CN106078521A - Polishing disk structure under the water-cooled of a kind of buffing machine - Google Patents
Polishing disk structure under the water-cooled of a kind of buffing machine Download PDFInfo
- Publication number
- CN106078521A CN106078521A CN201610566982.XA CN201610566982A CN106078521A CN 106078521 A CN106078521 A CN 106078521A CN 201610566982 A CN201610566982 A CN 201610566982A CN 106078521 A CN106078521 A CN 106078521A
- Authority
- CN
- China
- Prior art keywords
- lower wall
- water
- basal disc
- scratch diskette
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
- B24B41/047—Grinding heads for working on plane surfaces
Abstract
The present invention be a kind of buffing machine water-cooled under polishing disk structure, including lower wall scratch diskette, end side at described lower wall scratch diskette is provided with lower wall basal disc, form cooling chamber at faying face between described lower wall basal disc and lower wall scratch diskette, lower wall basal disc is respectively equipped with the water inlet connected with cooling chamber and outlet.The water-cooling structure of the present invention avoids cooling water and takes a shortcut, only could flow out from outlet after cooling water is full of cavity, ensure that cooling water can carry out sufficiently cool to dumping, take away the heat produced because of processing in time, the effect forcing cooling is served to dumping, more traditional passive type cooling is more reliable, it is possible to combine accurate temp measuring system and cooling water flow regulation system, it is achieved the accurate control of temperature of dumping.
Description
Technical field
The present invention relates to silicon wafer polishing machine technology field, be specifically related to polishing disk structure under the water-cooled of a kind of buffing machine.
Background technology
For the lower polishing disk of buffing machine, owing to can produce substantial amounts of heat in polishing process, the change of temperature will necessarily
Cause polishing disk to deform upon, and then affect crudy, it is therefore necessary to the strict temperature controlling polishing disk.IC chip in recent years
The size of silicon chip tends to ever-larger diameters, tighter to the prescription of silicon chip, for being used for carrying out silicon chip and other is high-precision
The polissoir of degree crispy material twin polishing processing, it is necessary to strictly control the deformation dumped.
The employing monolithic construction of dumping of the Twp-sided polishing machine produced before this, does not carry out special temperature controlled device,
In polishing processing, produced heat is taken away mainly by polishing fluid, belongs to passive type cooling, and the change of temperature of dumping can not
Control.Traditional equipment is applied in non-IC industry the most mostly, the highest to the temperature control requirement of lower wall, and silicon chip is wanted by IC industry
Asking comparison high, upper and lower polishing disk is carried out precision temperature control is required, it is therefore necessary to use new lower disc, in order to right
Dump and cool down, reach the purpose that temperature accurately controls.
Summary of the invention
The problem that it is an object of the invention to overcome prior art to exist, it is provided that polishing disk knot under the water-cooled of a kind of buffing machine
Structure, dumping, internal pressure leads to cooling medium, carries out lower polishing disk forcing cooling, it is achieved the accurate control of temperature of dumping, and reaches
To controlling the purpose deformed of dumping.
For realizing above-mentioned technical purpose, reaching above-mentioned technique effect, the present invention is achieved through the following technical solutions:
Polishing disk structure under the water-cooled of a kind of buffing machine, including lower wall scratch diskette, the end side at described lower wall scratch diskette is provided with
Lower wall basal disc, forms cooling chamber, sets respectively on lower wall basal disc at the faying face between described lower wall basal disc and lower wall scratch diskette
There is the water inlet and outlet connected with cooling chamber.
Further, described cooling chamber is made up of the sector region chamber of the multiple indents arranged on fan-shaped cooling chamber, described
Sector region intracavity is laid with water-cooling channel.
Further, the protrusion that described water-cooling channel is arranged by each sector region intracavity separation muscle and with separation
The gap protruded between the muscle composition that muscle shifts to install in opposite directions.
Further, the opposite side at described lower wall basal disc Yu lower wall scratch diskette faying face is provided with lower water diversion disk, described under
Being respectively equipped with inlet opening and backwater hole on water diversion disk, described inlet opening is by the intake chamber connection water inlet arranged on lower wall basal disc
Mouthful, described backwater hole is by the return flume connection outlet arranged on lower wall basal disc.
Further, it is connected to by the attachment screw being located on separation muscle between described upper dish aqueous cold plate and upper dish scratch diskette
Together.
Further, between described lower wall scratch diskette and lower wall basal disc, the outer ring of faying face is provided with outer ring sealing ring, lower wall
Between scratch diskette and lower wall basal disc, the inner ring of faying face is provided with inner ring sealing ring.
The invention has the beneficial effects as follows:
The water-cooling structure of the present invention avoids cooling water and takes a shortcut, only could be from outlet stream after cooling water is full of cavity
Go out, it is ensured that cooling water can carry out dumping sufficiently cool, takes away the heat produced because of processing in time, serve dumping strong
Refrigeration effect but, more traditional passive type cooling is more reliable, it is possible to combine accurate temp measuring system and cooling water flow is adjusted
Joint system, it is achieved the accurate control of temperature of dumping.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the A-A sectional view of Fig. 1；
Fig. 3 is the B-B sectional view of Fig. 1.
Label declaration in figure: 1, attachment screw；2, lower water diversion disk；21, inlet opening；22, backwater hole；3, cooling chamber；31, fan
Chamber, shape region；32, water-cooling channel；33, muscle is separated；34, muscle is protruded；4, outer ring sealing ring；5, outlet；6, return pipe；7, under
Dish scratch diskette；8；Water inlet；9, lower wall basal disc；91, intake chamber；92, return flume；10, inner ring sealing ring.
Detailed description of the invention
Below with reference to the accompanying drawings and in conjunction with the embodiments, the present invention is described in detail.
Referring to figs. 1 through shown in Fig. 3, polishing disk structure under the water-cooled of a kind of buffing machine, including lower wall scratch diskette 7, described
The end side of lower wall scratch diskette 7 is provided with lower wall basal disc 9, is formed at the faying face between described lower wall basal disc 9 and lower wall scratch diskette 7
Cooling chamber 3, is respectively equipped with the water inlet 8 and outlet 5 connected with cooling chamber 3 on lower wall basal disc 9.
Described cooling chamber 3 is made up of the sector region chamber 31 of the multiple indents arranged on fan-shaped cooling chamber 3, described fan section
Water-cooling channel 32 it is laid with in chamber, territory 31.
Described water-cooling channel 32 by the protrusion arranged in each sector region chamber 31 separation muscle 33 and with separate muscle 33
The gap protruded between muscle 34 composition shifted to install in opposite directions.
Opposite side at described lower wall basal disc 9 with lower wall scratch diskette 7 faying face is provided with lower water diversion disk 2, described lower water diversion disk 2
On be respectively equipped with inlet opening 21 and backwater hole 22, described inlet opening 21 by the intake chamber 91 arranged on lower wall basal disc 9 connect into
The mouth of a river 8, described backwater hole 22 connects outlet 5 by the return flume 92 arranged on lower wall basal disc 9.
It is connected to one by the attachment screw 1 being located on separation muscle 33 between described upper dish aqueous cold plate 5 and upper dish scratch diskette 7
Rise.
Between described lower wall scratch diskette 7 and lower wall basal disc 9, the outer ring of faying face is provided with outer ring sealing ring 4, lower wall scratch diskette 7
And the inner ring of faying face is provided with inner ring sealing ring 10 between lower wall basal disc 9.
The principle of the invention
Cooling water, at the inlet opening 21 of lower water diversion disk 2, is introduced the intake chamber 91 in lower wall basal disc 9, by water inlet by the present invention
Water inlet 8 in groove 91 enters cooling chamber 3, cools down lower wall scratch diskette 7；The height of the return pipe 6 at outlet 5 is high
In the faying face of compound disk body, cooling water could flow out via return pipe 6 from outlet 5 after must being completely filled with cavity 3, enter
Return flume 92, then flow into backwater hole 22, can ensure that dumps can be adequately cooled.
Furthermore, it is necessary to explanation, unless stated otherwise or point out, otherwise the term in description " first ", " the
Two ", " the 3rd " etc. describe be used only for distinguishing in description each assembly, element, step etc. rather than for representing each
Logical relation between assembly, element, step or ordering relation etc..
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for the skill of this area
For art personnel, the present invention can have various modifications and variations.All within the spirit and principles in the present invention, that is made any repaiies
Change, equivalent, improvement etc., should be included within the scope of the present invention.
Claims (7)
1. a polishing disk structure under the water-cooled of buffing machine, including lower wall scratch diskette (7), it is characterised in that in described lower wall work
The end side making dish (7) is provided with lower wall basal disc (9), shape at the faying face between described lower wall basal disc (9) and lower wall scratch diskette (7)
Become cooling chamber (3), lower wall basal disc (9) is respectively equipped with the water inlet (8) and outlet (5) connected with cooling chamber (3).
Polishing disk structure under the water-cooled of buffing machine the most according to claim 1, it is characterised in that described cooling chamber (3) by
Sector region chamber (31) composition of the upper multiple indents arranged of fan-shaped cooling chamber (3), is laid with in described sector region chamber (31)
Water-cooling channel (32).
Polishing disk structure under the water-cooled of buffing machine the most according to claim 2, it is characterised in that described water-cooling channel (32)
By the separation muscle (33) of the protrusion arranged in each sector region chamber (31) and convex with separate that muscle (33) shifts to install in opposite directions
Go out the gap composition between muscle (34).
Polishing disk structure under the water-cooled of buffing machine the most according to claim 3, it is characterised in that at described lower wall basal disc
(9) opposite side with lower wall scratch diskette (7) faying face is provided with lower water diversion disk (2), and described lower water diversion disk (2) is respectively equipped with into water
Hole (21) and backwater hole (22), described inlet opening (21) are by upper intake chamber (91) the connection water inlet arranged of lower wall basal disc (9)
(8), described backwater hole (22) is by the upper return flume (92) connection outlet (5) arranged of lower wall basal disc (9).
Polishing disk structure under the water-cooled of buffing machine the most according to claim 3, it is characterised in that described upper dish aqueous cold plate
(5) and linked together by the attachment screw (1) being located in separation muscle (33) between upper dish scratch diskette (7).
Polishing disk structure under the water-cooled of buffing machine the most according to claim 4, it is characterised in that in described return flume (92)
And being provided with return pipe (6) between outlet (5), the height of described return pipe (6) is higher than lower wall basal disc (9) and lower wall scratch diskette
(7) faying face between.
Polishing disk structure under the water-cooled of buffing machine the most according to claim 1, it is characterised in that described lower wall scratch diskette
(7) outer ring of faying face is provided with outer ring sealing ring (4), lower wall scratch diskette (7) and lower wall basal disc (9) and between lower wall basal disc (9)
Between the inner ring of faying face be provided with inner ring sealing ring (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610566982.XA CN106078521A (en) | 2016-07-19 | 2016-07-19 | Polishing disk structure under the water-cooled of a kind of buffing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610566982.XA CN106078521A (en) | 2016-07-19 | 2016-07-19 | Polishing disk structure under the water-cooled of a kind of buffing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106078521A true CN106078521A (en) | 2016-11-09 |
Family
ID=57220654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610566982.XA Pending CN106078521A (en) | 2016-07-19 | 2016-07-19 | Polishing disk structure under the water-cooled of a kind of buffing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106078521A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0752034A (en) * | 1993-08-19 | 1995-02-28 | Nippon Steel Corp | Wafer polishing device |
| CN101972998A (en) * | 2010-08-30 | 2011-02-16 | 兰州瑞德实业集团有限公司 | Lower polishing disk of polishing machine |
| CN104772694A (en) * | 2015-03-27 | 2015-07-15 | 苏州赫瑞特电子专用设备科技有限公司 | Upper polishing disk of polishing machine |
| CN104772718A (en) * | 2015-03-27 | 2015-07-15 | 苏州赫瑞特电子专用设备科技有限公司 | Lower polishing disk of polishing machine |
| CN206105628U (en) * | 2016-07-19 | 2017-04-19 | 苏州赫瑞特电子专用设备科技有限公司 | Polish structure of twining under water -cooling of burnishing machine |
-
2016
- 2016-07-19 CN CN201610566982.XA patent/CN106078521A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0752034A (en) * | 1993-08-19 | 1995-02-28 | Nippon Steel Corp | Wafer polishing device |
| CN101972998A (en) * | 2010-08-30 | 2011-02-16 | 兰州瑞德实业集团有限公司 | Lower polishing disk of polishing machine |
| CN104772694A (en) * | 2015-03-27 | 2015-07-15 | 苏州赫瑞特电子专用设备科技有限公司 | Upper polishing disk of polishing machine |
| CN104772718A (en) * | 2015-03-27 | 2015-07-15 | 苏州赫瑞特电子专用设备科技有限公司 | Lower polishing disk of polishing machine |
| CN206105628U (en) * | 2016-07-19 | 2017-04-19 | 苏州赫瑞特电子专用设备科技有限公司 | Polish structure of twining under water -cooling of burnishing machine |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20161109 |