CN106058038A - Electrical actuating film material, and preparation and application thereof - Google Patents
Electrical actuating film material, and preparation and application thereof Download PDFInfo
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- CN106058038A CN106058038A CN201610651400.8A CN201610651400A CN106058038A CN 106058038 A CN106058038 A CN 106058038A CN 201610651400 A CN201610651400 A CN 201610651400A CN 106058038 A CN106058038 A CN 106058038A
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- 239000000463 material Substances 0.000 title claims abstract description 35
- 238000002360 preparation method Methods 0.000 title claims abstract description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 62
- 229910021389 graphene Inorganic materials 0.000 claims abstract description 36
- 239000002238 carbon nanotube film Substances 0.000 claims abstract description 21
- 239000002041 carbon nanotube Substances 0.000 claims abstract description 16
- 229910021393 carbon nanotube Inorganic materials 0.000 claims abstract description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000011248 coating agent Substances 0.000 claims abstract description 13
- 238000000576 coating method Methods 0.000 claims abstract description 13
- 239000000725 suspension Substances 0.000 claims abstract description 12
- 238000001035 drying Methods 0.000 claims abstract description 10
- 239000004094 surface-active agent Substances 0.000 claims abstract description 8
- 238000003828 vacuum filtration Methods 0.000 claims abstract description 5
- 210000003205 muscle Anatomy 0.000 claims abstract description 4
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 3
- 239000010439 graphite Substances 0.000 claims abstract description 3
- 239000010409 thin film Substances 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 19
- 230000008569 process Effects 0.000 claims description 19
- 239000012528 membrane Substances 0.000 claims description 11
- 238000010298 pulverizing process Methods 0.000 claims description 10
- 238000001914 filtration Methods 0.000 claims description 6
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 5
- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 claims description 2
- LZZYPRNAOMGNLH-UHFFFAOYSA-M Cetrimonium bromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[N+](C)(C)C LZZYPRNAOMGNLH-UHFFFAOYSA-M 0.000 claims 1
- 238000012545 processing Methods 0.000 abstract description 5
- 239000007788 liquid Substances 0.000 abstract description 4
- 238000011031 large-scale manufacturing process Methods 0.000 abstract 1
- 238000010345 tape casting Methods 0.000 abstract 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 7
- 239000012498 ultrapure water Substances 0.000 description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 239000003814 drug Substances 0.000 description 6
- 239000005457 ice water Substances 0.000 description 6
- 238000003756 stirring Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000011263 electroactive material Substances 0.000 description 4
- JHJUUEHSAZXEEO-UHFFFAOYSA-M sodium;4-dodecylbenzenesulfonate Chemical group [Na+].CCCCCCCCCCCCC1=CC=C(S([O-])(=O)=O)C=C1 JHJUUEHSAZXEEO-UHFFFAOYSA-M 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 239000003153 chemical reaction reagent Substances 0.000 description 3
- 238000011026 diafiltration Methods 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 239000003292 glue Substances 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000007790 scraping Methods 0.000 description 3
- 239000002109 single walled nanotube Substances 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 241001597008 Nomeidae Species 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- HRHBQGBPZWNGHV-UHFFFAOYSA-N azane;bromomethane Chemical compound N.BrC HRHBQGBPZWNGHV-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- -1 ion exchange resin Metals Chemical class 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/092—Forming composite materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/093—Forming inorganic materials
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- Composite Materials (AREA)
- Materials Engineering (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
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- General Physics & Mathematics (AREA)
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- Inorganic Chemistry (AREA)
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Abstract
The invention relates to an electrical actuating film material, and preparation and application thereof. The electrical actuating film material is oxidized graphene/carbon nano tube film. The preparation method is characterized by adding a carbon nano tube and a surface active agent into water; processing and acquiring a carbon nanotube suspension liquid; carrying out vacuum filtration and acquiring the carbon nano tube film; dissolving graphite oxide into water, processing and acquiring an oxidized graphene sol; and then coating the sol to the carbon nano tube film through using a knife; drying; carrying out knife coating repeatedly; and drying, and then acquiring the material. The preparation method is simple and rapid, and large scale production can be performed. The acquired oxidized graphene/carbon nano tube film possesses a rapid, outstanding and stable electrostrictive performance and has an important application value in fields of a flexible electrical actuator, a mechanical arm, artificial muscles and the like.
Description
Technical field
The invention belongs to electro-active material and preparation thereof and application, particularly to a kind of electric actuation thin-film material and
Preparation and application.
Background technology
Activating material is a kind of can the stimulation such as light, heat, electricity, humidity, magnetic field, chemical atmosphere etc. of environment to external world to make
The intellectual material of response, the most just can be divided into light to activate material, thermal actuation material, electro-active material, magnetic actuation by activating material
Material, chemical environment activate material etc..Wherein electricity have cleanliness without any pollution, be easy to get, controlled advantage, then electro-active material tool
There are great researching value and application prospect.
Existing electro-active material has marmem, electro-active ceramic materials, ion exchange resin Metals composite
Material etc..But driving voltage is big, deformation quantity is little and the defect such as high molecular low chemical stability limits the most to varying degrees
The application of these materials.
Carbon-based material is received the extensive concern of scientific research scholar by its changeable adjustable form and character.Wherein, Graphene
Since being found, its a series of excellent physical and chemical performance having has started research boom, and graphene oxide is also that it is heavy
A kind of derivant wanted.Light, steam based on graphene oxide activate thin film it has been reported that major part is to oxidation at present
Graphene film carries out design gradient, heteropical so that it is stimulates light, steam etc. and produces asymmetric response and show
Go out macroscopic deformation.And the electric actuation device of carbon rarely has report due to the design of its structure, the complexity of electric drive control entirely.
Summary of the invention
The technical problem to be solved is to provide a kind of electric actuation thin-film material and preparation thereof and application, the present invention
Preparation method simple and quick, be produced on a large scale.
A kind of electric actuation thin-film material of the present invention, described electric actuation thin-film material is that graphene oxide/CNT is thin
Film, is composited by graphene oxide layer and carbon nanotube layer.Hydrophilic, electric conductivity and swollen is there is between the component that two-layer is different
The difference of swollen coefficient and there is unsymmetric structure, wherein the thickness of electric actuation thin-film material is 2～50 μm.
A kind of preparation method of the electric actuation thin-film material as claimed in claim 1 of the present invention, including:
(1) CNT and surfactant are added to the water, process, obtain carbon nano tube suspension, vacuum filtration, obtain
To carbon nano-tube film；
(2) graphite oxide is soluble in water, process, obtain graphene oxide colloidal sol, then blade coating is received to the carbon of step (1)
On mitron thin film, dry, repeat blade coating, dry, obtain electric actuation thin-film material.
In described step (1), the mass ratio of CNT and surfactant is 1-2:3；CNT is in suspension
Concentration is 0.1～10mg/mL.
In described step (1), surfactant is dodecylbenzene sodium sulfonate, dodecyl sodium sulfate and cetyl three
Methyl bromide ammonium etc..
CNT and surfactant are added to the water in (1) by described step, and regulation pH is 2～5.
Described step is processed as in (1): cell pulverization instrument processes, and the process time is 1-10h.
In described step (1), vacuum filtration is: carbon nano tube suspension poured into pvdf membrane as filter membrane in sand core funnel,
Sucking filtration is carried out by vacuum pump using circulatory water.
Described step is processed as in (2): cell pulverization instrument processes, and the process time is 2-24h；Drying is: oven for drying
Temperature is 40～80 DEG C；Time is 5～30min.
In described step (2), the concentration of graphene oxide colloidal sol is 5～20mg/mL.
The number of times repeat blade coating in described step (2), drying is 5～50 times.
Water in described step (1), (2) is ultra-pure water.
A kind of application of the electric actuation thin film of the present invention, answering in flexible electrical actuator, mechanical arm, artificial muscle field
With.
The present invention is by changing carbon nano tube suspension and the concentration of graphene oxide colloidal sol, sucking filtration carbon nano tube suspension
Volume and graphene oxide colloidal sol blade coating the number of plies can realize electric actuation graphene oxide/carbon nano-tube film thickness
Control.There is the series of physical chemical property such as hydrophilic, electric conductivity, thermal coefficient of expansion in graphene oxide layer and carbon nanotube layer
On difference, cause to external world stimulate such as applied voltage inside generation stress gradient, macroscopically producing actuated deformation.
Electric actuation thin-film material of the present invention has unsymmetric structure and rapid, notable, stable electrostrictive performance.
Beneficial effect
(1) preparation method of the present invention is simple and quick, is produced on a large scale；
(2) the electric actuation graphene oxide/carbon nano-tube film prepared by the present invention is as full material with carbon element device, greatly
Reduce the interface problem existed between different component；
(3) the electric actuation graphene oxide/carbon nano-tube film prepared by the present invention can drive at lower voltages, and response is fast
Speed, deformation quantity is big, activates behavior obvious, and cyclical stability is preferable, in fields such as flexible electrical actuator, mechanical arm and artificial muscles
There is significant application value.
Accompanying drawing explanation
Fig. 1 is the SEM figure on two surfaces of graphene oxide/carbon nano-tube film in embodiment 1；Wherein (a) is oxidation stone
Ink alkene layer surface；B () is carbon nanotube layer surface；
Fig. 2 is the SEM figure in graphene oxide in embodiment 1/carbon nano-tube film cross section；
Fig. 3 is that in embodiment 1, the graphene oxide/carbon nano-tube film macroscopical actuation effect under 5V DC voltage is shown
Figure.
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention is expanded on further.Should be understood that these embodiments are merely to illustrate the present invention
Rather than restriction the scope of the present invention.In addition, it is to be understood that after having read the content that the present invention lectures, people in the art
The present invention can be made various changes or modifications by member, and these equivalent form of values fall within the application appended claims equally and limited
Scope.
Embodiment 1
At room temperature, weigh 25mg CNT and 75mg dodecylbenzene sodium sulfonate, measure 50mL ultra-pure water and pour into
Being mixed by medicine in the beaker of 50mL, with concentrated hydrochloric acid regulation pH value to 2, the vial that will be equipped with mix reagent medicine after stirring is put
Processing 4h with cell pulverization instrument in ice-water bath makes CNT be uniformly dispersed, and has obtained carbon nano tube suspension, and has taken 20mL
Make filter membrane vacuum pump using circulatory water with pvdf membrane carry out sucking filtration and obtain single wall carbon nano-tube film after pure water diafiltration, use 3M glue
Band fixed placement is standby；Weigh 400mg graphite oxide powder to be placed in the beaker of 50mL, pour the stirring of 40mL ultra-pure water into and be made into dense
Degree is the dispersion liquid of 10mg/mL, then processes 10h in ice-water bath with cell pulverization instrument and obtains the oxidation that concentration is 10mg/mL
Graphene sol 40mL, with suction pipe absorption, 3 graphene oxide colloidal sols are on the carbon nano-tube film fixed every time, with scraping
Cutter blade coating uniformly, is put in 60 DEG C of baking ovens and is dried, and repeats blade coating drying and obtains graphene oxide/carbon nano-tube film 20 times.From
Fig. 1 can be seen that graphene oxide layer and carbon nanotube layer surface topography are completely different, and CNT is evenly distributed on carbon nanometer
Tube layer surface, has outstanding electric conductivity.Can draw from the SEM figure of Fig. 2 film sections, the thickness of this thin film is 24 μm.
Fig. 3 is the graphene oxide/carbon nano-tube film macroscopical actuation effect displaying figure under 5V DC voltage in embodiment, 0～8s
For the deformation process of thin film, start after 8s to recover, restore completely during 40s.During Gai, deformation of thin membrane be rapid, and whole process
Can be repeated several times, cyclical stability is preferable.
Embodiment 2
At room temperature, weigh 50mg CNT and 75mg dodecylbenzene sodium sulfonate, measure 50mL ultra-pure water and pour into
Being mixed by medicine in the beaker of 50mL, with concentrated hydrochloric acid regulation pH value to 2, the vial that will be equipped with mix reagent medicine after stirring is put
Processing 4h with cell pulverization instrument in ice-water bath makes CNT be uniformly dispersed, and has obtained carbon nano tube suspension, and has taken 20mL
Make filter membrane vacuum pump using circulatory water with pvdf membrane carry out sucking filtration and obtain single wall carbon nano-tube film after pure water diafiltration, use 3M glue
Band fixed placement is standby；Weigh 400mg graphite oxide powder to be placed in the beaker of 50mL, pour the stirring of 40mL ultra-pure water into and be made into dense
Degree is the dispersion liquid of 10mg/mL, then processes 10h in ice-water bath with cell pulverization instrument and obtains the oxidation that concentration is 10mg/mL
Graphene sol 40mL, with suction pipe absorption, 3 graphene oxide colloidal sols are on the carbon nano-tube film fixed every time, with scraping
Cutter blade coating uniformly, is put in 60 DEG C of baking ovens and is dried, and repeats blade coating drying and obtains graphene oxide/carbon nano-tube film 20 times.Oxygen
Functionalized graphene/carbon nano-tube film is under 5V DC voltage, and 0～12s is the deformation process of thin film, starts to recover after 12s,
Restore completely during 44s.
Embodiment 3
At room temperature, weigh 25mg CNT and 75mg dodecylbenzene sodium sulfonate, measure 50mL ultra-pure water and pour into
Being mixed by medicine in the beaker of 50mL, with concentrated hydrochloric acid regulation pH value to 2, the vial that will be equipped with mix reagent medicine after stirring is put
Processing 4h with cell pulverization instrument in ice-water bath makes CNT be uniformly dispersed, and has obtained carbon nano tube suspension, and has taken 20mL
Make filter membrane vacuum pump using circulatory water with pvdf membrane carry out sucking filtration and obtain single wall carbon nano-tube film after pure water diafiltration, use 3M glue
Band fixed placement is standby；Weigh 400mg graphite oxide powder to be placed in the beaker of 50mL, pour the stirring of 40mL ultra-pure water into and be made into dense
Degree is the dispersion liquid of 10mg/mL, then processes 10h in ice-water bath with cell pulverization instrument and obtains the oxidation that concentration is 10mg/mL
Graphene sol 40mL, with suction pipe absorption, 3 graphene oxide colloidal sols are on the carbon nano-tube film fixed every time, with scraping
Cutter blade coating uniformly, is put in 60 DEG C of baking ovens and is dried, and repeats blade coating drying and obtains graphene oxide/carbon nano-tube film 30 times.Oxygen
Functionalized graphene/carbon nano-tube film is under 5V DC voltage, and 0～9s is the deformation process of thin film, starts to recover, 42s after 9s
Time restore completely.
Claims (10)
1. an electric actuation thin-film material, it is characterised in that: described electric actuation thin-film material is that graphene oxide/CNT is thin
Film, wherein the thickness of electric actuation thin-film material is 2～50 μm.
2. a preparation method for electric actuation thin-film material as claimed in claim 1, including:
(1) CNT and surfactant are added to the water, process, obtain carbon nano tube suspension, vacuum filtration, obtain carbon
Nano-tube film；
(2) graphite oxide is soluble in water, process, obtain graphene oxide colloidal sol, then blade coating is to the CNT of step (1)
On thin film, dry, repeat blade coating, dry, obtain electric actuation thin-film material.
The preparation method of a kind of electric actuation thin-film material the most according to claim 2, it is characterised in that: described step (1)
The mass ratio of middle CNT and surfactant is 1-2:3；The concentration of carbon nano tube suspension is 0.1～10mg/mL.
The preparation method of a kind of electric actuation thin-film material the most according to claim 2, it is characterised in that: described step (1)
Middle surfactant is DBSA or dodecyl sodium sulfate and cetyl trimethylammonium bromide.
The preparation method of a kind of electric actuation thin-film material the most according to claim 2, it is characterised in that: described step (1)
In be processed as: cell pulverization instrument process, the process time is 1-10h.
The preparation method of a kind of electric actuation thin-film material the most according to claim 2, it is characterised in that: described step (1)
Middle vacuum filtration is: carbon nano tube suspension is poured into pvdf membrane as filter membrane in sand core funnel, is entered by vacuum pump using circulatory water
Row sucking filtration.
The preparation method of a kind of electric actuation thin-film material the most according to claim 2, it is characterised in that: described step (2)
In be processed as: cell pulverization instrument process, the process time is 2-24h；Drying is: the temperature of oven for drying is 40～80 DEG C；Time
It is 5～30min.
The preparation method of a kind of electric actuation thin-film material the most according to claim 2, it is characterised in that: described step (2)
The concentration of middle graphene oxide colloidal sol is 5～20mg/mL.
The preparation method of a kind of electric actuation thin-film material the most according to claim 2, it is characterised in that: described step (2)
The middle number of times repeating to scratch, dry is 5～50 times.
10. the application of an electric actuation thin-film material as claimed in claim 1, it is characterised in that: at flexible electrical actuator, machine
Application in mechanical arm, artificial muscle field.
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| CN109971021A (en) * | 2019-04-03 | 2019-07-05 | 东华大学 | A kind of fold graphene oxide/latex fexible film and its preparation and application |
| CN110385850A (en) * | 2019-07-23 | 2019-10-29 | 嘉兴学院 | The method of electrohydrodynamics spray printing Arbitrary 3 D flexible electronic circuit pattern |
| CN111268639A (en) * | 2020-02-19 | 2020-06-12 | 东华大学 | Multi-stimulus response actuating film and preparation and application thereof |
| CN111710701A (en) * | 2020-06-29 | 2020-09-25 | 青岛科技大学 | Flexible organic light-emitting display screen with multiple stimulus responses |
| CN112520685A (en) * | 2020-12-04 | 2021-03-19 | 青岛大学 | Double-layer thin film actuator and preparation method thereof |
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| CN109971021A (en) * | 2019-04-03 | 2019-07-05 | 东华大学 | A kind of fold graphene oxide/latex fexible film and its preparation and application |
| CN110385850A (en) * | 2019-07-23 | 2019-10-29 | 嘉兴学院 | The method of electrohydrodynamics spray printing Arbitrary 3 D flexible electronic circuit pattern |
| CN110385850B (en) * | 2019-07-23 | 2021-06-22 | 嘉兴学院 | Method for electrohydrodynamic jet printing of arbitrary three-dimensional flexible electronic circuit pattern |
| CN111268639A (en) * | 2020-02-19 | 2020-06-12 | 东华大学 | Multi-stimulus response actuating film and preparation and application thereof |
| CN111268639B (en) * | 2020-02-19 | 2023-08-18 | 东华大学 | Multi-stimulus response actuation film and preparation and application thereof |
| CN111710701A (en) * | 2020-06-29 | 2020-09-25 | 青岛科技大学 | Flexible organic light-emitting display screen with multiple stimulus responses |
| CN111710701B (en) * | 2020-06-29 | 2022-09-02 | 青岛科技大学 | Flexible organic light-emitting display screen with multiple stimulus responses |
| CN112520685A (en) * | 2020-12-04 | 2021-03-19 | 青岛大学 | Double-layer thin film actuator and preparation method thereof |
| CN112520685B (en) * | 2020-12-04 | 2024-03-01 | 青岛大学 | Double-layer film actuator and preparation method thereof |
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