CN106079174A - PDMS microwell array method for preparing template - Google Patents
PDMS microwell array method for preparing template Download PDFInfo
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- CN106079174A CN106079174A CN201610393813.0A CN201610393813A CN106079174A CN 106079174 A CN106079174 A CN 106079174A CN 201610393813 A CN201610393813 A CN 201610393813A CN 106079174 A CN106079174 A CN 106079174A
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- pdms
- microwell array
- epoxy resin
- sheet metal
- micro
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/40—Plastics, e.g. foam or rubber
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Micromachines (AREA)
Abstract
The present invention relates to a kind of PDMS microwell array method for preparing template, belong to field of micro-manufacture.The method includes: a, use Laser Processing make microwell array sheet metal (3)；Microwell array sheet metal (3) is filled in b, use epoxide-resin glue (2), obtains epoxy resin and micro-pit array sheet metal coalition after solidification；C, using microwell array sheet metal (3) as anode, use Electrolyzed Processing mode tentatively to remove metal material, after Electrolyzed Processing terminates, be placed on the remaining metal of erosion removal in hydrochloric acid；D, use PDMS glue (10) filling epoxy resin mould (9), separate PDMS with adhesive tape (11) and epoxy resin mould (9) after solidification.This invention uses epoxy resin as micro-group post mold, can be prepared on a large scale PDMS microwell array template, and prepared PDMS microwell array template can be used for the large area Electrolyzed Processing of micro-pit array, strengthens processing locality.
Description
Technical field
The present invention relates to polydimethylsiloxane (PDMS) microwell array method for preparing template, belong to field of micro-manufacture.
Background technology
Polydimethylsiloxane (PDMS) is the one in organosilicon material, is a kind of elastopolymer, generally
It is to be mixed by PDMS performed polymer and firming agent according to certain volume ratio (mass ratio) and be polymerized.Dimethyl during liquid
Siloxanes is a thick liquid, referred to as silicone oil, is a kind of polyorganosiloxane mixture with different polymerization degree chain structure, Gu
The dimethyl siloxane of state is a kind of silica gel, elastomer nontoxic, hydrophobic.It has good replicability and chemically stable
Property, insulating properties and corrosion resistance, be suitable for processing various biochemical reaction chips, the Microcontact printing being widely used in MEMS, micro-
In the technology such as flow pattern, template assisted drawing.PDMS microporous membrane is also applied to multilamellar microfluidic channel and cell sieve
Choosing is cultivated.
In PET microfiber field, PDMS microwell array template can also control Electrolyzed Processing district as insulating barrier
Territory, carries out micro-pit array electrochemical micromachining.When electrochemical micromachining, the PDMS template with certain pierced pattern is fitted in
In anode workpiece, after energising under the effect of electrolyte, in anode workpiece there is electrochemical reaction in the region of corresponding PDMS through hole,
Gradually it is dissolved and removes, finally give micro-texture of definite shape and distribution.PDMS template has good processing locality, can
To reuse.
PDMS microwell array template mainly carries out high-volume by method of molding and is molded preparation, to reduce cost of manufacture.Preparation
PDMS template focuses on the preparation of mould.Tradition makes silicon mould with silicon technology, or with LIGA(or UV-LIGA) technique making
Metal die, Mold Making yet suffers from complex process, high in cost of production problem.The most also occur in that with photoresist structure as mould
Tool replicates the method for PDMS chip, but has certain defect, and photoresist mould can not be reused, and owing to photoresist is micro-
Bundle pillar easily comes off with substrate, it is difficult to manufacture large-area micro-group post mold.Make PDMS mould based on photoetching technique to be difficult to obtain
Obtain large-area PDMS mould, limit the application in wide area surface texture Electrolyzed Processing of the PDMS template.
The preparation method of the PDMS microwell array template of reported in literature mainly has:
1) Korea S Guangzhou science and technology institute J. Choi etc. utilize Micromolding in Capillaries method and atmospheric pressure plasma jet treatment technology to propose
A kind of PDMS microwell array method for preparing template (Jongchan Choi, Kyeong-Hwan Lee and Sung Yang, J.
Micromech. Microeng. 21(2011) 097001 (8pp)).The method uses photoetching technique to prepare on substrate
Pit array structure, one layer of PDMS adhesive curing on substrate afterwards, produce PDMS fine bundle pillar stay in place form, the most right
PDMS template surface carries out normal pressure frequency and penetrates Cement Composite Treated by Plasma, to prevent mould and colloid adhesion, it is simple to the demoulding smoothly, last root
Carrying out the injection of PDMS colloid according to capillarity and form thin film, the step such as the cured demoulding is produced the PDMS with microcellular structure and is covered
Mould.The method uses PDMS as mould, then uses PDMS glue to fill PDMS mould, demoulding difficulty, and preparation process is complicated, needs
Surface to be carried out process, the film dimensions of making is little, and accuracy of repetition is limited, limits the actual application of the method.
2) Li Hansong etc. propose a kind of PDMS microwell array method for preparing template (a kind of polydimethylsiloxane array micropore
Method for manufacturing thin film, invention patent mandate number: ZL201310092534.7).The method first spin coating a layer thickness on substrate
For the SU-8-2005 photoresist of 1-5 μm, carrying out the full exposure-processed of photoetching, on substrate the most after the pre-treatment, spin coating is the thickest
The SU-8 photoresist of degree, through front baking, mask exposure, after bake and development, forms SU-8 micro-group rod structure.Substrate table on mould
The SU-8-2005 photoresist of one layer of 1-5 μ m-thick of face spin coating is as combining glue, by SU-8 micro-group rod structure cylinder top and mould
Substrate connects, and forms fine bundle pillar channel die.PDMS colloid is injected in micro-group post mold container, and takes out in being placed on vacuum chamber
Vacuum, after solidification, PDMS is the most separable with mould.The method is through multiple spin coating photoetching, and step is complicated, and SU8 mould can only
Use once, it is impossible to be prepared on a large scale PDMS template；Owing to SU-8 photoresist micro-group post easily comes off with substrate, it is difficult to manufacture big
The micro-group post mold of area.
Obviously, simple and low cost and large-area PDMS microwell array template the preparation method of development process is necessary.
Summary of the invention
The present invention proposes a kind of method using PDMS material to prepare microwell array template, can be used to high-volume and makes big
The PDMS template of area microwell array, PDMS template can be used for the Electrolyzed Processing of micro-pit array as mask.
A kind of PDMS microwell array method for preparing template, wherein this template thickness is 50-300 μm, it is characterised in that include
Following steps:
A, use laser processing mode make the sheet metal with microwell array, referred to as microwell array sheet metal；Micropore battle array
Row sheet metal thickness and micropore size size, pitch of holes determine according to PDMS template size；
B, when the Laser Processing of microwell array sheet metal light-emitting window one side stick adhesive tape, another at microwell array sheet metal
Filling epoxy resin glue in one side, obtains epoxy resin and sheet metal coalition after solidification, epoxide-resin glue is by epoxy resin
Material and firming agent are prepared in proportion；
C, coalition for epoxy resin Yu sheet metal, using microwell array sheet metal as anode, use Electrolyzed Processing
Mode tentatively removes metal material, after Electrolyzed Processing terminates, then is placed on the remaining metal of erosion removal in hydrochloric acid, obtains asphalt mixtures modified by epoxy resin
Fat mould；
D, epoxy resin mould micro-group post upper surface patch one layer tape make micro-group post passage, use PDMS glue ring type filling oxygen tree
The micro-group post passage of fat mould, separates PDMS with adhesive tape and epoxy resin mould after solidification, obtains PDMS microwell array template,
PDMS glue is prepared by PDMS material and PDMS firming agent.
The producing device of PDMS group's casement plate, including: laser instrument, vacuum pump, vacuum tank, molding container, epoxy resin are micro-
Thin bundle pillar mould, baking oven, it is characterised in that: use the microwell array sheet metal copy protection of Laser Processing to go out epoxy resin micro-group
Post mold, with PDMS glue filling epoxy resin mould, obtains PDMS microwell array template after the solidification demoulding.
Prepared by PDMS microwell array template it is crucial that produce the mould with micro-group post, then use PDMS to fill mould
Tool just can get PDMS via-hole array template.But the micro-group column dimension of mould is less, tradition difficult processing is to manufacture.Use photoetching
Fabrication techniques SU8 micro-group post mold, owing to micro-group post easily comes off from substrate, it is difficult to obtain large-area template, Er Qiemo
Tool is difficult to be used for multiple times.Use PDMS to make micro-group post mold, there is demoulding difficulty etc. when obtaining PDMS microwell array template
Problem.Epoxy resin, owing to containing active epoxide group in molecular structure, can crosslink reaction with firming agent and be formed not
Molten high polymer.Epoxy resin after solidification has good physics, chemical property, and deformation retract rate is little, and hardness is high.Due to
Epoxy resin easily solidifies, and stable performance after solidification, can be used to make mould, but it is to metal and the table of nonmetallic materials
Mask has the adhesive strength of excellence, is difficult to the demoulding after solidification.The present invention uses Laser Processing to make microwell array sheet metal, so
Rear use epoxy resin filler metal thin plate, obtains the coalition of epoxy resin and sheet metal.For nonmetal and metal
In conjunction with, sheet metal can be removed in the way of using Electrolyzed Processing, then use soak with hydrochloric acid to remove remaining metal, and at this
During epoxy resin mould will not be destroyed.The epoxy resin mould that the present invention makes is stable due to physicochemical properties, can
To be used for manufacturing in high volume PDMS microwell array template.
The invention have the advantages that
1, using Laser microdrilling array on sheet metal, this step can choose the thickness metal foil in 50-300 μm
Plate, processes the pierced pattern of different sizes and distribution, applied widely, can be by carrying out large-area laser group's hole machined
Prepare large-area PDMS microwell array template.
2, the present invention uses epoxy resin to make micro-group post mold.Epoxy resin chemistry good stability, corrosion resistance and good,
Mould can be reused, and can be used to be prepared on a large scale PDMS template.
3, in order to be departed from sheet metal by epoxy resin, the present invention uses the method for Electrolyzed Processing to remove on epoxy resin
Sheet metal, epoxy resin is soaked a period of time after terminating in hydrochloric acid by Electrolyzed Processing, can effectively remove on epoxy resin
Remaining metal, epoxy resin mould is had no mechanical damage by this process.
Accompanying drawing explanation
Fig. 1 makes epoxy resin mould vacuum extractor schematic diagram；
Fig. 2 makes PDMS microwell array template vacuum extractor schematic diagram；
Fig. 3 microwell array sheet metal schematic diagram；
Fig. 4 PDMS microwell array template schematic diagram；
Wherein label title: 1, molding container, 2, epoxide-resin glue, 3, microwell array sheet metal, 4, adhesive tape, 5, vacuum tank,
6, vacuum pump, 7, vacuometer, 8, molding container, 9, epoxy resin mould, 10, PDMS glue, 11, adhesive tape.
Detailed description of the invention
Step 1, choose sheet metal: choosing stainless steel 304 sheet metal, a size of 60mm x 60mm, thickness is
0.2mm, sheet metal requires that smooth surface is smooth；
Step 2, Laser microdrilling array: on sheet metal, carry out array through-hole Laser Processing, aperture 100 μm, pitch of holes
300 μm, microwell array region is 50mm x50mm, obtains microwell array sheet metal 3, such as Fig. 3；
Step 3, make group's hole path mould: the light-emitting window one side during Laser Processing of microwell array sheet metal 3 is sticked glue
Band 4, puts into molding container 1, and the one side taped is placed on lower section, fits tightly with molding container 1；
Step 4, the glue that falls: epoxide resin material and firming agent are prepared according to 2:1, pour the epoxy prepared in molding container 1 into
Resin glue 2；
Step 5, evacuation: the molding container 1 in step 4 is put into vacuum tank 5 evacuation, make mould inside be in vacuum shape
State, release after vacuum reaches 100Pa, full micro-group hole path filled by epoxide-resin glue, such as Fig. 1；
Step 6, colloid solidify: molding container 1 in step 5 is put into baking oven and keeps 70 DEG C to epoxide-resin glue completion of cure；
Step 7, preparation micro-group post mold: remove molding container 1 and adhesive tape 4, it is thus achieved that sheet metal and epoxy resin coalition.Will
Microwell array sheet metal 3 is put and is carried out Electrolyzed Processing as anode in the electrolytic solution, until anode electrolysis terminates, is then placed on salt
The remaining metal of erosion removal in acid, obtains epoxy resin micro-group post mold 9, such as Fig. 4；
Step 8, making mould micro-group post passage: make micro-group at epoxy resin mould 9 micro-group post upper surface patch one layer tape 11
Post passage, puts into molding container 8；
Step 9, the glue that falls: in molding container 8, pour PDMS material and the PDMS glue 10 of PDMS firming agent 1:1 preparation into；
Step 10, evacuation: the molding container 8 filling PDMS glue is put into vacuum tank 5 evacuation, makes mould inside be in very
Dummy status, release after vacuum reaches 10Pa, full micro-group post passage filled by PDMS glue；
Step 11, colloid solidify: molding container 8 in step 10 is put into baking oven holding 70 DEG C complete to PDMS adhesive curing；
Step 12, the demoulding: separated with epoxy resin mould 9 and adhesive tape 11 by the PDMS glue of solidification, obtain PDMS microwell array mould
Plate.
Claims (1)
1. a PDMS microwell array method for preparing template, wherein this template thickness is 50-300 μm, it is characterised in that include with
Lower step:
A, use laser processing mode make the sheet metal with microwell array, referred to as microwell array sheet metal (3)；Micropore
Array metal thin plate (3) thickness and micropore size size, pitch of holes determine according to PDMS template size；
B, when the Laser Processing of microwell array sheet metal (3) light-emitting window one side stick adhesive tape, in microwell array metal foil
Filling epoxy resin glue (2) on plate (3) another side, obtains epoxy resin and sheet metal coalition, epoxide-resin glue after solidification
(2) prepared in proportion by epoxide resin material and firming agent；
C, coalition for epoxy resin Yu sheet metal, using microwell array sheet metal (3) as anode, use electrolysis to add
Work mode tentatively removes metal material, after Electrolyzed Processing terminates, then is placed on the remaining metal of erosion removal in hydrochloric acid, obtains epoxy
Resin die (9)；
D, epoxy resin mould (9) micro-group post upper surface patch one layer tape (11) make micro-group post passage, use PDMS glue
(10) the micro-group post passage of filling epoxy resin mould (9), by PDMS and adhesive tape (11) and epoxy resin mould (9) point after solidification
From, obtaining PDMS microwell array template, PDMS glue (10) is prepared by PDMS material and PDMS firming agent.
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| CN201610393813.0A CN106079174B (en) | 2016-06-06 | 2016-06-06 | PDMS microwell array method for preparing template |
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| CN201610393813.0A CN106079174B (en) | 2016-06-06 | 2016-06-06 | PDMS microwell array method for preparing template |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107718611A (en) * | 2017-09-27 | 2018-02-23 | 重庆大学 | One kind is based on 3D printing and the formed in mould bionic compound eyes preparation method of negative pressure |
| CN110793674A (en) * | 2019-10-25 | 2020-02-14 | 北京化工大学 | Pressure sensor array based on vision and manufacturing method thereof |
| CN111170269A (en) * | 2020-01-02 | 2020-05-19 | 清华大学 | Method for preparing array micro-circular hole flexible membrane system by blowing PDMS (polydimethylsiloxane) through mesh framework |
| CN111664976A (en) * | 2020-06-19 | 2020-09-15 | 北京化工大学 | Visual halo-based array pressure measurement method and device and preparation method |
| CN114675355A (en) * | 2022-02-24 | 2022-06-28 | 安徽省东超科技有限公司 | Method for manufacturing visual field control device |
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| CN103231518A (en) * | 2013-03-22 | 2013-08-07 | 南京航空航天大学 | Polydimethylsiloxane array micropore film preparation method |
| CN104191548A (en) * | 2014-09-04 | 2014-12-10 | 齐鲁工业大学 | Quick preparation method of die of transparent adhesive tape-carved micro-fluidic chip |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101067027A (en) * | 2007-05-24 | 2007-11-07 | 上海大学 | Electron beam irradiating prepn process of mask for miclroporous array polyester template |
| CN103231518A (en) * | 2013-03-22 | 2013-08-07 | 南京航空航天大学 | Polydimethylsiloxane array micropore film preparation method |
| CN104191548A (en) * | 2014-09-04 | 2014-12-10 | 齐鲁工业大学 | Quick preparation method of die of transparent adhesive tape-carved micro-fluidic chip |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107718611A (en) * | 2017-09-27 | 2018-02-23 | 重庆大学 | One kind is based on 3D printing and the formed in mould bionic compound eyes preparation method of negative pressure |
| CN110793674A (en) * | 2019-10-25 | 2020-02-14 | 北京化工大学 | Pressure sensor array based on vision and manufacturing method thereof |
| CN111170269A (en) * | 2020-01-02 | 2020-05-19 | 清华大学 | Method for preparing array micro-circular hole flexible membrane system by blowing PDMS (polydimethylsiloxane) through mesh framework |
| CN111170269B (en) * | 2020-01-02 | 2022-08-16 | 清华大学 | Method for preparing array micro-circular hole flexible membrane system by blowing PDMS (polydimethylsiloxane) through mesh framework |
| CN111664976A (en) * | 2020-06-19 | 2020-09-15 | 北京化工大学 | Visual halo-based array pressure measurement method and device and preparation method |
| CN111664976B (en) * | 2020-06-19 | 2021-08-20 | 北京化工大学 | Visual halo-based array pressure measurement method and device and preparation method |
| CN114675355A (en) * | 2022-02-24 | 2022-06-28 | 安徽省东超科技有限公司 | Method for manufacturing visual field control device |
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| CN106079174B (en) | 2018-11-09 |
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