial direction.The method is suitable for large-scale production multimode fibre, and the multimode fibre of drawing has the most radial and axial geometrical property and refractive index profile, and manufacture method is simple, and production cost is low.
Description
Technical field
The present invention relates to a kind of interior chemical vapor deposition method of pipe that automatically eliminates and prepare glass during preform
Pipe bow degree method, is that one chemical vapor deposition method in utilization pipe controls during making preform and reduces glass
The technique of glass pipe bow degree, particularly relate to a kind of in MCVD pipe chemical vapor deposition process prepare radial and axial uniformity with
The method of the preferable preform of symmetry so that the preform of making and the optical fiber of drawing have uniform radially and
Axial geometrical property and refractive index profile.
Background technology
Preform is to prepare the topmost raw material of optical fiber.In the manufacture process of optical fiber, preform is placed in
Smelting furnace pulls into after heating the filament of certain external diameter, then coats one or more layers coating in filament surfaces.According to conventional optical fiber
Design and the technology of preparing route of prefabricated rods, the composition of preform is typically divided into plug and outsourcing two parts.Due to light
Fine quality mainly depends on the performance of plug, and the manufacturing process of plug is the key of prefabricated rods manufacturing technology.
The manufacture method of the plug of main flow has four kinds: OVD (OVD), axial vapor deposition method (VAD), change
The chemical vapor deposition method (MCVD) entered and PCVD (Plasma Chemical Vapor Deposition) (PCVD).
Modified chemical vapor deposition method (MCVD) technique, is method in a kind of pipe, is a kind of by vapour phase raw material chemical reaction
Product be deposited on the method for glass tubing inwall rotated.In such a process, a glass tubing is clamped in glass
On lathe.Vapour phase raw mixture is passed in glass tubing, and thermal source (oxyhydrogen flame) reciprocates along pipe, at high temperature raw material
Chemical reaction occurs, and reaction product is deposited on inside pipe wall and by vitrification.Thermal source often reciprocates once along pipe, is generated as
One layer of glass.Manufacture an optical fiber prefabricated rod mandrel and need to deposit 10～250 layers.During plug makes, can be deposited by change
In journey, the composition of raw material realizes gradual change or step-refraction index change, thus obtains the refractive index profile of design.After deposition terminates,
Under high temperature, glass tubing collapsing is become the prefabricated plug of solid core fibres.Then solid mandrel and quartz socket tube are formed prefabricated rods, or
Prefabricated rods, finally wire drawing on wire-drawer-tower is formed at solid mandrel surface redeposition surrounding layer.
During in pipe, legal system makes plug, unstrpped gas SiCl4、GeCl4、POCl3, vapor-phase fluoride, oxygen, helium
Gas, chlorine etc. need just to complete chemical reaction under 1500～2050 DEG C of high temperature and generate oxide and complete vitrified mistake
Journey.In order to obtain temperature in the highest pipe, generally use the relatively thin glass tubing of wall thickness (wall thickness < 3.5mm).Long-time outside
Under the heating of high temperature heat source (1600 ~ 2100C), the glass tubing bow affected by gravity degree of horizontal clamping may gradually be disliked
Change.In deposition process, the deterioration of glass tubing bow degree is by changing high temperature heat source and the distance on glass tubing surface, has a strong impact on glass
The axial-radial uniformity of the Temperature Distribution in pipe and circular symmetry, thus the reaction efficiency of feed change gas and product
Deposition efficiency.Ultimately result in optical fiber prefabricated rod mandrel physical dimension and refractive index profile unsymmetry radially and with axially
On inhomogeneities.And then affect preform and become the optical parametric of optical fiber to control with geometric parameter, such as: the band of optical fiber
Width, mode field diameter, PMD, sandwich layer out-of-roundness, core concentricity etc..It is necessary so being in operation to keep glass tubing axial direction
On maximum bow degree≤0.2mm/m.
Existing method is in running, and center of rotation and glass are measured in range estimation or test instrumentation by operator
Eccentricity between glass tube hub, such as maximum eccentric rate >=0.7mm, then operation suspension, the place of manual alignment glass tubing bending,
Until the maximum eccentric rate≤0.2mm met on glass tubing axial direction, then resume operation.This method has 3 main deficiencies
Part, one is the time extending and preparing plug, and two is to need operator skillfully to grasp manual alignment technology, and three is to interrupt sinking
Disturbance refractive index profile is made the optical parametric of final finished optical fiber be under some influence by long-pending process.
Therefore, in MCVD manufactures mandrel process, a kind of method needing to find improvement, can correct in running
The original flexibility of glass tubing is avoided that again the deterioration of glass tubing bow degree, thus institute's output plug of eliminating the effects of the act axially and footpath
To symmetry and circular symmetry factor.
Summary of the invention
The shortcoming that the object of the invention is that of avoiding existing method, it is provided that in pipe in chemical vapor deposition method running
Automatic straightening and the method controlling glass tubing bow degree, especially automatic straightening and control glass tubing in MCVD method running
Bow degree method.Present invention substantially eliminate the asymmetric of the solid core fibres prefabricated rod mandrel that causes above-mentioned vapor deposition method to make
Property and uneven principal element.
It is known that in MCVD technique, there is micro-strain in the glass tubing of heated portion under gravity.Such as lathe
Mechanism, glass tubing geometry (Pian Bidu, out-of-roundness, bow degree) and glass tubing clamping have any little deviation, are running
During, the small thermal deformation that gravity causes makes the bow degree of glass tubing run down by being exaggerated.In order to reach automatic straightening
With the purpose of control bow degree, in MCVD method prepares preform running, external diameter tester is utilized to measure glass continuously
The position of glass pipe external diameter both sides of the edge, and calculate center of rotation and the instantaneous position at glass tubing center and two according to marginal position
The deviation value (i.e. center jitter values) at individual center, according to the current angle position at glass tubing center, adjusts clamping glass chuck
Rotary speed centre deviation is corrected.Utilize gravity stop centre deviation continue increase and successive elimination Liang Ge center it
Between deviation.Make the maximum bow degree≤0.2mm/m on final glass tubing axial direction.
The present invention controls in chemical vapor deposition running in pipe and automatic straightening method glass tubing bow degree principle is as follows:
In pipe, chemical vapor deposition running controls and automatic straightening glass tubing bow degree, blowtorch platform forward moving process
In, passameter moves together along with blowtorch platform, and translational speed is 5 ~ 200mm/min.Passameter can be that optics external diameter is calibrated and is
System or CCD video system.Glass tubing rotary speed 10 ~ 50RPM.When glass tubing enters the hot-zone of thermal source, surface temperature is rapid
Improving, cause glass viscosity to decline rapidly, locally there is sagging deflections in glass tubing under gravity.And leave rear surface, hot-zone
Cooling, glass viscosity improves, and deformation is the most locked.The region that in hot-zone, glass viscosity is minimum can be described as deformation point.Deformation point leads to
It is frequently located in the rear 0 ~ 50mm of thermal source moving direction.The distance of deformation point and thermal source depends on the fortune of glass surface temperature and thermal source
Line speed.Result according to passameter test can calculate eccentricity E=OC(glass tubing center C and the rotation of current deformation point
Deviation between the O of center) vertical direction projection e=E × cos (), in order to utilize gravity that glass tubing inclined is reduced or eliminated
Heart rate, can change rotary speed according to eccentricity at the size and Orientation of the projection of vertical direction.Work as e > 0, i.e. C is O's
Top, reduces speed；When e < 0, i.e. C are in the lower section of O, increase rotating speed.Simplest control method is to linearly change rotation speed
Degree:=-k × e wherein k is proportionality constant, it usually needs pass through optimum experimental.
A kind of interior chemical vapor deposition method of pipe that automatically eliminates prepares glass tubing bow degree method during preform, bag
Include step:
It is first according to the purity quartz glass pipe for high selecting suitable dimension that sets of Refractive Index Profile of Optical design and processes parameter, profit
With the chemicals such as pure water, HF, its inner surface is cleaned and is dried；
Being installed to by glass tubing on MCVD depositing lathe, two ends are fixed in swivel joint, utilize motor to drive glass tubing to rotate,
Then lighting oxyhydrogen flame blowtorch heatable glass tube, blowtorch moves along glass tubing length direction；
Check glass tubing whether existing defects, and in glass tubing, be passed through fluoro-gas its inner surface performed etching, in removing
The impurity on surface；
In deposition process, vapour phase raw mixture is passed in glass tubing, and thermal source (oxyhydrogen flame) reciprocates along pipe, makes
Raw material issues biochemical reaction at 1500～2050 DEG C of high temperature and makes to be deposited on the reaction product vitrification of inside pipe wall.Thermal source edge
Pipe often reciprocates once, is generated as one layer of glass.Manufacture an optical fiber prefabricated rod mandrel and need to deposit 10～250 layers.Deposition
After end, at high temperature glass tubing collapsing is become the prefabricated plug of solid core fibres；
In running, utilize the position at two edges of external diameter tester follow-on test glass tube external diameter, and according to margin location
Put calculating center of rotation and the deviation value (i.e. center jitter values) at the instantaneous position at glass tubing center and Liang Ge center, according to glass
The current angle position of glass tube hub, centre deviation is corrected by the rotary speed adjusting clamping glass chuck.Utilize weight
Mechanical resistance is stopped centre deviation and is continued the deviation between increase successive elimination Liang Ge center.Make on final glass tubing axial direction
Longbow curvature≤0.2mm/m；
Pass through said method, it is possible to obtain the most radial and axial geometrical property and the prefabricated rod mandrel of refractive index profile.
Followed by method cleaning prefabricated rods surfaces such as high temperature polishing or hydrofluoric acid clean, it is thus achieved that high-quality prefabricated rods finished product, or
Obtain prefabricated rod mandrel and utilize the over cladding process such as OVD, tiretube process to increase prefabricated rods surrounding layer thickness.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
Controlling and automatic straightening method glass tubing bow degree in chemical vapor deposition running in pipe, the glass tubing of heated portion is at weight
Micro-strain is there is under power effect.Wherein lathe mechanism, glass tubing geometry (Pian Bidu, out-of-roundness, bow degree) and glass
Glass pipe clamping has any little deviation, and in running, the small thermal deformation that gravity causes makes the bow of glass tubing by being exaggerated
Curvature runs down.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
In pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bow degree, in blowtorch platform forward moving process,
Passameter moves together along with blowtorch platform, and translational speed is 5 ~ 200mm/min.Passameter can be optics external diameter measurement diameter system or
CCD video system.Glass tubing rotary speed 10 ~ 50RPM.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
In pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bow degree, when glass tubing enters the hot-zone of thermal source
Time surface temperature improve rapidly, cause glass viscosity to decline rapidly, locally there is sagging deflections in glass tubing under gravity.And
Leaving the cooling of rear surface, hot-zone, glass viscosity improves, and deformation is the most locked.The region that in hot-zone, glass viscosity is minimum can be described as becoming
Form point.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
Controlling and automatic straightening method glass tubing bow degree in chemical vapor deposition running in pipe, deformation point is usually located at thermal source and moves
Rear 0 ~ the 50mm in direction.The distance of deformation point and thermal source depends on the speed of service of glass surface temperature and thermal source.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
Controlling and automatic straightening method glass tubing bow degree in chemical vapor deposition running in pipe, the result according to passameter test can
With calculate eccentricity E=OC of current deformation point vertical direction projection e=E × cos (), in order to utilize gravity to reduce
Or the eccentricity of elimination glass tubing, rotation speed can be changed according to eccentricity at the size and Orientation of the projection of vertical direction
Degree.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
In pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bow degree, work as e 0, i.e. C is above O, fall
Low velocity；When e < 0, i.e. C are in the lower section of O, increase rotating speed.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
Controlling and automatic straightening method glass tubing bow degree in chemical vapor deposition running in pipe, simplest control method is linear
Ground change rotary speed:=-k × e wherein k is proportionality constant.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
In pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bow degree, calculate eccentricity and throw in vertical direction
Shadow: passameter and vertical direction angle are, in theory eccentricity vertical direction projection e=E × Cos (+)。
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
In pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bow degree, the change of rotary speed: be subject to
The test of angle measurement inaccuracy, equipment and the delay and the lathe rotating speed that control change the impact postponed, changing of actual speed
Change may be defined as:=-k × E × Cos(++) whereinIt it is delay compensation angle.In order to prevent actual speed speed
Degree (+) less than 0,Ultimate value:_ limt is necessarily less than rotary speed.It is generally selected_limt=10%~30%。
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
In pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bow degree,Determination: every MCVD equipment
'sThe most slightly difference.Need experimentally to determine.During experiment: use one to bend bigger glass tubing or Glass rod,
Close thermal source, arrange_limt=, the biggest proportionality coefficient is set, rotating speed 10 ~ 20RPM, platform translational speed 50 ~
100mm/min.Adjust, until the rotary speed that the center of glass tubing or Glass rod is when peak is 0.
A kind of interior chemical vapor deposition method of pipe that automatically eliminates of the present invention prepares glass tubing bow degree during preform
The advantage of method is:
1) present invention utilizes MCVD optical fiber prefabricated rod mandrel to manufacture the superiority of equipment, is combined in especially in MCVD method running
Automatic straightening and control glass tubing bow degree method, eliminate solid core fibres prefabricated rod mandrel axially and radially unsymmetry and
Circle unsymmetry.
2) the method is suitable for the plug that large-scale production refractive index profile is complicated, and the optical fiber of drawing has uniform radial direction
With axial geometrical property and refractive index profile, manufacture method is simple, and production cost is low.
It should be understood that above-mentioned general introduction and detailed description below are all illustrative and illustrative, it is intended to the present invention
Illustrated further, be not intended to that the protection scope of the present invention limited by appended claims is had any restriction.
Accompanying drawing explanation
Below with reference to accompanying drawing, the invention will be further described:
The schematic diagram of improvement chemical gaseous phase deposition (MCVD) equipment that Fig. 1 the inventive method is used.
The prefabricated rod mandrel front view that Fig. 2 bow degree is bigger.
Fig. 3 uses the prefabricated rod mandrel front view in the inventive method correcting process.
Fig. 4 is according to the schematic diagram of passameter test result calculations eccentricity.
The schematic diagram of Fig. 5 glass tubing central motion track.
Detailed description of the invention
A kind of interior chemical vapor deposition method of pipe that automatically eliminates of the description present invention detailed for 1-5 below in conjunction with the accompanying drawings prepares light
Glass tubing bow degree method and the equipment of use during fine prefabricated rods:
Raw material service 11 is connected with swivel joint 12, is placed in the quartz glass tube 14 on MCVD lathe chuck, respectively
Plant desired gas to be inputted by raw material service 11.In oxyhydrogen flame blowtorch 15 under the oxyhydrogen flame high temperature action of ejection, stone
Raw material in English glass tubing 14 reacts and is deposited on the inwall of quartz glass tube 14.External measuring instrument 16(or video heads
16 ') it is installed on the pedestal of oxyhydrogen flame blowtorch 15, for the external diameter of measurement quartz glass tube 14 in real time.Waste residue disposable box 17 is pacified
It is placed in the end on MCVD lathe chuck 13, the unstrpped gas not deposited in collecting quartz glass tube 14.
The present invention controls with automatic straightening method glass tubing bow degree principle such as in chemical vapor deposition running in pipe
Under:
In pipe, chemical vapor deposition running controls and automatic straightening glass tubing bow degree, blowtorch platform forward moving process
In, passameter moves together along with blowtorch platform, and translational speed is 5 ~ 200mm/min.Passameter can be that optics external diameter is calibrated and is
System or CCD video system.Glass tubing rotary speed 10 ~ 50RPM.When glass tubing enters the hot-zone of thermal source, surface temperature is rapid
Improving, cause glass viscosity to decline rapidly, locally there is sagging deflections in glass tubing under gravity.And leave rear surface, hot-zone
Cooling, glass viscosity improves, and deformation is the most locked.The region that in hot-zone, glass viscosity is minimum can be described as deformation point.Deformation point leads to
It is frequently located in the rear 0 ~ 50mm of thermal source moving direction.The distance of deformation point and thermal source depends on the fortune of glass surface temperature and thermal source
Line speed.Result according to passameter test can calculate eccentricity E=OC(glass tubing center C and the rotation of current deformation point
Deviation between the O of center, sees Fig. 5) vertical direction projection e=E × cos (), in order to utilize gravity that glass is reduced or eliminated
The eccentricity of glass pipe, can change rotary speed according to eccentricity at the size and Orientation of the projection of vertical direction.Work as e > 0,
I.e. C is above O, reduces speed；When e < 0, i.e. C are in the lower section of O, increase rotating speed.Simplest control method is to change linearly
Mutarotation rotary speed:=-k × e wherein k is proportionality constant, it usually needs pass through optimum experimental.
It is described below in detail and how to calculate deformation point eccentricity and at the projection e of vertical direction and determine the change of rotating speed.
In order to ensure that controlling software have recorded the eccentricity data of current deformation point, passameter test point must and deform
Point overlaps or in the front of Moving Heat Sources.In each sampling period of computer, passameter measures the radial direction of No. 1 glass tubing projection
The position of both sides of the edge, the sampling periodt = 0.005s~0.05s.Rotary speed is(RPM), rotate a circle hits N=
60/(*t).Angle change d between two sampled points=2/ N. is with reference to Fig. 4 and Fig. 5, the two of current glass pipe projection
Lateral edges coordinate is respectively as follows: Y1' and Y2’。
1) coordinate of glass tubing center (C) is YC’= (Y1’+Y2’)/2.The centre coordinate Y in 2 ~ 10 cycles of recordc’；
2) coordinate of the center of rotation (O) in each week is.Calculate nearest several cycle center of rotation to sit
Target meansigma methods；
3) current eccentricity is projected as on passameter.Record glass tubing rotates the bias of 2 circle ~ 10 circles
Rate e '.
4) calculating eccentricity and phase place, being in operation, to assume that the eccentricity of current deformation point projects be the distance of e ', C and O
Being E, phase angle is, their relation be e '=E × Cos ().Use the eccentric ratio e of 2 circle ~ 10 circles recorded ', use
Curve matching, numerical method or simply look for the method for extreme point can obtain E and。
5) record amplitude and the phase place of all sampled points from deformation point to the current point tested, test according to passameter
Distance, rotary speed and Moving Heat Sources speed between point and deformation point, the point needing record is that glass tubing rotates 2 circle ~ 300 circles
All sampled points.Assume that all of measuring point is j=0 ... M-1 point.After sampling, the data point reuse of measuring point j is every time: Ej=
Ej-1, j= j-1+d. newly-increased measuring point (j=0) is (E0, 0).
6) calculate eccentricity to project in vertical direction: with reference to Fig. 5, passameter and vertical direction angle are, the most partially
Heart rate vertical direction projection e=E × Cos (+)。
7) change of rotary speed: be subject toAngle measurement inaccuracy, equipment test and control delay and lathe
Rotating speed changes the impact postponed, and the change of actual speed may be defined as::=-k × E × Cos(++) wherein
It it is delay compensation angle.In order to prevent actual speed speed (+) less than 0,Ultimate value:_ limt is necessarily less than rotation
Rotary speed.It is generally selected_limt=10%~30%。
8)Determination: every MCVD equipmentThe most slightly difference.Need experimentally to determine.Experiment
Time: use one to bend bigger glass tubing or Glass rod, close thermal source, arrange_limt=, the biggest ratio system is set
Number, rotating speed 10 ~ 20RPM, platform translational speed 50 ~ 100mm/min.Adjust, until the center of glass tubing or Glass rod exists
Rotary speed during peak is 0.
A kind of interior chemical vapor deposition method of pipe that automatically eliminates prepares glass tubing bow degree method bag during preform
Include following steps:
It is first according to the purity quartz glass pipe for high selecting suitable dimension that sets of Refractive Index Profile of Optical design and processes parameter, profit
With the chemicals such as pure water, HF, its inner surface is cleaned and is dried.
Being installed to by glass tubing on MCVD depositing lathe, two ends are fixed in swivel joint, utilize motor to drive glass tubing
Rotating, then light oxyhydrogen flame blowtorch heatable glass tube, blowtorch moves along glass tubing length direction.
Check glass tubing whether existing defects, and in glass tubing, be passed through fluoro-gas its inner surface is performed etching, remove
Remove the impurity of inner surface.
In deposition process, vapour phase raw mixture is passed in glass tubing, and thermal source (oxyhydrogen flame) comes and goes along pipe and moves
Dynamic, make raw material issue biochemical reaction at 1500～2050 DEG C of high temperature and make to be deposited on the reaction product vitrification of inside pipe wall.
Thermal source often reciprocates once along pipe, is generated as one layer of glass.Manufacture an optical fiber prefabricated rod mandrel and need to deposit 10～250
Layer.After deposition terminates, at high temperature glass tubing collapsing is become the prefabricated plug of solid core fibres.
In running, utilize the position at two edges of external diameter tester follow-on test glass tube external diameter, and according to limit
The deviation value (i.e. center jitter values) at edge position calculation center of rotation and the instantaneous position at glass tubing center and Liang Ge center, root
According to the current angle position at glass tubing center, centre deviation is corrected by the rotary speed adjusting clamping glass chuck.Profit
Centre deviation is stoped to continue the deviation between increase successive elimination Liang Ge center with gravity.Make on final glass tubing axial direction
Maximum bow degree≤0.2mm/m.
Pass through said method, it is possible to obtain the most radial and axial geometrical property and the preform core of refractive index profile
Rod.Followed by method cleaning prefabricated rods surfaces such as high temperature polishing or hydrofluoric acid clean, it is thus achieved that high-quality prefabricated rods finished product, or
Person obtains prefabricated rod mandrel and utilizes the over cladding process such as OVD, tiretube process to increase prefabricated rods surrounding layer thickness.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
Controlling and automatic straightening method glass tubing bow degree in chemical vapor deposition running in pipe, the glass tubing of heated portion is at weight
Micro-strain is there is under power effect.Such as lathe mechanism, glass tubing geometry (Pian Bidu, out-of-roundness, bow degree) and glass
Pipe clamping has any little deviation, and in running, the small thermal deformation that gravity causes makes the bow of glass tubing by being exaggerated
Degree runs down.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
In pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bow degree, in blowtorch platform forward moving process,
Passameter moves together along with blowtorch platform, and translational speed is 5 ~ 200mm/min.Passameter can be optics external diameter measurement diameter system or
CCD video system.Glass tubing rotary speed 10 ~ 50RPM.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
In pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bow degree, when glass tubing enters the hot-zone of thermal source
Time surface temperature improve rapidly, cause glass viscosity to decline rapidly, locally there is sagging deflections in glass tubing under gravity.And
Leaving the cooling of rear surface, hot-zone, glass viscosity improves, and deformation is the most locked.The region that in hot-zone, glass viscosity is minimum can be described as becoming
Form point.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
Controlling and automatic straightening method glass tubing bow degree in chemical vapor deposition running in pipe, deformation point is usually located at thermal source and moves
Rear 0 ~ the 50mm in direction.The distance of deformation point and thermal source depends on the speed of service of glass surface temperature and thermal source.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
Controlling and automatic straightening method glass tubing bow degree in chemical vapor deposition running in pipe, the result according to passameter test can
With calculate eccentricity E=OC of current deformation point vertical direction projection e=E × cos (), in order to utilize gravity reduce or
Eliminate the eccentricity of glass tubing, rotary speed can be changed according to eccentricity at the size and Orientation of the projection of vertical direction.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
In pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bow degree, work as e 0, i.e. C is above O, fall
Low velocity；When e < 0, i.e. C are in the lower section of O, increase rotating speed.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
Controlling and automatic straightening method glass tubing bow degree in chemical vapor deposition running in pipe, simplest control method is linear
Ground change rotary speed:=-k × e wherein k is proportionality constant.
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
In pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bow degree, calculate eccentricity and throw in vertical direction
Shadow: passameter and vertical direction angle are, in theory eccentricity vertical direction projection e=E × Cos (+)。
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
In pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bow degree, the change of rotary speed: be subject to
The test of angle measurement inaccuracy, equipment and the delay and the lathe rotating speed that control change the impact postponed, changing of actual speed
Change may be defined as:=-k × E × Cos(++) whereinIt it is delay compensation angle.In order to prevent actual speed speed
Degree (+) less than 0,Ultimate value:_ limt is necessarily less than rotary speed.It is generally selected_limt=10%~30%。
During in a kind of pipe of elimination automatically, chemical vapor deposition method prepares preform in glass tubing bow degree method,
In pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bow degree,Determination: every MCVD equipment
'sThe most slightly difference.Need experimentally to determine.During experiment: use one to bend bigger glass tubing or Glass rod,
Close thermal source, arrange_limt=, the biggest proportionality coefficient is set, rotating speed 10 ~ 20RPM, platform translational speed 50 ~
100mm/min.Adjust, until the rotary speed that the center of glass tubing or Glass rod is when peak is 0.
A kind of interior chemical vapor deposition method of pipe that automatically eliminates of the present invention prepares glass tubing bow degree during preform
Method, it is adaptable to produce chemical vapor deposited MCVD technique in the pipe of preform.Present inventive concept is novel, with control automatically
Technology processed is combined closely, and in MCVD method prepares preform running, utilizes external diameter tester to measure glass tubing continuously
The position of external diameter both sides of the edge, and calculate in center of rotation and the instantaneous position at glass tubing center and two according to marginal position
The deviation Zhi Ji center jitter values of the heart, according to the current angle position at glass tubing center, adjusts the rotation of clamping glass chuck
Centre deviation is corrected by speed.Utilize gravity stop centre deviation continue increase and successive elimination Liang Ge center between inclined
Difference.Make the maximum bow degree≤0.2mm/m on final glass tubing axial direction.The method is suitable for large-scale production multimode light
Fibre, the multimode fibre of drawing has the most radial and axial geometrical property and refractive index profile, and manufacture method is simple, produces into
This is low.
The more than described content of invention, those skilled in the art can be changed with various ways, and these change not
Depart from the spirit and scope of the present invention.If these amendments of the present invention are apparent to those skilled in the art
, they will be included within the scope of the claims.
Claims (12)
1. a glass tubing bow degree method during chemical vapor deposition method prepares preform in automatic elimination pipe, it is special
Levy and be: comprise the steps:
It is first according to the purity quartz glass pipe for high selecting suitable dimension that sets of Refractive Index Profile of Optical design and processes parameter, profit
With pure water, HF chemicals, its inner surface is cleaned and is dried；
Being installed to by glass tubing on MCVD depositing lathe, two ends are fixed in swivel joint, utilize motor to drive glass tubing to rotate,
Then lighting oxyhydrogen flame blowtorch heatable glass tube, blowtorch moves along glass tubing length direction；
Check glass tubing whether existing defects, and in glass tubing, be passed through fluoro-gas its inner surface performed etching, in removing
The impurity on surface；
In deposition process, vapour phase raw mixture is passed in glass tubing, and thermal source oxyhydrogen flame reciprocates along pipe, makes former
Material issues biochemical reaction at 1500～2050 DEG C of high temperature and makes to be deposited on the reaction product vitrification of inside pipe wall, and thermal source is along pipe
Son often reciprocates once, is generated as one layer of glass, manufactures an optical fiber prefabricated rod mandrel and need to deposit 10～250 layers, deposition knot
Shu Hou, at high temperature becomes the prefabricated plug of solid core fibres by glass tubing collapsing；
In running, utilize the position at two edges of external diameter tester follow-on test glass tube external diameter, and according to margin location
Put calculating center of rotation and the deviation value at the instantaneous position at glass tubing center and Liang Ge center, i.e. center jitter values, according to glass
The current angle position of glass tube hub, centre deviation is corrected by the rotary speed adjusting clamping glass chuck, utilizes weight
Mechanical resistance is stopped centre deviation and is continued to increase and deviation between successive elimination Liang Ge center, makes on final glass tubing axial direction
Longbow curvature≤0.2mm/m；
Pass through said method, it is thus achieved that the most radial and axial geometrical property and the prefabricated rod mandrel of refractive index profile.
In one the most according to claim 1 eliminates pipe automatically, chemical vapor deposition method prepares glass during preform
Glass pipe bow degree method, it is characterised in that: obtain the most radial and axial geometrical property and the prefabricated rods of refractive index profile
Plug, followed by high temperature polishing or hydrofluoric acid clean method cleaning prefabricated rods surface, it is thus achieved that high-quality prefabricated rods finished product, or
Person obtains prefabricated rod mandrel and utilizes OVD, tiretube process over cladding process to increase prefabricated rods surrounding layer thickness.
3. bend according to glass tubing during chemical vapor deposition method prepares preform in the automatic elimination pipe of claim 1 one kind
Curvature method, it is characterised in that: in pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bow degree, quilt
There is micro-strain, wherein lathe mechanism, glass tubing geometry and glass under gravity in the glass tubing of heating part
Pipe clamping has any little deviation, and in running, the small thermal deformation that gravity causes makes the bow of glass tubing by being exaggerated
Degree runs down.
In one the most according to claim 1 eliminates pipe automatically, chemical vapor deposition method prepares glass during preform
Glass pipe bow degree method, it is characterised in that: in pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bends
Curvature, in blowtorch platform forward moving process, passameter moves together along with blowtorch platform, and translational speed is 5 ~ 200mm/min, external diameter
Instrument is optics external diameter measurement diameter system or CCD video system, glass tubing rotary speed 10 ~ 50RPM.
In one the most according to claim 1 eliminates pipe automatically, chemical vapor deposition method prepares glass during preform
Glass pipe bow degree method, it is characterised in that: in pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bends
Curvature, when glass tubing enters the hot-zone of thermal source, surface temperature improves rapidly, causes glass viscosity to decline rapidly, in action of gravity
Locally there is sagging deflections in lower glass tubing, and leaves the cooling of rear surface, hot-zone, and glass viscosity improves, and deformation is the most locked, hot-zone
The region that middle glass viscosity is minimum can be described as deformation point.
In one the most according to claim 1 eliminates pipe automatically, chemical vapor deposition method prepares glass during preform
Glass pipe bow degree method, it is characterised in that: in pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bends
Curvature, deformation point is usually located at the rear 0 ~ 50mm of thermal source moving direction, and the distance of deformation point and thermal source depends on glass surface
Temperature and the speed of service of thermal source.
In one the most according to claim 1 eliminates pipe automatically, chemical vapor deposition method prepares glass during preform
Glass pipe bow degree method, it is characterised in that: in pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bends
Curvature, can calculate the eccentricity E=OC projection e=E in vertical direction of current deformation point according to the result of passameter test
×cos(), in order to utilize gravity that the eccentricity of glass tubing is reduced or eliminated, can be according to eccentricity in the projection of vertical direction
Size and Orientation change rotary speed.
In one the most according to claim 1 eliminates pipe automatically, chemical vapor deposition method prepares glass during preform
Glass pipe bow degree method, it is characterised in that: in pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bends
Curvature, it is characterised in that: work as e > 0, i.e. C is above O, reduces speed；When e < 0, i.e. C are in the lower section of O, increase rotating speed.
In one the most according to claim 1 eliminates pipe automatically, chemical vapor deposition method prepares glass during preform
Glass pipe bow degree method, it is characterised in that: in pipe, chemical vapor deposition running controls and automatic straightening method glass tubing bends
Curvature, simplest control method is to linearly change rotary speed:=-k × e wherein k is proportionality constant.
One the most according to claim 1 eliminates during chemical vapor deposition method prepares preform in pipe automatically
Glass tubing bow degree method, it is characterised in that: in described pipe, chemical vapor deposition running controls and automatic straightening method
Glass tubing bow degree, calculates eccentricity and projects in vertical direction: passameter and vertical direction angle are that eccentricity is being hung down in theory
Nogata to projection e=E × Cos (+)。
11. one according to claim 1 eliminate during chemical vapor deposition method prepares preform in pipe automatically
Glass tubing bow degree method, it is characterised in that: in pipe, chemical vapor deposition running controls and automatic straightening method glass tubing
Bow degree, the change of rotary speed: changed by angle measurement inaccuracy, equipment test and delay and the lathe rotating speed controlled
Becoming the impact postponed, the change of actual speed may be defined as:=-k × E × Cos(++) whereinIt is to postpone to mend
Repay angle, in order to prevent actual speed speed (+) less than 0,Ultimate value:_ limt is necessarily less than rotary speed
, it is generally selected_limt=10%~30%。
12. one according to claim 1 eliminate during chemical vapor deposition method prepares preform in pipe automatically
Glass tubing bow degree method, it is characterised in that: in pipe, chemical vapor deposition running controls and automatic straightening method glass tubing
Bow degree,Determination: every MCVD equipmentThe most slightly difference, needs experimentally to determine, during experiment: use
One bends bigger glass tubing or Glass rod, closes thermal source, arranges_limt=, the biggest proportionality coefficient is set, turn
Speed 10 ~ 20RPM, platform translational speed 50 ~ 100mm/min, adjust, until the center of glass tubing or Glass rod is at peak
Time rotary speed be 0.
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| CN110002738A (en) * | 2019-03-28 | 2019-07-12 | 上海至纯洁净系统科技股份有限公司 | A kind of collapsing method improving prefabricated rod mandrel uniformity |
| CN113024094A (en) * | 2021-03-10 | 2021-06-25 | 中天科技精密材料有限公司 | Quartz bar extension straightening device and extension straightening method thereof |
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| CN110002738B (en) * | 2019-03-28 | 2024-03-29 | 上海至纯洁净系统科技股份有限公司 | Fusion shrinkage method for improving uniformity of core rod of preform |
| CN113024094A (en) * | 2021-03-10 | 2021-06-25 | 中天科技精密材料有限公司 | Quartz bar extension straightening device and extension straightening method thereof |
| CN117346664A (en) * | 2023-12-04 | 2024-01-05 | 南京烽火星空通信发展有限公司 | Optical rod bow degree calculation method based on rotation stick measurement data |
| CN117346664B (en) * | 2023-12-04 | 2024-03-15 | 南京烽火星空通信发展有限公司 | Optical rod bow degree calculation method based on rotation stick measurement data |
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