CN106052566A - Novel pulse laser line width measurement device - Google Patents
Novel pulse laser line width measurement device Download PDFInfo
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- CN106052566A CN106052566A CN201610571861.4A CN201610571861A CN106052566A CN 106052566 A CN106052566 A CN 106052566A CN 201610571861 A CN201610571861 A CN 201610571861A CN 106052566 A CN106052566 A CN 106052566A
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- pulse laser
- measurement apparatus
- scanning interferometer
- novel pulse
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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Abstract
The invention provides a novel pulse laser line width measurement device, which comprises a coupling lens, an FP scanning interferometer, a small hole aperture, a filter chip, a detector, a piezoelectric ceramic, a piezoelectric ceramic driving power supply and an oscilloscope sequentially arranged at horizontal intervals, wherein the FP scanning interferometer comprises a front endoscope and a rear endoscope; the piezoelectric ceramic is arranged on the back face of the rear endoscope and is connected with a power output end of the piezoelectric ceramic driving power supply; the signal output end of the detector is connected with the oscilloscope; and the voltage signal acquisition end of the oscilloscope is connected with the power output end of the piezoelectric ceramic driving power supply. Thus, the FP scanning interferometer can be used for measuring the pulse laser line width, the problem of real-time and online pulse laser line width measurement is solved, line width measurement on single-longitudinal mode or multi-longitudinal mode pulse laser with pulse repetition frequency no smaller than 1Hz and pulse width no smaller than 100ps can be realized, the structure is simple, the manufacturing difficulty is low, the performance is stable, and the device can be applied to measurement on the line width of pulse laser of various wavelengths.
Description
[technical field]
The invention belongs to laser linewidth technical field of measuring equipment, particularly relate to a kind of Novel pulse laser linewidth and measure dress
Put.
[background technology]
Measuring currently for laser linewidth, conventional method has from homodyne, self-heterodyne, Michelson's interferometer, Mach pool
Deccan interferometer, FP interferometer etc..Wherein, first two has the highest precision, and when choosing appropriate optical fibers length, laser linewidth is Lip river
During human relations hereby line style, precision is higher than 1kHz；Michelson's interferometer, Mach Zehnder interferometer precision through carefully adjusting can reach
To 30kHz；The FP interferometer precision using chamber mirror element is limited in 1MHz, and optical-fiber type FP interferometer precision can bring up to 4kHz.
In these line width measuring methods, FP interferometer is easiest to use, and is often fabricated to FP etalon or FP scanning interferometer two kinds
Form carries out laser linewidth measurement, such as: generally uses FP scanning interferometer for continuous laser live width and measures, for arteries and veins
Impulse optical linewidth measurement generally uses FP etalon and measures, and also has by contrasting many longitudinal modes and single longitudinal mode burst length simultaneously
Flatness makes assessment, or passes through test spectral and calculate what laser longitudinal mode interval carried out inferring.
[summary of the invention]
In order to solve above-mentioned technical problem present in prior art, the invention provides and a kind of use FP scanning interferometer
Pulse laser live width is measured, the problem solving pulse laser live width On-line sampling system, and can be to pulse recurrence frequency
More than or equal to 1Hz, pulse width more than or equal to the single longitudinal mode of 100ps or the Novel wrist impulse of many longitudinal modes pulse laser wire width measuring
Optical linewidth measurement apparatus.
The present invention solves the technical scheme that prior art problem used:
A kind of Novel pulse laser linewidth measurement apparatus, includes coupled lens, FP scanning interferometer, piezoelectric ceramics, pressure
Electroceramics drives power supply, aperture, filter plate, detector and oscillograph；Wherein, described coupled lens, FP scanning interferometer,
Aperture, filter plate and detector are horizontally spaced about successively, and FP scanning interferometer includes front cavity mirror and Effect of Back-Cavity Mirror, described
Piezoelectric ceramics is located at the back side of Effect of Back-Cavity Mirror and is connected with the power output end of drive power supply for piezoelectric ceramics；The letter of described detector
Number outfan is connected with oscillograph, the power output end of described oscillographic voltage signal acquisition end and drive power supply for piezoelectric ceramics
Connect.
Further, described piezoelectric ceramics stroke under rated voltage is at least 1-2 times of measured laser wavelength.
Further, described drive power supply for piezoelectric ceramics output frequency is that the continuously adjustable amplitude of 0.001Hz to 100Hz is
The sawtooth waveforms of piezoelectric ceramics rated voltage or triangular wave.
Further, described coupled lens is that the sphere realizing mating between measured laser with FP scanning interferometer transverse mode is saturating
Mirror or non-spherical lens.
Further, described front cavity mirror and Effect of Back-Cavity Mirror are plane mirror or concave mirror, collectively form average structure, plano-concave knot
The FP scanning interferometer of structure, recessed flat structure or double-concave structure.
Further, described aperture is big for FP scanning interferometer Output of laser carries out the aperture of space filtering
Little variable or changeless diaphragm.
Further, described filter plate be for FP scanning interferometer Output of laser is carried out the absorption-type of spectral filtering or
Reflection-type optical filter.
Further, described detector is to convert light signals into the high speed of the signal of telecommunication for detecting laser
Or low speed detector.
Further, described detector is silicon cell, photodiode, phototriode, PIN photodiode or snow
Avalanche photo diode.
Further, described oscillograph is to have the numeral that detection channels coupled impedance is arranged and multiple detection pattern is arranged
Oscillograph.
Beneficial effects of the present invention is as follows:
The present invention passes through technique scheme, can use the FP scanning interferometer being generally used for continuous laser wire width measuring
Pulse laser live width is measured, the problem solving pulse laser live width On-line sampling system, it is achieved to pulse recurrence frequency
More than or equal to 1Hz, pulse width more than or equal to the single longitudinal mode of 100ps or many longitudinal modes pulse laser wire width measuring, and structure is simple
List, manufacture difficulty are low, stable work in work, can be widely applied to the measurement of various wavelength pulsed laser live width.
[accompanying drawing explanation]
Fig. 1 is the structural principle schematic diagram of a kind of Novel pulse laser linewidth measurement apparatus embodiment of the present invention.
[detailed description of the invention]
In order to make the purpose of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, right
The present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, not
For limiting the present invention.
As shown in fig. 1:
Embodiments provide a kind of Novel pulse laser linewidth measurement apparatus, include coupled lens 1, FP scanning
Interferometer 2, piezoelectric ceramics 3, drive power supply for piezoelectric ceramics 4, aperture 5, filter plate 6, detector 7 and oscillograph 8, described coupling
Close lens 1, FP scanning interferometer 2, aperture 5, filter plate 6 and detector 7 to be horizontally spaced about successively, and FP scanning interferometer
Instrument 2 include front cavity mirror 21 and Effect of Back-Cavity Mirror 22, described piezoelectric ceramics 3 be located at Effect of Back-Cavity Mirror 22 the back side and with Piezoelectric Ceramic electricity
The power output end in source 4 connects；The signal output part of described detector 7 is connected with oscillograph 8, the voltage letter of described oscillograph 8
Number collection terminal is connected with the power output end of drive power supply for piezoelectric ceramics 4.
Wherein, described coupled lens 1 can be the ball realizing mating between measured laser 9 with FP scanning interferometer 2 transverse mode
Face lens or non-spherical lens；Described front cavity mirror 21 and Effect of Back-Cavity Mirror 22 may each be plane mirror or concave mirror, collectively form average
The FP scanning interferometer 2 of structure, plano-concave structure, recessed flat structure or double-concave structure；Described piezoelectric ceramics 3 is flexible under rated voltage
1-2 times of amount at least measured laser wavelength, described drive power supply for piezoelectric ceramics 4 output frequency is that 0.001Hz to 100Hz is continuous
Adjustable amplitude is sawtooth waveforms or the triangular wave of piezoelectric ceramics 3 rated voltage；Described aperture 5 could be for scanning FP
Interferometer 2 Output of laser carries out the variable or changeless diaphragm of pore size of space filtering；Described filter plate 6 can be to use
In FP scanning interferometer 2 Output of laser is carried out spectral filtering absorption-type or reflection-type optical filter；Described detector 7 can be
High speed or the low speed detector of the signal of telecommunication is converted light signals into, such as silicon cell, photoelectricity for laser is detected
Diode, phototriode, PIN photodiode or avalanche photodide；Described oscillograph 8 is digital oscilloscope, as can
To arrange the coupled impedance of detection channels, to arrange sampling configuration, peak detection mode, contour detecting pattern, average detected pattern
Digital oscilloscope etc. multiple detection pattern.
During Novel pulse laser linewidth measurement apparatus of the present invention work, what first measured pulse laser instrument 9 sent swashs
(pulse recurrence frequency of this laser is more than or equal to 1Hz or lower to light, and pulse width is more than or equal to 100ps, and longitudinal mode structure is Dan Zong
Mould or many longitudinal modes.) carry out FP scanning interferometer 2 after coupled lens 1 coupling matching；Then drive power supply for piezoelectric ceramics 4 is pressure
Electroceramics 3 provides sawtooth waveforms or triangle wave voltage, to change front cavity mirror 21 and the spacing of Effect of Back-Cavity Mirror 22, it is achieved to measured pulse
The laser linewidth that laser instrument 9 sends is scanned；Then the laser passed through through Effect of Back-Cavity Mirror 22 is successively through aperture 5 and filter plate
After 6 carry out space filtering and spectral filtering respectively, detector 7 receive；Last detector 7 will receive the optical signal conversion of laser
For the signal of telecommunication and be sent to oscillograph 8, the meanwhile sawtooth waveforms or three of oscillograph 8 Real-time Collection drive power supply for piezoelectric ceramics 4
Angle wave voltage.
Below by way of several examples to the structure of Novel pulse laser linewidth measurement apparatus of the present invention and technique effect
It is described further.
Example one:
The coupled lens 1 of pulse laser wire width measuring device of the present invention is the plano-convex spherical mirror of focal length 100mm；Described
The front cavity mirror 21 of FP scanning interferometer 2 and Effect of Back-Cavity Mirror 22 are concave mirror, and concave curvature radius is 75mm, is coated with 1064nm
Reflectance is the high-reflecting film layer of 98%, and another side is plane, and being coated with 1064nm transmitance is the antireflective film higher than 99.8%
Layer, the spacing of two chamber mirrors is 75mm, forms cofocus scanning interferometer structure；The rated voltage of described piezoelectric ceramics 3 is 200V,
Maximal dilation amount is 1 μm；Described drive power supply for piezoelectric ceramics 4 exports sawtooth voltage, and amplitude is 200V, and frequency is 0.001Hz
To 100Hz continuously adjustabe (being fixed on 10Hz here)；Described aperture 5 diameter 2mm, space filtering, only make 2mm scope
Light transmission；Described optical filter 6 is absorption-type optical filter, and spectral filtering only makes 1064nm laser light；Described detector 7 is
Low speed detector, selects silicon cell, and during 500 Ω sample resistance, its rise time is less than 1.2 μ s；Described oscillograph 8 is
Tektronix TDS 3032C, bandwidth 300MHz, sampling rate 2.5GS/s, and oscillograph are set to 1M Ω impedance matching and adopt
Original mold formula.By this pulse laser wire width measuring device can travelling-wave cavity laser instrument passive Q-adjusted to 1064nm output single longitudinal mode,
The laser linewidth that frequency is 10kHz, pulse width is 40ns measures.
Example two:
The coupled lens 1 of pulse laser wire width measuring device of the present invention is the plano-convex spherical mirror of focal length 100mm；Described
The front cavity mirror 21 of FP scanning interferometer 2 and Effect of Back-Cavity Mirror 22 are concave mirror, and concave curvature radius is 75mm, is coated with 1064nm
Reflectance is the high-reflecting film layer of 98%；Another side is plane, and being coated with 1064nm transmitance is the antireflective film higher than 99.8%
Layer, the spacing of two chamber mirrors is 75mm, forms cofocus scanning interferometer structure；The rated voltage of described piezoelectric ceramics 3 is 200V,
Maximal dilation amount is 1 μm；Described drive power supply for piezoelectric ceramics 4 exports sawtooth voltage, and amplitude is 200V, and frequency is 0.001Hz
To 100H continuously adjustabe (being fixed on 0.01Hz here)；Described aperture 5 diameter 2mm, space filtering, only make 2mm scope
Light transmission；Described optical filter 6 is absorption-type optical filter, and spectral filtering only makes 1064nm laser light；Described detector 7
For high speed detector, selecting Newport:818-BB-21, its rise time is less than 200ps；Described oscillograph 8 is Tektronix
TDS 3032C, bandwidth 300MHz, sampling rate 2.5GS/s, and oscillograph are set to 50 Ω impedance matchings and peakvalue's checking mould
Formula.Can the single longitudinal mode of travelling-wave cavity laser instrument passive Q-adjusted to 1064nm output, frequency by this pulse laser wire width measuring device
Measure for the laser linewidth that 1Hz, pulse width are 40ns.
Example three:
The coupled lens 1 of pulse laser wire width measuring device of the present invention is the plano-convex spherical mirror of focal length 100mm；Described
The front cavity mirror 21 of FP scanning interferometer 2 and Effect of Back-Cavity Mirror 22 are plane mirror, and it is the height of 98% that one side is coated with 1064nm reflectance
Anti-film layer, it is the antireflective film layer higher than 99.8% that another side is coated with 1064nm transmitance, and the spacing of two chamber mirrors is 30mm, group
Become average chamber scanning interferometer structure；The rated voltage of described piezoelectric ceramics 3 is 200V, and maximal dilation amount is 2 μm；Described piezoelectricity
Ceramic driving power supply 4 exports sawtooth voltage, and amplitude is 200V, and frequency is that 0.001Hz to 100H continuously adjustabe (is fixed on here
10Hz)；Described aperture 5 diameter 2mm, space filtering, only make the light transmission of 2mm scope；Described optical filter 6 is absorption-type
Optical filter, spectral filtering, only make 1064nm laser light；Described detector 7 is high speed detector, selects Thorlabs
DET10C/M, its rise time is less than 7ns；Described oscillograph 8 is Tektronix TDS 3032C, bandwidth 300MHz, sampling speed
Rate 2.5GS/s, and oscillograph is set to 1M Ω impedance matching and sampling configuration.By this pulse laser wire width measuring device
Many longitudinal modes of standing-wave cavity laser instrument passive Q-adjusted to 1064nm output, frequency are 30kHz, pulse width is the laser linewidth of 14ns
Measure.
So, Novel pulse laser linewidth measurement apparatus of the present invention can use and be generally used for the survey of continuous laser live width
Pulse laser live width is measured by the FP scanning interferometer of amount, the problem solving pulse laser live width On-line sampling system, real
Now to pulse recurrence frequency more than or equal to 1Hz (even lower pulse recurrence frequency), pulse width more than or equal to the Dan Zong of 100ps
Mould or many longitudinal modes pulse laser wire width measuring, and this apparatus structure is simple, manufacture difficulty is low, stable work in work, can be extensive
It is applied to the measurement of various wavelength pulsed laser live width.
Above content is to combine concrete optimal technical scheme further description made for the present invention, it is impossible to assert
Being embodied as of the present invention is confined to these explanations.For general technical staff of the technical field of the invention,
On the premise of present inventive concept, it is also possible to make some simple deduction or replace, all should be considered as belonging to the present invention's
Protection domain.
Claims (10)
1. a Novel pulse laser linewidth measurement apparatus, it is characterised in that: include coupled lens (1), FP scanning interferometer
(2), piezoelectric ceramics (3), drive power supply for piezoelectric ceramics (4), aperture (5), filter plate (6), detector (7) and oscillograph
(8)；Wherein, described coupled lens (1), FP scanning interferometer (2), aperture (5), filter plate (6) and detector (7) are successively
Being horizontally spaced about, and FP scanning interferometer (2) includes front cavity mirror (21) and Effect of Back-Cavity Mirror (22), described piezoelectric ceramics (3) is located at
The back side of Effect of Back-Cavity Mirror (22) is also connected with the power output end of drive power supply for piezoelectric ceramics (4)；The signal of described detector (7)
Outfan is connected with oscillograph (8), the voltage signal acquisition end of described oscillograph (8) and the electricity of drive power supply for piezoelectric ceramics (4)
Source output terminal connects.
Novel pulse laser linewidth measurement apparatus the most according to claim 1, it is characterised in that: described piezoelectric ceramics (3) exists
Under rated voltage, stroke is at least 1-2 times of measured laser wavelength.
Novel pulse laser linewidth measurement apparatus the most according to claim 2, it is characterised in that: described Piezoelectric Ceramic electricity
Source (4) output frequency be the continuously adjustable amplitude of 0.001Hz to 100Hz be the sawtooth waveforms or three of piezoelectric ceramics (3) rated voltage
Angle ripple.
4. according to Novel pulse laser linewidth measurement apparatus described in claim 1 or 2 or 3, it is characterised in that: described coupled lens
(1) it is spherical lens or the non-spherical lens realizing mating between measured laser (9) with FP scanning interferometer (2) transverse mode.
5. according to Novel pulse laser linewidth measurement apparatus described in claim 1 or 2 or 3, it is characterised in that: described front cavity mirror
(21) and Effect of Back-Cavity Mirror (22) is plane mirror or concave mirror, average structure, plano-concave structure, recessed flat structure or double-concave structure are collectively formed
FP scanning interferometer (2).
6. according to Novel pulse laser linewidth measurement apparatus described in claim 1 or 2 or 3, it is characterised in that: described aperture
(5) it is the variable or changeless diaphragm of pore size for FP scanning interferometer (2) Output of laser being carried out space filtering.
7. according to Novel pulse laser linewidth measurement apparatus described in claim 1 or 2 or 3, it is characterised in that: described filter plate
(6) it is absorption-type or the reflection-type optical filter for FP scanning interferometer (2) Output of laser being carried out spectral filtering.
8. according to Novel pulse laser linewidth measurement apparatus described in claim 1 or 2 or 3, it is characterised in that: described detector
(7) it is to convert light signals into high speed or the low speed detector of the signal of telecommunication for laser is detected.
Novel pulse laser linewidth measurement apparatus the most according to claim 8, it is characterised in that: described detector (7) is silicon
Light cell, photodiode, phototriode, PI N photodiode or avalanche photodide.
10. according to the Novel pulse laser linewidth measurement apparatus described in claim 1 or 2 or 3, it is characterised in that: described oscillography
Device (8) is to have the digital oscilloscope that detection channels coupled impedance is arranged and multiple detection pattern is arranged.
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| CN201610571861.4A CN106052566A (en) | 2016-07-19 | 2016-07-19 | Novel pulse laser line width measurement device |
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| CN201610571861.4A CN106052566A (en) | 2016-07-19 | 2016-07-19 | Novel pulse laser line width measurement device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106768898A (en) * | 2017-03-02 | 2017-05-31 | 天津大学 | A kind of detection method of the tune Q characteristic based on erbium doped fiber laser |
| CN109060150A (en) * | 2018-07-26 | 2018-12-21 | 天津大学 | Ultrashort pulse time width measuring device and method based on spectral interference |
| WO2021179158A1 (en) * | 2020-03-10 | 2021-09-16 | 深圳市速腾聚创科技有限公司 | Laser receiving device, laser receiving method and lidar |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106768898A (en) * | 2017-03-02 | 2017-05-31 | 天津大学 | A kind of detection method of the tune Q characteristic based on erbium doped fiber laser |
| CN109060150A (en) * | 2018-07-26 | 2018-12-21 | 天津大学 | Ultrashort pulse time width measuring device and method based on spectral interference |
| WO2021179158A1 (en) * | 2020-03-10 | 2021-09-16 | 深圳市速腾聚创科技有限公司 | Laser receiving device, laser receiving method and lidar |
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| CN113748358B (en) * | 2020-03-10 | 2024-04-26 | 深圳市速腾聚创科技有限公司 | Laser receiving device, laser receiving method and laser radar |
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