CN106078492A - A kind of sapphire rectangular-shaped piece double-side grinding method - Google Patents
A kind of sapphire rectangular-shaped piece double-side grinding method Download PDFInfo
- Publication number
- CN106078492A CN106078492A CN201610417874.6A CN201610417874A CN106078492A CN 106078492 A CN106078492 A CN 106078492A CN 201610417874 A CN201610417874 A CN 201610417874A CN 106078492 A CN106078492 A CN 106078492A
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- Prior art keywords
- rectangular
- sapphire
- shaped piece
- draw
- groove
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/28—Work carriers for double side lapping of plane surfaces
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The present invention relates to a kind of sapphire rectangular-shaped piece double-side grinding method as follows: once grind: (1) is selected four measurement points on sapphire rectangular-shaped piece;(2) thickness of each point is measured for the first time;(3) once identify;(4) could be made that the sapphire rectangular-shaped piece once identified puts into erratic star wheel foreign steamer;(5) sapphire rectangular-shaped piece is ground for the first time;(6) ultrasonic waves for cleaning;(7) by have crackle or collapse angle, collapse limit sapphire rectangular-shaped piece take out;Secondary grinds selected four measurement points on (1) sapphire rectangular-shaped piece after grinding for the first time;(2) second time measures the thickness of each point;(3) secondary marker;(4) could be made that the sapphire rectangular-shaped piece of secondary marker puts into erratic star wheel foreign steamer;(5) second time grinds sapphire rectangular-shaped piece;(6) ultrasonic waves for cleaning;(7) dry, obtain the sapphire rectangular-shaped piece after twin grinding, simple operation, substantially increase working (machining) efficiency.
Description
Technical field
The present invention relates to the double-side grinding method of a kind of sapphire rectangular-shaped piece, the twin grinding belonging to sapphire window sheet adds
Work technical field.
Technical background
Sapphire (Sapphire) crystal has excellent optical property, physical property and stable chemical property, extensively
It is applied to high-brightness LED backing material, various optical component, window material, because it has good radiation resistance, often
It is used in Aero-Space optical element material and smart mobile phone display screen, Home key, the shooting being exposed in radiation environment
The consumer electronics sector such as head protection lid.
Existing sapphire rectangular-shaped piece twin grinding needs to use inside and outside two pieces erratic star wheel to be nested, i.e. sapphire rectangular-shaped piece is permissible
In interior erratic star wheel, do rotation, place sheet number in machine process easily occurs slide plate, fragmentation and single erratic star wheel few, add work efficiency
The technical disadvantages that rate is low.
Summary of the invention
It is an object of the invention to overcome prior art shortcoming to provide a kind of sapphire rectangular-shaped piece double-side grinding method, operation
Convenient, substantially increase working (machining) efficiency.
The purpose of the present invention is realized by following technical proposals:
A kind of sapphire rectangular-shaped piece double-side grinding method, its method is as follows:
One, once grind
(1) four drift angles are selected on the sapphire rectangular-shaped piece after section as measuring point;
(2) measure the thickness of each point with spherical measuring anvil micrometer for the first time, and record;
(3) two some red symbol pens of relatively thin side in four points are made once identify;
(4) could be made that the sapphire rectangular-shaped piece once identified puts into erratic star wheel foreign steamer according to the following rules: once identified
Side is towards the center of circle of erratic star wheel foreign steamer;
(5) adjust the program of twin grinding board, the first removal quantity is set as removing the 1/2 of required value~2/3, grind for the first time
Mill sapphire rectangular-shaped piece;
(6) after program end of run, sapphire rectangular-shaped piece is taken off, be 50W/cm by intensity2Ultrasonic waves for cleaning 15min;
(7) visual inspection sapphire rectangular-shaped piece, by have crackle or collapse angle, collapse limit sapphire rectangular-shaped piece take out;
Two, secondary grinds
(1) four drift angles are selected on the sapphire rectangular-shaped piece after grinding for the first time as measuring point;
(2) measure the thickness of each point by spherical measuring anvil micrometer second time, and record;
(3) two some red symbol pens of relatively thin side in four points are made secondary marker;
(4) could be made that the sapphire rectangular-shaped piece of secondary marker puts into erratic star wheel foreign steamer according to the following rules: have the one of secondary marker
Side is towards the center of circle of erratic star wheel foreign steamer;
(5) adjusting the program of twin grinding board, the second removal quantity is set as removing the 1/3 of required value~1/2, second time is ground
Mill sapphire rectangular-shaped piece;
(6) after program end of run, sapphire rectangular-shaped piece is taken off, be 50W/cm by intensity2Ultrasonic waves for cleaning 15min;
(7) wafer after cleaning is placed in ventilated environment and naturally dries, and obtains the sapphire rectangular-shaped piece after twin grinding.
Above-mentioned a kind of sapphire rectangular-shaped piece double-side grinding method, wherein, described first removal quantity refers to through twin grinder
After platform grinds for the first time, sapphire rectangular-shaped piece remove thickness;Described second removal quantity refers to through twin grinding board second time
After grinding, sapphire rectangular-shaped piece remove thickness;The described required value that removes refers to that the thickness removed needed for sapphire rectangular-shaped piece is total
With, the i.e. first removal quantity and the summation of the second removal quantity.
Above-mentioned a kind of sapphire rectangular-shaped piece double-side grinding method, wherein, described erratic star wheel foreign steamer includes the trip of circular configuration
Star-wheel main body, erratic star wheel main body periphery is provided with a circle gear, and erratic star wheel main body is provided with the first draw-in groove, the second draw-in groove, the 3rd card
Groove and the 4th draw-in groove, the first draw-in groove, the second draw-in groove, the 3rd draw-in groove and the 4th draw-in groove be rectangular configuration, the first draw-in groove and the 3rd
Draw-in groove in the long limit of rectangular configuration towards the center of circle of erratic star wheel main body, the first draw-in groove and the 3rd draw-in groove are about erratic star wheel main body
The center of circle symmetrical, the second draw-in groove and the 4th draw-in groove in the minor face of rectangular configuration towards the center of circle of erratic star wheel main body, second
Draw-in groove and the 4th draw-in groove are symmetrical about the center of circle of erratic star wheel main body, sapphire rectangular-shaped piece clamping be arranged on the first draw-in groove, second
In draw-in groove, the 3rd draw-in groove or the 4th draw-in groove.
The invention have the benefit that
The twin grinding of sapphire rectangular-shaped piece of the present invention can not use the erratic star wheel that inside and outside two pieces is nested, it is only necessary to a wandering star
Wheel foreign steamer, the slide plate being greatly reduced in the course of processing, fragmentation phenomenon, meanwhile, the sapphire rectangle placed in single erratic star wheel
Pieces number increases, and improves working (machining) efficiency, reduces production cost.
Erratic star wheel foreign steamer is provided with the first draw-in groove, the second draw-in groove, the 3rd draw-in groove and the 4th draw-in groove, adds variable thickness and causes
The selectable draw-in groove of sapphire rectangular-shaped piece, add grinding quantity, beneficially large-scale production, efficiency be greatly improved.
Accompanying drawing explanation
Fig. 1 is erratic star wheel foreign steamer figure of the present invention.
Fig. 2 is the structure chart of sapphire rectangular-shaped piece of the present invention.
Detailed description of the invention
Embodiment one
A kind of sapphire rectangular-shaped piece double-side grinding method, its method is as follows:
The most once grind
(1) length a after section be 152.40mm, width b be that on 101.22mm sapphire rectangular-shaped piece, selected four drift angles do
For measuring point, four drift angles are respectively c1, c2, c3, c4;
(2) measure for the first time with spherical measuring anvil micrometer the thickness of tetra-points of c1, c2, c3, c4 be respectively 0.688mm,
0.684mm, 0.663mm, 0.667mm, and record;
(3) the two of c3, c4 some red symbol pens are made once identify;
(4) could be made that the sapphire rectangular-shaped piece once identified puts into erratic star wheel foreign steamer according to the following rules: once identified
Side is towards the center of circle of erratic star wheel foreign steamer;
(5) adjust the program of twin grinding board, the first removal quantity d1 is set as 0.6mm, by the normal process of twin grinding
Grinding sapphire rectangular-shaped piece for the first time, the requirement that removes this time ground is 0.9mm at d;
(6) after program end of run, sapphire rectangular-shaped piece is taken off, be 50W/cm by intensity2Ultrasonic waves for cleaning 15min;
(7) visual inspection sapphire rectangular-shaped piece, by have crackle or collapse angle, collapse limit sapphire rectangular-shaped piece take out;
2. grind for two times
(1) on the sapphire rectangular-shaped piece after grinding for the first time selected four drift angles as measuring point, four drift angles be respectively e1,
e2、e3、e4;
(2) with spherical measuring anvil micrometer second time measure tetra-points of e1, e2, e3, e4 thickness be respectively as follows: 0.625mm,
0.629mm, 0.622mm, 0.621mm, and record;
(3) two some red symbol pens of e3, e4 are made secondary marker;
(4) could be made that the sapphire rectangular-shaped piece of secondary marker puts into erratic star wheel foreign steamer according to the following rules: have the one of secondary marker
Side is towards the center of circle of erratic star wheel foreign steamer;
(5) adjust the program of twin grinding board, the second removal quantity d2 is set as 0.3mm, by the normal process of twin grinding
Second time grinds sapphire rectangular-shaped piece;
(6) after program end of run, sapphire rectangular-shaped piece is taken off, be 50W/cm by intensity2Ultrasonic waves for cleaning 15min;
(7) wafer after cleaning is placed in ventilated environment and naturally dries, and obtains the sapphire rectangular-shaped piece after twin grinding.
Embodiment two
A kind of sapphire rectangular-shaped piece double-side grinding method, its method is as follows:
The most once grind
(1) length a after section be 110.24mm, width b be that on 101.22mm sapphire rectangular-shaped piece, selected four drift angles do
For measuring point, four drift angles are respectively c1, c2, c3, c4;
(2) measure for the first time with spherical measuring anvil micrometer the thickness of tetra-points of c1, c2, c3, c4 be respectively 0.688mm,
0.665mm, 0.654mm, 0.655mm, and record;
(3) the two of c3, c4 some red symbol pens are made once identify;
(4) could be made that the sapphire rectangular-shaped piece once identified puts into erratic star wheel foreign steamer according to the following rules: once identified
Side is towards the center of circle of erratic star wheel foreign steamer;
(5) adjust the program of twin grinding board, the first removal quantity d1 is set as 0.4mm, by the normal process of twin grinding
Grinding sapphire rectangular-shaped piece for the first time, the requirement that removes this time ground is 0.6mm at d;
(6) after program end of run, sapphire rectangular-shaped piece is taken off, be 50W/cm by intensity2Ultrasonic waves for cleaning 15min;
(7) visual inspection sapphire rectangular-shaped piece, by have crackle or collapse angle, collapse limit sapphire rectangular-shaped piece take out;
2. grind for two times
(1) on the sapphire rectangular-shaped piece after grinding for the first time selected four drift angles as measuring point, four drift angles be respectively e1,
e2、e3、e4;
(2) with spherical measuring anvil micrometer second time measure tetra-points of e1, e2, e3, e4 thickness be respectively as follows: 0.645mm,
0.643mm, 0.646mm, 0.648mm, and record;
(3) two some red symbol pens of e1, e2 are made secondary marker;
(4) could be made that the sapphire rectangular-shaped piece of secondary marker puts into erratic star wheel foreign steamer according to the following rules: have the one of secondary marker
Side is towards the center of circle of erratic star wheel foreign steamer;
(5) adjust the program of twin grinding board, the second removal quantity d2 is set as 0.2mm, by the normal process of twin grinding
Second time grinds sapphire rectangular-shaped piece;
(6) after program end of run, sapphire rectangular-shaped piece is taken off, be 50W/cm by intensity2Ultrasonic waves for cleaning 15min;
(7) wafer after cleaning is placed in ventilated environment and naturally dries, and obtains the sapphire rectangular-shaped piece after twin grinding.
Embodiment three
A kind of sapphire rectangular-shaped piece double-side grinding method, its method is as follows:
The most once grind
(1) length a after section be 150.65mm, width b be that on 73.25mm sapphire rectangular-shaped piece 7, selected four drift angles do
For measuring point, four drift angles are respectively c1, c2, c3, c4;
(2) measure for the first time with spherical measuring anvil micrometer the thickness of tetra-points of c1, c2, c3, c4 be respectively 0.556mm,
0.558mm, 0.536mm, 0.538mm, and record;
(3) the two of c3, c4 some red symbol pens are made once identify;
(4) could be made that the sapphire rectangular-shaped piece once identified puts into erratic star wheel foreign steamer according to the following rules: once identified
Side is towards the center of circle of erratic star wheel foreign steamer;
(5) adjust the program of twin grinding board, the first removal quantity d1 is set as 0.6mm, by the normal process of twin grinding
Grinding sapphire rectangular-shaped piece for the first time, the requirement that removes this time ground is 0.9mm at d;
(6) after program end of run, sapphire rectangular-shaped piece is taken off, be 50W/cm by intensity2Ultrasonic waves for cleaning 15min;
(7) visual inspection sapphire rectangular-shaped piece, by have crackle or collapse angle, collapse limit sapphire rectangular-shaped piece take out;
2. grind for two times
(1) on the sapphire rectangular-shaped piece after grinding for the first time selected four drift angles as measuring point, four drift angles be respectively e1,
e2、e3、e4;
(2) with spherical measuring anvil micrometer second time measure tetra-points of e1, e2, e3, e4 thickness be respectively as follows: 0.495mm,
0.498mm, 0.489mm, 0.487mm, and record;
(3) two some red symbol pens of e3, e4 are made secondary marker;
(4) could be made that the sapphire rectangular-shaped piece of secondary marker puts into erratic star wheel foreign steamer according to the following rules: have the one of secondary marker
Side is towards the center of circle of erratic star wheel foreign steamer;
(5) adjust the program of twin grinding board, the second removal quantity d2 is set as 0.3mm, by the normal process of twin grinding
Second time grinds sapphire rectangular-shaped piece;
(6) after program end of run, sapphire rectangular-shaped piece is taken off, be 50W/cm by intensity2Ultrasonic waves for cleaning 15min;
(7) wafer after cleaning is placed in ventilated environment and naturally dries, and obtains the sapphire rectangular-shaped piece after twin grinding.
Erratic star wheel foreign steamer in above three embodiment includes the erratic star wheel main body 1 of circular configuration, erratic star wheel main body 1 periphery
Being provided with a circle gear 2, erratic star wheel main body 1 is provided with the first draw-in groove the 3, second draw-in groove the 4, the 3rd draw-in groove 5 and the 4th draw-in groove 6, and first
Draw-in groove, the second draw-in groove, the 3rd draw-in groove and the 4th draw-in groove are rectangular configuration, the first draw-in groove and the 3rd draw-in groove in rectangular configuration
Long limit towards the center of circle of erratic star wheel main body, the first draw-in groove and the 3rd draw-in groove are symmetrical about the center of circle of erratic star wheel main body, second
Draw-in groove and the 4th draw-in groove in the minor face of rectangular configuration towards the center of circle of erratic star wheel main body, the second draw-in groove and the 4th draw-in groove about
The center of circle of erratic star wheel main body is symmetrical, and sapphire rectangular-shaped piece clamping is arranged on the first draw-in groove, the second draw-in groove, the 3rd draw-in groove or the 4th
In draw-in groove.
Take the blue treasured of the sapphire rectangular sheet after respectively embodiment one, embodiment two, embodiment three being ground and comparative example
Each 50 batches of stone rectangular sheet, add up for 1000 altogether, and effect is as follows:
Slide plate probability | Fragmentation probability | Processing capacity | |
Embodiment one | 0.30% | 0.40% | 20/2.5H |
Embodiment two | 0.00% | 0.00% | 20/2.0H |
Embodiment three | 0.20% | 0.50% | 20/2.5H |
Comparative example | 1.50% | 2.50% | 20/2.5H |
Wherein, comparative example is the sapphire of the existing sapphire rectangular-shaped piece twin grinding processing using inside and outside two pieces erratic star wheel to be nested
Rectangular-shaped piece.
The twin grinding of sapphire rectangular-shaped piece of the present invention can not use the erratic star wheel that inside and outside two pieces is nested, it is only necessary to one
Erratic star wheel foreign steamer, the slide plate being greatly reduced in the course of processing, fragmentation phenomenon, meanwhile, the sapphire placed in single erratic star wheel
Rectangle pieces number increases, and improves working (machining) efficiency, reduces production cost.
Erratic star wheel foreign steamer is provided with the first draw-in groove, the second draw-in groove, the 3rd draw-in groove and the 4th draw-in groove, adds variable thickness and causes
The selectable draw-in groove of sapphire rectangular-shaped piece, add grinding quantity, beneficially large-scale production, efficiency be greatly improved.
Although it should be understood that above-described embodiment is described in detail the structure of the present invention, but the present invention does not limit
In above-described embodiment, every those skilled in the art from above-described embodiment without creative work just it is contemplated that replacement knot
Structure, belongs to protection scope of the present invention.
Claims (3)
1. a sapphire rectangular-shaped piece double-side grinding method, is characterized by, its method is as follows:
One, once grind
(1) four drift angles are selected on the sapphire rectangular-shaped piece after section as measuring point;
(2) measure the thickness of each point with spherical measuring anvil micrometer for the first time, and record;
(3) two some red symbol pens of relatively thin side in four points are made once identify;
(4) could be made that the sapphire rectangular-shaped piece once identified puts into erratic star wheel foreign steamer according to the following rules: once identified
Side is towards the center of circle of erratic star wheel foreign steamer;
(5) adjust the program of twin grinding board, the first removal quantity is set as removing the 1/2 of required value~2/3, grind for the first time
Mill sapphire rectangular-shaped piece;
(6) after program end of run, sapphire rectangular-shaped piece is taken off, be 50W/cm by intensity2Ultrasonic waves for cleaning 15min;
(7) visual inspection sapphire rectangular-shaped piece, by have crackle or collapse angle, collapse limit sapphire rectangular-shaped piece take out;
Two, secondary grinds
(1) four drift angles are selected on the sapphire rectangular-shaped piece after grinding for the first time as measuring point;
(2) measure the thickness of each point by spherical measuring anvil micrometer second time, and record;
(3) two some red symbol pens of relatively thin side in four points are made secondary marker;
(4) could be made that the sapphire rectangular-shaped piece of secondary marker puts into erratic star wheel foreign steamer according to the following rules: have the one of secondary marker
Side is towards the center of circle of erratic star wheel foreign steamer;
(5) adjusting the program of twin grinding board, the second removal quantity is set as removing the 1/3 of required value~1/2, second time is ground
Mill sapphire rectangular-shaped piece;
(6) after program end of run, sapphire rectangular-shaped piece is taken off, be 50W/cm by intensity2Ultrasonic waves for cleaning 15min;
(7) wafer after cleaning is placed in ventilated environment and naturally dries, and obtains the sapphire rectangular-shaped piece after twin grinding.
2. a kind of sapphire rectangular-shaped piece double-side grinding method as claimed in claim 1, is characterized by, described first removal quantity is
Refer to after twin grinding board grinds for the first time, sapphire rectangular-shaped piece remove thickness;Described second removal quantity refers to through two-sided
Grinder station second time grind after, sapphire rectangular-shaped piece remove thickness;The described required value that removes refers to sapphire rectangular-shaped piece institute
The summation of the thickness summation that need to remove, the i.e. first removal quantity and the second removal quantity.
3. a kind of sapphire rectangular-shaped piece double-side grinding method as claimed in claim 1, is characterized by, described erratic star wheel foreign steamer bag
Including the erratic star wheel main body of circular configuration, erratic star wheel main body periphery is provided with a circle gear, erratic star wheel main body be provided with the first draw-in groove,
Two draw-in grooves, the 3rd draw-in groove and the 4th draw-in groove, the first draw-in groove, the second draw-in groove, the 3rd draw-in groove and the 4th draw-in groove be rectangular configuration, and
One draw-in groove and the 3rd draw-in groove in the long limit of rectangular configuration towards the center of circle of erratic star wheel main body, the first draw-in groove and the 3rd draw-in groove close
Symmetrical in the center of circle of erratic star wheel main body, the second draw-in groove and the 4th draw-in groove in the minor face of rectangular configuration towards erratic star wheel main body
The center of circle, the second draw-in groove and the 4th draw-in groove are symmetrical about the center of circle of erratic star wheel main body, and sapphire rectangular-shaped piece clamping is arranged on
In one draw-in groove, the second draw-in groove, the 3rd draw-in groove or the 4th draw-in groove.
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CN201610417874.6A CN106078492A (en) | 2016-06-15 | 2016-06-15 | A kind of sapphire rectangular-shaped piece double-side grinding method |
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CN107553314A (en) * | 2017-10-21 | 2018-01-09 | 德清凯晶光电科技有限公司 | The large scale erratic star wheel of adjusting thickness |
CN107571145A (en) * | 2017-10-21 | 2018-01-12 | 德清凯晶光电科技有限公司 | The adjustable large scale erratic star wheel of thickness |
CN108081034A (en) * | 2017-12-05 | 2018-05-29 | 江苏师范大学 | A kind of processing method of hexahedron light guide block optical device |
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CN103889655A (en) * | 2011-11-07 | 2014-06-25 | 信越半导体株式会社 | Double-sided polishing method |
JP2013116540A (en) * | 2011-12-05 | 2013-06-13 | Seiko Epson Corp | Method of manufacturing optical element |
JP2014008574A (en) * | 2012-06-29 | 2014-01-20 | Hamai Co Ltd | Work carrier |
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CN107553314A (en) * | 2017-10-21 | 2018-01-09 | 德清凯晶光电科技有限公司 | The large scale erratic star wheel of adjusting thickness |
CN107571145A (en) * | 2017-10-21 | 2018-01-12 | 德清凯晶光电科技有限公司 | The adjustable large scale erratic star wheel of thickness |
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CN108081034A (en) * | 2017-12-05 | 2018-05-29 | 江苏师范大学 | A kind of processing method of hexahedron light guide block optical device |
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